TW223703B - - Google Patents

Info

Publication number
TW223703B
TW223703B TW082102610A TW82102610A TW223703B TW 223703 B TW223703 B TW 223703B TW 082102610 A TW082102610 A TW 082102610A TW 82102610 A TW82102610 A TW 82102610A TW 223703 B TW223703 B TW 223703B
Authority
TW
Taiwan
Application number
TW082102610A
Original Assignee
Semiconductor Energy Res Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4115503A external-priority patent/JP3071940B2/ja
Priority claimed from JP5089117A external-priority patent/JPH06275646A/ja
Application filed by Semiconductor Energy Res Co Ltd filed Critical Semiconductor Energy Res Co Ltd
Application granted granted Critical
Publication of TW223703B publication Critical patent/TW223703B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Thin Film Transistor (AREA)
TW082102610A 1992-04-07 1993-04-08 TW223703B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4115503A JP3071940B2 (ja) 1992-04-07 1992-04-07 絶縁ゲイト型半導体装置の作製方法
JP5089117A JPH06275646A (ja) 1993-03-24 1993-03-24 薄膜トランジスタの作製方法

Publications (1)

Publication Number Publication Date
TW223703B true TW223703B (zh) 1994-05-11

Family

ID=26430549

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082102610A TW223703B (zh) 1992-04-07 1993-04-08

Country Status (3)

Country Link
KR (1) KR970003917B1 (zh)
CN (1) CN1054469C (zh)
TW (1) TW223703B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3469337B2 (ja) * 1994-12-16 2003-11-25 株式会社半導体エネルギー研究所 半導体装置の作製方法
CN102569053B (zh) * 2012-01-18 2014-12-24 上海华力微电子有限公司 一种形成高介电常数金属栅的方法
JPWO2015064256A1 (ja) * 2013-10-28 2017-03-09 富士電機株式会社 炭化シリコン半導体装置及びその製造方法
CN105977306A (zh) * 2016-06-21 2016-09-28 北京大学深圳研究生院 一种自对准薄膜晶体管及其制备方法
CN107799605B (zh) * 2017-10-27 2020-07-31 合肥鑫晟光电科技有限公司 一种薄膜晶体管及其制备方法、阵列基板、显示装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9008214D0 (en) * 1990-04-11 1990-06-13 Gen Electric Co Plc Semiconductor devices

Also Published As

Publication number Publication date
KR930022600A (ko) 1993-11-24
CN1078068A (zh) 1993-11-03
CN1054469C (zh) 2000-07-12
KR970003917B1 (en) 1997-03-22

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