TW239188B - - Google Patents
Info
- Publication number
- TW239188B TW239188B TW083102161A TW83102161A TW239188B TW 239188 B TW239188 B TW 239188B TW 083102161 A TW083102161 A TW 083102161A TW 83102161 A TW83102161 A TW 83102161A TW 239188 B TW239188 B TW 239188B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4310244 | 1993-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW239188B true TW239188B (en:Method) | 1995-01-21 |
Family
ID=6484179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW083102161A TW239188B (en:Method) | 1993-03-30 | 1994-03-12 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5450754A (en:Method) |
| EP (1) | EP0618435A3 (en:Method) |
| JP (1) | JPH06307960A (en:Method) |
| KR (1) | KR940022070A (en:Method) |
| TW (1) | TW239188B (en:Method) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE59508560D1 (de) * | 1994-11-24 | 2000-08-17 | Siemens Ag | Kapazitiver Drucksensor |
| US5983727A (en) * | 1997-08-19 | 1999-11-16 | Pressure Profile Systems | System generating a pressure profile across a pressure sensitive membrane |
| JP3424550B2 (ja) * | 1998-04-13 | 2003-07-07 | 株式会社デンソー | 半導体力学量センサの製造方法 |
| JP2000283866A (ja) | 1999-01-27 | 2000-10-13 | Furukawa Electric Co Ltd:The | フィルム状圧力センサ |
| DE19920990C2 (de) * | 1999-05-06 | 2002-02-14 | Siemens Ag | Druckerfassungs-Anordnung |
| US6829131B1 (en) * | 1999-09-13 | 2004-12-07 | Carnegie Mellon University | MEMS digital-to-acoustic transducer with error cancellation |
| JP3507978B2 (ja) | 2000-02-23 | 2004-03-15 | 株式会社日立製作所 | 静電容量式圧力センサー |
| US6770505B1 (en) * | 2001-09-21 | 2004-08-03 | Lsi Logic Corporation | Arrangement for measuring pressure on a semiconductor wafer and an associated method for fabricating a semiconductor wafer |
| GB2383420A (en) * | 2001-12-22 | 2003-06-25 | Michael John Tudor | A capacitive pressure sensor with multiple diaphragms |
| US7436327B2 (en) * | 2003-12-22 | 2008-10-14 | Daktronics, Inc. | Capacitive relay takeoff swimming platform sensor system |
| US7155980B2 (en) * | 2005-01-07 | 2007-01-02 | Kulite Semiconductor Products, Inc. | Resonating transducer |
| KR101228383B1 (ko) * | 2005-07-22 | 2013-02-07 | 에스티마이크로일렉트로닉스 에스.알.엘. | 두 배의 측정 스케일 및 높은 정밀도의 풀 스케일의 통합된압력 센서 |
| US7401527B2 (en) * | 2006-10-11 | 2008-07-22 | Toyota Motor Engineering & Manufacturing North America, Inc. | Windshield wiper pressure sensor |
| WO2009130628A1 (en) * | 2008-04-23 | 2009-10-29 | Nxp B.V. | Capacitive pressure sensor |
| JP2009264890A (ja) * | 2008-04-24 | 2009-11-12 | Panasonic Electric Works Co Ltd | 圧力センサ |
| WO2010028077A1 (en) | 2008-09-02 | 2010-03-11 | Christian M. Puttlitz Consulting, Llc | Biomems sensor and apparatuses and methods thereof |
| CN103644985A (zh) * | 2013-12-11 | 2014-03-19 | 江苏物联网研究发展中心 | 多量程cmos mems电容式压力传感器芯片 |
| JP6399803B2 (ja) | 2014-05-14 | 2018-10-03 | キヤノン株式会社 | 力覚センサおよび把持装置 |
| JP6982953B2 (ja) * | 2016-09-21 | 2021-12-17 | エルジー ディスプレイ カンパニー リミテッド | センサ装置 |
| JP7007112B2 (ja) * | 2017-05-29 | 2022-01-24 | エルジー ディスプレイ カンパニー リミテッド | 力検出装置 |
| US11046575B2 (en) * | 2017-10-31 | 2021-06-29 | Encite Llc | Broad range micro pressure sensor |
| DE102018211330A1 (de) | 2018-07-10 | 2020-01-16 | Robert Bosch Gmbh | Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren |
| DE102018211331A1 (de) * | 2018-07-10 | 2019-10-31 | Robert Bosch Gmbh | Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren |
| DE102022206969A1 (de) * | 2022-07-07 | 2024-01-18 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanischer Drucksensor mit wenigstens zwei Membranen zur Bestimmung eines Druckwerts sowie entsprechendes Verfahren |
| DE102023205811A1 (de) * | 2023-06-21 | 2024-12-24 | Robert Bosch Gesellschaft mit beschränkter Haftung | Drucksensormodul und Verfahren zum Messen eines Drucks |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4443383A (en) * | 1981-03-19 | 1984-04-17 | Rohm And Haas Company | Preparation of methacrolein and methacrylonitrile from tert-butyl alkanoates |
| US4445383A (en) * | 1982-06-18 | 1984-05-01 | General Signal Corporation | Multiple range capacitive pressure transducer |
| DE3704870C1 (de) * | 1987-02-16 | 1988-04-28 | Peter Seitz | Vorrichtung zur Messung der flaechigen Verteilung von Druckkraeften |
| US5022270A (en) * | 1989-06-15 | 1991-06-11 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
| DE4042335A1 (de) * | 1990-02-12 | 1991-08-14 | Fraunhofer Ges Forschung | Drucksensoranordnung mit einem drucksensor, einem referenzelement und einer messschaltung |
-
1994
- 1994-03-02 EP EP94103124A patent/EP0618435A3/de not_active Withdrawn
- 1994-03-08 US US08/207,067 patent/US5450754A/en not_active Expired - Fee Related
- 1994-03-12 TW TW083102161A patent/TW239188B/zh active
- 1994-03-28 JP JP6082551A patent/JPH06307960A/ja not_active Withdrawn
- 1994-03-30 KR KR1019940006493A patent/KR940022070A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| US5450754A (en) | 1995-09-19 |
| JPH06307960A (ja) | 1994-11-04 |
| EP0618435A3 (de) | 1995-02-01 |
| EP0618435A2 (de) | 1994-10-05 |
| KR940022070A (ko) | 1994-10-20 |