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Application filed by Tokyo Uei Lih Ke Chuanq KkfiledCriticalTokyo Uei Lih Ke Chuanq Kk
Priority to TW086111457ApriorityCriticalpatent/TW344105B/en
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Publication of TW344105BpublicationCriticalpatent/TW344105B/en
A liquid treatment method comprising the following steps: supplying a treatment liquid from a treatment liquid supply device, transporting the treatment liquid to contact with an object to be processed and perform a specified treatment process thereto, allowing a cleaning liquid to be transported to and contact with the object to be processed thereby completing a washing process; in which after the specified treatment process, the cleaning liquid is supplied by the treatment liquid supply device to remove the treatment liquid remained in the treatment liquid supply device, and the cleaning liquid is transported to and contacts with the object to be processed thereby carrying out the washing process.
TW086111457A1997-08-111997-08-11Liquid treatment method and apparatus
TW344105B
(en)