TW218405B - - Google Patents
Info
- Publication number
- TW218405B TW218405B TW81102513A TW81102513A TW218405B TW 218405 B TW218405 B TW 218405B TW 81102513 A TW81102513 A TW 81102513A TW 81102513 A TW81102513 A TW 81102513A TW 218405 B TW218405 B TW 218405B
- Authority
- TW
- Taiwan
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
- F01L31/00—Valve drive, valve adjustment during operation, or other valve control, not provided for in groups F01L15/00 - F01L29/00
- F01L31/02—Valve drive, valve adjustment during operation, or other valve control, not provided for in groups F01L15/00 - F01L29/00 with tripping-gear; Tripping of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
- F01L23/00—Valves controlled by impact by piston, e.g. in free-piston machines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/10—Pumps having fluid drive
- F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
- F04B43/1136—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86847—Pivoted valve unit
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Compressor (AREA)
- Mechanically-Actuated Valves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/858,675 US5240390A (en) | 1992-03-27 | 1992-03-27 | Air valve actuator for reciprocable machine |
Publications (1)
Publication Number | Publication Date |
---|---|
TW218405B true TW218405B (zh) | 1994-01-01 |
Family
ID=25328876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW81102513A TW218405B (zh) | 1992-03-27 | 1992-03-31 |
Country Status (6)
Country | Link |
---|---|
US (2) | US5240390A (zh) |
JP (1) | JPH05288159A (zh) |
KR (1) | KR970009954B1 (zh) |
CN (1) | CN1077009A (zh) |
AU (1) | AU646171B2 (zh) |
TW (1) | TW218405B (zh) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5391060A (en) * | 1993-05-14 | 1995-02-21 | The Aro Corporation | Air operated double diaphragm pump |
CN1165699C (zh) * | 1996-04-12 | 2004-09-08 | 格雷科有限公司 | 单向阀 |
TW539918B (en) * | 1997-05-27 | 2003-07-01 | Tokyo Electron Ltd | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
US6257845B1 (en) | 1998-07-14 | 2001-07-10 | Wilden Pump & Engineering Co. | Air driven pumps and components therefor |
US6206644B1 (en) * | 1999-08-06 | 2001-03-27 | Microbar Systems, Inc. | Compact dual pump |
CA2387373A1 (en) | 1999-11-02 | 2001-06-28 | Tokyo Electron Limited | Method and apparatus for supercritical processing of a workpiece |
US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
US6561774B2 (en) * | 2000-06-02 | 2003-05-13 | Tokyo Electron Limited | Dual diaphragm pump |
WO2002009147A2 (en) | 2000-07-26 | 2002-01-31 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
DE10051869A1 (de) * | 2000-10-19 | 2002-04-25 | Wieder Gmbh | Durchflussmesser |
US7001468B1 (en) | 2002-02-15 | 2006-02-21 | Tokyo Electron Limited | Pressure energized pressure vessel opening and closing device and method of providing therefor |
US6722642B1 (en) | 2002-11-06 | 2004-04-20 | Tokyo Electron Limited | High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism |
US7021635B2 (en) * | 2003-02-06 | 2006-04-04 | Tokyo Electron Limited | Vacuum chuck utilizing sintered material and method of providing thereof |
US7077917B2 (en) * | 2003-02-10 | 2006-07-18 | Tokyo Electric Limited | High-pressure processing chamber for a semiconductor wafer |
US7225820B2 (en) * | 2003-02-10 | 2007-06-05 | Tokyo Electron Limited | High-pressure processing chamber for a semiconductor wafer |
US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
US20050035514A1 (en) * | 2003-08-11 | 2005-02-17 | Supercritical Systems, Inc. | Vacuum chuck apparatus and method for holding a wafer during high pressure processing |
US20050067002A1 (en) * | 2003-09-25 | 2005-03-31 | Supercritical Systems, Inc. | Processing chamber including a circulation loop integrally formed in a chamber housing |
CN100430276C (zh) * | 2003-11-11 | 2008-11-05 | 西拉工业控股有限公司 | 具有转矩传感器的电机致动装置 |
US7186093B2 (en) * | 2004-10-05 | 2007-03-06 | Tokyo Electron Limited | Method and apparatus for cooling motor bearings of a high pressure pump |
US7250374B2 (en) | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
US7140393B2 (en) | 2004-12-22 | 2006-11-28 | Tokyo Electron Limited | Non-contact shuttle valve for flow diversion in high pressure systems |
US7435447B2 (en) | 2005-02-15 | 2008-10-14 | Tokyo Electron Limited | Method and system for determining flow conditions in a high pressure processing system |
US7291565B2 (en) | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US7380984B2 (en) | 2005-03-28 | 2008-06-03 | Tokyo Electron Limited | Process flow thermocouple |
US7494107B2 (en) | 2005-03-30 | 2009-02-24 | Supercritical Systems, Inc. | Gate valve for plus-atmospheric pressure semiconductor process vessels |
US7686820B2 (en) * | 2005-04-14 | 2010-03-30 | Ethicon Endo-Surgery, Inc. | Surgical clip applier ratchet mechanism |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
KR100675490B1 (ko) * | 2005-09-16 | 2007-01-30 | (주)일지테크 | 파레트 이송장치 |
US7603855B2 (en) * | 2007-04-10 | 2009-10-20 | Illinois Tool Works Inc. | Valve with magnetic detents |
US7603854B2 (en) * | 2007-04-10 | 2009-10-20 | Illinois Tool Works Inc. | Pneumatically self-regulating valve |
US7587897B2 (en) * | 2007-04-10 | 2009-09-15 | Illinois Tool Works Inc. | Magnetically sequenced pneumatic motor |
DE102007020361A1 (de) * | 2007-04-30 | 2008-11-06 | Marco Systemanalyse Und Entwicklung Gmbh | Ventil |
GB2478784B (en) * | 2010-03-19 | 2017-01-25 | Finishing Brands Holdings Inc | Improvements in diaphragm pumps |
US9004881B2 (en) | 2012-04-20 | 2015-04-14 | Simmons Development, Llc | Modular fluid-driven diaphragm pump and related methods |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
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US215026A (en) * | 1879-05-06 | Improvement in direct-acting pumps | ||
US405939A (en) * | 1889-06-25 | Valve-gear | ||
US150317A (en) * | 1874-04-28 | goehring | ||
US374530A (en) * | 1887-12-06 | Piston meter | ||
US1114008A (en) * | 1913-10-31 | 1914-10-20 | Johan Kofoed | Duplex steam-pump. |
US1150452A (en) * | 1914-10-14 | 1915-08-17 | Alexander Walker Reid | Milking-machine pulsator. |
US1623028A (en) * | 1924-08-09 | 1927-03-29 | Barett | Automatic windshield cleaner |
US1830354A (en) * | 1929-11-16 | 1931-11-03 | Stewart Warner Corp | Windshield wiper |
US2124735A (en) * | 1935-05-20 | 1938-07-26 | Automotive Devices Inc | Fluid pressure motor |
US2075959A (en) * | 1936-03-30 | 1937-04-06 | Charles S Previti | Windshield wiper |
US2208772A (en) * | 1938-03-11 | 1940-07-23 | Robert M Morley | Windshield wiper motor |
US2613652A (en) * | 1947-01-06 | 1952-10-14 | Lynn J Ziegelmeyer | Pressure operated reciprocating valve |
US2678029A (en) * | 1948-10-23 | 1954-05-11 | Sprague Devices Inc | Windshield wiper motor |
US2610649A (en) * | 1949-04-18 | 1952-09-16 | Gear Grinding Mach Co | Snap-action valve |
US2792785A (en) * | 1954-05-24 | 1957-05-21 | Ernest R Hayden | Double-action pump |
US2813514A (en) * | 1955-04-28 | 1957-11-19 | H J Thiessen | Pneumatic saw and the like |
US2898865A (en) * | 1955-06-07 | 1959-08-11 | Thompson Ramo Wooldridge Inc | Vacuum driven automotive fuel pump |
US2951382A (en) * | 1956-09-15 | 1960-09-06 | Ljungmans Verkst Er Ab | Snap action device |
US2977040A (en) * | 1957-08-09 | 1961-03-28 | Dayton Rogers Mfg Co | Pneumatic pressure boosting apparatus |
US3016055A (en) * | 1958-03-20 | 1962-01-09 | Frank A Oldenburg | Pulsating stomach pumping apparatus and the like |
US3167083A (en) * | 1961-09-05 | 1965-01-26 | Peninsular Distributing Compan | Sequence valve |
US3148593A (en) * | 1962-06-04 | 1964-09-15 | David H Lipsey | Fluid actuated reciprocating mechanism and controls therefor |
US3448756A (en) * | 1964-03-11 | 1969-06-10 | Alfa Laval Ab | Automatic pulsator |
US3402642A (en) * | 1965-10-23 | 1968-09-24 | Huck Mfg Co | Reciprocating valve and piston |
US3584653A (en) * | 1967-10-12 | 1971-06-15 | Omron Tateisi Electronics Co | Fluid switching device |
US3700359A (en) * | 1971-05-18 | 1972-10-24 | Science Inc | Explosion-proof liquid fuel pump |
US3782863A (en) * | 1971-11-16 | 1974-01-01 | Rupp Co Warren | Slide valve apparatus |
US4008984A (en) * | 1975-10-23 | 1977-02-22 | Scholle William R | Pump apparatus |
US4123204A (en) * | 1977-01-03 | 1978-10-31 | Scholle Corporation | Double-acting, fluid-operated pump having pilot valve control of distributor motor |
DE2726667A1 (de) * | 1977-06-14 | 1978-12-21 | Licentia Gmbh | Oberflaechenpassiviertes halbleiterbauelement und verfahren zum herstellen desselben |
US4354806A (en) * | 1980-01-29 | 1982-10-19 | The Coca-Cola Company | Pneumatically powerable double acting positive displacement fluid pump |
US4682937A (en) * | 1981-11-12 | 1987-07-28 | The Coca-Cola Company | Double-acting diaphragm pump and reversing mechanism therefor |
AU554014B2 (en) * | 1981-11-12 | 1986-08-07 | Coca-Cola Company, The | Check valve cartridge |
US4597414A (en) * | 1982-06-16 | 1986-07-01 | Schmelzer Corporation | Two position control valve |
US4540349A (en) * | 1984-05-16 | 1985-09-10 | Du Benjamin R | Air driven pump |
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1992
- 1992-03-27 US US07/858,675 patent/US5240390A/en not_active Expired - Lifetime
- 1992-03-31 TW TW81102513A patent/TW218405B/zh active
- 1992-07-13 AU AU19623/92A patent/AU646171B2/en not_active Ceased
- 1992-08-04 CN CN92109245A patent/CN1077009A/zh active Pending
- 1992-08-18 JP JP24267892A patent/JPH05288159A/ja active Pending
- 1992-09-28 KR KR1019920017707A patent/KR970009954B1/ko not_active IP Right Cessation
-
1993
- 1993-04-21 US US08/051,084 patent/US5280808A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5240390A (en) | 1993-08-31 |
AU646171B2 (en) | 1994-02-10 |
KR970009954B1 (ko) | 1997-06-19 |
KR930020021A (ko) | 1993-10-19 |
CN1077009A (zh) | 1993-10-06 |
JPH05288159A (ja) | 1993-11-02 |
AU1962392A (en) | 1993-09-30 |
US5280808A (en) | 1994-01-25 |