TW349231B - Substrate cleaning device and substrate cleaning method - Google Patents
Substrate cleaning device and substrate cleaning methodInfo
- Publication number
- TW349231B TW349231B TW085114510A TW85114510A TW349231B TW 349231 B TW349231 B TW 349231B TW 085114510 A TW085114510 A TW 085114510A TW 85114510 A TW85114510 A TW 85114510A TW 349231 B TW349231 B TW 349231B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- substrates
- washing
- cassette
- solution
- Prior art date
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
A substrate washing apparatus for removing, from a cassette, a plurality of substrates which are arranged at a substantially equal pitch interval in the cassette, and conveying the substrates into a processing bath to wash the substrates in the processing bath at once, characterized in comprising: an intermediate holding portion in which holding grooves are formed so as to hold the substrates at a pitch interval narrower an arrangement pitch interval of the substrates in the cassette; means for separating the substrates in the cassette by relatively moving the substrates or the cassette; a processing tank for receiving a substrate and cleaning the substrate with a cleaning solution and then washing the substrate with a washing solution; a washing solution supply portion for supplying the washing solution to the processing tank; a holder transport mechanism for transporting the holder for holding the substrate to the processing tank and immersing the substrate together with the holder into the cleaning solution; after cleaning the substrate with a cleaning solution, the washing solution being introduced into the processing tank from the washing tank supply portion, and the cleaning solution being displaced with the washing solution in the processing tank.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1982295A JPH08195368A (en) | 1995-01-12 | 1995-01-12 | Cleaning method and device, and transfer device |
JP7019821A JPH08195371A (en) | 1995-01-12 | 1995-01-12 | Cleaning device and method |
JP1982095A JPH08195431A (en) | 1995-01-12 | 1995-01-12 | Substrate holding implement and cleaning apparatus |
JP7019823A JPH08195372A (en) | 1995-01-12 | 1995-01-12 | Cleaning device and its method |
JP7019824A JPH08195373A (en) | 1995-01-12 | 1995-01-12 | Cleaning device and its method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW349231B true TW349231B (en) | 1999-01-01 |
Family
ID=57939821
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085114509A TW348265B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
TW085114511A TW349232B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
TW085114510A TW349231B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
TW085100348A TW348264B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085114509A TW348265B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
TW085114511A TW349232B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085100348A TW348264B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
Country Status (1)
Country | Link |
---|---|
TW (4) | TW348265B (en) |
-
1996
- 1996-01-12 TW TW085114509A patent/TW348265B/en not_active IP Right Cessation
- 1996-01-12 TW TW085114511A patent/TW349232B/en not_active IP Right Cessation
- 1996-01-12 TW TW085114510A patent/TW349231B/en not_active IP Right Cessation
- 1996-01-12 TW TW085100348A patent/TW348264B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW349232B (en) | 1999-01-01 |
TW348264B (en) | 1998-12-21 |
TW348265B (en) | 1998-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |