TW239232B - - Google Patents

Info

Publication number
TW239232B
TW239232B TW082107959A TW82107959A TW239232B TW 239232 B TW239232 B TW 239232B TW 082107959 A TW082107959 A TW 082107959A TW 82107959 A TW82107959 A TW 82107959A TW 239232 B TW239232 B TW 239232B
Authority
TW
Taiwan
Application number
TW082107959A
Original Assignee
Tokyo Electron Co Ltd
Tokyo Electron Tohoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Co Ltd, Tokyo Electron Tohoku Kk filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW239232B publication Critical patent/TW239232B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW082107959A 1992-10-06 1993-09-27 TW239232B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26717192A JPH06120321A (ja) 1992-10-06 1992-10-06 基板ハンドリング装置

Publications (1)

Publication Number Publication Date
TW239232B true TW239232B (zh) 1995-01-21

Family

ID=17441095

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082107959A TW239232B (zh) 1992-10-06 1993-09-27

Country Status (4)

Country Link
US (1) US5383783A (zh)
JP (1) JPH06120321A (zh)
KR (1) KR940010264A (zh)
TW (1) TW239232B (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08335622A (ja) * 1995-06-07 1996-12-17 Tokyo Electron Ltd 基板搬送装置
US5609376A (en) * 1995-09-08 1997-03-11 Micron Technology, Inc. Wafer carrier handle assembly
US5695331A (en) * 1996-01-18 1997-12-09 Btu International Multiple width boat carrier for vertical ovens
AU6419798A (en) 1997-03-19 1998-10-12 Omron Corporation Transmitting photoelectric sensor array
KR100332577B1 (ko) * 1999-04-21 2002-04-17 김창덕 김 구이기
JP3464177B2 (ja) * 1999-09-06 2003-11-05 沖電気工業株式会社 半導体製造装置および静電気除去方法
JP2001148340A (ja) * 1999-11-19 2001-05-29 Advantest Corp 荷電粒子ビーム露光方法及び装置
KR20000024122A (ko) * 2000-01-24 2000-05-06 송경수 구이 김에 디 에이치 에이를 함유시키는 방법 및 장치
KR20010110977A (ko) * 2001-01-19 2001-12-15 주식회사 소윤식품 기능성 조미김의 제조방법
KR100481307B1 (ko) * 2001-11-08 2005-04-07 삼성전자주식회사 반도체 제조 설비의 카세트 테이블
KR100651239B1 (ko) * 2005-06-20 2006-11-30 김병철 김 구이기
US8936425B2 (en) * 2012-01-23 2015-01-20 Tera Autotech Corporation Ancillary apparatus and method for loading glass substrates into a bracket
CN204937899U (zh) * 2015-09-10 2016-01-06 合肥京东方光电科技有限公司 一种基板卡匣

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
KR0139026B1 (ko) * 1988-02-05 1998-06-01 후세 노보루 보우트 반송방법 및 열처리 장치
JP3006714B2 (ja) * 1988-12-02 2000-02-07 東京エレクトロン株式会社 縦型基板移載装置及び縦型熱処理装置並びに縦型熱処理装置における基板移載方法
JPH04186862A (ja) * 1990-11-21 1992-07-03 Tokyo Electron Sagami Ltd キャリア内基板の検出装置

Also Published As

Publication number Publication date
JPH06120321A (ja) 1994-04-28
KR940010264A (ko) 1994-05-24
US5383783A (en) 1995-01-24

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent