TW298659B - - Google Patents

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Publication number
TW298659B
TW298659B TW84111576A TW84111576A TW298659B TW 298659 B TW298659 B TW 298659B TW 84111576 A TW84111576 A TW 84111576A TW 84111576 A TW84111576 A TW 84111576A TW 298659 B TW298659 B TW 298659B
Authority
TW
Taiwan
Prior art keywords
container
boiling point
forming
pellets
aliphatic hydrocarbons
Prior art date
Application number
TW84111576A
Other languages
English (en)
Chinese (zh)
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW298659B publication Critical patent/TW298659B/zh

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  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW84111576A 1994-12-28 1995-11-02 TW298659B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32695094A JPH08186162A (ja) 1994-12-28 1994-12-28 半導体ウェーハ用包装容器およびその製造方法およびこれを用いた半導体ウェーハの保管方法

Publications (1)

Publication Number Publication Date
TW298659B true TW298659B (ja) 1997-02-21

Family

ID=18193592

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84111576A TW298659B (ja) 1994-12-28 1995-11-02

Country Status (2)

Country Link
JP (1) JPH08186162A (ja)
TW (1) TW298659B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6600480B2 (ja) * 2015-04-20 2019-10-30 東京エレクトロン株式会社 被処理体を処理する方法

Also Published As

Publication number Publication date
JPH08186162A (ja) 1996-07-16

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