TW360894B - Power-microscopy-probe - Google Patents

Power-microscopy-probe

Info

Publication number
TW360894B
TW360894B TW086113010A TW86113010A TW360894B TW 360894 B TW360894 B TW 360894B TW 086113010 A TW086113010 A TW 086113010A TW 86113010 A TW86113010 A TW 86113010A TW 360894 B TW360894 B TW 360894B
Authority
TW
Taiwan
Prior art keywords
probe
microscopy
power
bar
spring
Prior art date
Application number
TW086113010A
Other languages
English (en)
Chinese (zh)
Inventor
Ewald Guenther
Rainer Leuschner
Olaf Ohlsson
Original Assignee
Siemens Ag
Nanosensors Dr Olaf Wolter Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Nanosensors Dr Olaf Wolter Gmbh filed Critical Siemens Ag
Application granted granted Critical
Publication of TW360894B publication Critical patent/TW360894B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/40—Conductive probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
TW086113010A 1996-09-23 1997-09-09 Power-microscopy-probe TW360894B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19638977A DE19638977A1 (de) 1996-09-23 1996-09-23 Kraftmikroskopiesonde

Publications (1)

Publication Number Publication Date
TW360894B true TW360894B (en) 1999-06-11

Family

ID=7806603

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086113010A TW360894B (en) 1996-09-23 1997-09-09 Power-microscopy-probe

Country Status (3)

Country Link
DE (1) DE19638977A1 (fr)
TW (1) TW360894B (fr)
WO (1) WO1998013663A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1244817C (zh) * 1998-11-06 2006-03-08 特瑞克股份有限公司 带悬臂与屏蔽的静电力显微镜以及确定静电力、膜厚度的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0483104A (ja) * 1990-07-26 1992-03-17 Olympus Optical Co Ltd 走査型トンネル顕微鏡
JP2741629B2 (ja) * 1990-10-09 1998-04-22 キヤノン株式会社 カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置
US5444244A (en) * 1993-06-03 1995-08-22 Park Scientific Instruments Corporation Piezoresistive cantilever with integral tip for scanning probe microscope
US5450746A (en) * 1993-10-12 1995-09-19 The University Of North Carolina Constant force stylus profiling apparatus and method
JPH0850872A (ja) * 1994-08-08 1996-02-20 Canon Inc 試料表面の観察方法、原子間力顕微鏡、微細加工方法および微細加工装置
JP3576644B2 (ja) * 1995-06-19 2004-10-13 キヤノン株式会社 情報記録装置のプローブ及び記録媒体、並びにこれらを用いた情報記録方法

Also Published As

Publication number Publication date
DE19638977A1 (de) 1998-03-26
WO1998013663A1 (fr) 1998-04-02

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