TW222348B - - Google Patents

Info

Publication number
TW222348B
TW222348B TW080110268A TW80110268A TW222348B TW 222348 B TW222348 B TW 222348B TW 080110268 A TW080110268 A TW 080110268A TW 80110268 A TW80110268 A TW 80110268A TW 222348 B TW222348 B TW 222348B
Authority
TW
Taiwan
Application number
TW080110268A
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of TW222348B publication Critical patent/TW222348B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/224—Housing; Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
TW080110268A 1990-12-11 1991-12-30 TW222348B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US62555590A 1990-12-11 1990-12-11

Publications (1)

Publication Number Publication Date
TW222348B true TW222348B (zh) 1994-04-11

Family

ID=24506629

Family Applications (1)

Application Number Title Priority Date Filing Date
TW080110268A TW222348B (zh) 1990-12-11 1991-12-30

Country Status (4)

Country Link
EP (1) EP0490288A3 (zh)
JP (2) JP3254703B2 (zh)
KR (1) KR100264368B1 (zh)
TW (1) TW222348B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100269278B1 (ko) * 1992-10-14 2000-10-16 윤종용 강유전체박막을이용한커패시터제조방법
WO1996010845A2 (en) * 1994-10-04 1996-04-11 Philips Electronics N.V. Semiconductor device comprising a ferroelectric memory element with a lower electrode provided with an oxygen barrier
US5708302A (en) * 1995-04-26 1998-01-13 Symetrix Corporation Bottom electrode structure for dielectric capacitors
KR100200299B1 (ko) * 1995-11-30 1999-06-15 김영환 반도체 소자 캐패시터 형성방법
KR100393197B1 (ko) * 1996-10-31 2003-11-01 삼성전자주식회사 강유전체캐패시터및그제조방법
JPH10200072A (ja) * 1997-01-10 1998-07-31 Sony Corp 半導体メモリセルのキャパシタ構造及びその作製方法
JP2004241632A (ja) * 2003-02-06 2004-08-26 Seiko Epson Corp 強誘電体メモリおよびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4437139A (en) * 1982-12-17 1984-03-13 International Business Machines Corporation Laser annealed dielectric for dual dielectric capacitor
JPH02189969A (ja) * 1989-01-18 1990-07-25 Toshiba Corp 電子部品
KR940006708B1 (ko) * 1989-01-26 1994-07-25 세이꼬 엡슨 가부시끼가이샤 반도체 장치의 제조 방법
DE69022621T2 (de) * 1989-05-05 1996-05-30 Ramtron Corp Integrierter ferro-elektrischer Kondensator.

Also Published As

Publication number Publication date
JP2002064188A (ja) 2002-02-28
KR100264368B1 (ko) 2000-08-16
EP0490288A2 (en) 1992-06-17
KR920013712A (ko) 1992-07-29
JPH04287968A (ja) 1992-10-13
EP0490288A3 (en) 1992-09-02
JP3254703B2 (ja) 2002-02-12

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