TW349232B - Substrate cleaning device and substrate cleaning method - Google Patents

Substrate cleaning device and substrate cleaning method

Info

Publication number
TW349232B
TW349232B TW085114511A TW85114511A TW349232B TW 349232 B TW349232 B TW 349232B TW 085114511 A TW085114511 A TW 085114511A TW 85114511 A TW85114511 A TW 85114511A TW 349232 B TW349232 B TW 349232B
Authority
TW
Taiwan
Prior art keywords
washing
solution
processing tank
cleaning
substrate
Prior art date
Application number
TW085114511A
Other languages
Chinese (zh)
Inventor
Naoki Shindo
Takayuki Toshima
Shigenori Kitahara
Kenji Yokomizo
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7019824A external-priority patent/JPH08195373A/en
Priority claimed from JP7019821A external-priority patent/JPH08195371A/en
Priority claimed from JP1982295A external-priority patent/JPH08195368A/en
Priority claimed from JP7019823A external-priority patent/JPH08195372A/en
Priority claimed from JP1982095A external-priority patent/JPH08195431A/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of TW349232B publication Critical patent/TW349232B/en

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

A substrate washing apparatus characterized in comprising: a holder for arranging a plurality of substrates at a substantially equal pitch interval and holding them; a processing tank for cleaning the substrates held by the holder with a cleaning solution and then washing the substrates with a washing solution; a cleaning solution supply portion for supplying the cleaning solution to the processing tank; a washing solution blowing portion installed on the lower side of the substrate in the processing tank and formed with a plurality of blowing holes along the substrate for blowing the washing solution to the processing tank; after cleaning the substrate with a cleaning solution, the washing solution being introduced into the processing tank from the washing tank supply portion, and the cleaning solution being displaced with the washing solution in the processing tank.
TW085114511A 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method TW349232B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP7019824A JPH08195373A (en) 1995-01-12 1995-01-12 Cleaning device and its method
JP7019821A JPH08195371A (en) 1995-01-12 1995-01-12 Cleaning device and method
JP1982295A JPH08195368A (en) 1995-01-12 1995-01-12 Cleaning method and device, and transfer device
JP7019823A JPH08195372A (en) 1995-01-12 1995-01-12 Cleaning device and its method
JP1982095A JPH08195431A (en) 1995-01-12 1995-01-12 Substrate holding implement and cleaning apparatus

Publications (1)

Publication Number Publication Date
TW349232B true TW349232B (en) 1999-01-01

Family

ID=57939821

Family Applications (4)

Application Number Title Priority Date Filing Date
TW085114510A TW349231B (en) 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method
TW085114509A TW348265B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates
TW085100348A TW348264B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates
TW085114511A TW349232B (en) 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method

Family Applications Before (3)

Application Number Title Priority Date Filing Date
TW085114510A TW349231B (en) 1995-01-12 1996-01-12 Substrate cleaning device and substrate cleaning method
TW085114509A TW348265B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates
TW085100348A TW348264B (en) 1995-01-12 1996-01-12 Apparatus and method for washing substrates

Country Status (1)

Country Link
TW (4) TW349231B (en)

Also Published As

Publication number Publication date
TW348265B (en) 1998-12-21
TW349231B (en) 1999-01-01
TW348264B (en) 1998-12-21

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Legal Events

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