TW367557B - Rinsing method and device by microwave excitation - Google Patents

Rinsing method and device by microwave excitation

Info

Publication number
TW367557B
TW367557B TW086116656A TW86116656A TW367557B TW 367557 B TW367557 B TW 367557B TW 086116656 A TW086116656 A TW 086116656A TW 86116656 A TW86116656 A TW 86116656A TW 367557 B TW367557 B TW 367557B
Authority
TW
Taiwan
Prior art keywords
rinsing
microwave
microwave excitation
rinsing method
chemical solution
Prior art date
Application number
TW086116656A
Other languages
English (en)
Inventor
Hidemitsu Aoki
Original Assignee
Elpida Memory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elpida Memory Inc filed Critical Elpida Memory Inc
Application granted granted Critical
Publication of TW367557B publication Critical patent/TW367557B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
TW086116656A 1996-11-08 1997-11-07 Rinsing method and device by microwave excitation TW367557B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8296319A JP3055475B2 (ja) 1996-11-08 1996-11-08 マイクロ波励起の洗浄方法およびその装置

Publications (1)

Publication Number Publication Date
TW367557B true TW367557B (en) 1999-08-21

Family

ID=17832013

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086116656A TW367557B (en) 1996-11-08 1997-11-07 Rinsing method and device by microwave excitation

Country Status (5)

Country Link
US (1) US6041799A (zh)
JP (1) JP3055475B2 (zh)
KR (1) KR100330676B1 (zh)
CN (1) CN1176759C (zh)
TW (1) TW367557B (zh)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6714300B1 (en) 1998-09-28 2004-03-30 Therma-Wave, Inc. Optical inspection equipment for semiconductor wafers with precleaning
KR20010027577A (ko) * 1999-09-14 2001-04-06 김영환 반도체 현상장비의 린스액가열장치
US6689284B1 (en) 1999-09-29 2004-02-10 Kabushiki Kaisha Toshiba Surface treating method
US6861619B1 (en) 2000-02-07 2005-03-01 Therma-Wave, Inc. Method and apparatus for preparing semiconductor wafers for measurement
US6261853B1 (en) 2000-02-07 2001-07-17 Therma-Wave, Inc. Method and apparatus for preparing semiconductor wafers for measurement
KR100378624B1 (ko) * 2000-07-13 2003-04-08 (주)보부하이테크 마이크로파를 이용한 초순수 가열장치
KR20030021581A (ko) * 2001-09-06 2003-03-15 씨엘디 주식회사 세정 장치 및 그를 이용한 세정 방법
US6598314B1 (en) * 2002-01-04 2003-07-29 Taiwan Semiconductor Manufacturing Company Method of drying wafers
US8257781B1 (en) * 2002-06-28 2012-09-04 Novellus Systems, Inc. Electroless plating-liquid system
TW595520U (en) * 2003-06-03 2004-06-21 Hon Hai Prec Ind Co Ltd Cleaning machine
WO2004112093A2 (en) * 2003-06-06 2004-12-23 P.C.T. Systems, Inc. Method and apparatus to process substrates with megasonic energy
KR100644072B1 (ko) * 2003-11-10 2006-11-10 동부일렉트로닉스 주식회사 웨이퍼 세척장치
JP4877897B2 (ja) * 2004-07-21 2012-02-15 シルトロニック・ジャパン株式会社 シリコンウェハの不純物の除去方法及び分析方法
JP4915090B2 (ja) * 2005-12-20 2012-04-11 ソニー株式会社 薬液処理装置
NO324488B1 (no) * 2006-03-13 2007-10-29 Rec Scanwafer As Metode og anordning for a separere wafere fra en stabel med wafere
US20080060682A1 (en) * 2006-09-13 2008-03-13 Taiwan Semiconductor Manufacturing Co., Ltd. High temperature spm treatment for photoresist stripping
SG151113A1 (en) * 2007-09-10 2009-04-30 Turbine Overhaul Services Pte Microwave assisted post-fpi cleaning method
SG165202A1 (en) * 2009-03-25 2010-10-28 United Technologies Corp Method and apparatus for cleaning a component using microwave radiation
US9592539B2 (en) * 2010-01-05 2017-03-14 Stratasys, Inc. Support cleaning system
WO2014071552A1 (zh) * 2012-11-06 2014-05-15 中国科学院微电子研究所 一种微波激发的超临界干燥装置及方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1063681A (en) * 1975-04-30 1979-10-02 Shigeru Kusunoki Microwave heating apparatus with movable waveguide and support
US4629849A (en) * 1984-06-28 1986-12-16 Ngk Insulators Ltd. Microwave heating device having a rotary reflector means in a heating chamber
JP2555034B2 (ja) * 1986-09-17 1996-11-20 株式会社日立製作所 処理装置
JPH06103678B2 (ja) * 1987-11-28 1994-12-14 株式会社東芝 半導体基板の加工方法
JPH01316935A (ja) * 1988-06-17 1989-12-21 Hitachi Ltd 洗浄装置
US5049816A (en) * 1990-05-31 1991-09-17 Texas Instruments Incorporated Semiconductor substrate minority carrier lifetime measurements
US5068030A (en) * 1990-11-09 1991-11-26 Oxford Science Industrial Co., Ltd. Water filtering sterilizing and heating apparatus
JPH04357836A (ja) * 1991-06-04 1992-12-10 Matsushita Electric Ind Co Ltd 半導体ウエハー洗浄装置
JP3237871B2 (ja) * 1991-07-02 2001-12-10 忠弘 大見 純水製造方法及び装置並びに洗浄方法
US5490882A (en) * 1992-11-30 1996-02-13 Massachusetts Institute Of Technology Process for removing loose powder particles from interior passages of a body
DE69306542T2 (de) * 1993-01-08 1997-05-15 Nec Corp Verfahren und Vorrichtung zur Nassbehandlung von festen Oberflächen
US5427622A (en) * 1993-02-12 1995-06-27 International Business Machines Corporation Method for uniform cleaning of wafers using megasonic energy
JP3550171B2 (ja) * 1993-10-14 2004-08-04 株式会社フジマック 衝突熱伝達を利用した加熱処理装置

Also Published As

Publication number Publication date
JP3055475B2 (ja) 2000-06-26
US6041799A (en) 2000-03-28
CN1183322A (zh) 1998-06-03
KR100330676B1 (ko) 2002-06-20
JPH10137704A (ja) 1998-05-26
CN1176759C (zh) 2004-11-24
KR19980042232A (ko) 1998-08-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees