經濟部中央標準局員工消費合作社印製 A7 ----_B7 -- ---- Ss------、 五、發明説明（） 本發明係有關於檢測儀器詳而言之乃是指—種具路 徑自動追縱定位功能之雷射干涉位移量測系統。 按，目前普遍應用於檢測工具機及三次元量測儀器幾 何誤差的檢測工具係為雷射干涉儀（如弟一圖所示），係包 5 含有一利用三角架架設之雷射裝置（1)、一置於參考位置（如 工作台）上之干涉鏡（2)及一置於移動物件（如主軸）上之反 射鏡裝置（3)，其應用原理係由雷射光頭（1)發射雷射光源 經干涉鏡(2)、反射鏡（3)後再由反射鏡（3)反射回干涉鏡（2) 及雷射光頭（1)中，當干涉鏡（2)與反射鏡（3)間產生沿著雷 10 射光軸向的相對位移時會在干涉鏡（2)上產生都卜勒 (Doppler-shift Effect)頻差干涉，因此藉由計算都卜勒頻差 干涉條紋可換算出干涉鏡(2)與反射鏡（3)在雷射光軸向的 相對移動距離，而可測得移動床台之位移誤差；雷射光頭 (1)、干涉鏡(2)與反射鏡(3)之架設方式時則依水平或垂直 15軸而將鏡片組擺設不同，也隨著幾何誤差之種類不同如 檢測位移誤差時的鏡片組將不同於檢測角度誤差時的鏡片 組。 然而對於測量之前置對準作業而言，目前的雷射干涉 儀必須以人工方式反覆進行雷射光軸路徑的對準 20 (Aligment)工作才能進行量測，此種對準工作包括雷射光 頭、干涉鏡及反射鏡間三者之直線對準對準工作之目的 是在使待測軸運動路徑能儘量平行於雷射光軸路徑並儘 量避免任何垂直於雷射光軸的橫軸向位移，其目的在保證 量測過程中由反射鏡傳回的雷射光能落在干涉鏡上並產生 -3- 本紙張尺度適用中國國家( CNS ) A4規格^^297公瘦)~~~-----— (請先閲讀背面之注意事項再填寫本頁} 裝A7 printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ----_ B7----- Ss ------, V. Description of the invention () The present invention refers to the details of the testing equipment. -A laser interference displacement measurement system with automatic path tracking and positioning function. According to the press, currently the detection tool commonly used to detect the geometric errors of machine tools and three-dimensional measuring instruments is a laser interferometer (as shown in the first picture of the brother). Package 5 contains a laser device erected by a tripod (1 ). An interference mirror (2) placed on a reference position (such as a work table) and a mirror device (3) placed on a moving object (such as a main axis). The application principle is emitted by a laser head (1) The laser light source passes through the interference mirror (2), the reflection mirror (3), and then is reflected by the reflection mirror (3) back to the interference mirror (2) and the laser head (1). When the interference mirror (2) and the reflection mirror (3) ) When the relative displacement along the axis of the laser beam is generated, the Doppler-shift Effect frequency difference interference will occur on the interferometer (2), so it can be converted by calculating the Doppler-frequency interference fringe The relative movement distance of the interference mirror (2) and the reflection mirror (3) in the laser beam axis, and the displacement error of the moving bed can be measured; the laser head (1), the interference mirror (2) and the reflection mirror (3) According to the horizontal or vertical 15 axis, the arrangement of the lens group is different, and the type of geometric error is different, such as the detection position. When the lens assembly is different from the lens set when the error detection angle error. However, for the measurement of the pre-alignment operation, the current laser interferometer must manually perform the alignment of the laser optical path 20 (Aligment) to perform the measurement. Such alignment includes the laser head , The alignment of the interferometer and the mirror is aimed at making the path of the axis under test as parallel as possible to the path of the laser beam axis and avoiding any transverse displacement perpendicular to the laser beam axis. Purpose To ensure that the laser light returned by the mirror can fall on the interferometer during the measurement process and produce -3- This paper scale is applicable to the China National (CNS) A4 specification ^^ 297 male thin) ~~~ ---- -— (Please read the precautions on the back before filling this page)
、1T 315407 經濟部中央標準局員工消費合作社印製 A 7 B7五、發明説明（） 干涉條紋，以檢測誤差量者。 惟，上述之雷射干涉儀系統係存在有下列幾點缺失： 1. 此種雷射裝置、干涉鏡及反射鏡實施對準（Aligment) 作業，係使該三點形成精確度高之直線對準，作業上相當 5 不易，若非熟練者，架設對準作業往往耗費數小時以上, 而感不便；另外若更換量測不同之幾何誤差時，如檢測完 位移誤差作業後更換為檢測角度誤差時，又耗費更換鏡片 組與重新對準之架設時間；另如檢測水平軸誤差作業後更 換為檢測垂直軸誤差時，也需要重新擺置及對準鏡片組之 10 架設時間，由於工具機共有21項誤差量測，使得整個量測 作業往往耗費多數個工作天者。 2. 由於在架設雷射裝置時必須以三角架裝設機器外部 之地板上而頗佔空間，因此不容易在狹窄的環境空間内操 作。 15 3.在大部份之工廠現場之工具機必須以鈑金元件將機 器和外界隔開以保護機器操作人員，但這些鈑金元件常擋 住了雷射光頭到干涉鏡間的雷射路徑，因此使得量測範圍 受限制，甚至無法進行量測。 4.另外，目前市售干涉儀雖然也提供多軸同動或作對 20 角線（Diagonal Measurement)的量測模組，但是必須要作相 當複雜的對準工作，而在實用上也常發現在某些機器上由 於空間限制之故很難進行對角線量測。 有鑑於此，本發明人秉於長期從事工具機之學術研究 及實驗，針對上述缺失不斷地研發改良，終於有一本發明 -4- -------------:裝------II------,線 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 經濟部中央標準局員工消費合作社印製 A7 B7_五、發明説明（） 產生。 亦即，本發明之主要目的乃在於提供一種具路徑自動 追蹤定位功能之雷射干涉位移量測系統，其前置作業之架 設工作快速簡易，且作業方便。 5 本發明之另一目的乃在於提供一種具路徑自動追蹤定 位功能之雷射干涉位移量測系統，架設佔存空間小，因此 可在狹窄的環境空間内操作。 本發明之又一目的乃在於提供一種具路徑自動追蹤定 位功能之雷射干涉位移量測系統，雷射光路徑不會受到機 10 器鈑金元件阻礙，因此並獲致較大的量測移動範圍。 緣此，本發明一種具路徑自動追蹤定位功能之雷射干 涉位移量測系統，係包含有一含接收器之雷射光頭、一干 涉鏡、一反射鏡及一自動追蹤定位單元，其中該雷射光頭 係藉由一光纖傳輸組件與該干涉鏡作光束傳輸連結，以作 15 為該雷射光頭與該干涉鏡之間雷射光之發射及接收傳遞; 該自動追蹤定位單元係具有一光感測器、一資料處理組件 及一控制組件，其中該光感測器係置設於該干涉鏡之反射 餘光下端，具有一感測面，係用來感應雷射光於該干涉鏡 上所產生之反射餘光位置，再藉由該感應位置之輸出訊號 20 經該資料處理組件轉換成電壓資料予以讀取後，再傳訊至 該控制組件控制該干涉鏡組件及該反射鏡組件間之相對位 移，以達到干涉鏡與反射鏡間雷射光路徑自動追蹤定位之 目的。 為使貴審查委員對於本發明之目的、特徵及功效有 -5- H— 1^—^— m 11 im t -Kn i^m n^i i 、一-aJ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央搮準局員工消費合作社印裝 315407 A7 __ B7 五、發明説明（） 更進一步之了解與認同，茲列舉以下實施例應配合圖式詳 細說明於后，其中： 第一圖係習用雷射干涉儀量測之簡單示意圖。 第二圖係本發明一較佳實施例之示意圖。 5 第三圖係本發明干涉鏡及反射鏡間之雷射光路徑圖。 第四圖係本發明雷射光餘光投影至光感測器之簡單示 意圖。 第五圖係本發明干涉鏡及反射鏡位移變化時餘光位置 之變化圖。 10 第穴圖係本發明實施誤差量測之作動量流程圖。 第七圖係本發明應用於三軸同動量測之示意圖。 首先請參閱第二至三圖所示，本發明係包含有一雷射 光頭（10)、一干涉鏡(20)、一反射鏡(30)、一光纖傳輸組件 (40)、一自動追蹤定位單元（50)，其中： 15 該雷射光頭（丨〇)，係包含有一接收器用以發射及接收 雷射光者，其外端係接設一固定夾具（11);該干涉鏡(2〇)外 端接設有一固定夾具(21);該光纖傳輸組件（40)，係一端夾 固於該雷射光頭（10)之固定夾具（11)中，另一端夹固於該 干涉儀（2〇)之固定夾具(21)上，使得該雷射光頭（10)與該干 20 涉鏡（20)之雷射光束傳輸，係以光纖來導引雷射光束，此 光纖必須使用單模態光纖（SINGLE MODE FIBER)以減少 光纖之散射效應（DISPE-RSION EFFECT)以確保雷射光通 過光纖後的相位信息或同調性；此光纖也必須是偏光保持 光纖（POLARIZATION-MAINTAINING FIBER)以確保雷射 -6- 用中國國家樣準（CNS〉A4規格（210X297公釐） -----------餐------1T------泉 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（) 光源通過光纖後之極性；光纖式之雷射光束傳輸方式使得 在量測不同之軸向誤差時，只需改變干涉鏡與反射鏡（2〇) (30)之相對位置和方向即可，不需重新更改雷射光頭（10) 之架設位置；上述均為習用之技術領域，在此容不贅述； 5 該自動追蹤定位單元（50)，係包含有一光感測器, 1T 315407 Printed by the employee consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A 7 B7 V. Description of invention () Interference fringes to detect the amount of error. However, the above-mentioned laser interferometer system has the following defects: 1. This laser device, interferometer and reflector implement alignment operation, which makes the three points form a straight line pair with high accuracy Accurate, the operation is quite difficult, if unskilled, setting up the alignment operation often takes more than a few hours, which is inconvenient; in addition, if the measurement of different geometric errors is replaced, such as when the displacement error is detected and the angle error is detected , And it takes time to replace the lens group and re-alignment; in addition, if the horizontal axis error is detected and the vertical axis error is replaced, it also needs to reposition and align the lens group 10 erection time, because the machine tool has 21 The measurement of item errors makes the entire measurement operation often cost most working days. 2. When installing the laser device, a tripod must be installed on the floor outside the machine, which occupies a lot of space, so it is not easy to operate in a narrow environmental space. 15 3. The machine tools at most factory sites must be separated from the outside world by sheet metal components to protect the machine operators, but these sheet metal components often block the laser path from the laser head to the interferometer, thus making The measurement range is limited, and even measurement is not possible. 4. In addition, although the currently available interferometers also provide multi-axis simultaneous motion or diagonal 20 Diagonal Measurement (Diagonal Measurement) measurement modules, they must perform quite complicated alignment work, and are often found in practice. On some machines it is difficult to make diagonal measurements due to space constraints. In view of this, the inventor has been engaged in academic research and experimentation of machine tools for a long time, and has continuously developed and improved against the above-mentioned deficiencies. Finally, there is a present invention. ----- II ------, line (please read the precautions on the back before filling in this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X 297mm) Central Bureau of Standards of the Ministry of Economic Affairs Employee consumer cooperatives printed A7 B7_ V. Invention description () produced. That is, the main object of the present invention is to provide a laser interference displacement measurement system with automatic path tracking and positioning function, which is quick and easy to set up in front of the operation and convenient in operation. 5 Another object of the present invention is to provide a laser interference displacement measurement system with automatic path tracking and positioning function, which has a small installation space and can be operated in a narrow environmental space. Another object of the present invention is to provide a laser interference displacement measurement system with automatic path tracking and positioning function. The laser light path will not be hindered by mechanical sheet metal components, and therefore a larger measurement movement range is obtained. Therefore, the present invention provides a laser interference displacement measurement system with automatic path tracking and positioning function, which includes a laser head including a receiver, an interferometer, a reflector, and an automatic tracking and positioning unit, wherein the laser light The head is connected to the interferometer by an optical fiber transmission component for light beam transmission, and 15 is used for the transmission and reception of laser light between the laser head and the interferometer; the automatic tracking and positioning unit has a light sensing Device, a data processing component and a control component, wherein the light sensor is arranged at the lower end of the reflected residual light of the interferometer, and has a sensing surface for sensing the laser light generated on the interferometer The position of the reflected afterglow is read by the output signal 20 of the sensing position converted into voltage data by the data processing component, and then transmitted to the control component to control the relative displacement between the interference mirror component and the mirror component, In order to achieve the purpose of automatic tracking and positioning of the laser light path between the interference mirror and the reflector. In order for your review committee to have the purpose, features and efficacy of the present invention -5-H-1 ^-^-m 11 im t-Kn i ^ mn ^ ii, a-aJ (please read the notes on the back before filling in (This page) This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) Printed by the Central Consumers Bureau of the Ministry of Economic Affairs, Employee Consumer Cooperatives 315407 A7 __ B7 V. Description of invention () For further understanding and approval, here are a few examples The following embodiments should be described in detail in conjunction with the drawings, among which: The first picture is a simple schematic diagram of measurement using a conventional laser interferometer. The second figure is a schematic diagram of a preferred embodiment of the present invention. 5 The third figure is a diagram of the laser light path between the interferometer and the reflector of the present invention. The fourth diagram is a simple schematic diagram of the projection of the laser afterglow of the present invention onto the light sensor. The fifth figure is a graph of the change of the position of the afterglow when the displacement of the interferometer and the mirror of the present invention changes. 10 The acupoint diagram is a flow chart of the momentum of the present invention for error measurement. The seventh diagram is a schematic diagram of the present invention applied to three-axis simultaneous motion measurement. First, please refer to the second to third figures, the present invention includes a laser head (10), an interferometer (20), a reflector (30), an optical fiber transmission component (40), an automatic tracking and positioning unit (50), where: 15 the laser head (丨 〇), which includes a receiver for emitting and receiving laser light, the outer end of which is connected with a fixing fixture (11); the interference mirror (2〇) outside A fixed clamp (21) is provided at the end; the optical fiber transmission assembly (40) is clamped at one end in the fixed clamp (11) of the laser head (10), and the other end is clamped at the interferometer (2〇) The fixed fixture (21), so that the laser beam of the laser head (10) and the stem 20 of the mirror (20) is transmitted, the laser beam is guided by an optical fiber, this fiber must use single-mode fiber ( SINGLE MODE FIBER) to reduce the optical fiber scattering effect (DISPE-RSION EFFECT) to ensure the phase information or coherence of the laser light after passing through the fiber; this fiber must also be a polarization-maintaining fiber (POLARIZATION-MAINTAINING FIBER) to ensure the laser-6 -Use Chinese national standard (CNS> A4 specification (210X297mm) ----------- Meal-- ---- 1T ------ Quan (please read the precautions on the back before filling in this page) A7 B7 printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Description of invention () Polarity of light source after passing through optical fiber; The optical fiber laser beam transmission method makes it necessary to change the relative position and direction of the interferometer and reflector (2〇) (30) when measuring different axial errors, without changing the laser head ( 10) The erection position; the above are the conventional technical fields, which will not be repeated here; 5 The automatic tracking and positioning unit (50) includes a light sensor
(51)、一資料處理組件（52)及一控制組件（53);其中該光 感測器（51)係置設於該干涉鏡（2〇)底端，用以接收該干 涉鏡（20)上雷射光點之反射餘光（Ra)(如第三圖所示 該光感測器（51)係為一四象限光感測器（QUADRANT 10 photodiode)或一雙軸橫向移位光感測器（Dual-axis LATERAL EFFECT PHOTODIODE)(如第四圖所示），具有 一感測面（51)及四個電流輸出接腳（Ιχ+，Ιχ，Iy+，Iy )，係以該 感測面（511)檢測雷射光點之投射位置並產生一定大小之 電流，使得該各電流輸出接腳(Ix+, Ix., Iy+，Iy_)之輸出電流流 15 量取決於該雷射光點與電路接點之距離而呈比例性關係變 化，即可得知雷射光點之位置；該資料處理組件（52)，係具 有信號放大器（521), A/D(類比及數位）轉換器（522),係將 光感測器（51)所感應之光點位置而輸出之電流用以放大訊 號並轉換成四個電壓值，此電壓值隨著雷射光點打在不同 20 之位置而呈線性變化，根據感測器的輸出電壓值作計算而 得到雷射光束此時之偏離距離；該控制組件（53)，係包含 有一微電腦主機（531)及待檢測機具上之控制器（如CNC控 制器）(532),係將該各輸出電壓值換算成光點之橫軸向位 移，並轉換成工具機的位置移動指令而傳送至待檢機具上 本紙張尺度適用中國國家榡隼（CNS )八4規格（21〇><297公釐） n «nn nn m^— tt i tuv H^— (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 S15407 A7 . _________________B7___ 五、發明说明（) 之控制器（532)以驅動工具機之各移動軸以維持干涉鏡與 反射鏡間的雷射光路徑自動對準狀態。 在此首先就該干涉鏡及反射鏡間位移變化時，其干涉 鏡之反射餘光變化作一簡單原理說明，如第五圖所示當 5反射鏡（3〇)與該干涉鏡(20)其初始狀態在所產生之反射餘 光為Ra，若該反射鏡(3〇)與該干涉鏡(2〇)產生任何橫轴向 位移△時，其投射在該光感測器（51)上之新餘光RA，即產 生2 △之位移，此時該四個電流輸出接腳(Ix+，Ix_，Iy+，Iy^p 產生比例性之增減變化，經由該資料處理組件（52)轉換成 10輸出電壓值，再由該控制組件（53)依校準作業作補正動作 或逕行量測作業作記錄者。 另外，本發明在前置之架設校準作業及量測作業之作 動流程如第六圖所示，首先係記錄初始雷射光點在光感測 器上的初始位置；當主動軸運動時，若該干涉鏡(2〇)與反 15射鏡（3〇)產生相對於雷射光軸的橫軸向位移，這使得新餘 光RA’於該光感測器^”上產生出新的電流值；再經由資 料處理組件（52)轉換成電壓值並傳送至該控制組件（53), 復轉換成被動軸之移動指令，而由控制器進行驅動作業而 修正干涉鏡(2〇)與反射鏡（3〇)之相對位移，直到新餘光RA， 20的在光感測器上的位置回到初始位置，以達到雷射光路徑 自動追蹤對準目的； 再者，上述係為單轴線性量測作業，事實上本發明可 應用於檢測多軸機器、平面對角線量測作業、三轴同動量 測作業（如第七圖所示），以檢測角度、直線度及正交度等幾 -8- ( CNS ) A4^^- ( 21〇X297^jJt：) ------- I--------^------tx------0 (請先閲讀背面之注意事項再蜞寫本頁) A7 B7 經濟部中央標隼局員工消費合作社印製 五、發明説明（） 何誤差，其方法快速且低成本，不需習用雷射干涉儀量測 每一單項誤差時，即依使用目的而換裝不同之干涉鏡或反 射鏡，造成拆換不便且重覆進行雷射光路徑對準工作，且 各式各樣鏡片組不僅使得系統價格居高不下，也使得操作 5 人員容易出錯之缺點，而本發明僅需單一線性位移量測鏡 片組即可測得一部機器所有誤差。 換言之，本發明在架設校準作業及量測作業上具有下 列優點： 一、 利用光纖傳輸線的彎曲路徑之傳輸能力來簡化雷 10 射光頭與該干涉鏡之雷射光路徑對準工作；再利用於該干 涉鏡上之餘光路徑上置設一光感應器，並藉由資料處理組 件及控制組件之閉迴路控制，得以省去該干涉鏡及該反射 鏡之校準工作，而大大地簡化了路徑對準工作。 二、 本發明在架上之簡便性，使得更容易在狹窄的環 15 境空間内操作並獲致較大之量測範圍。 三、 本發明可自動進行多軸定位誤差量測，適用範圍 廣泛者。 综上所陳，本發明具路徑自動追蹤定位功能之雷射干 涉位移量測系統確具有產業上之利用價值，且經查相關資 20 料未發現有雷同者，為保障發明人之權益爰依法提出申請, 且舉凡本發明申請範圍所作的均等變化與修飾，皆為本發 明專利範圍所涵蓋。 I---------^------1T------,線 (請先閲讀背面之注意事項再填寫本頁) -9- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 315407 A7 B7 ·五、發明説明（） 圖式之簡單說明： 第一圖係習用雷射干涉量測之簡單示意圖。 第二圖係本發明一較佳實施例之示意圖。 第三圖係本發明干涉鏡及反射鏡間之雷射光路徑圖。 第四圖係本發明雷射光餘光投影至光感測器之簡單示 5 意圖。 第五圖係本發明干涉鏡及反射鏡位移變化時餘光位置 之變化圖。 第六圖係本發明實施誤差量測之作動量流程圖。 第七圖係本發明應用於三軸同動量測之示意圖。 -----------t-------IT------.4. (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印裝 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）(51), a data processing component (52) and a control component (53); wherein the light sensor (51) is disposed at the bottom of the interferometer (2〇) for receiving the interferometer (20 ) The reflected residual light (Ra) on the laser spot (as shown in the third figure, the photo sensor (51) is a four-quadrant photo sensor (QUADRANT 10 photodiode) or a dual-axis lateral shift photo sensor The detector (Dual-axis LATERAL EFFECT PHOTODIODE) (as shown in the fourth figure) has a sensing surface (51) and four current output pins (Ιχ +, Ιχ, Iy +, Iy), based on the sensing The surface (511) detects the projection position of the laser spot and generates a certain amount of current, so that the output current flow of each current output pin (Ix +, Ix., Iy +, Iy_) depends on the laser spot and the circuit. The distance between the points changes in a proportional relationship, and the position of the laser light spot can be known; the data processing component (52) has a signal amplifier (521), an A / D (analog and digital) converter (522), The current output from the position of the light spot sensed by the light sensor (51) is used to amplify the signal and convert it into four voltage values. The light spot hits different positions at 20 and changes linearly. The deviation distance of the laser beam at this time is calculated according to the output voltage value of the sensor; the control component (53) includes a microcomputer host (531) and The controller (such as CNC controller) (532) on the machine to be tested converts each output voltage value into the horizontal and axial displacement of the light spot, and converts it into a position movement command of the machine tool and sends it to the machine to be tested This paper scale is applicable to the Chinese National Falcon (CNS) 84 specifications (21〇 < 297mm) n «nn nn m ^ — tt i tuv H ^ — (please read the precautions on the back before filling this page ) S15407 A7 is printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. _________________B7___ 5. The controller (532) of the invention description () drives the moving axes of the machine tool to maintain the automatic alignment of the laser path between the interferometer and the reflector Here, firstly, when the displacement between the interferometer and the reflector changes, the change of the reflected afterglow of the interferometer is explained as a simple principle. As shown in the fifth figure, when the 5 reflector (3〇) and the interferometer ( 20) Its initial state The generated reflected residual light is Ra, and if the mirror (3〇) and the interference mirror (2〇) produce any lateral-axial displacement △, the new residual light RA projected on the light sensor (51) , That is, a displacement of 2 △ occurs. At this time, the four current output pins (Ix +, Ix_, Iy +, Iy ^ p produce a proportional increase or decrease, and are converted into 10 output voltage values by the data processing component (52), Then, the control unit (53) performs a correction operation according to a calibration operation or a record measurement operation. In addition, the operation flow of the calibration and measurement operations in the front of the invention is shown in the sixth figure. First, it records the initial position of the initial laser light spot on the light sensor; when the active axis moves, if the The interferometer (2〇) and the reflector 15 (3〇) produce a horizontal axial displacement relative to the laser optical axis, which causes the new residual light RA 'to generate a new current value on the light sensor ^ "; It is converted into a voltage value by the data processing component (52) and sent to the control component (53), which is converted into the movement command of the passive axis, and the controller performs the driving operation to correct the interference mirror (2〇) and the mirror (3 〇) The relative displacement until the position of the Xinyu light RA, 20 on the light sensor returns to the initial position, in order to achieve the automatic tracking and alignment of the laser light path; In addition, the above is a single-axis linear measurement operation, In fact, the present invention can be applied to detect multi-axis machines, plane diagonal measurement operations, three-axis simultaneous motion measurement operations (as shown in the seventh figure), to detect angles, straightness and orthogonality, etc.-8 -(CNS) A4 ^^-(21〇X297 ^ jJt :) ------- I -------- ^ ----- -tx ------ 0 (please read the precautions on the back before writing this page) A7 B7 Printed by the Consumer Standardization Facility of the Central Standard Falcon Bureau of the Ministry of Economy V. Invention Instructions () What is the error? The method is fast and low Cost, no need to use a laser interferometer to measure each single error, that is, according to the purpose of use, different interferometers or mirrors are replaced, resulting in inconvenient disassembly and repeated laser light path alignment work, and various Various lens groups not only make the price of the system high, but also make the operation 5 personnel easy to make mistakes, and the present invention only needs a single linear displacement measurement lens group to measure all errors of a machine. In other words, the present invention is set up The calibration operation and measurement operation have the following advantages: 1. Use the transmission capacity of the curved path of the optical fiber transmission line to simplify the alignment of the laser beam path of the laser head and the interferometer; reuse the residual light on the interferometer A light sensor is placed on the path, and through the closed loop control of the data processing component and the control component, the calibration work of the interferometer and the mirror can be omitted, which greatly simplifies Path alignment work. 2. The simplicity of the invention on the rack makes it easier to operate in a narrow annular space and obtain a larger measurement range. 3. The invention can automatically perform multi-axis positioning error measurement For a wide range of applications. In summary, the laser interference displacement measurement system with automatic path tracking and positioning function of the present invention does have industrial use value, and if it is found that there are no similarities in the relevant information, it is guaranteed The inventor's rights and interests apply in accordance with the law, and all equivalent changes and modifications made in the scope of the application for the present invention are covered by the scope of the patent for the invention. I --------- ^ ------ 1T- -----, line (please read the precautions on the back before filling in this page) -9- This paper size is applicable to China National Standard (CNS) A4 specification (210X297mm) 315407 A7 B7 Brief description of the diagram: The first diagram is a simple schematic diagram of conventional laser interference measurement. The second figure is a schematic diagram of a preferred embodiment of the present invention. The third figure is a laser light path diagram between the interference mirror and the reflector of the present invention. The fourth diagram is a schematic diagram showing the projection of the laser afterglow of the present invention onto the light sensor. The fifth figure is a graph of the change of the position of the afterglow when the displacement of the interferometer and the mirror of the present invention changes. The sixth diagram is a flow chart of the momentum of the present invention for performing error measurement. The seventh diagram is a schematic diagram of the present invention applied to three-axis simultaneous motion measurement. ----------- t ------- IT ------. 4. (Please read the notes on the back before filling this page) Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs The size of the printed paper is in accordance with the Chinese National Standard (CNS) A4 (210X297mm)