TW324071B - Manufacturing method of phase shifting mask wiht multi-layer film structure (patent specification amendment of patent number 85113798) - Google Patents
Manufacturing method of phase shifting mask wiht multi-layer film structure (patent specification amendment of patent number 85113798)Info
- Publication number
- TW324071B TW324071B TW085113798A TW85113798A TW324071B TW 324071 B TW324071 B TW 324071B TW 085113798 A TW085113798 A TW 085113798A TW 85113798 A TW85113798 A TW 85113798A TW 324071 B TW324071 B TW 324071B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- phase shifting
- manufacturing
- film structure
- wiht
- Prior art date
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085113798A TW324071B (en) | 1996-11-11 | 1996-11-11 | Manufacturing method of phase shifting mask wiht multi-layer film structure (patent specification amendment of patent number 85113798) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085113798A TW324071B (en) | 1996-11-11 | 1996-11-11 | Manufacturing method of phase shifting mask wiht multi-layer film structure (patent specification amendment of patent number 85113798) |
Publications (1)
Publication Number | Publication Date |
---|---|
TW324071B true TW324071B (en) | 1998-01-01 |
Family
ID=58262057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085113798A TW324071B (en) | 1996-11-11 | 1996-11-11 | Manufacturing method of phase shifting mask wiht multi-layer film structure (patent specification amendment of patent number 85113798) |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW324071B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI613509B (zh) * | 2013-04-17 | 2018-02-01 | 阿爾貝克成膜股份有限公司 | 相位移光罩之製造方法、相位移光罩及相位移光罩之製造裝置 |
-
1996
- 1996-11-11 TW TW085113798A patent/TW324071B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI613509B (zh) * | 2013-04-17 | 2018-02-01 | 阿爾貝克成膜股份有限公司 | 相位移光罩之製造方法、相位移光罩及相位移光罩之製造裝置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |