經濟部中央橾準局員工消费合作社印«. 401337 3472twf.doc/002 Λ7 B7 五、發明説明（I ) 【技術領域】 本發明係提供一種加工裝置。 【習知技術】 請參閱第3圖所示’在將待加工物1〇〇維持於固定檯 2上’並供給切削液而進行切削事宜的加工裝置4中，請 參閱第2圖所示，避免切削液滲入裝置內部，習知係將固 定待加工物且可進行移動的固定檯2，裝設防水套la，同 時在該防水套la二側’裝設可隨該固定檯移動之防水性 伸縮蛇腹元件1，並將整體構件覆蓋於該加工裝置本體的 開口 4a上。 【發明欲解決課題】 如上述，習知伸縮蛇腹元件1係在二端處設置安裝板 3，再利用螺絲將該安裝板3固定於加工裝置4的廢液盤 5的側壁上，當進行維修時必須將其取下。 惟，該伸縮蛇腹元件1裝設時所採用螺絲鎖合位置相 當多(以圖爲例，單邊有5個，二邊合計有1〇個）’所以 在進行拆除時便非常的麻煩，而且亦可能產生螺絲掉落或 遺失等麻煩問題。 有鑑於斯，本發明爲解決上述問題，遂提供一種加工 裝置，單邊的螺絲安裝處僅有一個’達容易拆裝且可避免 螺絲等掉落或遺失之功效者。 【解決課題之手段】 爰是，本發明爲解決上述課題’提供一種加工裝置’ 係至少包含固定待加工物且可移動的固定檯、沿該固定檯 4 (請先閲讀背面之注$項再填寫本頁) 訂 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公楚） 3472twf. doc/002 Λ7 3472twf. doc/002 Λ7 經濟部中央標率局貞工消費合作社印製 五、發明説明（>) 之移動方向所形成的開口、以及覆蓋該開口的蛇腹元件。 該蛇腹元件係包含有蛇腹部及裝卸於該加工裝置本體 的裝卸部’而在該加工裝置本體上則設置裝卸該裝卸部的 固定部，俾該蛇腹元件可輕易的裝卸於該加工供裝置本體 上。 再者’該加工裝置本體的固定部上設有卡合部及接合 部，而在蛇腹元件的裝卸部處則形成被卡合部及被接合 部。 該接合部至少包含一根螺絲，而該被接合部則設有對 應該螺絲的螺孔。 該加工裝置乃指切割裝置，而該待加工物則指半導體 晶圓。 【實施發明較佳態樣】 以下，針對本發明較佳實施態樣，依據所附示圖示進 行詳細說明。 第1圖所示係第3圖之加工裝置4的重要元件示意 圖。如第1圖所示，在加工裝置本體的開口 4a下方位置 處’設置固定檯2的驅動構件6。該驅動構件6具備移動 檯6a '將該移動檯6a沿X軸向（開口的長度方向)移動之 滾珠螺桿6b、以及馬達6c。在該移動檯6a上裝設固定檯 2，使該固定檯2隨移動檯6a同時在X軸方向上進行移 動。 在加工裝置本體的開口 4a二端裝設固定元件7。該 固定元件7的二側下端設置呈略L形之卡合部7a，而在 5 本紙張尺度適用中國國家標準（CNS) A4規格（210x 297公楚） (請先閲讀背面之注項再填寫本頁}401337 3472twf.doc / 002 Λ7 B7 Printed by the Consumers' Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs V. Description of the Invention (I) [Technical Field] The present invention provides a processing device. [Know-how] Please refer to FIG. 3 for the processing device 4 for “cutting the workpiece 100 on the fixed table 2” and supplying cutting fluid to perform cutting. To prevent cutting fluid from penetrating into the interior of the device, the conventional system is to fix the to-be-processed and movable fixing table 2 with a waterproof cover la. At the same time, the two sides of the waterproof cover la are provided with waterproofness that can be moved with the fixed table. The bellows element 1 is retracted and retracted, and the entire component is covered on the opening 4a of the processing device body. [Invention to solve the problem] As mentioned above, the conventional telescopic bellows element 1 is provided with a mounting plate 3 at the two ends, and the mounting plate 3 is fixed to the side wall of the waste liquid tray 5 of the processing device 4 with screws for maintenance. It must be removed at the time. However, the telescopic bellows element 1 is installed with a lot of screw-locking positions (take the figure as an example, there are 5 on one side and 10 on the two sides in total), so it is very troublesome to remove it, and There may also be troublesome problems such as dropping or losing screws. In view of this, the present invention provides a processing device in order to solve the above-mentioned problems. There is only one side of the single screw mounting portion, which can be easily disassembled and can prevent the screw or the like from being dropped or lost. [Means for solving the problem] That is, the present invention provides a processing device for solving the above-mentioned problem. The system includes at least a fixed table that is fixed and movable, and along the fixed table 4 (please read the note on the back before reading) (Fill in this page) The size of the paper is applicable to Chinese National Standard (CNS) A4 (210x297). 3472twf. Doc / 002 Λ7 3472twf. Doc / 002 Λ7 Printed by Zhengong Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs (≫), the opening formed by the moving direction, and the bellows element covering the opening. The bellows element includes a bellows and a mounting and dismounting portion mounted on the processing device body, and a fixing portion for mounting and dismounting the mounting and dismounting portion is provided on the processing device body. The bellows element can be easily mounted on the processing device body. on. Furthermore, the fixing portion of the processing apparatus body is provided with an engaging portion and a joint portion, and an engaged portion and an engaged portion are formed at the attaching and detaching portion of the bellows element. The engaging portion includes at least one screw, and the engaged portion is provided with a screw hole corresponding to the screw. The processing device refers to a dicing device, and the object to be processed refers to a semiconductor wafer. [Preferred Aspects of Implementing the Invention] Hereinafter, preferred embodiments of the present invention will be described in detail according to the accompanying drawings. Fig. 1 is a schematic diagram of important elements of the processing device 4 of Fig. 3. As shown in Fig. 1, a driving member 6 of the fixing table 2 is provided at a position below the opening 4a of the processing apparatus body. The driving member 6 includes a moving stage 6a ', a ball screw 6b that moves the moving stage 6a in the X-axis direction (the lengthwise direction of the opening), and a motor 6c. A fixed table 2 is mounted on the mobile station 6a, and the fixed table 2 is moved in the X-axis direction simultaneously with the mobile station 6a. Fixing elements 7 are installed at both ends of the opening 4a of the processing apparatus body. The lower end of the two sides of the fixing element 7 is provided with a slightly L-shaped engaging portion 7a, and the Chinese paper standard (CNS) A4 (210x297) is applied to 5 paper sizes (please read the notes on the back before filling This page}
3472twf.doc/002 A7 B7 五、發明説明（彡） 上端則設計呈水平向內側彎曲的接合部7b’並在中央部 位處貫穿可穿插螺絲的貫穿孔7c。 (請先閲讀背面之注意事項再填寫本頁) 該防水套la的中央部位處，設計配合裝設於該固定 檯2的套合孔lc，而在二側則分別裝置蛇腹元件1 °該蛇 腹元件1具備蛇腹部lb'及分別於二端處所設置的裝卸 部8。 該裝卸部8略呈門狀，並在二側下端部位處形成卡合 於該固定部7之卡合部7a的被卡合部8a，而在二側上端 處則形成水平向內側彎曲的被接合部8b，同時於分別於 二端中央處設置可貫穿螺絲的螺孔8c。 -rt 此種構造的蛇腹元件1，係裝設於防水套1上’並以 可覆蓋於該加工裝置本體的開口 4a方式，安裝於該固定 部7a上。即，將該防水套la裝設於固定檯2上’同時將 蛇腹元件1的裝卸部8，由固定部7內側斜向插入’俾使 該被卡合部8a嵌入卡合部7a中，而分別予以卡合。該被 接合部8b抵接於接合部7b的上面，由該接合部7b的貫 穿孔7c插入螺絲9，並貫穿該螺孔8c而固定。 經濟部中央標準局員工消费合作杜印製 職是，藉由上述結構，二側蛇腹元件1分別可僅利用 單根螺絲9，便將該加工裝置本體裝置於固定部7。所以， 當進行維修時，僅需拆除螺絲9，同時由固定部7中拔除 裝卸部8的話，便可輕易的完成拆除。而且僅要將該蛇腹 部lb沿蛇腹伸縮方向進行滑移的話，便可輕易的確認開 口 4a內部。換句話說，本發明藉由其特殊的結構，不僅 大幅簡化蛇腹元件1的裝卸，同時亦可防止諸如螺絲等鎖 6 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公楚） 3472twf.doc/002 3472twf.doc/002 經濟部中央櫺準局貝工消费合作社印裝 五、發明説明（) 合工具的掉落或遺失等不良情形。該蛇腹元件1亦因爲可 自由伸縮，所以容易進行裝卸事宜。 當加工裝置4係爲切割裝置時，在固定檯2上固定屬 待加工物100的半導體晶圓，並將固定檯2朝X軸方向 移動，利用如第3圖所示之旋轉刀片等切削構件101，供 給切削液於半導體晶圓，同時進行切削加工。 此外，該防水套la與蛇腹元件1間的裝設方式，亦 可採用本發明所提供的方法。即，在防水套la上形成與 加工裝置本體上之固定部相同的固定部，並在蛇腹元件上 設置裝卸部，便可輕易的進行裝卸。 【發明效果】 —.....-. 綜上所述，：里僅需利用每根螺絲，便可將蛇腹元 件的裝卸部安裝於加工裝置本體的固定部上，所以當施行 維修時，可輕易進行裝卸事宜，同時亦可防止諸如螺絲等 固定元件的掉落或遺失，頗具簡單拆裝且節省施工程序之 功效者。 【圖示簡單說明】 第1圖係本發明較佳實施例的組裝立體示意圖。 第2圖係習知之立體示意圖。 第3圖係本發明較佳實施例之加工裝置整體示意圖。 【圖示編號】 1 蛇腹元件 la防水套 lb蛇腹部 lc套合孔 2 固定檯 7 ( CNS ) A4^ ( 21〇x297/^t ) ' (請先閲讀背面之注意事項再填寫本頁) 訂 -Γ.3472twf.doc / 002 A7 B7 V. Description of the invention (彡) The upper end is designed as a joint portion 7b 'which is curved horizontally inward and penetrates a through hole 7c at the central portion through which a screw can be inserted. (Please read the precautions on the back before filling out this page) The central part of the waterproof cover la is designed to fit the fitting hole lc installed on the fixing table 2, and on both sides are equipped with a bellows element 1 ° the bellows The element 1 includes a bellows lb ′ and attaching and detaching portions 8 provided at the two ends, respectively. The attaching and detaching portion 8 is slightly door-shaped, and an engaged portion 8a that is engaged with the engaging portion 7a of the fixing portion 7 is formed at the lower end portion of the two sides, and a horizontally inwardly curved is formed at the upper end of the two sides. At the same time, the joint portions 8b are provided with screw holes 8c through which screws can be passed respectively at the center of the two ends. -rt The bellows element 1 of this structure is mounted on the waterproof case 1 'and is mounted on the fixing portion 7a in such a manner as to cover the opening 4a of the processing apparatus body. That is, the waterproof cover la is mounted on the fixing table 2 while inserting and removing the bellows element 1 attaching and detaching part 8 from the inside of the fixing part 7 obliquely, and inserting the engaged part 8a into the engaging part 7a, and Engage them separately. The joined portion 8b is in contact with the upper surface of the joined portion 7b, and the screw 9 is inserted through the through hole 7c of the joined portion 7b, and is fixed through the screw hole 8c. With the above-mentioned structure, the two sides of the bellows element 1 can use only a single screw 9 to install the processing device body on the fixed portion 7 with the above-mentioned structure. Therefore, when performing maintenance, it is only necessary to remove the screw 9 and remove the attachment and removal part 8 from the fixing part 7 at the same time, and the removal can be easily completed. Furthermore, if the belly portion lb is slid in the telescopic direction of the belly, the inside of the opening 4a can be easily confirmed. In other words, with its special structure, the present invention not only greatly simplifies the assembly and disassembly of the bellows element 1, but also prevents locks such as screws. 6 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 Gongchu) 3472twf. doc / 002 3472twf.doc / 002 Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. 5. Description of the invention () The falling or missing of the combined tool. The bellows element 1 is also free to expand and contract, so it is easy to handle. When the processing device 4 is a dicing device, the semiconductor wafer belonging to the object to be processed 100 is fixed on the fixed table 2, and the fixed table 2 is moved in the X-axis direction, and a cutting member such as a rotary blade is used as shown in FIG. 3. 101. Supply a cutting fluid to a semiconductor wafer and perform a cutting process at the same time. In addition, the installation method between the waterproof cover la and the bellows element 1 can also adopt the method provided by the present invention. That is, the same fixing part as that of the processing device body is formed on the waterproof casing la, and the attaching and detaching part is provided on the bellows element, so that it can be easily attached and detached. [Effects of the invention] —.....-. In summary, the attaching and detaching part of the bellows element can be installed on the fixing part of the processing device body only by using each screw. Therefore, It can easily carry out the loading and unloading matters, and at the same time can prevent the fixing components such as screws from being dropped or lost. It is quite simple to disassemble and save the effect of construction procedures. [Brief description of the diagram] FIG. 1 is an assembled perspective view of a preferred embodiment of the present invention. Figure 2 is a conventional three-dimensional schematic diagram. FIG. 3 is an overall schematic view of a processing device according to a preferred embodiment of the present invention. [Picture number] 1 Snake belly element la Waterproof sleeve lb Snake belly lc Fitting hole 2 Fixing table 7 (CNS) A4 ^ (21〇x297 / ^ t) '(Please read the precautions on the back before filling this page) Order -Γ.
« ^ϋ· I 3472twl'.doc/002 A 7 B7 五、發明説明（) 7 3 3 1 G 4 經濟部中央標準局貝工消費合作社印製 3 安裝板 4 加工裝置 4a 開口部 5 廢液盤 6 驅動構件 6a 移動檯 6b 滾珠螺桿 6c 馬達 7 固定部 7a 卡合部 7b 接合部 7c 貫穿孔 8 裝卸部 8a 被卡合部 8b 被接合部 8c 螺孔 9 螺絲 (請先閲讀背面之注意事項再填寫本頁) 訂 -Γ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）«^ Ϋ · I 3472twl'.doc / 002 A 7 B7 V. Description of the invention () 7 3 3 1 G 4 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 3 Mounting plate 4 Processing device 4a Opening 5 Waste liquid tray 6 Driving member 6a Moving table 6b Ball screw 6c Motor 7 Fixing part 7a Engaging part 7b Joining part 7c Through hole 8 Attachment part 8a Engaged part 8b Engaged part 8c Screw hole 9 Screw (Please read the precautions on the back first (Fill in this page) Order -Γ This paper size applies to China National Standard (CNS) A4 (210X297mm)