534858 A7 B7 經濟部智慧財產局員工消費合作社印制衣 五、發明說明（） 發明領域： 本發明係有關於一種導環（guide ring)拆卸輔助工具和 其使用方法。特別是有關於拆卸與頂環模組（top ring module)密合之導環的拆卸輔助工具和其使用方法。 發明背景： 在目前已發展的半導體平坦化技術中，化學機械研磨 (chemical-mechanical polishing ; CMP)技術是目前可達到 全域性（Global)平坦化的主要技術。化學機械研磨技術可 同時利用機械研磨的方式以及化學作用的方式移除晶圓 表面的材質，使晶圓表面輪廓漸趨平坦，而使晶圓表面達 到全面性的平坦化，以利後續之沉積製程以及微影製程等 的進行。 請參照第1圖’第1圖為緣示習知之化學機械研磨機 台的裝置示意圖，例如：日本依巴拉公司（Ebara Corporation)所生產的CMP機台。在化學機械研磨製程 中，頂環模組10(top ring module)係用來壓制晶圓40 ,以 使晶圓40與轉動平台（未繪示）上的研磨墊3〇(p〇Ushing pad)接觸。而頂環模組1〇的上端係藉著複數個頂環緊固元 件1 2 (例如· 3個螺絲）連接於機械手臂$ 〇下之頂環軸5 〇。 本紙張尺度適用中國國家標準(CNS)A4規格（210 x 297公餐） _ f I -- n n i H ϋ i· n i n §mm n I · u n tmmf n n n n 一 I 1 I I i i 1 yll I (請先閱讀背面之注意事項再填寫本頁) 534858 A7 —«""" ------〜__B7 _— _— 一 五、發明說明（） (請先閲讀背面之注意事項再填寫本頁) 晶圓40的上方與頂環模組1 0之間有支持膜32，藉以使晶 圓4〇與頂環模組10之間具有彈性。此外，頂環模組1 〇 與晶圓40接觸之表面的四周安裝有導環2〇，藉以將晶圓 4 〇保持在頂環模組1 0之中，使晶圓4 0在旋轉時不會脫 離頂環模組1 〇。當化學機械研磨製程進行時，由化學物 和研磨顆粒所組成之研磨漿（未繪示）注入於轉動平台的 中間區域上。藉由轉動平台旋轉時所產生之離心力，將研 磨衆散佈到轉動平台的其他區域，而使研磨漿進入晶圓 40與研磨墊30之間，以利研磨的進行。 經濟部智慧財產局員工消費合作社印製 請繼續參照第1圖。由於導環20直接與研磨墊30接 觸’故經過一段時間的CMP製程之後，導環20會因磨損 過度而必須更換。請參照第2圖，第2圖為繪示習知之頂 環模組和導環的立體結構示意圖。其中，先將頂環模組i 〇 下面部分之頂環凸緣丨6伸入導環2 〇中，再將頂環模組1 〇 上之複數個頂環凹槽丨4分別與導環2 〇之複數個導環固定 孔24相對齊後’再旋入複數個螺絲（未繪示），藉以使頂環 模組10與導環20密合。由於研磨漿會滲入頂環模組jo 與導環2 0之間’研磨漿於凝固後會使原本已相當緊密的 頂環模組1 0與導環2 〇更加難以分開。習知之更換導環的 方法係先將頂環模組10和導環2〇的結合體自機械手臂6〇 下之頂環軸5 0卸下，拆掉頂環模組1 〇和導環2 〇之間的螺 絲後，再將頂環模組1 〇和導環2 〇的結合體浸泡在水中3 〇 本纸張又度適用中國國家標準（CNS)A4規格（210 X 297公餐） 534858 A7534858 A7 B7 Printed clothing for employees' cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention () Field of the invention: The present invention relates to a guide ring disassembly auxiliary tool and its use method. In particular, there is a disassembly assisting tool for disassembling a guide ring which is in close contact with a top ring module and a method of using the same. BACKGROUND OF THE INVENTION Among the semiconductor planarization technologies that have been developed, chemical-mechanical polishing (CMP) technology is the main technology that can currently achieve global planarization. Chemical mechanical polishing technology can use both mechanical polishing and chemical action to remove the material on the surface of the wafer, so that the surface profile of the wafer is gradually flattened, and the wafer surface is completely flattened to facilitate subsequent deposition Process and lithography process. Please refer to Figure 1 '. Figure 1 is a schematic diagram of a conventional chemical mechanical polishing machine, such as a CMP machine produced by Ebara Corporation in Japan. In the chemical mechanical polishing process, the top ring module 10 is used to press the wafer 40 so that the wafer 40 and the polishing pad 3 (p〇Ushing pad) on the rotating platform (not shown). contact. The top end of the top ring module 10 is connected to the top ring shaft 50 under the robot arm by a plurality of top ring fastening elements 12 (eg, 3 screws). This paper size applies to China National Standard (CNS) A4 specification (210 x 297 meals) _ f I-nni H ϋ i · nin §mm n I · un tmmf nnnn I I II II y 1 I (Please read first Note on the back, please fill out this page) 534858 A7 — «" " " ------ ~ __B7 _— _— 15. Description of the invention () (Please read the note on the back before filling out this page ) There is a supporting film 32 between the top of the wafer 40 and the top ring module 10, so that there is flexibility between the wafer 40 and the top ring module 10. In addition, a guide ring 20 is installed around the surface where the top ring module 10 contacts the wafer 40, so that the wafer 40 is held in the top ring module 10, so that the wafer 40 does not rotate during rotation. Will leave the top ring module 1 〇. When the CMP process is performed, a grinding slurry (not shown) composed of chemicals and abrasive particles is injected onto the middle area of the rotating platform. By using the centrifugal force generated when the rotating platform rotates, the grinding mill is spread to other areas of the rotating platform, so that the polishing slurry enters between the wafer 40 and the polishing pad 30 to facilitate polishing. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Please continue to refer to Figure 1. Since the guide ring 20 is in direct contact with the polishing pad 30 ', after a period of CMP process, the guide ring 20 will be replaced due to excessive wear. Please refer to Fig. 2, which is a schematic diagram showing the three-dimensional structure of the conventional top ring module and guide ring. Among them, firstly, the top ring flange of the top ring module i 〇 6 is inserted into the guide ring 2 〇, and then a plurality of top ring grooves 4 on the top ring module 1 〇 and the guide ring 2 are respectively 〇 After the plurality of guide ring fixing holes 24 are relatively aligned, then screw in a plurality of screws (not shown), so that the top ring module 10 and the guide ring 20 are in close contact. Because the slurry will penetrate between the top ring module jo and the guide ring 20, the solidified slurry will make it difficult to separate the top ring module 10 and the guide ring 20, which are already quite tight. The conventional method of replacing the guide ring is to first remove the combination of the top ring module 10 and the guide ring 20 from the top ring shaft 50 under the robotic arm 60, and remove the top ring module 10 and the guide ring 2 After the screw between 〇, the combination of the top ring module 1 〇 and the guide ring 2 〇 was immersed in water 3 〇 This paper is again applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 meals) 534858 A7
--------訂------ (請先閱讀背面之注意事項再填寫本頁) • n n n _ 線卜 n n u n n n n n n ( 534858 A7 五、發明說明（ 使用方法。使得報廢的導環可以成為有用的導環拆卸輔助 工具。因而得以節省更換導環的成本’且有利於環保 根據以上所述之目的，本發明提供了一種導環拆卸辅 助工具和其使用方法。本發明之導環拆卸辅助工具係於與 欲拆卸之導環的結構相同的導環（例如：報廢的同型號導環) 上之複數個孔中安裝複數個支持元件（例如：螺絲），藉以拆 卸與頂環模組密合的導環。另外，於導環拆卸辅助工具上 的孔之間安裝有複數個緩衝墊，藉以於本發明之導環拆卸 辅助工具與頂環模組相合後，在拆卸的過程中避免傷害頂 裱杈組。本發明之導環拆卸輔助工具的使用方法係先將導 壤拆卸辅助工具的支持元件插入頂環模組的凹槽之後，再 以晝圓的方式輕輕敲打與頂環模組密合的導環，以使導環 脫離頂環模組。 圖式簡單說明： 本發明的較佳實施例將於往後之說明文字中辅以下列 圖形做更詳細的闡述，其中·· _____一丨：：！！«________訂_______r 線 (請先閱讀背面之注音？事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 圖 意 示 置 裝 的 厶〇 機 磨 研 械 機 學 化 之 知 習 示 繪 為 圖 1X 第 意 示 構 結 體 立 的 環 導 和 組 模 環 頂 之 知 習 示 繪 為 圖 2 第 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公餐） 534858 A7 五、發明說明（圖； 第3圖4 I示本發明之較佳f施例《導環 具的立體結構示意圖； 斥卸辅助 第4圖為繪示本發明之較佳實施例之導環拆卸辅助 具的俯視示意圖；以及 第5圖為繪示本發明之較佳實施例之導環拆卸輔助 工 經濟部智慧財產局員工消費合作社印制π 具之使用 方法的流程圖。 圖號對照說明： 10 頂環模組 12 頂環緊固元件 14 頂環凹槽 16 頂環凸緣 20 導環 24 導環固定孔 30 研磨墊 32 支持膜 40 晶圓 50 頂環轴 60 機械手臂 100 導環拆卸辅助工具 120 治具導環 本纸張尺度適用中國國家標準（CNS)A4規恪（210 X 297公餐） (請先閱讀背面之注意事項再填寫本頁) Φ--------訂----------線卜,----------------- 534858 五、發明說明（ 122 124 210 220 230 240 250 260 緩衝墊 支持元件 卸下頂環模組和導環的結合體 將導環拆卸輔助工具上的支持元件插入頂環模組 和導環的結合體之位於頂環模組上的凹槽 導衣拆卸輔助卫具與頂環模組和導環的結合體 相合 平放導環拆卸辅M I 1 , 兩助具頂王衣模組和導環的結合 體於工作檯上並使其中《導環位於最上面 以晝圓的方式敲打導環朝上之表©以使導環脫離 頂環模組 分開導環拆卸輔助工具和頂環模組 (請先閱讀背面之注意事項再填寫本頁)-------- Order ------ (Please read the precautions on the back before filling this page) • nnn _ Line nnnnnnnnn (534858 A7 V. Description of the invention (Method of use. The scrap guide ring It can be a useful guide ring disassembly assisting tool. Therefore, the cost of replacing the guide ring can be saved 'and is environmentally friendly. According to the above-mentioned purpose, the present invention provides a guide ring dismounting auxiliary tool and a method of using the same. The guide ring of the present invention The removal auxiliary tool is attached to a plurality of holes on the guide ring having the same structure as the guide ring to be disassembled (for example, a scrapped guide ring of the same model), and a plurality of supporting elements (for example, screws) are used to dismantle the top ring mold. The guide rings are assembled tightly. In addition, a plurality of buffer pads are installed between the holes on the guide ring removal auxiliary tool, so that after the guide ring removal auxiliary tool of the present invention is combined with the top ring module, during the disassembly process Avoid damage to the top mounting branch group. The method of using the guide ring removal auxiliary tool of the present invention is to insert the support element of the guide ring removal auxiliary tool into the groove of the top ring module, and then gently The guide ring that is tightly attached to the top ring module is made to separate the guide ring from the top ring module. The diagram is briefly explained: The preferred embodiment of the present invention will be supplemented by the following figures in the following explanatory text for more detailed description. Elaboration, of which ... _____ 一 丨 :: !!! «________Order _______r line (please read the note on the back? Matters before filling out this page} The printed drawings of the employees’ cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs厶 〇 The knowledge of mechanical grinding and mechanization is shown in Figure 1X. The structure of the ring guide and the ring top of the mold is shown in Figure 2. The paper size applies the Chinese national standard (CNS). ) A4 specification (210 X 297 meals) 534858 A7 V. Description of the invention (Figure; Figure 3 Figure 4 I shows the preferred embodiment of the present invention "Schematic diagram of the three-dimensional structure of the guide ring; Removal assistance auxiliary Figure 4 is a drawing A schematic plan view showing a guide ring disassembling aid of a preferred embodiment of the present invention; and FIG. 5 is a diagram showing a guide ring disassembling aid of a preferred embodiment of the present invention. Flow chart of how to use . Comparative description of drawing number: 10 Top ring module 12 Top ring fastening element 14 Top ring groove 16 Top ring flange 20 Guide ring 24 Guide ring fixing hole 30 Polishing pad 32 Supporting film 40 Wafer 50 Top ring shaft 60 Mechanical Arm 100 guide ring removal aid tool 120 jig guide ring The paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 meals) (Please read the precautions on the back before filling this page) Φ --- ----- Order ---------- Line Bu, ----------------- 534858 V. Description of the invention (122 124 210 220 230 240 250 260 Remove the combination of the top ring module and the guide ring from the cushion support element. Insert the support element on the guide ring removal auxiliary tool into the groove on the top ring module of the combination of the top ring module and the guide ring. The auxiliary guard is combined with the combination of the top ring module and the guide ring. The guide ring is dismantled and the auxiliary MI 1 is placed flat. The table above hits the guide ring upwards in a daylight manner © to separate the guide ring from the top ring module and separate the guide ring removal aid and the top ring module (please read first Note the surface to fill out this page)
-n 1« n ϋ I 經濟部智慧財產局員工消費合作社印製 發明詳細說明： .，本Γ:Γ露一種導環拆卸輔助工具和其使…。本 發=二拆卸輔助工具係於一個與欲拆卸之導環的結構 目 ¥上之複數個孔t安裝複數個支持元件，藉以拆 卸與頂環模組密合的導環。本發明之導環拆卸輔助工具的 m使導環拆卸辅助工具的支持元件玫入頂環模組 離頂環模組。 ㈣％ ’以使導％脫 ϋ氏張尺度適用中國國家標準（CNS)A4規ί各（210 x 297公餐_-n 1 «n ϋ I Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy Detailed description of the invention:. This book Γ: Γ shows a guide ring disassembly auxiliary tool and its use ... The two auxiliary removal tools are attached to a structure with the guide ring to be removed. The multiple holes t on the upper part are used to install a plurality of supporting components, so as to remove the guide ring which is in close contact with the top ring module. The m of the guide ring removal assisting tool of the present invention allows the supporting element of the guide ring removal assisting tool to be inserted into the top ring module and the top ring module. ㈣ ％ ’to make the percent off. The Zhang's scale is applicable to the Chinese National Standard (CNS) A4 regulations. Each (210 x 297 public meal_
It-------r ·線 —Αν---------- 534858 經濟部智慧財產局員工消費合作社印製 A7 R7 五、發明說明（） 请參照第3圖和第4圖，第3圖為繪示本發明之較佳 實施例之導環拆卸辅助工具的立體結構示意圖。而第4圖 為繪示本發明之較佳實施例之導環拆卸辅助工具的俯視示 意圖。請繼續參照第2圖，本發明之較佳實施例之導環拆 卸辅助工具係應用於例如··日本依巴拉公司所生產的CMp 機台。為方便說明起見，以下之敘述係以第2圖所示之導 環20和頂環模組1 〇做為欲被拆卸之標的： 如第3圖所示，導環拆卸辅助工具i 〇〇之治具導環i 2〇 係與第2圖所示之導環2 0的結構相同。而本發明之較佳實 施例所使用的治具導環120可為與導環2〇的同型號之全新 的導環，或報廢的導環。然而，為了節省成本及環境保護， 本發明使用報廢的導環來做為治具導環1 2 〇。治具導環1 2 〇 上有與如第2圖所示之導環固定孔24相同的治具導環固定 孔（未繪示），例如：12個。導環拆卸輔助工具丨〇〇係於 這些治具導％固定孔其中之若干個（例如·· 6個）對稱的 孔上分別安裝支持元件1 24，而此支持元件丨24可為例如： 螺絲。當支持元件1 24插入於頂環模組1 〇的頂環凹槽i 4 後’維修人員以畫圓的方式敲打欲拆除之導環2〇的不與頂 環模組1 0相接的表面時，支持元件i 24會提供與畫圓的方 向相反之反作用力來阻止頂環模組1 〇隨導環2〇移動，藉 以鬆動頂環模組10和導環20，因而可以輕鬆地將它們分 開。依實際狀況而定，本發明亦可在全部（例如：1 2個）或 8 (請先閱讀背面之注意事項再填寫本頁) II________^______________________________It ------- r · line—Αν ---------- 534858 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 R7 V. Description of the invention () Please refer to Figure 3 and 4 FIG. 3 is a schematic diagram showing a three-dimensional structure of a guide ring removal assisting tool according to a preferred embodiment of the present invention. FIG. 4 is a schematic plan view illustrating a guide ring removal assisting tool according to a preferred embodiment of the present invention. Please continue to refer to FIG. 2. The guide ring disassembling auxiliary tool of the preferred embodiment of the present invention is applied to, for example, a CMP machine manufactured by Japan Ibarra Company. For the convenience of explanation, the following description uses the guide ring 20 and the top ring module 1 〇 shown in FIG. 2 as the targets to be removed: As shown in FIG. 3, the guide ring removal assisting tool i 〇〇 The jig guide ring i 20 has the same structure as the guide ring 20 shown in FIG. 2. The jig guide ring 120 used in the preferred embodiment of the present invention may be a brand new guide ring of the same model as the guide ring 20, or a discarded guide ring. However, in order to save costs and protect the environment, the present invention uses a discarded guide ring as the jig guide ring 120. The jig guide ring 1 2 0 has the same jig guide ring fixing hole (not shown) as the guide ring fixing hole 24 shown in FIG. 2, for example, twelve. Guide ring removal auxiliary tool 〇〇〇 is installed in several of these fixture guide% fixing holes (such as · 6) symmetrical holes are respectively installed with a supporting element 1 24, and this supporting element 丨 24 can be, for example: screws . When the supporting element 1 24 is inserted into the top ring groove i 4 of the top ring module 10, the maintenance personnel taps the surface of the guide ring 2 to be removed that is not in contact with the top ring module 10 and draws a circle. At this time, the supporting element i 24 will provide a reaction force opposite to the direction of drawing the circle to prevent the top ring module 10 from moving with the guide ring 20, thereby loosening the top ring module 10 and the guide ring 20, so they can be easily moved. separate. Depending on the actual situation, the present invention can also be used in all (for example: 12) or 8 (please read the notes on the back before filling this page) II ________ ^ ______________________________
534858 五、發明說明（ 較少（例如：3個）的治具導環固定孔上分別安裝支持元件 ⑴。此外’本發明更於這些支持元件124之間分別安裝: 衝塾122。為使支持元件124可以較深地插入 一 ^ 2圖所 示之頂環模組10的頂環凹槽14中，緩衝墊122的厚产 可太大。這些緩衝墊122係用來於本發明之導環拆卸二$ 工具100與頂環模組10相合後，在拆卸導環20的過程中 避免傷害到頂環模組1 〇，故其最佳厚度可為例如支持元件 124之長度的一半。緩衝墊122除可使用如第3圈和第4 圖所不之形狀外，即只蓋住支持元件丨24間的部分之導環 20，亦可蓋住其間的全部之導環2〇。以上所述之支持元件 1 24的數目和形狀，以及缓衝墊丨22厚度和形狀僅為舉例 說明’本發明之導環拆卸輔助工具並不在此限。 凊參照第5圖，第5圖為緣示本發明之較佳實施例之 導環拆卸輔助工具之使用方法的流程圖。本發明之較佳實 施例之導環拆卸辅助工具之使用方法可綜合如下： 請繼續參照第1圖至第4圖。先進行步驟210卸下頂 環模紕1 0和導環20的結合體，此步驟21 0係將頂環模組 1 0上之頂環緊固元件1 2鬆開，自機械手臂60之頂環軸50 卸下頂環模組1 〇和導環20的結合體。為了工作方便，可 將這結合體平放在工作檯（未繪示）上並使其中之頂環模組 1 0位於結合體的最上面。然後進行步驟220將導環拆卸輔 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 蠓 訂-------- 經濟部智慧財產局員工消費合作社印制农 534858 Λ7 五、發明說明（ 助工具100上的支持元件 ,. “ 入頂環模組10和導環21 的結合體之位於頂環模相〗Λ ， 、、、且10上的頂環凹槽14。再進行牛 驟230使導環拆卸辅助工I 運仃少 ，丄人祕 人 一 100與頂環模組10和導環？（ 的結合體相合，而形成暮严仏l α 战導％拆卸輔助工具100、頂環模电 10和導環20的結合體。再 ^、、且 仃乂驟240平放導環拆卸輔 助工具100、頂環模組1()和 两補 导衣2 〇的結合體於工作檯 並使其中之導環20位於此έ士人μ 、 於此結合體的最上面。再進行步驟 250以畫圓的方式敲打導環2〇朝μ ^ 守衣20朝上之表面以使導環2〇脫 離頂環模組1 0 ’此時，緩衝势〗9 衡蟄122可以在敲打時保護頂環 模組1 0，使其避免撞到導環抵知結 等衣拆卸辅助工具1 〇〇。然後進行 步驟260分開導環拆卸辅助工呈 助工具100和頂環模組1 〇。接著 便可順利完成更換導環。 綜合以上所述，本發明之一優點為提供一種導環拆卸 輔助工具和其使用方法，本發明可有效地取代習知之更換 導環的方法。由於本發明無須浸泡頂環模組和導環的結合 體於水中或以物件敲打《，故可節省工時，更可避免頂環 模組崩裂，而使頂環模組保持完整無缺。 本發明的另一優點為提供一種導環拆卸輔助工具和其 使用方法。本發明可使報廢的導環成為導 τ衣诉卸輔助工 具。本發明之導環拆卸輔助工具和其使用方法可節省更換 導環的成本，更有利於環保回收β 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公f ) ---* (請先閱讀背面之注意事項再填寫本頁) 訂-------t儀線 經濟部智慧財產局員工消費合作社印製 534858 A7 _21 五、發明說明（） 如熟悉此而技術之人員所暸解的，以上所述僅為本發 明之較佳實施例而已，並非用以限定本發明之申請專利範 圍；凡其它未脫離本發明所揭示之精神下所完成之等效改 變或修飾，均應包含在下述之申請專利範圍内。 (請先閱讀背面之注意事項再填寫本頁) 訂i •線丨 經濟部智慧財產局員工消費合作社印製 本紙張瓦度適用中國國家標準（CNS)A4規格（210 x 297公f )534858 V. Description of the invention (less (for example: 3) fixture support rings are respectively installed on the fixture guide ring fixing holes. In addition, the present invention further installs between these support elements 124: 塾 122. In order to support The element 124 can be deeply inserted into the top ring groove 14 of the top ring module 10 shown in FIG. 2, and the thickness of the cushion pad 122 can be too large. These cushion pads 122 are used in the guide ring of the present invention. After disassembling the two tools 100 and the top ring module 10, avoid damage to the top ring module 10 in the process of disassembling the guide ring 20, so the optimal thickness may be, for example, half of the length of the supporting element 124. The cushion 122 In addition to the shapes shown in Figure 3 and Figure 4, only the guide ring 20 covering only the part between the support element 24 and the entire guide ring 20 between them can be covered. The number and shape of the supporting elements 1 and 24, and the thickness and shape of the cushion pad 22 are merely examples. 'The guide ring removal assisting tool of the present invention is not limited to this. 凊 Refer to FIG. 5, which illustrates the present invention by margin. Flow chart of the method of using the guide ring disassembly assisting tool in the preferred embodiment The method of using the guide ring removal assisting tool of the preferred embodiment of the present invention can be summarized as follows: Please continue to refer to FIG. 1 to FIG. 4. First, proceed to step 210 to remove the combination of the top ring mold 10 and the guide ring 20. In this step 21 0, the top ring fastening element 12 on the top ring module 10 is loosened, and the combination of the top ring module 10 and the guide ring 20 is removed from the top ring shaft 50 of the robot arm 60. For the convenience of work, the assembly can be placed on a workbench (not shown) with the top ring module 10 located at the top of the assembly. Then step 220 is performed to remove the guide ring and the auxiliary paper again. Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the notes on the back before filling out this page) 534858 Λ7 V. Description of the invention (Supporting element on the auxiliary tool 100, “The top ring module 10 and the guide ring 21 are located in the top ring mold phase” Λ, ,,, and 10 on the top ring groove 14. Perform another step 230 to make the guide ring dismantling auxiliary worker I run less, the secret one 100 and the top ring module 10 and The combination of the ring? (And the combination of the ring, and the formation of the Twilight α α α war guide disassembly auxiliary tool 100, the top ring mold 10 and the guide ring 20 combination. Then ^, and step 240 flat guide ring disassembly The combination of the auxiliary tool 100, the top ring module 1 (), and the two supplementary guide garments 20 is placed on the work table, and the guide ring 20 is located at the top of this person μ, and then the step 250 is performed. Tap the guide ring 20 in a circle-shaped manner toward the upper surface of the guard 20 to remove the guide ring 20 from the top ring module 1 0 'At this time, the buffer potential〗 9 Hengji 122 can protect the top when hitting The ring module 10 prevents it from hitting the guide ring and reaching the knot and other clothing removal tools 100. Then, step 260 is performed to separate the guide ring disassembling helper assisting tool 100 and the top ring module 10. The replacement of the guide ring can then be successfully completed. In summary, one advantage of the present invention is to provide a guide ring disassembly assisting tool and a method of using the same. The present invention can effectively replace the conventional method of replacing the guide ring. Since the present invention does not need to soak the combination of the top ring module and the guide ring in the water or knock it with objects, it can save man-hours, prevent the top ring module from cracking, and keep the top ring module intact. Another advantage of the present invention is to provide a guide ring removal assisting tool and a method of using the same. According to the present invention, the scrapped guide ring can be used as a guide tool for unloading clothes. The guide ring disassembling auxiliary tool and the use method of the present invention can save the cost of replacing the guide ring, and is more conducive to environmental protection recycling. Β 10 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 male f) --- * (Please read the notes on the back before filling this page) Order ------- Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 534858 A7 _21 5. Description of the invention () If you are familiar with this technology It is understood that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the scope of patent application for the present invention; all other equivalent changes or modifications made without departing from the spirit disclosed by the present invention are It should be included in the scope of patent application described below. (Please read the notes on the back before filling this page) Order i • Line 丨 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper's wattage applies to China National Standard (CNS) A4 (210 x 297mm f)