TW349231B - Substrate cleaning device and substrate cleaning method - Google Patents

Substrate cleaning device and substrate cleaning method

Info

Publication number
TW349231B
TW349231B TW085114510A TW85114510A TW349231B TW 349231 B TW349231 B TW 349231B TW 085114510 A TW085114510 A TW 085114510A TW 85114510 A TW85114510 A TW 85114510A TW 349231 B TW349231 B TW 349231B
Authority
TW
Taiwan
Prior art keywords
substrate
substrates
washing
cassette
solution
Prior art date
Application number
TW085114510A
Other languages
Chinese (zh)
Inventor
Naoki Shindo
Takayuki Toshima
Shigenori Kitahara
Kenji Yokomizo
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1982295A external-priority patent/JPH08195368A/en
Priority claimed from JP7019821A external-priority patent/JPH08195371A/en
Priority claimed from JP1982095A external-priority patent/JPH08195431A/en
Priority claimed from JP7019823A external-priority patent/JPH08195372A/en
Priority claimed from JP7019824A external-priority patent/JPH08195373A/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of TW349231B publication Critical patent/TW349231B/en

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

A substrate washing apparatus for removing, from a cassette, a plurality of substrates which are arranged at a substantially equal pitch interval in the cassette, and conveying the substrates into a processing bath to wash the substrates in the processing bath at once, characterized in comprising: an intermediate holding portion in which holding grooves are formed so as to hold the substrates at a pitch interval narrower an arrangement pitch interval of the substrates in the cassette; means for separating the substrates in the cassette by relatively moving the substrates or the cassette; a processing tank for receiving a substrate and cleaning the substrate with a cleaning solution and then washing the substrate with a washing solution; a washing solution supply portion for supplying the washing solution to the processing tank; a holder transport mechanism for transporting the holder for holding the substrate to the processing tank and immersing the substrate together with the holder into the cleaning solution; after cleaning the substrate with a cleaning solution, the washing solution being introduced into the processing tank from the washing tank supply portion, and the cleaning solution being displaced with the washing solution in the processing tank.
TW085114510A 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method TW349231B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP1982295A JPH08195368A (en) 1995-01-12 1995-01-12 Cleaning method and device, and transfer device
JP7019821A JPH08195371A (en) 1995-01-12 1995-01-12 Cleaning device and method
JP1982095A JPH08195431A (en) 1995-01-12 1995-01-12 Substrate holding implement and cleaning apparatus
JP7019823A JPH08195372A (en) 1995-01-12 1995-01-12 Cleaning device and its method
JP7019824A JPH08195373A (en) 1995-01-12 1995-01-12 Cleaning device and its method

Publications (1)

Publication Number Publication Date
TW349231B true TW349231B (en) 1999-01-01

Family

ID=57939821

Family Applications (4)

Application Number Title Priority Date Filing Date
TW085114509A TW348265B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates
TW085114511A TW349232B (en) 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method
TW085114510A TW349231B (en) 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method
TW085100348A TW348264B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates

Family Applications Before (2)

Application Number Title Priority Date Filing Date
TW085114509A TW348265B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates
TW085114511A TW349232B (en) 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW085100348A TW348264B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates

Country Status (1)

Country Link
TW (4) TW348265B (en)

Also Published As

Publication number Publication date
TW349232B (en) 1999-01-01
TW348264B (en) 1998-12-21
TW348265B (en) 1998-12-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees