TW374251B - Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device - Google Patents

Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device

Info

Publication number
TW374251B
TW374251B TW085114909A TW85114909A TW374251B TW 374251 B TW374251 B TW 374251B TW 085114909 A TW085114909 A TW 085114909A TW 85114909 A TW85114909 A TW 85114909A TW 374251 B TW374251 B TW 374251B
Authority
TW
Taiwan
Prior art keywords
sensor device
chemical sensor
semiconductor chemical
thermocouple
forming
Prior art date
Application number
TW085114909A
Other languages
English (en)
Inventor
Lionel Lescouzeres
Alexandra Lorenzo
Emmanual Scheid
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Application granted granted Critical
Publication of TW374251B publication Critical patent/TW374251B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
TW085114909A 1996-03-04 1996-12-03 Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device TW374251B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9602669A FR2745637B1 (fr) 1996-03-04 1996-03-04 Dispositif capteur chimique a semiconducteur et procede de formation d'un thermocouple pour ce dispositif

Publications (1)

Publication Number Publication Date
TW374251B true TW374251B (en) 1999-11-11

Family

ID=9489803

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085114909A TW374251B (en) 1996-03-04 1996-12-03 Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device

Country Status (7)

Country Link
US (1) US5879630A (zh)
EP (1) EP0794427B1 (zh)
JP (1) JP3937191B2 (zh)
KR (1) KR100429321B1 (zh)
DE (1) DE69724486T2 (zh)
FR (1) FR2745637B1 (zh)
TW (1) TW374251B (zh)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52801A (en) * 1975-06-23 1977-01-06 Masaharu Kusuyama Process for manufacturing body warmer stick, activated charcoal, fuel charcoal, etc.
JPS524501A (en) * 1975-06-28 1977-01-13 Toshio Ichikawa Process for preparing a fuel
US6171880B1 (en) * 1999-06-14 2001-01-09 The United States Of America As Represented By The Secretary Of Commerce Method of manufacture of convective accelerometers
US6331438B1 (en) 1999-11-24 2001-12-18 Iowa State University Research Foundation, Inc. Optical sensors and multisensor arrays containing thin film electroluminescent devices
DE10011562C2 (de) * 2000-03-09 2003-05-22 Daimler Chrysler Ag Gassensor
US6663602B2 (en) * 2000-06-16 2003-12-16 Novo Nordisk A/S Injection device
AU2001289589A1 (en) 2000-09-22 2002-04-02 Novo-Nordisk A/S A medication delivery device
US6627959B1 (en) 2002-04-16 2003-09-30 Boston Microsystems, Inc. P-n junction sensor
US6861758B2 (en) * 2002-08-30 2005-03-01 Intel Corporation Structure and manufacturing process of localized shunt to reduce electromigration failure of copper dual damascene process
DE102004017750B4 (de) * 2004-04-06 2006-03-16 Flechsig, Gerd-Uwe, Dr. rer. nat. Analyse-Array mit heizbaren Elektroden
USRE46363E1 (en) 2004-10-21 2017-04-11 Novo Nordisk A/S Dial-down mechanism for wind-up pen
US20090043264A1 (en) * 2005-04-24 2009-02-12 Novo Nordisk A/S Injection Device
DE102006006347B3 (de) 2006-02-07 2007-08-23 Universität Rostock Sensorvorrichtung für ein elektrochemisches Messgerät und Verfahren zur Durchführung elektrochemischer Messungen
JP5183499B2 (ja) * 2006-03-10 2013-04-17 ノボ・ノルデイスク・エー／エス 注射装置
JP5062768B2 (ja) * 2006-03-10 2012-10-31 ノボ・ノルデイスク・エー／エス 注射装置および該装置のカートリッジを交換する方法
CN101405044B (zh) 2006-03-20 2013-10-16 诺沃-诺迪斯克有限公司 注射针位置的测定
DE602007004972D1 (de) 2006-05-16 2010-04-08 Novo Nordisk As Getriebemechanismus für ein injektionsgerät
AU2007253481B2 (en) * 2006-05-18 2013-01-17 Novo Nordisk A/S An injection device with mode locking means
EP2073871B1 (en) * 2006-09-29 2013-03-20 Novo Nordisk A/S An injection device with electronic detecting means
US7691329B2 (en) * 2006-11-16 2010-04-06 General Electric Company Methods for detecting contaminants in a liquid
EP2125081B1 (en) * 2007-03-23 2017-12-20 Novo Nordisk A/S An injection device comprising a locking nut
EP2190506B1 (en) 2007-08-17 2011-08-17 Novo Nordisk A/S Medical device with value sensor
ES2385630T3 (es) * 2007-12-31 2012-07-27 Novo Nordisk A/S Dispositivo de inyección controlado electrónicamente
DE102008049726B4 (de) * 2008-09-30 2012-02-09 Advanced Micro Devices, Inc. Gestapelte Chipkonfiguration mit stromgespeistem Wärmeübertragungssystem und Verfahren zum Steuern der Temperatur in einem Halbleiterbauelement
US8114677B2 (en) * 2008-10-01 2012-02-14 Babcock & Wilcox Technical Services Y-12, Llc. Passive in-situ chemical sensor
CN103998077B (zh) 2011-12-29 2017-05-31 诺沃—诺迪斯克有限公司 具有向上拨动/向下拨动定量机构的基于扭力弹簧的卷紧自动注射器笔
GB2572388B (en) 2018-03-28 2020-04-22 Suresensors Ltd Integrated temperature control within a diagnostic test sensor

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH521649A (de) * 1970-07-31 1972-04-15 Cerberus Ag Feuermeldeeinrichtung
NL7111653A (zh) * 1971-08-25 1973-02-27
US3932246A (en) * 1973-08-31 1976-01-13 Ford Motor Company Gas sensor and method of manufacture
US4141955A (en) * 1977-10-25 1979-02-27 Obiaya Joseph O Combustible concentration analyzer
US4313338A (en) * 1978-08-18 1982-02-02 Matsushita Electric Industrial Co., Ltd. Gas sensing device
DE2855012A1 (de) * 1978-12-20 1980-06-26 Bosch Gmbh Robert Elektrochemischer messfuehler fuer die bestimmung des sauerstoffgehaltes in gasen, insbesondere in abgasen
US4325912A (en) * 1980-07-01 1982-04-20 Beckman Instruments, Inc. Carbon monoxide detection apparatus
US4358951A (en) * 1981-02-17 1982-11-16 General Motors Corporation Zinc oxide thin film sensor having improved reducing gas sensitivity
JPS5990040A (ja) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd 一酸化炭素ガス検知器
JPS59143947A (ja) * 1983-02-07 1984-08-17 Matsushita Electric Ind Co Ltd ガス漏れ警報器
US5140393A (en) * 1985-10-08 1992-08-18 Sharp Kabushiki Kaisha Sensor device
JP2521783B2 (ja) * 1987-09-28 1996-08-07 三菱電機株式会社 半導体装置およびその製造方法
US5238729A (en) * 1991-04-05 1993-08-24 Minnesota Mining And Manufacturing Company Sensors based on nanosstructured composite films
GB2261321B (en) * 1991-11-06 1995-10-11 Motorola Inc Power semiconductor device with temperature sensor
US5362975A (en) * 1992-09-02 1994-11-08 Kobe Steel Usa Diamond-based chemical sensors
DE4497477T1 (de) * 1993-10-05 1995-10-19 Mitsubishi Materials Corp Gassensor und Gasunterscheidungsverfahren
US5600174A (en) * 1994-10-11 1997-02-04 The Board Of Trustees Of The Leeland Stanford Junior University Suspended single crystal silicon structures and method of making same

Also Published As

Publication number Publication date
JP3937191B2 (ja) 2007-06-27
US5879630A (en) 1999-03-09
DE69724486T2 (de) 2004-04-01
JPH102872A (ja) 1998-01-06
DE69724486D1 (de) 2003-10-09
KR970067923A (ko) 1997-10-13
FR2745637A1 (fr) 1997-09-05
EP0794427B1 (en) 2003-09-03
KR100429321B1 (ko) 2004-10-14
FR2745637B1 (fr) 1998-05-22
EP0794427A1 (en) 1997-09-10

Similar Documents

Publication Publication Date Title
TW374251B (en) Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device
EP0964231A3 (en) Infrared thermometer
DE69923704D1 (en) Sensor fur die differentialthermoanalyse
DE69630501D1 (de) Vorrichtung zur Bearbeitung von Einzelhalbleiterwafern mit In-situ-Temperaturregelung
FI973802A0 (fi) Sensorijärjestelmä analyyttien havaitsemiseksi fluideissa
ATE217707T1 (de) Temperatursensoren und verfahren zur messung der temperatur eines werkstücks
DE19681502T1 (de) Automatisierte Kalibrierung von Temperatursensoren bei schneller thermischer Behandlung
DE19880398T1 (de) Substrattemperatur-Meßvorrichtung, Substrattemperatur-Meßverfahren Substraterwärmungsverfahren und Wärmebehandlungsvorrichtung
FR2778984B1 (fr) Capteur de temperature de type thermistance
FR2659445B1 (fr) Element sensible a la temperature, et sonde de mesure comportant un tel element.
SG44985A1 (en) Temperature sensing device semiconductor device having temperature sensing device installed therein and auto-focusing system using this semiconductor device
DE3883151D1 (de) Pyrometrisches temperaturmessgeraet.
DE69004132D1 (de) Wärmeempfindliche Übertragungsschicht.
PL329848A1 (en) Sensing element for determining thermal conductivity and/or temperature of liquid, gaseous or semi-solid substances and method of excitinmg such sensing element
FR2783051B1 (fr) Film de detection d'une espece chimique, capteur chimique et procede de fabrication de ceux-ci
DE69020004D1 (de) Wärmeempfindliche Übertragungsschicht.
PL338806A1 (en) Method of and apparatus for generating a signal dependent on thickness of liquid layer on a surface
ES2182375T3 (es) Aparato de panel termoelectrico.
FR2732768B1 (fr) Capteur chimique haute temperature
KR970045036U (ko) 온도센서 검사장치
EP0348243A3 (en) Calibration of thermal conductivity and specific heat devices
FR2775537B1 (fr) Dispositif de thermistance, methode de fabrication d'un tel dispositif et capteur de temperature
KR950001966A (ko) 웨이퍼의 온도 측정방법 및 그 장치
KR850002083A (ko) 열 전사기(熱轉寫機)에 있어서의 가열부재의 온도제어 방법과 온도제어장치
IT1128487B (it) Dispositivo e procedimento per rivelare la presenza di una sostanza su una superficie liquida particolarmente di inquinamenti oleosi su specchi d acqua