TW290708B - The manufacturing method of phase-shifted photo-mask - Google Patents

The manufacturing method of phase-shifted photo-mask

Info

Publication number
TW290708B
TW290708B TW84112456A TW84112456A TW290708B TW 290708 B TW290708 B TW 290708B TW 84112456 A TW84112456 A TW 84112456A TW 84112456 A TW84112456 A TW 84112456A TW 290708 B TW290708 B TW 290708B
Authority
TW
Taiwan
Prior art keywords
layer
transparent film
mask
film layer
phase
Prior art date
Application number
TW84112456A
Other languages
Chinese (zh)
Inventor
Fang-Chinq Jaw
Tian-Jyue Lii
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW84112456A priority Critical patent/TW290708B/en
Application granted granted Critical
Publication of TW290708B publication Critical patent/TW290708B/en

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

A manufacturing method of phase-shifted photo-mask includes following steps: - Provide a transparent substrate; - Form a transparent film layer on substrate; - Form a non-transparent film layer on transparent film layer; - Form a PR layer of reserving pattern on non-transparent film layer; - Anisotropic etching the non-transparent and transparent film layer by using PR as mask; - Isotropic etching the PR layer and make the residual PR layer just cover non-transparent film layer; - Anisotropic etching the non-transparent film layer by using residual PR layer as mask; - Remove the PR layer.
TW84112456A 1995-11-22 1995-11-22 The manufacturing method of phase-shifted photo-mask TW290708B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84112456A TW290708B (en) 1995-11-22 1995-11-22 The manufacturing method of phase-shifted photo-mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84112456A TW290708B (en) 1995-11-22 1995-11-22 The manufacturing method of phase-shifted photo-mask

Publications (1)

Publication Number Publication Date
TW290708B true TW290708B (en) 1996-11-11

Family

ID=51398275

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84112456A TW290708B (en) 1995-11-22 1995-11-22 The manufacturing method of phase-shifted photo-mask

Country Status (1)

Country Link
TW (1) TW290708B (en)

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