TW348264B - Apparatus and method for washing substrates - Google Patents
Apparatus and method for washing substratesInfo
- Publication number
- TW348264B TW348264B TW085100348A TW85100348A TW348264B TW 348264 B TW348264 B TW 348264B TW 085100348 A TW085100348 A TW 085100348A TW 85100348 A TW85100348 A TW 85100348A TW 348264 B TW348264 B TW 348264B
- Authority
- TW
- Taiwan
- Prior art keywords
- path
- bath
- washing
- rinse solution
- valve
- Prior art date
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
A substrate washing apparatus including a bath, a washing solution supply source, a first path for allowing the washing solution overflowing from the bath, a rinse solution supply source, a second path for passing the rinse solution, a common path communicating with the first and second paths and also with a bottom of the bath, a first valve, a second valve, a discharge path branched from the first path, and a control section, in which the first valve includes a first body for opening/closing the first path, a third path arranged parallel to the first path and having a diameter smaller than a diameter of the first path, and a second body for opening/closing the third path, so that the first body is opened and the second body is closed, to allow the washing solution to flow into the bath, and on the other hand, the first body is closed, the second body is opened, to allow the rinse solution to flow into the bath, and the washing solution remaining in the first and third paths is discharged together with the rinse solution through the discharge path.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1982095A JPH08195431A (en) | 1995-01-12 | 1995-01-12 | Substrate holding implement and cleaning apparatus |
JP7019823A JPH08195372A (en) | 1995-01-12 | 1995-01-12 | Cleaning device and its method |
JP7019821A JPH08195371A (en) | 1995-01-12 | 1995-01-12 | Cleaning device and method |
JP1982295A JPH08195368A (en) | 1995-01-12 | 1995-01-12 | Cleaning method and device, and transfer device |
JP7019824A JPH08195373A (en) | 1995-01-12 | 1995-01-12 | Cleaning device and its method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW348264B true TW348264B (en) | 1998-12-21 |
Family
ID=57939821
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085114510A TW349231B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
TW085114509A TW348265B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
TW085100348A TW348264B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
TW085114511A TW349232B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085114510A TW349231B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
TW085114509A TW348265B (en) | 1995-01-12 | 1996-01-12 | Apparatus and method for washing substrates |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085114511A TW349232B (en) | 1995-01-12 | 1996-01-12 | Substrate cleaning device and substrate cleaning method |
Country Status (1)
Country | Link |
---|---|
TW (4) | TW349231B (en) |
-
1996
- 1996-01-12 TW TW085114510A patent/TW349231B/en not_active IP Right Cessation
- 1996-01-12 TW TW085114509A patent/TW348265B/en not_active IP Right Cessation
- 1996-01-12 TW TW085100348A patent/TW348264B/en not_active IP Right Cessation
- 1996-01-12 TW TW085114511A patent/TW349232B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW348265B (en) | 1998-12-21 |
TW349232B (en) | 1999-01-01 |
TW349231B (en) | 1999-01-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |