TW340957B - Plasma processor and gas release device - Google Patents

Plasma processor and gas release device

Info

Publication number
TW340957B
TW340957B TW086100949A TW86100949A TW340957B TW 340957 B TW340957 B TW 340957B TW 086100949 A TW086100949 A TW 086100949A TW 86100949 A TW86100949 A TW 86100949A TW 340957 B TW340957 B TW 340957B
Authority
TW
Taiwan
Prior art keywords
release device
electrode
carrier
gas release
plasma processor
Prior art date
Application number
TW086100949A
Other languages
English (en)
Inventor
Setsu Suzuki
Toku Tokumasu
Kazuo Maeda
Junichi Aoki
Original Assignee
Canon Hanbai Kk
Hadotai Kotei Kenkyusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8016502A external-priority patent/JP2978974B2/ja
Priority claimed from JP8016503A external-priority patent/JP2975885B2/ja
Application filed by Canon Hanbai Kk, Hadotai Kotei Kenkyusho Kk filed Critical Canon Hanbai Kk
Application granted granted Critical
Publication of TW340957B publication Critical patent/TW340957B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
TW086100949A 1996-02-01 1997-01-28 Plasma processor and gas release device TW340957B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8016502A JP2978974B2 (ja) 1996-02-01 1996-02-01 プラズマ処理装置
JP8016503A JP2975885B2 (ja) 1996-02-01 1996-02-01 ガス分散器及びプラズマ処理装置

Publications (1)

Publication Number Publication Date
TW340957B true TW340957B (en) 1998-09-21

Family

ID=26352850

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086100949A TW340957B (en) 1996-02-01 1997-01-28 Plasma processor and gas release device

Country Status (4)

Country Link
US (1) US5834730A (zh)
EP (1) EP0788137A3 (zh)
KR (1) KR100229181B1 (zh)
TW (1) TW340957B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI471929B (zh) * 2007-07-11 2015-02-01 Sosul Co Ltd 電漿蝕刻設備與蝕刻晶圓之方法

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3396399B2 (ja) * 1997-06-26 2003-04-14 シャープ株式会社 電子デバイス製造装置
US6139678A (en) 1997-11-20 2000-10-31 Trusi Technologies, Llc Plasma processing methods and apparatus
US6287976B1 (en) * 1999-05-19 2001-09-11 Tru-Si Technologies, Inc. Plasma processing methods and apparatus
KR100416308B1 (ko) * 1999-05-26 2004-01-31 동경 엘렉트론 주식회사 플라즈마 처리 장치
US6123775A (en) * 1999-06-30 2000-09-26 Lam Research Corporation Reaction chamber component having improved temperature uniformity
US6576062B2 (en) * 2000-01-06 2003-06-10 Tokyo Electron Limited Film forming apparatus and film forming method
US6531069B1 (en) 2000-06-22 2003-03-11 International Business Machines Corporation Reactive Ion Etching chamber design for flip chip interconnections
US6749764B1 (en) * 2000-11-14 2004-06-15 Tru-Si Technologies, Inc. Plasma processing comprising three rotational motions of an article being processed
DE10153463A1 (de) * 2001-10-30 2003-05-15 Aixtron Ag Verfahren und Vorrichtung zum Abscheiden insbesondere kristalliner Schichten auf insbesondere kristallinen Substraten
JP3940095B2 (ja) * 2003-05-08 2007-07-04 忠弘 大見 基板処理装置
JP2005174974A (ja) * 2003-12-08 2005-06-30 Matsushita Electric Ind Co Ltd 積層圧電体部品の製造方法
KR100610019B1 (ko) * 2005-01-11 2006-08-08 삼성전자주식회사 플라즈마 분배장치 및 이를 구비하는 건식 스트리핑 장치
JP4584722B2 (ja) * 2005-01-13 2010-11-24 シャープ株式会社 プラズマ処理装置および同装置により製造された半導体素子
JP2006196681A (ja) * 2005-01-13 2006-07-27 Sharp Corp プラズマ処理装置および同装置により製造された半導体素子
US8058585B2 (en) * 2006-03-13 2011-11-15 Tokyo Electron Limited Plasma processing method, plasma processing apparatus and storage medium
US20070261726A1 (en) * 2006-05-11 2007-11-15 Rye Jason A Multiple workpiece processor
JP4971078B2 (ja) * 2007-08-30 2012-07-11 東京応化工業株式会社 表面処理装置
US20110000432A1 (en) * 2008-06-12 2011-01-06 Atomic Energy Council - Institute Of Nuclear Energy Research One atmospheric pressure non-thermal plasma reactor with dual discharging-electrode structure
US8142521B2 (en) * 2010-03-29 2012-03-27 Stion Corporation Large scale MOCVD system for thin film photovoltaic devices
WO2019212059A1 (ja) * 2018-05-02 2019-11-07 東京エレクトロン株式会社 上部電極およびプラズマ処理装置
KR102675856B1 (ko) * 2020-01-20 2024-06-17 에이에스엠 아이피 홀딩 비.브이. 박막 형성 방법 및 박막 표면 개질 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198822A (ja) * 1984-03-23 1985-10-08 Anelva Corp ドライエツチング装置
US4750980A (en) * 1986-11-07 1988-06-14 Texas Instruments Incorporated Process for etching tin oxide
US5091217A (en) * 1989-05-22 1992-02-25 Advanced Semiconductor Materials, Inc. Method for processing wafers in a multi station common chamber reactor
US5432315A (en) * 1991-05-31 1995-07-11 Hitachi, Ltd. Plasma process apparatus including ground electrode with protection film
US5266153A (en) * 1992-06-16 1993-11-30 National Semiconductor Corp. Gas distribution head for plasma deposition and etch systems
JPH06283435A (ja) * 1993-03-26 1994-10-07 Sanyo Electric Co Ltd プラズマｃｖｄによるアモルファスシリコンの成膜方法
US5647945A (en) * 1993-08-25 1997-07-15 Tokyo Electron Limited Vacuum processing apparatus
JP3144665B2 (ja) * 1993-09-17 2001-03-12 東京エレクトロン株式会社 処理用ガスの供給方法
KR100302167B1 (ko) * 1993-11-05 2001-11-22 히가시 데쓰로 플라즈마처리장치및플라즈마처리방법
TW295677B (zh) * 1994-08-19 1997-01-11 Tokyo Electron Co Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI471929B (zh) * 2007-07-11 2015-02-01 Sosul Co Ltd 電漿蝕刻設備與蝕刻晶圓之方法

Also Published As

Publication number Publication date
EP0788137A3 (en) 2000-09-27
KR970063559A (ko) 1997-09-12
EP0788137A2 (en) 1997-08-06
KR100229181B1 (ko) 1999-11-01
US5834730A (en) 1998-11-10

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