CN213673670U - Mask clamp - Google Patents

Abstract

The utility model discloses a mask clamp, including the spout, the one end fixed mounting of spout has the grab handle, but the other end position of spout has cup jointed movable chuck, install the auxiliary assembly that makes the device can fix the mask plate of different grade type size between grab handle and the movable chuck, and the auxiliary assembly cup joints the surface at the spout, it is tight to make the one end of mask plate tightly through the cooperation between grab handle and the handle now, through adjusting movable chuck installation bolt, then correspond the draw-in groove, be favorable to pressing from both sides the mask plate of different grade type size tightly, under the effect through auxiliary assembly, be favorable to the device can adapt to multiple processing environment, also can be with unsettled processing of mask plate, and make four terminal surfaces of mask plate can receive the effect of force, it is tight with supplementary fixed chuck and movable chuck to.

Description

Mask clamp

Technical Field

The utility model relates to a mask anchor clamps technical field specifically is a mask anchor clamps.

Background

The mask is a mold required in the semiconductor industry and the integrated circuit manufacturing, and the pattern on the mask can be copied on the wafer through the exposure process. The mask factory converts the graphic data according to the graphic designed by the customer, and then uses the mask exposure machine to expose on the photosensitive quartz substrate, and the surface of the photosensitive quartz substrate generates the light-transmitting and light-proof ultra-fine logic graphic through the developing (developing + baking) and etching processes. In the mask process, in order to manually take and place pollutants such as fingerprints and particles left behind a mask, a mask clamp is provided, workpieces with different types, sizes and shapes need to be clamped on an existing mask table, therefore, various types of clamps are provided on the existing clamp, the mask table is inconvenient to use under various types of clamps, waste in processing cost is caused due to various types of clamps, and the mask clamp is provided for reducing the cost.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a mask anchor clamps to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a mask clamp, includes the spout, and the one end fixed mounting of spout has the grab handle, and the other end position of spout has cup jointed portable chuck, installs between grab handle and the portable chuck and makes the device can be with the fixed auxiliary assembly of mask plate of different grade type size, and the auxiliary assembly cup joints the surface at the spout, is favorable to more stable a bit with anchor clamps when pressing from both sides tight mask plate at an auxiliary assembly of surface mounting of spout, prevents that it from droing.

Preferably, the screw rod has been run through to the surface position of grab handle, and the bottom of grab handle is connected with the handle that is used for manual regulation through the cooperation screw rod, installs the first spring that is used for quick reset between grab handle and the handle, and the one end of handle is installed fixed chuck in the bottom position that is close to the spout, and the screw rod is through running through grab handle and handle fixed connection, and the purpose of installation first spring lies in that the elasticity of spring itself can be dismantled the mask slice when dismounting device.

Preferably, a plurality of draw-in grooves have been seted up on the surface of spout, and the surface position of portable chuck runs through there is the bolt, and the stopper has been cup jointed to the bottom position excircle of bolt, and the bottom position fixedly connected with second spring of stopper, and the bolt carries out the joint through running through portable chuck and draw-in groove, with draw-in groove and stopper joint, is favorable to the quick fixed position who finds the correspondence of portable chuck.

Preferably, the auxiliary assembly is including setting up the shell that is used for protection device on the surface of spout, and the shell is the kind slotted cavity, the internally mounted of shell has oblique tooth's socket, the both sides position of oblique tooth's socket is all installed and is used for carrying out spacing soft movable block with the device, the surface of soft movable block runs through there is the removal post that is used for manual regulation, one side position connection of soft movable block is fixed with the third spring, the one end of third spring is connected with the slider with the shell is gliding, the bottom position of removing the post is connected with the connecting rod, the one end fixedly connected with of connecting rod is used for pressing from both sides the supplementary splint of tight mask piece, supplementary splint are favorable to holding well mask piece at the different grade type, make mask piece.

Preferably, one end of the chute is a folded layer at the connection near the handle.

Compared with the prior art, the beneficial effects of the utility model are that: the mask plate is clamped at one end by matching between the grab handle and the grip, the bolt is installed by adjusting the movable chuck and then corresponds to the clamping groove, the clamping of the mask plates with different types and sizes is facilitated, the device can adapt to various processing environments under the action of the auxiliary assembly, the mask plates can be processed in a suspension mode, the four end faces of the mask plates can be subjected to force, and the clamping of the mask plates by the auxiliary fixed chuck and the movable chuck is facilitated.

Drawings

Fig. 1 is a schematic structural view of the overall structure of the present invention;

fig. 2 is a schematic view of the movable chuck according to the present invention in a partial sectional structure;

FIG. 3 is a schematic view of the handle of the present invention in a partial cross-sectional view;

FIG. 4 is a schematic structural diagram of the auxiliary assembly of the present invention;

FIG. 5 is a schematic diagram showing an enlarged view of point A of the present invention;

fig. 6 is a schematic structural diagram of an installation manner of the first spring according to the present invention.

In the figure: 1-a chute; 2-a grab handle; 3-a grip; 4-a first spring; 5-fixing the chuck; 6-a bolt; 7-a clamping groove; 8-a movable chuck; 9-screw rod; 10-a limiting block; 11-a second spring; 100-an auxiliary component; 101-a housing; 102-skewed tooth slot; 103-connecting rod; 104-an auxiliary splint; 105-a soft moving block; 106-moving the column; 107-third spring; 108-slide block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-6, the present invention provides a mask clamping apparatus, comprising: the utility model provides a mask clamp, includes spout 1, the one end fixed mounting of spout 1 has grab handle 2, but the other end position of spout 1 has cup jointed movable chuck 8, install between grab handle 2 and the movable chuck 8 and make the device can be with the fixed auxiliary assembly 100 of mask plate of different grade type size, and auxiliary assembly 100 cup joints the surface at spout 1.

The surface position of grab handle 2 runs through there is screw rod 9, the bottom of grab handle 2 is connected with the handle 3 that is used for manual regulation through cooperation screw rod 9, install the first spring 4 that is used for quick return between grab handle 2 and the handle 3, fixed chuck 5 is installed at the bottom position that is close to spout 1 to the one end of handle 3, and screw rod 9 is through running through grab handle 2 and 3 fixed connection of handle, and the connection between fixed chuck 5 and the handle 3 is connected with both by a fixed column.

A plurality of draw-in grooves 7 have been seted up on the surface of spout 1, the surface position of portable chuck 8 runs through there is bolt 6, stopper 10 has been cup jointed to the bottom position excircle of bolt 6, the bottom position fixedly connected with second spring 11 of stopper 10, and bolt 6 carries out the joint through running through portable chuck 8 and draw-in groove 7, and the cavity has been seted up to portable chuck 8 is inside, and the cavity can pass through the rotation of stopper 10 to die the inside of portable chuck 8 with bolt 6 lock, the slider is installed by portable chuck 8 the inside to portable chuck 8 and spout 1's being connected.

The auxiliary assembly 100 comprises a shell 101 arranged on the surface of the sliding chute 1 and used for protecting a device, the shell 101 is a grooved cavity, an inclined tooth groove 102 is arranged inside the shell 101, soft moving blocks 105 used for limiting the device are arranged on two sides of the inclined tooth groove 102, moving columns 106 used for manual adjustment penetrate through the surfaces of the soft moving blocks 105, a third spring 107 is fixedly connected to one side of each soft moving block 105, one end of each third spring 107 is connected with a sliding block 108 which slides with the shell 101, a connecting rod 103 is connected to the bottom end of each moving column 106, and an auxiliary clamping plate 104 used for clamping a mask plate is fixedly connected to one end of each connecting rod 103.

One end of the sliding chute 1 is a folding layer at the joint close to the grab handle 2.

The working principle is as follows: firstly, a mask plate is placed at a proper processing position, then one end of a chute 1 is connected with a movable chuck 8, a plurality of clamping grooves 7 are arranged on the surface of the chute 1, so that a bolt 6 can be inserted on the surface of the movable chuck 8, the bolt 6 is inserted into the clamping grooves 7, the bolt 6 is provided with a limiting block 10 on the cavity part of the movable chuck 8 due to the cavity arranged in the movable chuck 8, the bolt 6 is fixed with the movable chuck 8 by rotating the bolt 6, the handle 2 connected with the other end of the chute 1 is pressed by a handle 3 to clamp the mask plate under the matching between the fixed chuck 5 and the movable chuck 8, if the clamping is likely to be unstable under the suspension processing environment, an auxiliary assembly 100 is sleeved on the surface of the chute 1, the auxiliary assembly 100 firstly slides a flexible moving block 105 along the inner side of an inclined tooth groove 102 through a moving column 106, when the auxiliary clamp plate 104 is clamped inwards by the connecting rod 103 to clamp the mask plate, and when the auxiliary assembly 100 is loosened, the movable column 106 can drive the slider 108 to pull upwards along the groove in the housing 101, so that the soft movable block 105 is separated from the helical tooth grooves 102, and the mask plate can be loosened.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. A mask jig comprising a chute (1), characterized in that: the mask plate fixing device is characterized in that a grab handle (2) is fixedly mounted at one end of the sliding chute (1), a movable chuck (8) is sleeved at the other end of the sliding chute (1), an auxiliary component (100) which enables the device to fix mask plates of different types and sizes is mounted between the grab handle (2) and the movable chuck (8), and the auxiliary component (100) is sleeved on the surface of the sliding chute (1).

2. The mask jig according to claim 1, wherein: the utility model discloses a handle, including grab handle (2), the surface position of grab handle (2) runs through screw rod (9), the bottom of grab handle (2) is connected with handle (3) that are used for manual regulation through cooperation screw rod (9), install between grab handle (2) and handle (3) and be used for quick reset first spring (4), fixed chuck (5) are installed in the bottom position that is close to spout (1) to the one end of handle (3), and screw rod (9) are through running through grab handle (2) and handle (3) fixed connection.

3. The mask jig according to claim 2, wherein: a plurality of draw-in grooves (7) have been seted up on the surface of spout (1), bolt (6) have been run through to the surface position of portable chuck (8), stopper (10) have been cup jointed to the bottom position excircle of bolt (6), the bottom position fixedly connected with second spring (11) of stopper (10), and bolt (6) carry out the joint through running through portable chuck (8) and draw-in groove (7).

4. A mask jig according to claim 3, wherein: the auxiliary assembly (100) comprises a shell (101) arranged on the surface of the sliding groove (1) and used for protecting a device, the shell (101) is a groove cavity, an inclined tooth groove (102) is arranged inside the shell (101), soft moving blocks (105) used for limiting the device are arranged on two sides of the inclined tooth groove (102), moving columns (106) used for manual adjustment penetrate through the surfaces of the soft moving blocks (105), third springs (107) are fixedly connected to one side of each soft moving block (105), one ends of the third springs (107) are connected with sliding blocks (108) sliding with the shell (101), connecting rods (103) are connected to the bottom ends of the moving columns (106), and auxiliary clamping plates (104) used for clamping a mask plate are fixedly connected to one ends of the connecting rods (103).

5. The mask jig according to claim 4, wherein: one end of the sliding chute (1) is a folding layer at the joint close to the grab handle (2).

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