TW357396B - Exposure device - Google Patents
Exposure deviceInfo
- Publication number
- TW357396B TW357396B TW086117483A TW86117483A TW357396B TW 357396 B TW357396 B TW 357396B TW 086117483 A TW086117483 A TW 086117483A TW 86117483 A TW86117483 A TW 86117483A TW 357396 B TW357396 B TW 357396B
- Authority
- TW
- Taiwan
- Prior art keywords
- location
- symbol
- base
- plate
- detection
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9017647A JPH10208990A (ja) | 1997-01-17 | 1997-01-17 | 露光装置 |
JP1764897A JP4029134B2 (ja) | 1997-01-17 | 1997-01-17 | 投影露光装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW357396B true TW357396B (en) | 1999-05-01 |
Family
ID=26354206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086117483A TW357396B (en) | 1997-01-17 | 1997-11-22 | Exposure device |
Country Status (3)
Country | Link |
---|---|
US (1) | US5978069A (zh) |
KR (1) | KR19980070407A (zh) |
TW (1) | TW357396B (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3466893B2 (ja) * | 1997-11-10 | 2003-11-17 | キヤノン株式会社 | 位置合わせ装置及びそれを用いた投影露光装置 |
WO1999034416A1 (fr) * | 1997-12-26 | 1999-07-08 | Nikon Corporation | Appareil d'exposition par projection et procede d'exposition |
KR20010058688A (ko) * | 1999-12-30 | 2001-07-06 | 황인길 | 스테퍼의 렌즈 배율 자동 조정 장치 |
EP1182509B1 (en) * | 2000-08-24 | 2009-04-08 | ASML Netherlands B.V. | Lithographic apparatus, calibration method thereof and device manufacturing method |
US7289212B2 (en) * | 2000-08-24 | 2007-10-30 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufacturing thereby |
US7561270B2 (en) * | 2000-08-24 | 2009-07-14 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby |
TW527526B (en) | 2000-08-24 | 2003-04-11 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
US6768539B2 (en) * | 2001-01-15 | 2004-07-27 | Asml Netherlands B.V. | Lithographic apparatus |
US6525805B2 (en) * | 2001-05-14 | 2003-02-25 | Ultratech Stepper, Inc. | Backside alignment system and method |
JP4164414B2 (ja) * | 2003-06-19 | 2008-10-15 | キヤノン株式会社 | ステージ装置 |
DE102008004762A1 (de) * | 2008-01-16 | 2009-07-30 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage für die Mikrolithographie mit einer Messeinrichtung |
NL2009196A (en) * | 2011-08-25 | 2013-02-27 | Asml Netherlands Bv | Position measurement system, lithographic apparatus and device manufacturing method. |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4814830A (en) * | 1985-04-01 | 1989-03-21 | Canon Kabushiki Kaisha | Flat panel display device and manufacturing of the same |
US4943733A (en) * | 1987-05-15 | 1990-07-24 | Nikon Corporation | Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment |
US5734478A (en) * | 1988-10-12 | 1998-03-31 | Nikon Corporation | Projection exposure apparatus |
US5486896A (en) * | 1993-02-19 | 1996-01-23 | Nikon Corporation | Exposure apparatus |
JP3412704B2 (ja) * | 1993-02-26 | 2003-06-03 | 株式会社ニコン | 投影露光方法及び装置、並びに露光装置 |
-
1997
- 1997-11-22 TW TW086117483A patent/TW357396B/zh not_active IP Right Cessation
-
1998
- 1998-01-09 KR KR1019980000329A patent/KR19980070407A/ko not_active Application Discontinuation
- 1998-01-20 US US09/009,365 patent/US5978069A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR19980070407A (ko) | 1998-10-26 |
US5978069A (en) | 1999-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |