TW278243B - Fabrication method of SRAM polysilicon load resistor - Google Patents

Fabrication method of SRAM polysilicon load resistor

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Publication number
TW278243B
TW278243B TW82111167A TW82111167A TW278243B TW 278243 B TW278243 B TW 278243B TW 82111167 A TW82111167 A TW 82111167A TW 82111167 A TW82111167 A TW 82111167A TW 278243 B TW278243 B TW 278243B
Authority
TW
Taiwan
Prior art keywords
load resistor
layer
depositing
sram
fabrication method
Prior art date
Application number
TW82111167A
Other languages
Chinese (zh)
Inventor
Shyang-Ming Jow
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW82111167A priority Critical patent/TW278243B/en
Application granted granted Critical
Publication of TW278243B publication Critical patent/TW278243B/en

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Abstract

A fabrication method of SRAM polysilicon load resistor comprises the steps of: forming field oxide layer necessary for separating active area; forming MOS transistor; depositing polysilicon layer and performing load resistor ion implantation; depositing SiO2 layer and defining load resistor photoresist pattern; by reactive ion etching anisotropically etching SiO2 layer and removing photoresist; depositing Ti metal thin film layer; performing metal silicidation; removing Ti metal thin film on SiO2 layer surface; defining metal silicide pattern as interconnection.
TW82111167A 1993-12-27 1993-12-27 Fabrication method of SRAM polysilicon load resistor TW278243B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW82111167A TW278243B (en) 1993-12-27 1993-12-27 Fabrication method of SRAM polysilicon load resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW82111167A TW278243B (en) 1993-12-27 1993-12-27 Fabrication method of SRAM polysilicon load resistor

Publications (1)

Publication Number Publication Date
TW278243B true TW278243B (en) 1996-06-11

Family

ID=51397458

Family Applications (1)

Application Number Title Priority Date Filing Date
TW82111167A TW278243B (en) 1993-12-27 1993-12-27 Fabrication method of SRAM polysilicon load resistor

Country Status (1)

Country Link
TW (1) TW278243B (en)

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