TW287314B - - Google Patents
Info
- Publication number
- TW287314B TW287314B TW083110217A TW83110217A TW287314B TW 287314 B TW287314 B TW 287314B TW 083110217 A TW083110217 A TW 083110217A TW 83110217 A TW83110217 A TW 83110217A TW 287314 B TW287314 B TW 287314B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8839094A JPH07297265A (ja) | 1994-04-26 | 1994-04-26 | 静電チャック |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW287314B true TW287314B (sv) | 1996-10-01 |
Family
ID=13941474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW083110217A TW287314B (sv) | 1994-04-26 | 1994-11-04 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH07297265A (sv) |
| KR (1) | KR950034652A (sv) |
| TW (1) | TW287314B (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7042697B2 (en) | 2000-05-19 | 2006-05-09 | Ngk Insulators, Ltd. | Electrostatic chucks and electrostatically attracting structures |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09260474A (ja) * | 1996-03-22 | 1997-10-03 | Sony Corp | 静電チャックおよびウエハステージ |
| CN1127750C (zh) | 1996-12-27 | 2003-11-12 | 佳能株式会社 | 减少电荷的薄膜,图象形成装置及其制造方法 |
| JP4236292B2 (ja) | 1997-03-06 | 2009-03-11 | 日本碍子株式会社 | ウエハー吸着装置およびその製造方法 |
| JPH11214491A (ja) * | 1998-01-22 | 1999-08-06 | Toshiba Ceramics Co Ltd | ウエハ保持装置及びその製造方法 |
| JPH11209182A (ja) * | 1998-01-22 | 1999-08-03 | Sumitomo Metal Ind Ltd | プラズマ耐食部材 |
| WO1999059201A1 (en) * | 1998-05-11 | 1999-11-18 | Applied Materials Inc | Polished ceramic chuck for low backside particles in semiconductor plasma processing |
| WO2001013423A1 (fr) * | 1999-08-10 | 2001-02-22 | Ibiden Co., Ltd. | Plaque ceramique pour dispositif de production de semi-conducteurs |
| JP4529690B2 (ja) * | 2000-01-20 | 2010-08-25 | 住友電気工業株式会社 | 半導体製造装置用ウェハ保持体およびその製造方法ならびに半導体製造装置 |
| JP2002057207A (ja) * | 2000-01-20 | 2002-02-22 | Sumitomo Electric Ind Ltd | 半導体製造装置用ウェハ保持体およびその製造方法ならびに半導体製造装置 |
| JP4272786B2 (ja) * | 2000-01-21 | 2009-06-03 | トーカロ株式会社 | 静電チャック部材およびその製造方法 |
| JP3808286B2 (ja) * | 2000-06-07 | 2006-08-09 | 住友大阪セメント株式会社 | 静電チャック |
| JP3693895B2 (ja) | 2000-07-24 | 2005-09-14 | 住友大阪セメント株式会社 | 可撓性フィルムの静電吸着装置、可撓性フィルムの静電吸着方法、可撓性フィルムの表面処理方法 |
| KR20020064508A (ko) * | 2001-02-02 | 2002-08-09 | 삼성전자 주식회사 | 정전 척 |
| JP4493251B2 (ja) | 2001-12-04 | 2010-06-30 | Ｔｏｔｏ株式会社 | 静電チャックモジュールおよび基板処理装置 |
| DE10232080B4 (de) * | 2002-07-15 | 2015-10-01 | Integrated Dynamics Engineering Gmbh | Elektrostatischer Greifer und Verfahren zu dessen Herstellung |
| EP1676309A1 (en) * | 2003-10-09 | 2006-07-05 | SNT Co., Ltd. | Electro-static chuck with non-sintered aln and a method of preparing the same |
| JP2007150351A (ja) * | 2007-02-15 | 2007-06-14 | Toto Ltd | 静電チャック |
| JP5270310B2 (ja) * | 2008-11-13 | 2013-08-21 | 東京エレクトロン株式会社 | 静電チャック及び基板処理装置 |
| JP2010166086A (ja) * | 2010-04-12 | 2010-07-29 | Fujitsu Semiconductor Ltd | 静電チャックを用いた半導体製造装置 |
| JP2010177698A (ja) * | 2010-04-12 | 2010-08-12 | Fujitsu Semiconductor Ltd | 静電チャックの製造方法 |
| JP6038698B2 (ja) | 2013-03-22 | 2016-12-07 | 日本碍子株式会社 | セラミックス部材及び半導体製造装置用部材 |
| WO2015080135A1 (ja) * | 2013-11-29 | 2015-06-04 | 株式会社東芝 | プラズマ装置用部品及びその製造方法 |
| JP5926870B1 (ja) | 2014-09-16 | 2016-05-25 | 日本碍子株式会社 | セラミック構造体、基板保持装置用部材及びセラミック構造体の製法 |
| JP7140183B2 (ja) * | 2018-02-20 | 2022-09-21 | 住友大阪セメント株式会社 | 静電チャック装置および静電チャック装置の製造方法 |
| KR102632768B1 (ko) * | 2019-06-28 | 2024-02-01 | 엔지케이 인슐레이터 엘티디 | 웨이퍼 배치대 |
| US20230245918A1 (en) * | 2020-07-13 | 2023-08-03 | Kyocera Corporation | Sample holder |
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1994
- 1994-04-26 JP JP8839094A patent/JPH07297265A/ja active Pending
- 1994-11-04 TW TW083110217A patent/TW287314B/zh active
-
1995
- 1995-01-21 KR KR1019950001027A patent/KR950034652A/ko not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7042697B2 (en) | 2000-05-19 | 2006-05-09 | Ngk Insulators, Ltd. | Electrostatic chucks and electrostatically attracting structures |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07297265A (ja) | 1995-11-10 |
| KR950034652A (ko) | 1995-12-28 |