TW202509527A - 積層膜 - Google Patents

積層膜 Download PDF

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Publication number
TW202509527A
TW202509527A TW113126037A TW113126037A TW202509527A TW 202509527 A TW202509527 A TW 202509527A TW 113126037 A TW113126037 A TW 113126037A TW 113126037 A TW113126037 A TW 113126037A TW 202509527 A TW202509527 A TW 202509527A
Authority
TW
Taiwan
Prior art keywords
film
layer
chamber
substrate film
plasma
Prior art date
Application number
TW113126037A
Other languages
English (en)
Chinese (zh)
Inventor
中島一裕
山下紗也加
待永広宣
Original Assignee
日商日東電工股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日東電工股份有限公司 filed Critical 日商日東電工股份有限公司
Publication of TW202509527A publication Critical patent/TW202509527A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
TW113126037A 2023-07-11 2024-07-11 積層膜 TW202509527A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023113722A JP7730864B2 (ja) 2023-07-11 2023-07-11 積層フィルム
JP2023-113722 2023-07-11

Publications (1)

Publication Number Publication Date
TW202509527A true TW202509527A (zh) 2025-03-01

Family

ID=94215812

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113126037A TW202509527A (zh) 2023-07-11 2024-07-11 積層膜

Country Status (5)

Country Link
JP (1) JP7730864B2 (https=)
KR (1) KR20260037625A (https=)
CN (1) CN121398961A (https=)
TW (1) TW202509527A (https=)
WO (1) WO2025013857A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4350263B2 (ja) * 2000-04-03 2009-10-21 三菱伸銅株式会社 金属化ポリイミドフィルムおよびその製造方法
JP2005017707A (ja) * 2003-06-26 2005-01-20 Nitto Denko Corp 反射防止フィルム、偏光板、光学素子および画像表示装置
KR102517501B1 (ko) * 2020-07-13 2023-04-03 닛토덴코 가부시키가이샤 방오층이 형성된 광학 필름
CN115803194A (zh) * 2020-07-13 2023-03-14 日东电工株式会社 带防污层的光学薄膜
WO2022014696A1 (ja) * 2020-07-17 2022-01-20 デクセリアルズ株式会社 光学積層体、物品、光学積層体の製造方法
JP7114669B2 (ja) * 2020-10-15 2022-08-08 日東電工株式会社 反射防止フィルムおよび画像表示装置
KR20260035683A (ko) * 2023-07-11 2026-03-13 닛토덴코 가부시키가이샤 반사 방지 필름

Also Published As

Publication number Publication date
JP7730864B2 (ja) 2025-08-28
JP2025011543A (ja) 2025-01-24
CN121398961A (zh) 2026-01-23
WO2025013857A1 (ja) 2025-01-16
KR20260037625A (ko) 2026-03-17

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