TW419686B - Dielectric ceramic, method for producing the same, laminated ceramic electronic element, and method for producing the same - Google Patents

Dielectric ceramic, method for producing the same, laminated ceramic electronic element, and method for producing the same Download PDF

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Publication number
TW419686B
TW419686B TW088100659A TW88100659A TW419686B TW 419686 B TW419686 B TW 419686B TW 088100659 A TW088100659 A TW 088100659A TW 88100659 A TW88100659 A TW 88100659A TW 419686 B TW419686 B TW 419686B
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Taiwan
Prior art keywords
powder
patent application
dielectric ceramic
barium titanate
ceramic
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TW088100659A
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Chinese (zh)
Inventor
Nobuyuki Wada
Jun Ikeda
Takashi Hiramatsu
Yukio Hamaji
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Murata Manufacturing Co
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • H01G4/12Ceramic dielectrics
    • H01G4/1209Ceramic dielectrics characterised by the ceramic dielectric material
    • H01G4/1218Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
    • H01G4/1227Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
    • C04B35/4682Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Capacitors (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

The present invention provides a dielectric ceramic which exhibits an excellent electrostatic capacity-temperature characteristic; which allows use of a base metal such as nickel; which can be fired in a reducing atmosphere; and which is suitable for constituting a dielectric ceramic layer of a laminated ceramic electronic element such as a laminated ceramic capacitor. The dielectric ceramic is obtained by firing barium titanate powder in which a caxis/a-axis ratio in the perovskite structure is in the range of 1.003 to 1.010 and an amount of OH groups in the crystal lattice is 1 wt.% or less. The barium titanate powder serving as a starting material preferably has a maximum particle size of 0.5 mu m or less and an average particle size of 0.1-0.3 mu m, and individual particles of the barium titanate powder comprise a low-crystallinity portion 21 and a high-crystallinity portion 23, with the diameter of the low-crystallinity portion being less than 0.65 times the particle size of the powder. Moreover, when sintered, the powder satisfies the ratio of (average grain size of the fired dielectric ceramic)/(average particle size of barium titanate powder serving as a starting material), which is referred to as R, of 0.90-1.2, to thereby suppress considerable grain growth. The invention also discloses a laminated ceramic electronic element including a laminate of a plurality of layers of the above-mentioned dielectric ceramic, as well as a method for producing the same.

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4ί^686 λ; -----Β7 _________ 五、發明説明(t ) 發明背景 發明範圍 •本發明係關於一種介電陶瓷,其是利於使用在一積層陶 瓷免子元件之上,像是具有一由諸如線或鎳合金之基底金 屬所形成的内部導體之積層陶瓷電容器,以及有關於製造 VI •陶資;方法。本發明也有關於—種由介電陶莞所形成 I積層陶...走電子元件,以及有關於其製造的方法。 相關技術説明 積層陶瓷電子元件的微縮及降價是不斷地在進行中。舉 例而。,在這樣的—個陶瓷電子元件中,陶瓷層已經變薄 ,而且基底金屬也已被做成一两部導體。在積層陶瓷電容 器中(屬積層陶定電子元件的一種),一介電陶究層已被作 成薄如約3微米的厚度,且像*Cu4Ni—般的基底金屬也 已做爲製造一内部導體(即内電極)的材料3 然而,當陶瓷層變薄時,外加至該層之電場強度會增加 ,這造成使用一介電材料作爲陶瓷層(其表現出因電場感應 而介兔常數大幅變化)的問題。減少在陶瓷層厚度方向上陶 瓷晶粒的大小也引起可靠度的問題。 經濟部中央標準局員工消費合作社印裝 爲了要克服這樣的情形,曰本專利申請·公開第9_241074 號、第9-24丨075號等已提出,藉由增加在介電陶瓷層厚度 方向上陶瓷晶粒的大小能夠提升陶瓷材料的可靠度。因此 ,控制陶瓷晶粒的大小可減低因著電場或溫度感應所致的 介電常數變化= 然而,在上述的習知技術中,當介電陶瓷層的厚度約爲t -4 - 本紙張尺度適用中國國家標準i CNS >A4規格(210χ297公釐) 經濟部中央標準局員工消费合作杜印製 幻9686 A7 --—_______________ 五、發明説明(2) 微米或更低時’雖然維持了其可靠度,但溫度一介電常數 特性上的變化則加大’因此使得要獲得具有高再現性之穩定 溫度一介電常數特性變成是一件因難的事。爲了確保穩定 之溫度一介電常數特性’電場強度必須要降低而所產生之 積層陶走%子元件的額定電壓(rated v〇itage)也必須要降低 。因此’若只是使用上述習知技術來解決問題的話,要實 現厚度薄至1微米或更低之薄層是很因難甚或是不可能的。 發明摘要 根據先前所述,本發明指出一種利於使用在一積層陶瓷 電子元件上的介電陶瓷,此積層陶瓷電子元件包括—厚度 薄土 1微米4更低之薄陶竞層,以及指出一製造該介電陶瓷 的方法。本發明也指出一種由介電陶瓷所構成之積層陶瓷 電子元件以及其製造方法。 在尽發明的一個方面,提供—介電陶瓷,其是藉由烺燒 具鈣鈦礦結構之鈦酸鋇粉而獲得,此鈣鈦礦結構中£_軸/3_ 抽的比率是在丨003至1 〇1〇的範園内,且晶格中基的含 量是I . 0重量%或更低。 在本發明的另一方面’提供一種製造介電陶瓷的方法, 此方法包括提供上述鈦酸鋇粉的步騍,其鈣鈦礦結構中c-抽/ a -軸比率是在1.003至1 ‘〇 [ 〇的範園内,並且晶格令所含 疋0 Η基的量是1 . 〇重量%或更少:以及烺燒鈦酸鋇粉末的 步戰3 〇 Η基的含量是決定於在丨5〇 t或更高時,對試樣作熱重 量(thermogravimetric)分析期間測量時所損失的量3 -5- 國家辟(CNS ) Λ4 規格(157x297 公筮] ------^^------,π------A, (請先閲讀背面之注意事項再填寫本頁) A7 B7 4J9686 五、發明説明(3 ) 鈦酸鎖粉末顆粒最大較好是不超過〇 5微米,而平均粒度 爲〇. 1至0.3微米。 此外,上述每L料顆粒較好是包含—低結晶度 邵分和-高結晶度邵分,且低結晶度部分的直徑較好是低 於粉末粒度的0 65倍。如圖2(欽酸鋇粉末的穿透式電子顯 微鏡照片)及圖3(前圖說明性的描圖)所示,此處所用之術 語「低結晶度部分」21代表一個包含—些像是空孔22的晶 格缺陷區域,而此處所用之術語「高結晶度部分」23則表 不一不包含如此晶格缺陷的區域。 再者,當(經愤燒之介電陶竟平均晶粒大小)/(所提供之 致酸鎖粉末平均粒度)的比率代表時,請好是在 0-90至1 . 2的範圍裡。 構成本發明之介電陶瓷的晶粒可以具有一核心與外殼的 组成和晶系不同之核心—外殼結構,4是可以具有均質結 構,其具有一致组成和晶系結構。 此處所用的術語「晶系」指的是一個鈣鈦礦晶體的晶系 ,也就栺的是一立方晶系,具有之鈣鈦礦結構中^轴以_軸 比率爲1,或指的是一正方晶系,具有整約欽礦結構中c__ / a -軸比率在1或更高。 在本發明的又一方面,提供一積層陶瓷電子元件,包括 一由複數個陶瓷層所構成之積層,以及沿著在毗連介電陶 免層間之特定介面所形成之内部導體。 更確切地説,在本發明中,包含在積層陶瓷電子元件中 的介電陶瓷層是由一介電陶瓷所構成,而此介電陶瓷是將 -6- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X29*7公釐) u. I I J I- 11-- —^― i^i m n^i I .. 1^1 --「 1 ^^1 ϋ n _ n 1^1 ‘ ,T (請先閱讀背面之注意事項再>/爲本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 4^686 五、發明説明(4) 具鈣鈦礦結構之鈦酸鋇粉末煨燒所獲得,此鈣鈦礦结構中 C轴/a-轴的比率是在i 〇〇3至1〇1〇的範圍内,而晶格中 基的含量是1.0重量%或更低。 在上述的積層陶瓷電子元件中’内部導體較好是包含像 是鎳或鎳合金的基底金屬。 積層陶瓷電子元件可進一步包含在侧面不同的位置上複 數個外邵電極。在此例子中,内部.導體形成以讓每一個内 4導體的一端均暴露在側面中以便電連接到其中一個外部 4極。如此結構典型上是應用在積層陶瓷電容器上3 在本發明的更進—步方面,其提供了一種製造積層陶瓷 電子儿件的方法’此方法包含摄供鈦酸鋇粉末的步驟,其 中約欽礦結構中之c -軸/ a -軸比率是在1. 〇〇3到1. ο 1 〇的範固 内’而晶格中〇H的含量是10重量%或更低;製造一積層 ’其中積層包含了鈦酸鋇粉末複數個陶瓷生胚片料(green sheet)和内邵電極,所以那些内部電極沿著陶瓷生胚片料的 特足介面上出現:以及烺燒鈦酸鋇粉末以藉此提供介電陶 瓷。 圖式的簡單說明 因爲考慮相關聯的附圖並參照下列較佳實施例的詳細插 述而獲得更佳的瞭解,本發明其他各種不同的目的、特敦 及伴隨的優點將會立即得到正確認識,附圖如下: 圖1是根據本發明的一個具體實施例的剖面圖,表示—績 層陶瓷電容器1 ; 圖2爲一張根據本發明提供用來製造一介電陶瓷的鈦酸鋇 本紙悵尺度適用中國國家標準(CNS ) Λ4規格(2丨0X 297公釐) 1iI-^——-——t.—— (請先閔讀背面之注意事項再填寫本頁) 訂 泉 經濟部中夹標.準局員工消费合作社印製 419686 A7 B7 五、發明説明(5 ) " " ^ 粉末的穿透式電子顯微鏡照片;以及 圖3是在圖2中顯示的電子顯微鏡照片的一個說明式描圖。 較佳的實施例的描述 本發明中所用的鈦酸鋇粉末之组成化學式表現為: (Bai.xXJn^TihUO3。其組成不受進一步地確切限制。X可 包含Ca,單一稀土元素,和它們之中二種或多種的组合。 Y可包含如Zr或Μη等單一的種類以及它們其中二種或多種 的組合。大體上而Τ ’ m是較好是從1 00〇到丨035,端視鈦 酸頻粉末的组成而定以獲得一非還性之介電陶完。 利於使用之鈦酸鋇粉末具有鈣鈦礦結構,其c _軸/ a _軸的 比率疋在1.003到1.01 〇的範圓十。再者,晶格中〇 H基的含 量為1.0重量%或更低;最大的粒度不大於〇5微米;而平 均晶粒大小則是0 . 1至〇 . 3微米。這樣的鈦酸鋇粉末可由對 跃銷粉末熱處理獲得,此鈥酸銷粉末是經由一濕式合成 方法’例如濕熱(hydrothermal)合成方法、水解的方法、或 是溶膠-凝膠方法製成。為了要合成,也可以用固相方法, 其中構成鈦酸鋇粉末之元素的硬酸鹽 '氧化物等被混合且 熱處理。 在上述的熱處理中,中度晶粒成長的條件被選擇以實現 南至1.003到1.013範園的c _軸/ a -抽比率。舉例來說,藉由 控制處理的温度和時間’有效的熱處理能夠在含H2〇的氣氛 中進行。當然’上述的範圍可經由對於熱處理溫度及時間 適度的調整而狻得。當使用固相的方法時,因為c _軸/ a _軸 的比率也許會隨分解所合成之粉末的條件而降低,所以分 (CNS ) Λ4現格(2I〇x 297公犛) I.— ^---:--.--裝------訂------.線 (請先閱讀背面之注意事項再·*7本頁) 經濟部智.¾財產苟工消費合作社印製 4ί9686 Α7 Β7 經濟部中*標準局負工消費合作杜印11 五、發明説明(6) 解的條件必須被控制3 在上述熱處理之後,於圖2和圖3中所示之鈦酸鋇粉末的 每顆粒’其低結晶度部分2 1的直徑比率(即低結晶度部分 2 1的直彳i對粉末粒度的比率)預定爲低於〇. 65。如此的—個 直徑比率可經由一個升溫速率爲1 .C/min或更慢的熱處理獲 得。 由此提供I鈥酸鋇粉末的平均晶粒大小與經烺燒之介電 陶瓷的平均晶粒大小之間的關係,即(經烺燒陶瓷之平均晶 粒大小)/(所提供之鈦酸鋇粉末平均晶粒大小)的比率(表示 爲R)較好是0.90到K2。簡言之,於製造陶资燒結時相當程 度的晶粒成長最好是能避免3,例來説,爲了此目的,心 成份及[或]Mg成份,Sl_基助熔劑等被如入到鈦酸釦粉末 中。大體上,添加劑可以氧化物或緣酸鹽粉末的形式 併入鈦酸鋇粉末中。或是説,也 忧州—種万法,將鈦酸 鋇粉束以-包含這些添加劑之溶液塗鎪然後加以叔… 這樣的鈇酸鋇粉末經過愤燒藉此產生—介機 電嶋用於積層陶宏電子元件,如於圖】所示之 在 電容器1。 、曰-〜 如圖1所示’積層^電容器1包含~積層3,其内又各 有複數個積層介電層2’而一第—外部電極“_第二外: 電極7分別地提供在積層3之—第一侧面々和一第二㈣面卜 上。此整個積樹電容器丨部份组成—矩形平 : 晶片型電子元件。 在積層3中,第—内部電極8和第二電㈣交替地配 本故乐又度適用中國國家標辛(CNS ) Λ4規格(2!0X 297公發 ----1---:-----裝------訂-------線 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標孪局員工消f合作社印製 419686 A7 _______ B7 五、發明説明(7) 爲内部導體3第—内部電極8是沿著介電陶瓷層2之間的特 定介面形成以致於每—個内部電極8的一端暴露於此積層3 的::側面4之上,所以可電連接到第一外部電極6上,然 而第一内郅電極9沿著介電陶瓷層2之間的特定介面形成以 致於每-個内部電極9的—爾於積層3之第二側面,之 上,所以可電連接到帛二外部電極7之上, 在積a陶宏疋奋器Η,於積層$中之介電陶資層2包含 了上述的介電陶瓷3 爲了要製造積層陶资電容器1,提供的初始材料包含如欽 酸鎖之主Μ份,,χ及歧料師"性(smteiabiiity)的 添加劑3那也材料以箱令® f — —竹以預疋里稱重並以濕式混合形成混合粉 末。 然I $機結合劑和一落劑被加入混合粉末中,以藉 此狻付泥桌,並且使用泥漿製造形成介電陶瓷層2的陶瓷生 胚片料3 接者,形战内邶電極8和9之導電性膏膜形成於此特定之 陶资生胚片料之上。導電性膏膜包含〆基底金屈,如鎳或 銅或它們的合金,而且經由-種像:印刷電路、汽相沈積 、或是電鍵的方法形成。 複數個m胚片料’包括那些如上所述已形成於其上 的導電性膏獏’被積層、加壓及和切割,如果必要的話。 因此,‘坆生胚積層3,其陶瓷生胚片料和那些内部電極8 和9沿著陶究生胚片料之間的特定的介面形成積層,每一個 内部電極的一端8和9暴露於甸面4或5上。 本纸狀度賴悄ϋ家辟(CNS)a4^^. ( :1〇χ797^ ---:------.--裝-------訂------Λ (請先閲讀背面之注意事項再填寫本頁) 96 96 經濟部中央標準局員工消费合作社印製 A7 B7 五、發明説明(8) 積層3然後在還原性的氣氛中烺燒藉此將鈦酸鋇粉末轉變 成介電陶瓷。在這個步親中,上述的晶粒大小比率R被控 制以落在0.90 S R幻.2的範圍内。 第一個外邵電極6和第二個外部電極7分別地於積層3之 第一側面4和第二侧面5上形成,以便與經煅燒積層3之第 一内郅電極8和第二内部電極9之暴露端接觸。 對於製造外部的電極6及7的材料的组成沒有特別的限制 。更確切地説,所用之材料可能與内部電極8和9相同。外 部電極也可以由一燒結層構成,此層包含導電性金屬粉末 ’例如Ag、P d、A g- P d、C u或C u合金的粉末:或一燒結 層包含上述導電性金屬粉末與一破璃原料的混合物,例如 B2〇3-Li2〇-Si02-BaO、B203-Si02-Ba0 ' Li20-Si02-Ba0 或 BWrSiOyZnO。製造外部電極6及7的材料組成是考慮與積 層陶究電谷器1有關足因素(如使用或使用環境)後由適當地 決定, 如上所述,外部電極6和7可以籍由塗上形成於經烺燒之 積層3上之金屬粉末膏並燃燒後形成。那些電極也可能藉由 塗此膏至未經煨燒之積層3上並且與此積層3同時烺燒。 外部電極6和7可以塗鍍上塗層1〇及11,其是由Ni、Cu 、NbCu合金等,分別地依據需要形成。那些塗鍍層1〇和 Π可以進一步塗鍍上第二塗層丨2和丨3,其是分別由焊料' 錫所構成。 接下來本發明將會經由實例詳細描述,這些實例不應該 被解釋爲限制衣發明。 本紙張尺度適用中國國家榡牟(CNS ) Α4规格(;Μ〇Χ 297公釐) ----:---1--i—t------ΐτ-------涑 (請先閲讀背面之注意事項再填寫本頁) 11 - t# 4 Α7 Β7 五 發明説明(g) 實例 在此實例中所製造的積層陶瓷電容器是一具有圖丨中、_ 結構之積層陶瓷電容器〗。 | 表1中所顯示的不同组成之鈦酸鋇材料是以水解法製備 所生成的粉末材料其粒度在50毫微米(nm)至70毫微米之 間’而鈣鈦礦結構晶格中含有許多OH基之立方結構。藉著 在不同條件下(例如含h2o的氣氛)對這些材料進行熱處理, 具不同之Γ c / a」値(c -軸/ a -軸比率)、平均晶粒大小,最 大的粒度、Ο Η基含量、以及直徑比率的鈦酸鋇粉末A到N 被製備。在熱處理期間產生的困聚於熱處理之後被分解-- -----r ---rI----装-- i請先閲讀背面之注意事項再ir寫本頁) 訂_ 經濟部中央樣準局貝工消费合作杜印製 表 -- BaTlOs (Ba丨、Ca .).TiO, c/a 乎均粒度 最大粒度 ◦Η基含量丨 粉末.· X m (μιϋ) (μιη) (%) ------ A* 0.00 1.005 1.002 0.07 0.20 1.40 0.8 B氺 b.oo 1.005 1.005 0.09 0.25 1.20 〇.了 C 0.00 1.015 1.005 0.13 0.30 0.60 0.4 —D 0.00 1.015 1.007 ":〇Γ2〇 0.40 0.20 0.2 ----- E 0.00 1.015 1,009 0.25 0.45 0.10 F* 0.00 1.015 1.011 0.25 0.50 0.1 〇Ί ·» .- 0.1^ -人••一 ·· G ^ 0.00 1.015 1.009 0.35 0.50 0.1ft ^ 0.1 Ά — H氺 0.00 1.015 1.009 0.25 ' Ο.ΤΟ 0, U.T — ! 0.05 1.010 1,005 0.30 0.80 0.4 J氺 0.05 1.010 1.002 0.15 0.30 0.90 0.T K 〇7ϊ〇π 1.015 1.009 0.25 0.45 0.20 αι L氺 0.10 1.015 1.011 0.25 ! 0.45 0.10; 』 0.1 丨 M氺 0.10 i.010 1.00 了 0.35 0.60 0.10 品 0.1今」 ΝΨ o.to 1.010 1.005 ojlJ 0.30 0.85 仓7 本纸張尺度適用中國國家標準(CNS ) A4規格(2丨0X297公釐〉 -12- 經滴部智丛財凌局:约工消費合作社印製 4ΐ96β6 A7 Β7 五、發明説明(1Q) 顯示於表1中之「C / a」數值是對鈦酸銷粉末做X ·光繞射 來決定。也就是說,此得自於X光繞射的結果是使用 Rietveld分析來作X光輪廓配適(fitting)以精確地決定晶格常 數。藉由在掃描式電子顯微鏡下觀帶欽敗鎖粉末可以測仔 其平均晶粒大小和最大的晶粒大小。而藉由熱重分析鈦酸 鋇粉末,測量其在150 °C或更高的溫度下的重量損失’來測 得其OH基的含量。 表1中所示之直徑比率為低結晶度部分的直徑對粉末粒度 的比率,且是由將粉末作切割處理來決定,以獲得一薄膜 試片而可在穿透式電子顯微鏡之下觀察。當粉末薄膜狀的 試片以切割處理製備時,粉末4立度和粉末中低結晶度部分 的直徑會變化。明確地說,因為低結晶度部份並不總是位 於一粉末的中心,所以此部分的大小必須仰賴於製備薄膜 時的切割位置來變化觀察=因此,為了做觀察,所選的顆 粒其大小是具有類似於掃描式電子顯微鏡所觀測到的粒度 。直徑比率是以觀測丨〇個以上這樣的顆粒後計算其平均直 徑比率。 在表1中第一欄裡的「BaTi03粉末」,相對於粉末A到Η ’材料(BakCaJmTiOs的各個” χ 11是〇.〇〇,所以粉末Α到Η不 含C a ’但是粉末I到ν則是含有c a,它們的"X "據了解是 0.05 或 〇. 1〇 , 如同表丨中所示加入到鈦酸鋇粉末中的添加劑,也提供了 在表2及表3中所示組成的添加劑。更確切地說,對於顯示 於表2中的樣本1到1 7號,提供R e ( R E代任一 G d、D y、 -13- f、尺度適用车(CNS) Λ4規格(2|0^_:297公益,— 1-1-!---,.--:--裝------訂------線 (請先聞讀背面之注意事項再 本買) 86 A7 B7 五、發明説明(”) Ho、和Er),Mg以及Μη做爲添加劑以上述樣本A到Η之一 的形式加入到BaTi03。被提供包含s i的助熔劑當做主要的 成份。對於表3中樣本1 8到2 9號,Mg和Μη被提供用作添 加劑以任一上述樣本I到Ν的形式加入到(Ba^CadTiCb。也 提供當做主要成份之含(S i,T i ) - B a助嫁劑3 表2 經濟部中央標準局負工消費合作社印?私 樣 BaTi Oj+aRE+ βΜ^4-γΜη 含Si助燒 本 BaTi03 a(成徐 ,莫耳) β(成份, γ(成份, 結劑(成 號 種類 Gd Dy Ho Er 莫耳) 莫耳) 份,莫耳) 1 A 0.02 一 0.020 0.005 -1 _> 2 B 0.02 0.020 0.005 2 3 B 0.02 0.020 0.005 4 4 C 0.02 0.020 0.005 5 C 0.02 0.020 0.010 λ j 6 C 0.02 0.015 0.005 Λ 7 C 0.02 0.015 0.005 4 8 C 0.02 0.010 0.020 6 9 D 0.02 0.010 0.005 2 L0 D 0.02 0.020 0.005 *> ο 11 E 0.02 0.010 0.005 Λ 12 E 0.02 0.020 0.005 Λ J 13 E 0.02 0.010 0.005 3 14 E 0.02 0.010 0.005 4 15 F 0.02 0.010 0.005 4 16 G 0.02 0.010 0.005 4 17 Η 0.02 0.010 0.005 4 -14- 本紙掁尺度適用中國國家標準(CNS ) Λ4規格(210X297公浼) „ r-----裝-- (請先K讀背面之注意事項再填寫本頁)4ί ^ 686 λ; ----- Β7 _________ V. Description of the invention (t) Background of the invention The scope of the present invention is related to a dielectric ceramic, which is advantageous for use on a laminated ceramic daughter element, such as having A multilayer ceramic capacitor with an inner conductor formed from a base metal such as a wire or a nickel alloy, and a method for manufacturing VI ceramics. The invention also relates to a kind of multilayer ceramic formed by dielectric ceramics, ... to pass electronic components, and a method for manufacturing the same. Relevant technical description Miniaturization and price reduction of multilayer ceramic electronic components are continuously ongoing. For example. In such a ceramic electronic component, the ceramic layer has been thinned, and the base metal has also been made into one or two conductors. In multilayer ceramic capacitors (a type of multilayer ceramic electronic components), a dielectric ceramic layer has been made as thin as about 3 microns, and a base metal like * Cu4Ni— has also been used as an internal conductor. (Ie internal electrode) material 3 However, when the ceramic layer becomes thinner, the electric field strength applied to the layer will increase, which results in the use of a dielectric material as the ceramic layer (which shows a large change in dielectric constant due to electric field induction) )The problem. Reducing the size of ceramic grains in the thickness direction of the ceramic layer also causes reliability problems. In order to overcome this situation, the central government bureau of the Ministry of Economic Affairs' employee consumer cooperatives printed this patent application and publication No. 9_241074, No. 9-24 丨 075, etc. have been proposed, by increasing the ceramics in the direction of the thickness of the dielectric ceramic layer The grain size can improve the reliability of ceramic materials. Therefore, controlling the size of ceramic grains can reduce the change in dielectric constant due to electric field or temperature induction. However, in the above-mentioned conventional technology, when the thickness of the dielectric ceramic layer is about t -4-this paper size Applicable to China National Standard i CNS > A4 specification (210 × 297 mm) Consumer Co-operation of the Central Bureau of Standards of the Ministry of Economic Affairs Du Yinzhi 9866 A7 ---_______________ V. Description of the invention (2) When the micron or lower is maintained Reliability, but the change in temperature-dielectric constant characteristics increases. Therefore, it is difficult to obtain stable temperature-dielectric constant characteristics with high reproducibility. In order to ensure a stable temperature-dielectric constant characteristic, the electric field strength must be reduced, and the rated voltage of the sub-elements produced must also be reduced. Therefore, it is difficult or impossible to achieve a thin layer as thin as 1 micron or less if the conventional techniques are used to solve the problem. SUMMARY OF THE INVENTION According to the foregoing, the present invention indicates a dielectric ceramic that is beneficial for use in a multilayer ceramic electronic component. The multilayer ceramic electronic component includes a thin ceramic layer with a thickness of 1 micron and a thickness of 4 microns, and a manufacturing method. The dielectric ceramic method. The invention also indicates a multilayer ceramic electronic component composed of a dielectric ceramic and a method for manufacturing the same. In one aspect of the invention, there is provided a dielectric ceramic, which is obtained by sintering barium titanate powder with a perovskite structure. The perovskite structure has a £ _axis / 3_ pumping ratio of 丨 003 Within the range of 10 to 10, and the content of radicals in the crystal lattice is 1.0% by weight or less. In another aspect of the present invention, a method of manufacturing a dielectric ceramic is provided. The method includes the step of providing the above barium titanate powder, wherein the c-pump / a-axis ratio in the perovskite structure is from 1.003 to 1 '. 〇 [〇 within the range of the garden, and the lattice order contained 疋 0 Η group is 1.0% by weight or less: and the step of sintered barium titanate powder 3 〇Η group content is determined in 丨At 50t or higher, the amount lost during the thermogravimetric analysis of the sample 3 -5- National Pioneer (CNS) Λ4 Specification (157x297 cm) ------ ^^- -----, π ------ A, (Please read the precautions on the back before filling in this page) A7 B7 4J9686 V. Description of the invention (3) The maximum titanate lock powder particle size is preferably no more than 〇 5 microns, and the average particle size is 0.1 to 0.3 microns. In addition, the above-mentioned L particles preferably contain-low crystallinity Shao and-high crystallinity Shao, and the diameter of the low crystallinity part is preferably low It is 0 to 65 times the particle size of the powder. As shown in Fig. 2 (transmission electron micrograph of barium acetic acid powder) and Fig. 3 (illustrative drawing of the previous figure), The term "low crystallinity portion" 21 represents a region containing lattice defects such as voids 22, and the term "high crystallinity portion" 23 as used herein means a region that does not include such lattice defects. In addition, when the ratio of (average grain size of the dielectric ceramics after being burnt) / (average particle size of the acid-locking powder provided) is represented, please be in the range of 0-90 to 1.2. The crystal grains constituting the dielectric ceramic of the present invention may have a core-shell structure with a core and a shell composition and a crystal system different from each other, 4 may have a homogeneous structure, which has a uniform composition and a crystal system structure. The term used herein " "Crystalline system" refers to the crystal system of a perovskite crystal, that is, a cubic crystal system, with a perovskite structure in which the ^ axis is _ axis ratio of 1, or refers to a tetragonal system, It has a c __ / a-axis ratio of 1 or more in the chitin structure. In yet another aspect of the present invention, a multilayer ceramic electronic component is provided, including a multilayer composed of a plurality of ceramic layers, and Adjacent to the formation of a specific interface between dielectric ceramic layers More specifically, in the present invention, the dielectric ceramic layer included in the laminated ceramic electronic component is composed of a dielectric ceramic, and this dielectric ceramic is a -6-size paper that applies the Chinese national standard (CNS) A4 specification (210X29 * 7mm) u. IIJ I- 11-- — ^ ― i ^ imn ^ i I .. 1 ^ 1-「1 ^^ 1 ϋ n _ n 1 ^ 1 ', T (Please read the precautions on the back before &/; this page) A7 B7 4 ^ 686 printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (4) Barium titanate powder with perovskite structure 结构Obtained by firing, the C-axis / a-axis ratio in this perovskite structure is in the range of 003 to 1010, and the content of radicals in the crystal lattice is 1.0% by weight or less. In the multilayer ceramic electronic component described above, the 'internal conductor' preferably contains a base metal such as nickel or a nickel alloy. The multilayer ceramic electronic component may further include a plurality of external electrodes at positions on different sides. In this example, the inner conductor is formed so that one end of each inner 4 conductor is exposed in the side for electrical connection to one of the outer 4 poles. Such a structure is typically applied to a multilayer ceramic capacitor. In a further aspect of the present invention, it provides a method for manufacturing a multilayer ceramic electronic component. The method includes a step of feeding a barium titanate powder, wherein Jochin The c-axis / a-axis ratio in the ore structure is within the range of 1.03 to 1.00 'and the content of 0H in the crystal lattice is 10% by weight or less; making a laminate' The multilayer contains barium titanate powder and several ceramic green sheets and internal electrodes, so those internal electrodes appear along the special interface of the ceramic green sheet: and the calcined barium titanate powder is This provides a dielectric ceramic. The brief description of the drawings is better understood by considering the associated drawings and referring to the detailed insertions of the following preferred embodiments. The various other purposes, Tetons, and accompanying advantages of the present invention will be immediately recognized correctly. The drawings are as follows: FIG. 1 is a cross-sectional view of a specific embodiment of the present invention, showing a layered ceramic capacitor 1; FIG. 2 is a barium titanate paper provided for manufacturing a dielectric ceramic according to the present invention; The scale is applicable to the Chinese National Standard (CNS) Λ4 specification (2 丨 0X 297 mm) 1iI-^ ——-—— t .—— (Please read the notes on the back before filling this page) Standard 419686 A7 B7 printed by quasi-station employee consumer cooperatives V. Description of the invention (5) " " ^ Transmission electron microscope photograph of powder; and Figure 3 is an explanatory formula of the electron microscope photograph shown in Figure 2 Draw a picture. Description of the preferred embodiment The chemical formula of the composition of the barium titanate powder used in the present invention is: (Bai.xXJn ^ TihUO3. Its composition is not further restricted exactly. X may include Ca, a single rare earth element, and A combination of two or more of them. Y may include a single species such as Zr or Mn, and a combination of two or more of them. Generally, T′m is preferably from 100 to 035, end-view titanium The composition of the acid-frequency powder is determined to obtain a non-returnable dielectric ceramic finish. The barium titanate powder which is advantageous for use has a perovskite structure, and the ratio of c_axis / a_axis is in the range of 1.003 to 1.01. Circle 10. Furthermore, the content of OH groups in the crystal lattice is 1.0% by weight or less; the largest particle size is not more than 0.05 micrometers; and the average grain size is 0.1 to 0.3 micrometers. Such titanium The barium acid powder can be obtained by heat-treating a jump pin powder, which is made by a wet synthesis method such as a hydrothermal synthesis method, a hydrolysis method, or a sol-gel method. To synthesize, Solid-phase method The stearic acid 'oxides of the elements of the powder are mixed and heat-treated. In the above-mentioned heat treatment, the conditions for moderate grain growth are selected to achieve a c_axis / a-pump ratio of south to 1.003 to 1.013. For example, by controlling the temperature and time of the treatment, 'effective heat treatment can be performed in an atmosphere containing H2O. Of course, the above range can be obtained by appropriately adjusting the temperature and time of the heat treatment. When using solid phase In the method, because the ratio of the c_axis / a_axis may decrease with the conditions of decomposition of the synthesized powder, the (CNS) Λ4 lattice (2I0x 297 mm) I.— ^ ---: --.-- install ------ order ------. Line (please read the precautions on the back before * 7 this page) Ministry of Economic Affairs. ¾ Printed by the Property Cooperative Consumer Cooperative 4ί9686 Α7 Β7 The Ministry of Economic Affairs * Standards Bureau ’s work-consumption cooperation Du Yin 11 V. Description of the invention (6) The conditions for solution must be controlled 3 After the above heat treatment, each particle of barium titanate powder shown in Figure 2 and Figure 3 'The ratio of the diameter of the low crystallinity portion 21 (i.e. Rate) is predetermined to be less than 0.65. Such a diameter ratio can be obtained through a heat treatment with a heating rate of 1 .C / min or slower. This provides the average grain size and warp of the barium acid powder. The relationship between the average grain size of the fired dielectric ceramic, that is, the ratio of (average grain size of the calcined ceramic) / (average grain size of the barium titanate powder provided) (expressed as R) is better It is 0.90 to K2. In short, it is best to avoid a considerable degree of grain growth during the sintering of ceramic materials. For example, for this purpose, the heart component and [or] Mg component, Sl-based flux And so on into the titanate button powder. In general, the additives may be incorporated into the barium titanate powder in the form of an oxide or a rimate powder. In other words, you are worried about the state of the art. Barium titanate powder is coated with a solution containing these additives and then tertiary ... This kind of barium titanate powder is produced by scorching. Dielectrics are used for lamination. Tao Hong electronic components, as shown in the picture, are in capacitor 1. As shown in Fig. 1, 'multilayer capacitor 1 includes ~ multilayer 3, each of which has a plurality of multi-layer dielectric layers 2' and a first-external electrode "_ second outer: electrodes 7 are provided separately Layer 3—the first side face and a second side face. This entire tree capacitor is partly composed of a rectangular flat: a chip-type electronic component. In the layer 3, the first-internal electrode 8 and the second electrode Alternately matching the old music and once again applicable to China National Standard Xin (CNS) Λ4 specifications (2! 0X 297 public hair ---- 1 ---: ----- installation ------ order ---- --- Wire (please read the precautions on the back before filling this page) Printed by the staff of the Central Bureau of Standards of the Ministry of Economic Affairs and printed by the cooperative 419686 A7 _______ B7 V. Description of the invention (7) is the internal conductor 3rd-the internal electrode 8 is It is formed along the specific interface between the dielectric ceramic layers 2 so that one end of each of the internal electrodes 8 is exposed to the side of the laminate 3: above the side 4, so it can be electrically connected to the first external electrode 6, but the first An inner electrode 9 is formed along a specific interface between the dielectric ceramic layers 2 so that each of the inner electrodes 9 is on the second side of the laminate 3, above Therefore, it can be electrically connected to the second external electrode 7, the ceramic ceramic material layer 2 in the ceramic material layer 2 contains the above-mentioned dielectric ceramic 3 in order to manufacture the ceramic material capacitor 1 The initial materials provided include the main ingredients such as cinnamic acid lock, χ, and the additives of the distorter " smteiabiiity " 3 that are also made with box order f-bamboo weighed in a pre-washed bowl and wet The mixed powder is then mixed to form a mixed powder. However, a machine binding agent and a falling agent are added to the mixed powder, so as to support the mud table, and the mud is used to manufacture the ceramic green sheet 3 that forms the dielectric ceramic layer 2. Then, The conductive paste films of the internal warfare electrodes 8 and 9 are formed on this particular ceramic-grown embryo sheet. The conductive paste film contains a rhenium base metal buckle, such as nickel or copper, or an alloy thereof, and passes through a kind of image: Formed by a printed circuit, vapor deposition, or electrical bonding method. A plurality of m blanks 'including those of conductive pastes' which have been formed thereon as described above are laminated, pressed, and cut, if necessary. Therefore, 'Epiphyseal layer 3, its ceramic green sheet and those within The internal electrodes 8 and 9 form a laminate along a specific interface between the ceramic slabs, and one end 8 and 9 of each internal electrode is exposed on the surface 4 or 5. CNS) a4 ^^. (: 1〇χ797 ^ ---: ------.-- install --------- order ------ Λ (Please read the precautions on the back before (Fill in this page) 96 96 Printed by A7 B7, Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs 5. Description of the invention (8) Layer 3 is then calcined in a reducing atmosphere to transform barium titanate powder into dielectric ceramics. In this step, the above-mentioned grain size ratio R is controlled to fall within the range of 0.90 SR magic.2. A first outer electrode 6 and a second outer electrode 7 are formed on the first side 4 and the second side 5 of the laminate 3, respectively, so as to interact with the first inner electrode 8 and the second inner electrode of the calcined laminate 3 The exposed end of 9 is in contact. There is no particular limitation on the composition of the materials for manufacturing the external electrodes 6 and 7. More precisely, the materials used may be the same as the internal electrodes 8 and 9. The external electrode may also be composed of a sintered layer containing conductive metal powder, such as a powder of Ag, Pd, Ag-Pd, Cu or Cu alloy: or a sintered layer containing the above-mentioned conductive metal powder and A mixture of glass-breaking raw materials, such as B2O3-Li2O-Si02-BaO, B203-Si02-Ba0'Li20-Si02-Ba0 or BWrSiOyZnO. The material composition of the external electrodes 6 and 7 is appropriately determined after taking into consideration the factors related to the laminated ceramic trough 1 (such as the use or the use environment). As described above, the external electrodes 6 and 7 can be formed by coating. The metal powder paste on the burnt layer 3 is formed after burning. Those electrodes may also be burned by applying this paste to the unfired buildup 3 at the same time. The external electrodes 6 and 7 can be coated with coating layers 10 and 11, which are formed of Ni, Cu, NbCu alloy, etc., respectively, as needed. Those coating layers 10 and Π may be further coated with a second coating layer 2 and 3, which are respectively composed of solder 'tin. The invention will be described in detail below by way of examples, which should not be construed as limiting the invention. This paper size is applicable to China National Mou (CNS) A4 specification (; M × X 297 mm) ----: --- 1--i--t ------ ΐτ -------涑 (Please read the precautions on the back before filling this page) 11-t # 4 Α7 Β7 Five Inventions (g) Example The multilayer ceramic capacitor manufactured in this example is a multilayer ceramic with the structure shown in Figure 丨 and _ Capacitor. | The barium titanate materials of different compositions shown in Table 1 are prepared by the hydrolysis method. The particle size is between 50 nanometers (nm) and 70 nanometers. And the perovskite structure lattice contains many Cubic structure of OH group. By heat treating these materials under different conditions (such as an atmosphere containing h2o), they have different Γ c / a ″ 値 (c-axis / a-axis ratio), average grain size, maximum grain size, 0 Η The barium titanate powders A to N having a base content and a diameter ratio were prepared. (Treatment during heat treatment is decomposed after heat treatment ------- r --- rI ---- install-i Please read the notes on the back before writing this page) Order _ Ministry of Economy Central Samples of the Bureau of Shellfish Consumer Cooperation Du printed tabulations-BaTlOs (Ba 丨, Ca.). TiO, c / a Almost the average particle size, maximum particle size Η base content 丨 powder. X m (μιϋ) (μιη) (% ) ------ A * 0.00 1.005 1.002 0.07 0.20 1.40 0.8 B 氺 b.oo 1.005 1.005 0.09 0.25 1.20 〇. C 0.00 1.015 1.005 0.13 0.30 0.60 0.4 --D 0.00 1.015 1.007 ": 〇Γ2〇0.40 0.20 0.2 ----- E 0.00 1.015 1,009 0.25 0.45 0.10 F * 0.00 1.015 1.011 0.25 0.50 0.1 〇Ί · ».- 0.1 ^ -person •• ·· G ^ 0.00 1.015 1.009 0.35 0.50 0.1ft ^ 0.1 Ά — H氺 0.00 1.015 1.009 0.25 '〇.Τ〇 0, UT —! 0.05 1.010 1,005 0.30 0.80 0.4 J 氺 0.05 1.010 1.002 0.15 0.30 0.90 0.TK 〇7ϊ〇π 1.015 1.009 0.25 0.45 0.20 αι L 氺 0.10 1.015 1.011 0.25! 0.45 0.10 ; 『0.1 丨 M 氺 0.10 i.010 1.00 to 0.35 0.60 0.10 product 0.1 today” ΝΨ o.to 1.010 1.005 ojlJ 0.30 0.85 warehouse 7 paper The standard is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) -12- Jingdi Bureau of Intellectual Property Finance Bureau: 4 × 96β6 A7 Β7 printed by Yuecong Cooperative Cooperative 5. The description of the invention (1Q) is shown in Table 1 as " The "C / a" value is determined by X-ray diffraction of the titanate pin powder. That is, the result obtained from X-ray diffraction is the use of Rietveld analysis to make X-ray contour fitting for accurate The lattice constant is determined by ground. The average grain size and the largest grain size can be measured by observing the powders with a chinlock under a scanning electron microscope. The barium titanate powder is analyzed by thermogravimetry and measured at 150 ° C or higher weight loss' to measure its OH group content. The diameter ratio shown in Table 1 is the ratio of the diameter of the low crystallinity portion to the particle size of the powder, and is determined by cutting the powder to obtain a thin film test piece which can be observed under a transmission electron microscope. When a powdery film-like test piece is prepared by a cutting process, the 4 degree of powder and the diameter of the low crystallinity portion of the powder may change. Specifically, because the low crystallinity part is not always located in the center of a powder, the size of this part must be changed depending on the cutting position when the film is prepared. Therefore, in order to observe, the size of the selected particles It has a particle size similar to that observed with a scanning electron microscope. The diameter ratio is an average diameter ratio calculated after observing more than 0 such particles. The "BaTi03 powder" in the first column of Table 1 corresponds to powders A to Η 'materials (each of BakCaJmTiOs) χ 11 is 0.000, so powders A to Η do not contain C a' but powders I to ν It contains ca. Their " X " is understood to be 0.05 or 0.10, and the additives added to the barium titanate powder as shown in Table 丨 are also provided in Tables 2 and 3. Additives for the composition. To be more precise, for samples Nos. 1 to 17 shown in Table 2, R e (RE for any G d, D y, -13-f, CNS) Λ4 specification is provided. (2 | 0 ^ _: 297 public welfare, — 1-1-! ---, .--: --- install ------ order ------ line (please read the precautions on the back first) Buy this again) 86 A7 B7 V. Description of the invention (") Ho, and Er), Mg and Mn are added to BaTi03 in the form of one of the samples A to Η. The flux containing si is provided as the main Ingredients. For samples Nos. 18 to 29 in Table 3, Mg and Mη were provided as additives to be added to any of the above samples I to N (Ba ^ CadTiCb. Also included as the main ingredient (S i, T i)-B a 3 Table 2 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs? Private sample BaTi Oj + aRE + βΜ ^ 4-γΜη Si-containing sintered BaTi03 a (Cheng Xu, Mor) β (component, γ (component, binding agent ( Type Gd Dy Ho Er Morr) Morr) Serving, Morr) 1 A 0.02-0.020 0.005 -1 _ > 2 B 0.02 0.020 0.005 2 3 B 0.02 0.020 0.005 4 4 C 0.02 0.020 0.005 5 C 0.02 0.020 0.010 λ j 6 C 0.02 0.015 0.005 Λ 7 C 0.02 0.015 0.005 4 8 C 0.02 0.010 0.020 6 9 D 0.02 0.010 0.005 2 L0 D 0.02 0.020 0.005 * > ο 11 E 0.02 0.010 0.005 Λ 12 E 0.02 0.020 0.005 Λ J 13 E 0.02 0.010 0.005 3 14 E 0.02 0.010 0.005 4 15 F 0.02 0.010 0.005 4 16 G 0.02 0.010 0.005 4 17 Η 0.02 0.010 0.005 4 -14- The paper's scale is applicable to the Chinese National Standard (CNS) Λ4 specification (210X297 cm) „r ----- Install-(Please read the precautions on the back before filling out this page)

、1T 線 4 1^686 A7 B7 五、發明説明(12) 表3 樣本號 (Ba,、 1T line 4 1 ^ 686 A7 B7 V. Description of the invention (12) Table 3 Sample No. (Ba,

BaTi03(種類) 18 19 20 21 22 23 24BaTi03 (type) 18 19 20 21 22 23 24

K 25K 25

K 26K 26

K 27K 27

LL

2S Μ 29 Ν •^^〇Ό05 ,Ca,)Tj〇3+ P(成份,莫耳) 0.02 0.02 0.02 0.02 0.02 0.02 0,01 0.01 0.0】 0.01 0.01 0.022S Μ 29 Ν • ^^ 〇Ό05, Ca,) Tj〇3 + P (component, mole) 0.02 0.02 0.02 0.02 0.02 0.02 0,01 0.01 0.0] 0.01 0.01 0.02

經濟部中夬標準局員工消f合作社印¾ 表2與表3中所示之個別的添加劑會被轉換成可溶於有機 溶劑之烷氧(alkoxide)化合物,接著被加到已散佈於有機落 劑中之鈦酸鋇粉束中。更確切地說,對於樣本丨到1 7號, 加入到鈦酸鋇粉末中之個別添加劑形成了如表2中所示之 "BaTi03+aRE + pMg + 7Mn”,其"ct " β 'I、’、"和"包含Si 的助熔劑"全爲各成价的莫耳數:> 對於樣本丨8到2 9號,加 入至鈦酸鋇粉末中之個別添加劑全部是以各成莫耳數之,,p" 15 - 本紙张尺度通用中國國家標準(CXS ) Λ4規格(210X 297公t〉 ------L----批衣------、玎------.A (請先閲讀背面之注意事項再填寫本頁) Α7 4^686 __________Β7 五、發明説明(坳 、γ和「包含(Si,Ti)-Ba的助熔劑」表示,如表3中 (Ba]_xCax)Ti03+ βΜ^ + γ^/Γη ” 所示 a 爲了要將上述的添加劑溶解到有機溶劑中.,它們可以如 上述般被轉換成烷氧類,或是轉換成戊二酮鹽類 (acetylacetonates)或金屬肥 & (metal soap)。 而所產生的泥漿則以有機溶劑溶劑蒸發乾燥和進一步的 熱處理,藉此移除那些有機的成份。 接下來,對於每個已加入添加劑之鈦酸鋇粉末樣本,聚 乙烯醇縮丁醛(p〇lyVmyI butyral)結合劑和有機溶劑(如乙醇) 被加入,並且濕磨那些成分以製備陶瓷泥漿。藉由手術刀 將所生成的泥漿使模製成片狀||Γ此獲得一厚度爲1 5微米之 矩形生胚片料。然後,在生成之陶瓷生胚片料上,内含Ν丨 作爲主要元件之導電性膏,以印刷方式形成内部電極之導 電性膏膜= 接著,複數個藉此獲得之陶瓷生胚片料被積層,以上述 片料上之導電性膏膜其前端交替排列藉此獲得一積層3生 成之積層在氮氣氣氛上以35〇 I加熱以燒光結合剤,然後在 N2-H2〇還原性氣氛中,以1〇-9至1〇-!21^3的氧分愿,在表4 所示的溫度下烺燒2個小時, 對於烺燒積層的反側,加上含有B2〇3_Li20-Si〇2-BaO玻璃 原料之銀膏,接著在600下氮氣氛中燃燒以獲電連接至内 部電極之外部電極=> 所生成的積層陶瓷電容器其外部尺寸宽是5 . 〇毫米,長爲 5.7毫米,厚度2.4毫米,而於内部電極之間的介電陶瓷層 -16- 本纸張尺度適用中國國家標隼(CN:S ) A·!規格(210X2W公釐) I-------.--裝------訂·------.,!: (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消费合作社印製 4 j^6e 6 Α7 Β7 五 經濟部中央標準局男工消f合作社印製 、發明説明( 的厚度則爲是〗微米。有效的介電陶瓷層總數是5,而且每 —層相反電極的面積則是16.3 X 10 —6平方公尺。 所知之樣本的電學性質是以下列方式測量。 靜電容(C)和介質損失(tans)是根據曰本工業規格5102使 用自動橋接儀器加以測量,而介電常數(ε )則是用所生成 的靜電容來決定。 爲了要測量絕緣電阻(R ),使用了 一絕緣測試器:外加 1 0伏特(V )直流電二分鐘來獲得25 X的絕緣電阻(R ),並 且計算出其電阻係數。 關於靜電容相對於溫度變化的變率,顯示出的是在 -2 5 °C到+ 85 ’C範圍裏對2 0 5C妁靜電容的變率(W / C 2〇) ’ 以及在-55 °C到+125 °C範圍襄相對於25 °C下靜電容的變率 (△c/c25) ° 在高溫負荷試驗中,對1 5 0 下外加1 0 V直〉瓦電之絕緣電 阻時程變化加以測量=在這個試驗中’樣本的平均壽命被 加以評估,其中一樣本的壽命是以當每個樣本的絕緣電阻 (R)下降至ΙΟ5 Ω崩潰時所認定之相等時間。 崩潰電壓是以1 〇〇 V /杪升壓速率外加直流電壓來測量 包含於所生成之積層陶瓷電容器中介電陶竞的平均晶粒 大小,是好一積層之戴面作化學独.到决依’在彳,卜A式電子 顯微鏡下觀察其表面而得3藉著使用於表丨中所不由切始材 料所得之平均粒度’測量出比率R ’也就疋(介電陶瓷平均 晶粒大小)/(平均初始原料的晶粒大小)。 結果顯示於表4中s 本纸張尺度通用中國國家標進(CNS ) λ4規格(2ίΟΧ]97公沒) -----.-----^------,1T------'" (请先Ktii背面之注意事項再填寫本頁) 17- 8β ΑΊ Β7 五、發明説明(15) 經濟部中央標辛局員二消f合作杜印製 表4 樣本贫丨 1 温度 尺寸比 介窀 介芜 ^靴牵1衫料度料之變化率 ,電租率, i崩潰 乎均 當數 損失 iC/Ct α +85Έ iC/Cii H2S0 1〇0ί 玄麈 壽命 ' j ⑻ (W- (%) (w (%) (0·αη) (kV/tnn) (h) 1沐 1100 1.30 1300 L8 —5.0 -12.6 -30.7 13.1 7 6 9 6 2本 Π00 1.05 1530 2.3 -8.0 -10.5 -18*9 13.1 8 4 2 5 3* 11G0 1.55 HT0 2.1 -24.6 -5.6 -40.8 12.9 8 8 5 4 4伞 UC0 0.80 1160 2.7 —6.5 -11.6 -20.5 13.1 7 8 8 6 5 1150 1.05 1680 1Λ —9.0 -7.5 -1Z6 13.1 8 8 9 3 6 1150 1.10 1750 2*3 -B.8 - 7—6 -11.5 13.1 8 4 9 0 7 1150 1.18 1720 2.4 —10.2 ~ T.5 -1Z4 13.1 8 6 9 2 8* 1150 1.40 1260 2.5 —Z1- 4 -丄8,4 -35.2 13.2 T 4 4 6 9* 11CO 0.T5 1160 1.1 -6.0 -9.6 -28.4 13.2 7 4 10 5 10 1150 U0 1850 Z4 -10.0 -E.8 -13.7 13.2 8 5 8 5 11 * 1125 0.80 1160 2.3 -11.0 -9.2 -24.6 13.2 了 5 9 6 12 1200 1.05 2020 Z5 -11.3 -8.5 —13_ 6 112 8 8 9 1 13 1150 1.10 1850 Z5 — 11.5 -8.2 -13.5 13.1 了 5 9 3 U木 1300 1.35 2360 3.4 —26, 6 —3. 了 -25-2 12.9 了 4 3 3 15* 1175 1.05 2H0 Μ ™11.3 -8.2 ~12,4 13.2 8 5 1 6 16^ Π75 1.10 2250 15 -13.5 -8.9 -13.7 13.2 8 8 2 5 Π* | 1150 1.05 20 了 0 Ζ4 — 11.4 -12.6 H9.T 13.2 1飞 12 18* 1100 0.T5 870 U 一 8.0 -8.8 -28.7 13,2 7 5 10 5' 19 Π30 1.00 1670 1Λ -10.0 -5.5 -13.4 13.1 9 1 8 4 20 1100 1.15 1540 2.5 -8.0 一 4‘ 5 -11.6 13.2 8 6 7 8 21* 1130 1.25 1220 2.3 —1 了 6 3.4 67.8 12.8 了 8 2 3 Z2* 1100 1.05 1120 Ζ4 -9.0 — 1.4 -30.8 13.1 了 4 6 5 23* 1100 1.25 U80 3.6 —25* 5 3.6 36. T 13 7 5 18 24* 1150 0.70 1060 8.Τ -T.0 —8· 5 -28.5 13.2 9 6 8 8 25 Π50 U0 2160 2.5 — 15.5 —4_ 2 10.3 13.1 8 8 8 4 26 1150 U8 2340 2*5 -21.2 —4.5 13.5 13.2 8 Τ 8 3 2U 1250 1.05 2060 3.4 -15.0 -2.3 25.5 1Ζ6 了 5 16 m 1200 1.05 2150 2.8 -17.0 -3· 3 21.6 12.8 7 5 1 B 29* 1100 1.10 1360 Zi, -7.5 一 6· 了 -14.T 13 8 8 9 0 (讀先閱讀背面之注意事項再填寫衣頁) -18 - 本纸張尺度適用中國國家標準(C、TS ) Α4规格(2丨0 x_ 297公楚) -裝·--- —訂------旅 A7 B7 l96ee 五、發明説明(π) 本發明的介電M其特徵在於,藉由對—具㈣欽轉结 構(其卜軸/a-軸比率是在1〇〇3到1〇1〇的範圍内,而晶格中 0H基的含量不高於! 〇重量%)炫燒而獲得^較好的是,作 爲初始原料之鈦酸鋇粉末其最大之粒度大小不大於〇 5微米 ’而其平均粒度則是在0」到〇.3微米之間。料,上述每 - _貝#末顆粒較妤是包含一低結晶度部分和一高結晶 度邵分,其低結晶度部分的直徑是顆粒粉末的〇65倍或更 高,而(平均介電陶资晶粒大个)/(鈦酸鋇粉末的平均粒度) 的比率R爲0.90到〗.2,以致於在燒結陶瓷時不會有相當量 晶粒成長發生。 在表4中,故有*標圮之樣本號碼,以及表1中標有*記號的 粉未是落在上述較佳範園或本發明的範圍之外3 首先,關於藉由使用表丨中A至H原料之一所得之表4中樣 本I到]7唬,以穿透式電子顯微鏡分析經炫燒之陶瓷顯示 通近丨句資:晶粒晶界處’像是G d,ID y、Η 〇、或E r等之 稀土元素(R E )擴散並形成一外殼部分,而在陶瓷晶粒的中 心則形成一核心部分;即在每晶粒中,經煊燒的陶瓷在每 一晶粒中建立一種核心-外殼結構,其中核心與外殼有著不 同的组成和晶系3 就如在表4中丨號樣本可見,使用鈣鈦礦結構中^軸/3_軸 的比率是低於1.003之粉末(如表!中所顯之粉末材料A )龙不 恰i ’因爲一添加劑反應性過度地高,而不利地導致燒結 陶走晶粒粑大並加大了溫度一介電常數特性的變化。 正如表4中樣本丨5號的數據清楚地顯示,使用具c _軸/ a - -19- 本紙乐尺度適用中囤國家^车(CNS ) Λ4規格(:1〇 Χ 公釐了〜 ------------裝------訂------Λ (請先閔讀背面之注意事項再填寫木頁) ,經濟部中央標準局員工消费合作.社印製 經濟部中央標準局員二消費合作社印*'表 4 19686 五、發明説明(17) 軸比率大於1·010之粉末材料是並不適當,如表丄之粉末材 料F所π,因爲其與添加劑的反應性不佳因此會縮短平均壽 命,此外,當介電陶瓷層如本例子般的薄化時,其可靠度 就不良地劣化。 即使其粉末材料之c -袖/ a -軸比率是在〗〇〇3到1.01 〇間、 且其OH基含量低於1.〇重量。/〇,.表4中樣本16號的數據説明 了 ’倘若使用的粉末其平均粒度大於〇 . 3微米,如表1之粉 末材料G —樣,其平均壽命也會相對地縮短,此外,當介 電陶瓷層如本例子般的薄化時,其可靠度就不良地劣化a 類似的情尤’即使是在c -軸/ a _軸比率及其〇 Η基含量低 均是在本發明之上述範園中的情形下,表4中樣本17號的 數據清楚的說明了,倘若使用的粉末其平均粒度大於〇 5微 米,如表丨之粉末材料Η —樣,其平均壽命也會相對地縮短 ,此外’當介電陶瓷層如本例子般的薄化時,其可靠度就 不良地劣化 即使是表1中粉末材料C、D與Ε的例子中,其粉末忖料 之c -軸/ a -軸比率是在1. 〇〇3到1.01 0間、其〇 η基含量低於 1 . 0重量%、其最大粒度小於等於0 5微米、且其平均粒度 介於0 . 1到0 _ 3微米之間,如表4中樣本4 ' 9、及1 1 (其R値 小於0.90 )或樣本8及1 4號(其R値超過1 . 2 )清晰可見,介雷 常數隨溫度的變化也會增加。Individual additives shown in Tables 2 and 3 of the China Standards Bureau staff of the Ministry of Economic Affairs will be converted into alkoxide compounds that are soluble in organic solvents and then added to the organic compounds that have been dispersed in organic solvents. In the powder of barium titanate. More specifically, for samples Nos. 17 to 17, the individual additives added to the barium titanate powder form "BaTi03 + aRE + pMg + 7Mn" as shown in Table 2, whose "quot" ct " β 'I,', " and " Si-containing fluxes " are all moles at each cost: > For samples Nos. 8 to 29, the individual additives added to the barium titanate powder are all In terms of the number of moles, p " 15-This paper size is in accordance with the Chinese National Standard (CXS) Λ4 specification (210X 297 g t) ------ L ---- batch clothes ------ 、 玎 ------. A (Please read the precautions on the back before filling this page) Α7 4 ^ 686 __________ Β7 V. Description of the invention (坳, γ, and "flux containing (Si, Ti) -Ba") It is shown in Table 3 as (Ba) _xCax) Ti03 + βΜ ^ + γ ^ / Γη ”a In order to dissolve the above additives in organic solvents, they can be converted into alkoxy groups as described above, or It is converted into acetylacetonates or metal soap. The resulting slurry is removed by evaporation and drying with an organic solvent and further heat treatment to remove it. Next, for each barium titanate powder sample to which additives have been added, a polyvinyl butyral binding agent and an organic solvent (such as ethanol) are added, and those ingredients are wet-milled A ceramic slurry is prepared. The generated slurry is molded into a sheet shape with a scalpel || Γ This obtains a rectangular green embryo sheet with a thickness of 15 microns. Then, on the generated ceramic green sheet, The conductive paste containing N 丨 as the main component is used to form the conductive paste film of the internal electrode by printing. Next, a plurality of ceramic green embryo sheets obtained in this way are laminated to the conductive paste film on the sheet. The front ends are alternately arranged so as to obtain a build-up layer 3. The build-up layer is heated in a nitrogen atmosphere at 350 ° C to burn out the bound rhenium, and then in a N2-H2O reducing atmosphere at 10-9 to 10-! 21 Oxygen content of ^ 3 was sintered at the temperature shown in Table 4 for 2 hours. For the opposite side of the sintered laminate, a silver paste containing B2O3_Li20-Si〇2-BaO glass material was added, followed by 600 Combustion in a nitrogen atmosphere to obtain external power connected to the internal electrode = > The external dimensions of the produced multilayer ceramic capacitors are 5.0 mm wide, 5.7 mm long, and 2.4 mm thick, and the dielectric ceramic layer between the internal electrodes is -16- This paper size applies to Chinese national standards CN (CN: S) A ·! Specifications (210X2W mm) I -------.-- Installation ------ Order · ------.,!: (Please read the back first Please pay attention to this page, please fill in this page) Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 4 j ^ 6e 6 Α7 Β7 5. Printed by the Central Standards Bureau of the Ministry of Economic Affairs, printed by the male workers and cooperatives of the Fifth Cooperative Association, and the thickness of the invention is [micrometer]. The total number of effective dielectric ceramic layers is 5, and the area of each opposite electrode is 16.3 X 10-6 square meters. The electrical properties of the known samples were measured in the following manner. The electrostatic capacitance (C) and dielectric loss (tans) are measured using an automatic bridge instrument according to Japanese Industrial Standard 5102, and the dielectric constant (ε) is determined by the generated electrostatic capacitance. In order to measure the insulation resistance (R), an insulation tester was used: an additional 10 volts (V) DC was applied for two minutes to obtain an insulation resistance (R) of 25 X, and the resistivity was calculated. Regarding the rate of change of the electrostatic capacitance with respect to temperature, it shows the rate of change of the static capacitance (W / C 2〇) 'in the range of -2 5 ° C to + 85' C, and -55 Range of ° C to +125 ° C relative to the static capacitance change rate at 25 ° C (△ c / c25) ° In the high temperature load test, when the insulation resistance of 10 watts plus 10 volts is applied at 150 ° C Process variation is measured = In this test, the average life of the sample is evaluated, where the life of the sample is the equivalent time that is determined when the insulation resistance (R) of each sample falls to 105 Ω collapse. The breakdown voltage is measured at a boosting rate of 1000V / 中 plus a DC voltage to measure the average crystal grain size of the dielectric ceramics contained in the generated multilayer ceramic capacitors. 'The surface is observed under an A-type electron microscope, and the average particle size obtained by using the starting material used in Table 丨 is not measured. The ratio R is measured, which is also the average grain size of the dielectric ceramic. / (Average grain size of the initial raw material). The results are shown in Table 4. s The paper size is in accordance with the Chinese National Standards (CNS) λ4 specification (2ίΟΧ) 97 public) -----.----- ^ ------, 1T-- ---- '" (Please note the matters on the back of Ktii before filling out this page) 17- 8β ΑΊ Β7 V. Description of the invention (15) Member of the Central Bureau of Standards of the Ministry of Economic Affairs, second cooperation, f. Du printed Table 4 Sample Poor 丨1 Dimensional ratio of temperature 窀 窀 芜 靴 Boot pull 1 shirt material change rate, electricity rental rate, i collapse almost average loss iC / Ct α + 85Έ iC / Cii H2S0 1〇0ί Xuanzang life 'j ⑻ (W- (%) (w (%) (0 · αη) (kV / tnn) (h) 1 μm 1100 1.30 1300 L8 —5.0 -12.6 -30.7 13.1 7 6 9 6 2 Π00 1.05 1530 2.3 -8.0- 10.5 -18 * 9 13.1 8 4 2 5 3 * 11G0 1.55 HT0 2.1 -24.6 -5.6 -40.8 12.9 8 8 5 4 4 Umbrella UC0 0.80 1160 2.7 —6.5 -11.6 -20.5 13.1 7 8 8 6 5 1150 1.05 1680 1Λ — 9.0 -7.5 -1Z6 13.1 8 8 9 3 6 1150 1.10 1750 2 * 3 -B.8-7-6 -11.5 13.1 8 4 9 0 7 1150 1.18 1720 2.4 --10.2 ~ T.5 -1Z4 13.1 8 6 9 2 8 * 1150 1.40 1260 2.5 --Z1- 4-丄 8,4 -35.2 13.2 T 4 4 6 9 * 11CO 0.T5 1160 1.1 -6.0 -9.6 -28.4 13.2 7 4 1 0 5 10 1150 U0 1850 Z4 -10.0 -E.8 -13.7 13.2 8 5 8 5 11 * 1125 0.80 1160 2.3 -11.0 -9.2 -24.6 13.2 5 9 6 12 1200 1.05 2020 Z5 -11.3 -8.5 —13_ 6 112 8 8 9 1 13 1150 1.10 1850 Z5 — 11.5 -8.2 -13.5 13.1 5 9 3 U wood 1300 1.35 2360 3.4 —26, 6 —3. -25-2 12.9 4 4 3 3 15 * 1175 1.05 2H0 Μ ™ 11.3 -8.2 ~ 12,4 13.2 8 5 1 6 16 ^ Π75 1.10 2250 15 -13.5 -8.9 -13.7 13.2 8 8 2 5 Π * | 1150 1.05 20 00 ZZ4 — 11.4 -12.6 H9.T 13.2 1 fly 12 18 * 1100 0.T5 870 U-8.0 -8.8 -28.7 13,2 7 5 10 5 '19 Π30 1.00 1670 1Λ -10.0 -5.5 -13.4 13.1 9 1 8 4 20 1100 1.15 1540 2.5 -8.0-4' 5 -11.6 13.2 8 6 7 8 21 * 1130 1.25 1220 2.3 —1 6 6 6 67.8 12.8 8 2 3 Z2 * 1100 1.05 1120 Z4 -9.0 — 1.4 -30.8 13.1 4 4 5 5 23 * 1100 1.25 U80 3.6 --25 * 5 3.6 36. T 13 7 5 18 24 * 1150 0.70 1060 8.T -T.0 —8 · 5 -28.5 13.2 9 6 8 8 25 Π50 U0 2160 2.5 — 15.5 —4_ 2 10.3 13.1 8 8 8 4 26 1150 U8 2340 2 * 5 -21.2 —4.5 13.5 13.2 8 Τ 8 3 2U 1250 1.05 2060 3.4 -15.0 -2.3 25.5 1 6 1 5 16 m 1200 1.05 2150 2.8 -17.0 -3 · 3 21.6 12.8 7 5 1 B 29 * 1100 1.10 1360 Zi, -7.5-6 · -14.T 13 8 8 9 0 (Read the first note on the back Please fill in the clothing page for further details) -18-This paper size is applicable to Chinese National Standards (C, TS) Α4 specifications (2 丨 0 x_ 297 Gongchu)-Equipment · --- —Order ------ Travel A7 B7 l96ee V. Description of the invention (π) The dielectric M of the present invention is characterized in that by using a counter-rotating structure (whose ratio of the b-axis / a-axis is in the range of 103 to 1010) , And the content of 0H groups in the crystal lattice is not higher than 〇wt%) and obtained by sintering ^ It is preferable that the maximum particle size of the barium titanate powder as the initial raw material is not more than 0.05 micron 'and its average particle size It is between 0 "and 0.3 microns. It is known that the above-mentioned particles each include a low crystallinity portion and a high crystallinity fraction, and the diameter of the low crystallinity portion is 65 times or more than that of the particle powder, and (average dielectric The ratio of the size of the ceramic material is large) / (average particle size of barium titanate powder) is 0.90 to 2 .2, so that a considerable amount of grain growth does not occur when the ceramic is sintered. In Table 4, therefore, the sample numbers marked with * and the powder marked with * in Table 1 do not fall outside the above-mentioned preferred range or the scope of the present invention. 3 First, by using A to Samples 1 to 7 in Table 4 obtained from one of the H raw materials were analyzed by transmission electron microscopy. The sentence shows that the burned ceramics are similar. Sentence: The grain boundaries are like 'G d, ID y, Η 〇, or Er or other rare earth elements (RE) diffuse and form a shell part, and in the center of the ceramic grains form a core part; that is, in each grain, the fired ceramic in each grain Establish a core-shell structure, in which the core and the shell have different compositions and crystal systems3 As can be seen in sample No. 丨 in Table 4, the ratio of the ^ axis / 3_ axis in the perovskite structure is less than 1.003. (As shown in the table! The powder material A) Long Buqi i 'Because an additive has an excessively high reactivity, it unfavorably causes the sintered ceramics to grow grains and increase the change in temperature-dielectric constant characteristics. As the data of sample No. 5 in Table 4 clearly show, the use of c_axis / a--19- this paper music standard is applicable to the middle-country ^ car (CNS) Λ4 specification (: 10 × mm ~ ~ ---------- Equipment ------ Order ------ Λ (please read the notes on the back before filling in the wooden pages), the staff of the Central Standards Bureau of the Ministry of Economic Affairs, consumer cooperation. Printed by the Central Bureau of Standards of the Ministry of Economic Affairs of the People's Republic of China. * Table 4 19686 V. Description of the invention (17) Powder materials with an axis ratio greater than 1.010 are not suitable, as shown in Table 丄, powder material F, because it is related to The poor reactivity of the additive shortens the average life. In addition, when the dielectric ceramic layer is thinned as in this example, its reliability is poorly deteriorated. Even if the c-sleeve / a-axis ratio of the powder material is Between 〖〇03 and 1.01 〇, and its OH group content is less than 1.0 weight. / 〇 .. The data of sample No. 16 in Table 4 shows that 'if the average particle size of the powder used is greater than 0.3 microns, As with the powder material G in Table 1, its average life will be relatively shortened. In addition, when the dielectric ceramic layer is thinned as in this example, it is reliable. Deteriorating a badly similar situation 'Even in the case where the c-axis / a-axis ratio and its low hydrazine content are in the above-mentioned range of the invention, the data of sample No. 17 in Table 4 It is clearly stated that if the average particle size of the powder used is greater than 0.05 micrometers, as in the powder material of Table 丨, its average life will be relatively shortened. In addition, when the dielectric ceramic layer is as thin as this example , The reliability deteriorates poorly. Even in the case of the powder materials C, D, and E in Table 1, the c-axis / a-axis ratio of the powder material is between 1.03 and 1.01. Its η-group content is less than 1.0% by weight, its maximum particle size is less than or equal to 0.5 microns, and its average particle size is between 0.1 and 0_3 microns, as shown in Table 4 for samples 4 ′ 9 and 1 1 (whose R 値 is less than 0.90) or samples 8 and 14 (whose R 値 exceeds 1.2) are clearly visible, and the dielectric constant will increase with temperature.

相反地,雖然在表4中之5、6、7、1 0、1 2和1 3號後本 其介電陶瓷層厚度薄至1微米,但是其靜電容隨溫度變化的 速率滿足日本工業規格規定在-25 °C至+85 X:的範圍中之B -20- 本纸恢尺度適用中國國家標準(CN—S ) A4規格(210X297公龙 (請先閔讀背面之注意事項再瑣寫本育) .裝· 訂 A7 B7 4l9eee 五、發明説明(18) 特性,以及滿足EIA規格所規定在 再者,在高溫負荷試驗中,這些樣綱久 70小時甚至更長直到崩潰發生 . ^ 4朋$赏玍,並且可在1200。(:或更低的 溫度下烺燒=在外加直流電壓之靜* A心雜%谷的變化不大於5 %和 因此能確保一高電壓額定(rating) 3 穿透式電子顯微鏡分析表4中所示經烺燒之丨8至Μ號樣 本,其是利用示於表丨中之粉末材料而得到。可^確 定的是,如同與1至丨7號樣本相關之個別陶資晶粒其成份 上的均勻性與不均勻晶系並未在此觀察到。 當使用其鈣鈦礦結構中c_軸/&_軸比率値低於1〇〇3之粉末 材料時,像是表丨中的粉末材科,那正如表4中樣本U及 2 3號的數據清晰可見,介電常數之溫度特性會增加,這樣 増加的發生無關於烺燒期間晶粒成長的程度,如比較^本 2 2號與樣本2 3號之R値即可了解s 就如在表4中2 7號樣本清楚可見,使用鈣鈦礦結構中 軸/a-軸的比率高於1010之粉末(如表丨中所顯之粉末材^ L)並不恰當,因爲其不令人滿意的溫度—介電常數特性、 •雨短的寿命和不良的可靠度。 即使是表丨中粉末材料[與κ的例子中,其粉末材料之c 細’ a -軸比率是在1.003到1 .〇 1 〇間、其Ο Η基含量低於〗〇重 量%、其最大粒度小於等於〇 5微米、且其平均粒度介於 〇,丨到0.3微米之間,表4中樣本〗S及2 4 (其R値小於〇 9〇 )咬 樣本2 1號(其R値超過1 2)可清楚地説明,若r的植低於 〇.90或鬲於1 2,則介電常數之依隨變化會増加。 -21 - 尽紙張尺度適用中國國家標準(CNS ) Λ4規格(210X29·/公釐) ------:--.--^------J1T------,Α (請先閲讀背面之注意事項鼻填寫本頁) 經濟部中央標準局負X消f合作.社印製 4^68 6 A7 B7 到 %的例子中,表4令樣 五、發明説明(1弓 i.ou)間、其cm基轴比率是在^003 =號㈣據説明了,若所用之粉末其平均粒度大於03微 米且其取大粒度大於〇_5微米,如表工中之 ,‘J — ’其溫度-介電常數特性無法令人、1 科M所不 對縮短、以及,當介電層變料备、$壽命會相 J Λ度會不良地劣化。 就如在表4中29號樣本清楚可見,本 .^ , 心两使用表1中所示之粉 末材料N時,其中每一敍酸鎖粉末μ j . 卜 不蜎杧包含—低結晶度邵 伤(直徑低於琢粉末粒度的〇 65倍),其溫度一介電常數的特 性會劣化。 相反地,參照表4中之]9、20"、25、及μ號樣本,雖然 其介"4陶瓷層厚度薄至1微米,但是其靜電容隨溫度變化的 速率滿足日本工業規格規定在_25 °C至+85 °C的範圍中之B 特性’以及滿足EIA规格所規定在-5 5 X:到+125 3C範圍t之 X7R特性3再者’在鬲溫負荷試驗中,這些樣本能耐久7 〇 小時甚至更長直到崩潰發生,並且可在1 200 °C或更低的遇 度下馈燒^'其靜電容隨外加之直流電壓的變化不大,且可 確保高的電壓額定。 如上所述,即使一介電質每一顆粒中其晶粒均有著均質 的組成及均勻的晶系一也就是即使那些晶粒並不具有核心 一外殼結構一 燒結時控制著晶粒的成長能夠製造出具優 良溫度一介電常數特性和高的可靠度之介電陶瓷,如在1 9 、2 0、2 5和2 6號樣本的例子。 上述的例子指出一以積層陶瓷電容器爲其形式的積層陶 -22- ) Λ4 規格(:似別公麼) ---.--装------tr------Λ (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標荜局男工消費合作社印11 4 ΐ9〇86 彡 J 9 6 8, A7 ---—__ B7 五、發明説明(2〇) 一 一 ~ 免電子元件;然而,在其他積層㈣電子元件(如以幾乎相 同万法製造之多繼基體),已確知可得到相同的結果。 如同至此所拎述的-般,在本發明之介電陶瓷中’藉由 對鈣鈦礦結構中c_軸/a_軸比率和晶格中0H基含量的控制 ’較佳地是進-步對最大粒度、平均粒度、基於結晶度的 粉末顆粒結構、以及對用作爲初始材料之鈦酸鋇粉料於煅 燒期間晶粒成長等的控制,實現了一極佳之溫度一介電常 數特性及改良之可靠度。 所以,藉著使用本發明的介電陶瓷,可以獲得高性能之 %層陶瓷電子元件,其具有優夏的溫度一介電常數特性以 及高的可靠度3確切地説’當介電陶瓷被運用於一包括有 彼此疊置之介電陶瓷層和内部電極的積層陶瓷電子元件(如 積層陶瓷電容器)時,即使是在一厚度不高於1微米的薄陶 瓷層的情況下,此溫度一介電常數的特性可被穩定化,而JL 因此在對積層陶瓷電子元件之微缩化及薄化方面是有利。 當在還原性氣氛下愤燒製造介電陶竞的時候,該陶党不 會在烺燒時被還原3因此,使用介電陶瓷形成之發明的積 層陶瓷電子元件,允許使用如鎳或鎳合金的基底金屬作爲 内部導體的材料,以#此降低如積層陶瓷電容器之積層陶 瓷電子元件的成本3 根據本發明之介電陶免提供優良的溫度—介電常數的特 性和優良的可靠度’典_其疋否具有核心"一外’ίί的结構-因此,當介電陶瓷不具有核心〜外殼結構時,其溫度特性 -23- ) Λ4ίΐ^( 21〇;' (請先閲讀背面之注意事項再填寫本頁) .裝. 、1Τ 經濟部中夬榡準局員工消费合作杜印製 經濟部中央標隼局員工消費合作社印製 4 Ϊ9686 v A7 B7 五、發明説明(21) 和可靠度不受一添加劑成份散佈狀態的影響,並因此降低 了隨烺燒條件其特性上的變化。 -24- (請先閣讀背面之注意事項再填寫本頁〕In contrast, although the dielectric ceramic layer thickness was as thin as 1 micron after Tables 5, 6, 7, 10, 12, and 13 in Table 4, the rate of change in electrostatic capacitance with temperature met Japanese industrial specifications B -20 specified in the range of -25 ° C to +85 X: This paper is restored to the standard of China National Standard (CN-S) A4 (210X297 male dragon (please read the precautions on the back first and then write the book in trivial form) Education). Packing and ordering A7 B7 4l9eee V. Description of the invention (18) Characteristics and meeting EIA specifications. Furthermore, in the high temperature load test, these samples lasted 70 hours or even longer until collapse occurred. ^ 4 朋$ Reward, and can be burned at 1200. (: or lower temperature = static at the applied DC voltage * A change in the %% of valleys is not greater than 5% and therefore can ensure a high voltage rating 3 The transmission electron microscope analysis of the sintered samples Nos. 8 to M shown in Table 4 was obtained using the powder material shown in Table 丨. It can be determined that it is the same as the samples Nos. 1 to 7 The homogeneity and heterogeneous crystal system of the related individual ceramic grains have not been observed here. In the perovskite structure, when the c_axis / & _axis ratio 値 is lower than 1003, the powder material is like the powder material family in Table 丨, which is as clear as the data of samples U and 23 in Table 4. It can be seen that the temperature characteristic of the dielectric constant will increase, so that the occurrence of the increase has nothing to do with the degree of grain growth during the sintering. For example, if you compare R 2 of No. 2 No. 2 and No. 3 of Sample No. 2, you can understand s as shown in Table 4. Sample No. 2-7 clearly shows that using a perovskite structure with an axis / a-axis ratio higher than 1010 (such as the powdered material shown in Table 丨 L) is inappropriate because of its unsatisfactory temperature. — Dielectric constant characteristics, • Short rain life and poor reliability. Even for powder materials in the table [in the example with κ, the fineness of the powder material's a-axis ratio is 1.003 to 1.0. 〇, its OH group content is less than 0% by weight, its maximum particle size is less than or equal to 0.05 microns, and its average particle size is between 0, 丨 and 0.3 microns, the samples in Table 4 S and 2 4 (the R 値 is less than 0.90) Bite sample No. 2 (whose R 其 is more than 12) can clearly indicate that if the planting of r is less than 0.90 or less than 12, the dielectric Depends on the number will increase. -21-Applicable to China National Standard (CNS) Λ4 specification (210X29 · / mm) as far as the paper size is concerned ------: --.-- ^ ------ J1T ------, Α (Please read the notes on the back first and fill out this page) The Central Bureau of Standards of the Ministry of Economic Affairs has negative cooperation with X and f. The company printed 4 ^ 68 6 A7 B7. Sample five, the description of the invention (1 bow i.ou), the cm base axis ratio is ^ 003 = No. According to the description, if the powder used has an average particle size greater than 03 microns and its larger particle size is greater than 0-5 microns As shown in the table, the temperature-dielectric constant characteristics of 'J —' cannot be made, the length of 1M is not shortened, and when the dielectric layer is changed, the lifetime will be degraded badly. . As can be clearly seen in Sample No. 29 in Table 4, when the powder material N shown in Table 1 is used in this example, each of the acid-locking powders μ j. Bu Bu contains—low crystallinity. (The diameter is less than 65 times of the particle size of the powder), and its temperature-dielectric constant characteristics will be deteriorated. Conversely, referring to the samples of No. 9, 20, 25, and μ in Table 4, although the thickness of the ceramic layer is as thin as 1 micron, the rate of change in capacitance with temperature meets Japanese industrial specifications. _25 ° C to +85 ° C B characteristics 'and meet the EIA specification -5 5 X: to +125 3C range t7R characteristics 3 again' in the high temperature load test, these samples Durable for 70 hours or longer until a crash occurs, and can be burned at 1 200 ° C or lower ^ Its static capacitance does not change much with the applied DC voltage, and it can ensure high voltage rating . As mentioned above, even if each grain of a dielectric has a homogeneous composition and a uniform crystal system, that is, even if those grains do not have a core, a shell structure, and control of grain growth when sintered, Manufacture of dielectric ceramics with excellent temperature-dielectric constant characteristics and high reliability, such as the examples in samples Nos. 19, 20, 25, and 26. The above example points out a multilayer ceramic capacitor in the form of a multilayer ceramic capacitor -22-) Λ4 Specification (: Does it look like a common man) ---.-- install ------ tr ------ Λ ( Please read the notes on the back before filling in this page) Printed by Male Worker Consumer Cooperative of Central Bureau of Standards, Ministry of Economic Affairs 11 4 ΐ9〇86 彡 J 9 6 8, A7 -----__ B7 V. Description of Invention (2〇) 1 I ~ Free electronic components; however, in other laminated electronic components (such as multi-substrates made with almost the same method), it has been confirmed that the same results can be obtained. As described heretofore, in the dielectric ceramic of the present invention, 'by controlling the c_axis / a_axis ratio in the perovskite structure and the 0H group content in the crystal lattice', it is preferably- The control of the maximum particle size, average particle size, powder particle structure based on crystallinity, and grain growth of barium titanate powder used as an initial material during calcination, etc., achieves an excellent temperature-dielectric constant characteristic And improved reliability. Therefore, by using the dielectric ceramic of the present invention, a high-performance% -layer ceramic electronic component can be obtained, which has excellent temperature-dielectric constant characteristics and high reliability. 3 To be precise, when a dielectric ceramic is used When a multilayer ceramic electronic component (such as a multilayer ceramic capacitor) including a dielectric ceramic layer and an internal electrode stacked on top of each other, even at a thin ceramic layer having a thickness of not more than 1 micron, the temperature is The characteristics of the electric constant can be stabilized, and JL is therefore advantageous in miniaturizing and thinning multilayer ceramic electronic components. When a dielectric ceramic is produced in a reductive atmosphere, the ceramics will not be reduced during sintering. 3 Therefore, the invention uses laminated ceramic electronic components made of dielectric ceramics, such as nickel or nickel alloys. The base metal is used as the material of the internal conductor to reduce the cost of multilayer ceramic electronic components such as multilayer ceramic capacitors. 3 The dielectric ceramic according to the present invention provides excellent temperature-dielectric constant characteristics and excellent reliability. _Whether it has a core " 一 外 'ίί structure-therefore, when a dielectric ceramic does not have a core ~ shell structure, its temperature characteristics-23-) Λ4ίΐ ^ (21〇;' (Please read the note on the back first Please fill in this page for further information.) Installation, 1T Consumer Consumption Cooperation of the China Standard Procurement Bureau of the Ministry of Economic Affairs, printed by the Central Consumers Bureau of the Ministry of Economic Affairs, Printed by the Employee Consumption Cooperative of the Central Standardization Bureau 4 49686 v A7 B7 V. Invention Description (21) and Reliability It is not affected by the dispersion state of an additive component, and thus reduces the change in characteristics with the sintering conditions. -24- (Please read the precautions on the back before filling this page)

^^^^1 Γ- - H - _ 1· 1 1 I ^^1* I ---I — Ί· - I 本紙張尺度適用中國國家標注ί CNS ) Λ4現格()^^^^ 1 Γ--H-_ 1 · 1 1 I ^^ 1 * I --- I — Ί ·-I This paper size is applicable to the Chinese national labeling CNS) Λ4 is present ()

Claims (1)

—14 19686 第88100659%專利申請案 _争請鼻利範圃終正本^六、申請專利範圍 AS BS C8 D8 2. 4 . 6. 經濟部中央棣丰局貝工消費合作杜印*. 8. —種藉由烺燒鈦酸鋇粉末所獲得到之介電陶瓷,該鈦酸 <、粕不之转鈇礦結構中之卜軸以-抽比率是在丨至 1‘〇1〇的範圍内,而其晶格中0H基的含量則為丨〇重量% 或更低。 如申專利靶園第I項之介電陶瓷,其中該鈦酸鋇粉末 之最大粒度不大於0 5微米,而其平均粒度為01至0 3 微米 如申請專利範圍第〖項之介電陶瓷,其中該鈦酸鋇粉末 之個別顆粒包含一低結晶度部分和一高結晶度部分,而 且其低結晶度部分的直徑低於該粉末粒度的0,65倍。 如申請專利範圍第1項之介電陶瓷,其中定義成(介電陶 資:平均晶粒大小)/(所提供之鈦酸鋇粉末平均粒度)之比 率值R是在〇.9〇至1 ,2之中。 如申請專利範圍第1項之介電陶瓷,其中構成介電陶瓷 的晶粒具有一核心—外殼結構,其核心與外殼之間的組 成和晶系不同, 如中請專利範園第I項之介電陶瓷,其中該介電陶瓷中 的晶粒具有一具備均勻組成及晶系之均質結構。 一種製造介電陶瓷的方法,其包括提供一種鈦酸鋇粉末 的步驟’此鈦酸鋇粉末之鈣鈦礦結構中之c_ — /a-軸比率 疋在1.003至1.010的範圍内,並且其晶格中QH基的含量 不高於1 . 0重量% ;以及煅燒欽酸鋇粉末的步驟3 如申請專利範圍第7項之製造介電陶竞的方法,其中於 提供一鈦酸鋇粉末的步驟中,提供了 一鈦酸鋇粉末,其 本紙張尺度遑用中國國家櫺準(CNS )从规格(210 X 297公釐 (請先《讀背面之注意^項再填寫本頁) .裝- 訂 線 超濟部f央核率局属工消费合作社印ft /!!!8e g __________ D8 六、申請專利範園 最大粒度不大於〇_5微米,而其平均粒度則在o.l至0.3 之間α 9 ‘如申請專利範圍第7項之製造介電陶瓷的方法,其中於 提供一欽酸鋇粉末的步驟中,個別的鈦酸鋇粉末顆粒包 含一低結晶度部分和一高結晶度部分,而其低結晶度部 分的直徑低於該粉末顆粒的0 65倍。 10‘如令請專利範圍第7項之製造介電陶瓷的方法,其中於 馈燒的步螺中’定義成(煅燒後介電陶瓷之平均晶粒大小 V (所提供之妖酸鋇粉末平均粒度)的比率值R是控制落 在0.90至1 .2的範圍内β 1 1 .如申請專利範圍第7項之製造介電陶瓷的方法,其中構 成介電陶瓷之晶粒在煅燒後具有核心—外殼的結構,其 在核心和外殼之間的組成和晶系不同。 12.如申請專利範圍第7項之製造介電陶瓷的方法’其中介 電陶瓷中的晶粒在烺燒後具有一具備均勻組成和晶系之 均質結構。 13,一種積層陶瓷電子元件,包括一積層,其是由複數個介 電陶瓷層及沿著二個毗連的介電陶瓷層間之一特定介面 形成之内部導體所形成,其中該介電陶瓷層包含一藉由 懷燒鈇酸鎖粉末所獲得之介電陶资,其舞献礦結構中之 c-軸/a-轴比率是在〗.003至〗.010的範圍内,而其晶格中 Ο Η基的含量則不高於1 . 〇重量%。 14.如申請專利範固第〗3項之積層陶瓷電子元件,其冲該欽 酸銷粉末之最大粒度不大於0.5微米而其平均粒度則在 -----.--r--裝------訂------線 <請先»讀背面之注意事項再埃寫本頁)—14 19686 The 88100659% patent application _ plead for the final original version of the patent application ^ Six, the scope of patent application AS BS C8 D8 2. 4. 6. Central China Fengfeng Bureau, Ministry of Economic Affairs, shellfish consumer cooperation Du Yin *. 8. — A dielectric ceramic obtained by calcining barium titanate powder, the titanic acid <, the non-converted ore-converted ore structure in the axis-to-draw ratio is in the range of 丨 to 1′〇1〇 And the content of the 0H group in the crystal lattice is 0 wt% or less. For example, the dielectric ceramic of item I of the target garden of patent application, wherein the maximum particle size of the barium titanate powder is not greater than 0.5 micrometers, and the average particle size thereof is 01 to 0 3 micrometers. The individual particles of the barium titanate powder include a low crystallinity portion and a high crystallinity portion, and the diameter of the low crystallinity portion is less than 0.65 times the particle size of the powder. For example, the dielectric ceramics in the scope of patent application No. 1 are defined as (dielectric ceramics: average grain size) / (average particle size of the barium titanate powder provided). The ratio R is between 0.90 and 1. , 2 in. For example, for the dielectric ceramics under the scope of patent application, the grains constituting the dielectric ceramics have a core-shell structure, and the composition and crystal system between the core and the shell are different. A dielectric ceramic, in which the crystal grains in the dielectric ceramic have a homogeneous structure with a uniform composition and a crystal system. A method for manufacturing a dielectric ceramic, which includes the step of providing a barium titanate powder, 'the c_ — / a-axis ratio 疋 in the perovskite structure of this barium titanate powder is in the range of 1.003 to 1.010, and its crystal The content of QH group in the grid is not higher than 1.0% by weight; and the step 3 of calcining the barium acetic acid powder is the method for manufacturing a dielectric ceramic according to item 7 of the patent application, wherein the step of providing a barium titanate powder In the paper, a barium titanate powder is provided. The paper size is in accordance with China National Standards (CNS) from the specifications (210 X 297 mm (please read "Note on the back side before filling this page)." The Department of Industrial and Consumer Cooperatives of the Ministry of Supervision of the Ministry of Finance and Economics is a member of the Industrial and Consumer Cooperative Association. Ft / !!! 8e g __________ D8 6. The maximum particle size of the patent application park is not more than 0-5 microns, and the average particle size is between ol and 0.3. 9 'The method for manufacturing a dielectric ceramic according to item 7 of the patent application scope, wherein in the step of providing a barium cinnamate powder, the individual barium titanate powder particles include a low crystallinity portion and a high crystallinity portion, and The diameter of the low crystallinity part is lower than that of the powder particles 0 65 times. 10 'If the method of manufacturing dielectric ceramics according to item 7 of the patent scope, in the stepped snails fed in,' is defined as (average grain size of the dielectric ceramics after calcination V (provided The ratio R of the barium acid powder average particle size) is controlled to fall within the range of 0.90 to 1.2 β 1 1. The method for manufacturing a dielectric ceramic according to item 7 of the patent application, wherein the crystal grains of the dielectric ceramic are formed It has a core-shell structure after firing, and its composition and crystal system are different between the core and the shell. 12. The method for manufacturing a dielectric ceramic according to item 7 of the patent application 'wherein the grains in the dielectric ceramic are in After sintering, it has a homogeneous structure with a uniform composition and crystal system. 13. A laminated ceramic electronic component, comprising a laminated layer, which is specified by a plurality of dielectric ceramic layers and one of two adjacent dielectric ceramic layers. Formed by an internal conductor formed by an interface, wherein the dielectric ceramic layer includes a dielectric ceramic material obtained by burning saccharic acid powder, and the c-axis / a-axis ratio in the dance structure is .003 to .010, and its crystal The content of 0% in the grid is not more than 1.0% by weight. 14. If the laminated ceramic electronic component of item 3 of the patent application, the maximum particle size of the acetic acid pin powder is not more than 0.5 microns and its The average particle size is in -----.-- r--install ------ order ------ line < Please read the precautions on the back before writing this page) 4 ,9&ee A8 B8 C8 D8 經濟部央標李局員工消费合作社印«. 申請專利範圍 〇,1至Ο · 3微米之間a K如申請專利範圍第13項之積層陶免電干元件,其令該個 別之鈥酸㈣的顆粒包含-低結晶度部分及—高妹晶度 部分,而其低結晶度部分的直徑低於該粉末之^曰的 0-65 倍。 、 如申諳專利範圍第13項之積層陶爱電子元件,其中定義 成(介電陶冑平均晶粒大小)/(教酸鎖粉末平均晶粒大小) 的比率值R是在〇‘9〇至1.2的範固中a 如申請專利範圍第π項之積層陶瓷電子元件,其中構成 孩介電陶瓷的晶粒具有核心—外殼的結構,其中在核心 和外殼之間的组成和晶系不同。 如申請專利範圍第13項之積層陶资電子元件f其中該介 電陶资中的晶粒具有-具備均句的組成和晶系之均質结 構》 19, 如申請專利範圍第13項之積層陶资電子元件,其中該内 部導體包含一基底金屬^ 20. 如申請專利範圍第19項之積層陶瓷電子元件其令該内 部導趙包含媒或鎳合金。 21_如申請專利範圍第13項之積層陶瓷電子元件,其更進一 步包括一由該積層之一側面上之不同位置所設置之複數 個外部電極,其中複數個内部導體係設置成使每一個内 部導體的一端暴露該側面上以便電接觸至其申一個外部 電極上。 22. —種積層陶瓷電子元件的製造方法,其包括提供一種鈦 -3 良纸張尺度逋用中8¾家槺準(CNS〉A4洗格(210X29*7公釐) ---—-----!—装------ir線- 1请先TS讀背面之注意事項*填寫本貧〕 ^196 ___ ^196 ___ 經濟部令央捃率局貝工消費合作衽印ft A8 B8 六、申請專利範圍 酸鋇粉末的步驟,此鈦酸鋇粉末之鈣鈦礦結構中之c-軸 /a•軸比率在1.003至1.010的範圍内,並且其晶格中01|基 的含量不高於1.0重量% :製作一積層的步驟,其中複數 個陶瓷生胚片料包含該鈦酸鋇粉末和内部電極以使該内 部電極沿著該陶瓷生胚片料之特定介面存在;以及煅燒 該鈇酸鋇粉末以提供一介電陶瓷的步驟。 2 3 _如申請專利範園第2 2項之積層陶瓷電子元件的製造方法 ’其中在提供鈦酸鋇粉末的步驟中,提供之鈦酸鋇粉末 其最大度不大於0.5微米而其平均粒度則在〇.丨至〇.3 微米之間。 24 .如申請專利範圍第22項之積層陶瓷電子元件的製造方法 ,其中在該提供欽酸鋇粉末的步螺中,該鈥酸鋇粉末之 個別顆粒包含一低結晶度部分及—高結晶度部分,而其 低結晶度部分的直徑低於該粉末粒度的彡倍。 25. 如申請專利範圍第22項之積層陶瓷電子元件的製造方法 ,其中在該煅燒步驟中,定義成(煅燒後介電陶瓷之平均 晶粒大小)/(所提供之鈦酸鋇粉末平均粒度)的比率值R 控制落於0.90至1.2的範圍内。 26. 如申請專利範圍第22項之積層陶瓷電子元件的製造方法 ’其中構成介電陶瓷的晶粒在烺燒後具有一核心一外殼 的結構’其核心和外殼之間的組成和晶系不同a 2 7 .如申請專利範圍第2 2項之積層陶瓷電子元件的製造方法 ’其中該介電陶瓷中的晶粒在煅燒後具有一具備均勻的 組成和晶系之均質結構。 本紙張尺度適用中國國家標準(CNS > A4规格(2丨0X297公釐) --------.--^-------ΐτ------漆’ (請先Μ讀背面之注意事項再填寫本)ί) 4,968e SJ C8 ----—__D8 六、申請專利範圍 ' 一- 如申請專利範園第22項之積層陶资電子元件的製造方法 ,其中該内部導體包含一基底金屬。 Μ.如申請專利㈣第28項之積㈣爱電子元件的製造方法 ’其中該内部導體包含鎳或鎳合金。 30,如中請專利範圍第22項之積層陶资電予元件的製造方法 ’其中該製造-積層的步驟包含下列予步驟:沿著二個 蛾連陶走生胚片料間的特定介面設置該内部電極使得每 一個内部導體的一端從該積層的—側面暴露出 於該積看之侧面上形成複數個外部電極以使每一個内部 導體之暴露端電連接於所對應之外部電接a 1 I Is I:--- 1 0 - - J -n- l^n -I - (请先《讀背面之注意事項再填寫本I」 訂I 線 經濟部中央椹隼局負工消费合作社印«. •5-4, 9 & ee A8 B8 C8 D8 Printed by the Consumers' Cooperative of the Central Bureau of the Ministry of Economic Affairs of the Central Bureau of Li Bureau «. The scope of patent application is between 0, 1 and 0 · 3 micrometers a. It makes the individual acid particles contain-a low crystallinity portion and a-high crystallinity portion, and the diameter of the low crystallinity portion is 0-65 times smaller than that of the powder. For example, the laminated Tao Ai electronic component of the 13th patent scope, which is defined as the ratio of (the average grain size of the dielectric ceramics) / (the average grain size of the acid-locked powder) is 0'9. Fan Guzhong a to 1.2 is the multilayer ceramic electronic component as described in the patent application No. π, in which the grains constituting the dielectric ceramic have a core-shell structure, and the composition and crystal system between the core and the shell are different. For example, the laminated ceramic materials of the 13th scope of the patent application, where the crystal grains in the dielectric ceramic materials have a homogeneous composition and a homogeneous structure of the crystal system "19, such as the laminated ceramics of the 13th scope of patent application An electronic component, wherein the inner conductor comprises a base metal ^ 20. For example, the laminated ceramic electronic component according to item 19 of the patent application scope, so that the inner conductor contains a medium or a nickel alloy. 21_ The multilayer ceramic electronic component according to item 13 of the patent application scope, further comprising a plurality of external electrodes arranged at different positions on one side of the multilayer, wherein a plurality of internal conductive systems are arranged so that each One end of the conductor is exposed on the side for electrical contact with an external electrode. 22. —A method for manufacturing a multilayer ceramic electronic component, which includes providing a standard of titanium 3—3 good paper, 8¾ standard (CNS> A4 wash grid (210X29 * 7mm) -------- -! — Equipment ------ ir line-1 Please read the notes on the back of TS first * fill in the poverty] ^ 196 ___ ^ 196 ___ Order from the Ministry of Economic Affairs to lead the bureau to cooperate with the shellfish consumer cooperation seal ft A8 B8 6. Apply for a patent application step of barium acid powder. The c-axis / a • axis ratio in the perovskite structure of this barium titanate powder is in the range of 1.003 to 1.010, and the content of 01 | More than 1.0% by weight: a step of making a laminate, wherein a plurality of ceramic green sheet material comprises the barium titanate powder and an internal electrode so that the internal electrode exists along a specific interface of the ceramic green sheet material; and calcining the A step of providing barium titanate powder to provide a dielectric ceramic. 2 3 _ A method for manufacturing a laminated ceramic electronic component such as the patent application No. 22 of the patent application, wherein in the step of providing barium titanate powder, the barium titanate is provided. The maximum degree of powder is not more than 0.5 microns and its average particle size is between 0.1 and 0.3 microns. 2 4. The method for manufacturing a laminated ceramic electronic component according to item 22 of the scope of patent application, wherein in the snail provided with barium acetate powder, the individual particles of the “barium acid powder” include a low crystallinity portion and a high crystallinity 25. For example, the method for manufacturing a laminated ceramic electronic component in the scope of application for patent No. 22, wherein the calcination step is defined as The ratio R of the average grain size of the electrical ceramics) / (average particle size of the barium titanate powder provided) is controlled to fall within the range of 0.90 to 1.2. 26. Manufacturing of laminated ceramic electronic components such as the 22nd item in the scope of patent application Method 'in which the grains constituting the dielectric ceramic have a core and a shell structure after sintering', the composition and crystal system of the core and the shell are different a 2 7. Such as the multilayer ceramic electronics of the 22nd patent application Element manufacturing method 'wherein the crystal grains in the dielectric ceramic have a homogeneous structure with a uniform composition and crystal system after calcination. This paper size is applicable to Chinese national standards (CNS > A4 (2 丨 0X297mm) --------.-- ^ ------- ΐτ ------ lacquer '(please read the precautions on the back before filling in this) ί ) 4,968e SJ C8 ---- — __D8 6. Scope of Patent Application 'One-For example, the method of manufacturing a laminated ceramic electronic component for patent application No. 22, wherein the internal conductor includes a base metal. Μ. 如Apply for a patent ㈣Production method for product of item 28 of love electronic component 'wherein the internal conductor contains nickel or nickel alloy. 30, such as the method of making multilayer ceramic materials for element production of item 22 of the patent scope'wherein the manufacture -The step of lamination includes the following steps: setting the internal electrode along a specific interface between two moth pottery germs, so that one end of each internal conductor is exposed from the side of the lamination-the side of the lamination A plurality of external electrodes are formed so that the exposed end of each internal conductor is electrically connected to the corresponding external electrical connection a 1 I Is I: --- 1 0--J -n- l ^ n -I-(please first "Read the notes on the back and fill in this I again" Order I Printed by the Central Bureau of Work, Ministry of Economic Affairs, Consumer Cooperatives «. 5-
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