TW227545B - - Google Patents
Info
- Publication number
- TW227545B TW227545B TW082100102A TW82100102A TW227545B TW 227545 B TW227545 B TW 227545B TW 082100102 A TW082100102 A TW 082100102A TW 82100102 A TW82100102 A TW 82100102A TW 227545 B TW227545 B TW 227545B
- Authority
- TW
- Taiwan
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Ventilation (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04012311A JP3082389B2 (en) | 1992-01-27 | 1992-01-27 | Cleanroom storage |
Publications (1)
Publication Number | Publication Date |
---|---|
TW227545B true TW227545B (en) | 1994-08-01 |
Family
ID=11801776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW082100102A TW227545B (en) | 1992-01-27 | 1993-01-09 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3082389B2 (en) |
KR (1) | KR100236273B1 (en) |
TW (1) | TW227545B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100446220C (en) * | 2005-08-16 | 2008-12-24 | 力晶半导体股份有限公司 | Method of manufacturing semiconductor components |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0530081U (en) * | 1991-09-25 | 1993-04-20 | 新明和工業株式会社 | Hook retractable crane |
JP3085468B2 (en) * | 1995-03-27 | 2000-09-11 | ティー・シー・エム株式会社 | Container handling equipment and management system |
US5980183A (en) * | 1997-04-14 | 1999-11-09 | Asyst Technologies, Inc. | Integrated intrabay buffer, delivery, and stocker system |
US6379096B1 (en) * | 1999-02-22 | 2002-04-30 | Scp Global Technologies, Inc. | Buffer storage system |
CN101506087B (en) * | 2006-06-19 | 2011-09-21 | 诚实公司 | System for purging reticle storage |
KR100958793B1 (en) * | 2007-09-28 | 2010-05-18 | 주식회사 실트론 | Box cleaner for cleaning wafer shipping box |
JP4412391B2 (en) * | 2007-11-16 | 2010-02-10 | 村田機械株式会社 | Transport vehicle system |
JP2009196748A (en) * | 2008-02-20 | 2009-09-03 | Murata Mach Ltd | Mounting block |
US11501991B2 (en) * | 2016-06-08 | 2022-11-15 | Murata Machinery, Ltd. | Container storage and container storage method |
CN111365957B (en) * | 2020-04-16 | 2023-05-09 | 重庆电力高等专科学校 | Chrome plating pipe washs stoving production line |
CN115215030B (en) * | 2022-07-14 | 2024-03-19 | 深圳市创新特科技有限公司 | A three-dimensional warehouse system for dust free room |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6036205A (en) * | 1983-08-08 | 1985-02-25 | Hitachi Ltd | Housing device |
-
1992
- 1992-01-27 JP JP04012311A patent/JP3082389B2/en not_active Expired - Fee Related
-
1993
- 1993-01-09 TW TW082100102A patent/TW227545B/zh not_active IP Right Cessation
- 1993-01-20 KR KR1019930000637A patent/KR100236273B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100446220C (en) * | 2005-08-16 | 2008-12-24 | 力晶半导体股份有限公司 | Method of manufacturing semiconductor components |
Also Published As
Publication number | Publication date |
---|---|
KR930016317A (en) | 1993-08-26 |
KR100236273B1 (en) | 1999-12-15 |
JP3082389B2 (en) | 2000-08-28 |
JPH05201506A (en) | 1993-08-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |