TW257876B - Focusing method of photoengraving - Google Patents

Focusing method of photoengraving

Info

Publication number
TW257876B
TW257876B TW083107491A TW83107491A TW257876B TW 257876 B TW257876 B TW 257876B TW 083107491 A TW083107491 A TW 083107491A TW 83107491 A TW83107491 A TW 83107491A TW 257876 B TW257876 B TW 257876B
Authority
TW
Taiwan
Prior art keywords
specified
area
height position
surface height
specified area
Prior art date
Application number
TW083107491A
Other languages
English (en)
Inventor
Eiichi Ishikawa
Ichiro Arimoto
Junichi Kobe
Original Assignee
Mitsubishi Electric Machine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Machine filed Critical Mitsubishi Electric Machine
Application granted granted Critical
Publication of TW257876B publication Critical patent/TW257876B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW083107491A 1994-08-05 1994-08-16 Focusing method of photoengraving TW257876B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18490594A JP3384880B2 (ja) 1994-08-05 1994-08-05 写真製版における焦点合わせ方法

Publications (1)

Publication Number Publication Date
TW257876B true TW257876B (en) 1995-09-21

Family

ID=16161388

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083107491A TW257876B (en) 1994-08-05 1994-08-16 Focusing method of photoengraving

Country Status (5)

Country Link
US (1) US5561495A (zh)
JP (1) JP3384880B2 (zh)
KR (1) KR0143149B1 (zh)
DE (1) DE19521390C2 (zh)
TW (1) TW257876B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19626176A1 (de) * 1996-06-29 1998-01-08 Deutsche Forsch Luft Raumfahrt Lithographie-Belichtungseinrichtung und Lithographie-Verfahren
CN100399529C (zh) * 2004-11-02 2008-07-02 力晶半导体股份有限公司 用于曝光机器的检测装置及检测方法
DE102006059818B4 (de) * 2006-12-11 2017-09-14 Kleo Ag Belichtungsanlage
CN101644888B (zh) * 2008-08-04 2011-11-30 中芯国际集成电路制造(北京)有限公司 曝光方法、掩模版和掩模版设计方法
DE102009032210B4 (de) 2009-07-03 2011-06-09 Kleo Ag Bearbeitungsanlage

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63173323A (ja) * 1987-01-13 1988-07-16 Toshiba Corp 投影露光装置
US4902900A (en) * 1987-12-21 1990-02-20 Nikon Corporation Device for detecting the levelling of the surface of an object
US5117254A (en) * 1988-05-13 1992-05-26 Canon Kabushiki Kaisha Projection exposure apparatus
US5124562A (en) * 1989-01-27 1992-06-23 Canon Kabushiki Kaisha Surface position detecting method at a predetermined and plurality of adjacent points
JP2840959B2 (ja) * 1989-07-13 1998-12-24 富士通株式会社 電子ビーム描画露光装置の焦点設定方法
JP2886957B2 (ja) * 1990-09-06 1999-04-26 キヤノン株式会社 自動焦点合せ装置
JPH04294518A (ja) * 1991-03-25 1992-10-19 Fujitsu Ltd 半導体装置の製造方法
JPH04342111A (ja) * 1991-05-20 1992-11-27 Hitachi Ltd 投影露光方法及びその装置
US5266790A (en) * 1992-12-21 1993-11-30 Ultratech Stepper, Inc. Focusing technique suitable for use with an unpatterned specular substrate
US5461237A (en) * 1993-03-26 1995-10-24 Nikon Corporation Surface-position setting apparatus
US5364051A (en) * 1993-04-29 1994-11-15 Teledyne Industries Inc. Locator clip

Also Published As

Publication number Publication date
US5561495A (en) 1996-10-01
DE19521390C2 (de) 1999-09-30
DE19521390A1 (de) 1996-02-08
JP3384880B2 (ja) 2003-03-10
JPH0851053A (ja) 1996-02-20
KR0143149B1 (ko) 1998-07-01
KR960008430A (ko) 1996-03-22

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent