TW280029B - - Google Patents

Info

Publication number
TW280029B
TW280029B TW084113136A TW84113136A TW280029B TW 280029 B TW280029 B TW 280029B TW 084113136 A TW084113136 A TW 084113136A TW 84113136 A TW84113136 A TW 84113136A TW 280029 B TW280029 B TW 280029B
Authority
TW
Taiwan
Application number
TW084113136A
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Application granted granted Critical
Publication of TW280029B publication Critical patent/TW280029B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
    • H01L28/91—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
    • H01L28/87—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
TW084113136A 1994-12-31 1995-12-09 TW280029B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940040526A KR960026870A (ko) 1994-12-31 1994-12-31 반도체소자의 캐패시터 제조방법

Publications (1)

Publication Number Publication Date
TW280029B true TW280029B (zh) 1996-07-01

Family

ID=19406200

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084113136A TW280029B (zh) 1994-12-31 1995-12-09

Country Status (5)

Country Link
US (1) US5658817A (zh)
KR (1) KR960026870A (zh)
DE (1) DE19547811C2 (zh)
GB (1) GB2296821B (zh)
TW (1) TW280029B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1187653A (ja) 1997-09-09 1999-03-30 Fujitsu Ltd 半導体装置およびその製造方法
DE112017003811B4 (de) * 2016-07-29 2021-09-09 Sony Corporation Displayeinrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950000500B1 (ko) * 1989-08-31 1995-01-24 금성일렉트론 주식회사 디램셀 커패시터 제조방법 및 구조
US5248628A (en) * 1989-09-08 1993-09-28 Kabushiki Kaisha Toshiba Method of fabricating a semiconductor memory device
US5236859A (en) * 1990-06-05 1993-08-17 Samsung Electronics Co., Ltd. Method of making stacked-capacitor for a dram cell same
US5108943A (en) * 1991-01-02 1992-04-28 Micron Technology, Inc. Mushroom double stacked capacitor
KR940001426B1 (ko) * 1991-03-27 1994-02-23 삼성전자 주식회사 고집적 반도체 메모리장치 및 그 제조방법
JPH0629483A (ja) * 1991-04-29 1994-02-04 Micron Technol Inc スタック型ｉセルキャパシタおよびその製造方法
US5137842A (en) * 1991-05-10 1992-08-11 Micron Technology, Inc. Stacked H-cell capacitor and process to fabricate same

Also Published As

Publication number Publication date
GB2296821A (en) 1996-07-10
US5658817A (en) 1997-08-19
DE19547811A1 (de) 1996-07-04
KR960026870A (ko) 1996-07-22
GB2296821B (en) 1999-01-20
GB9526722D0 (en) 1996-02-28
DE19547811C2 (de) 2001-02-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees