JP7730864B2 - 積層フィルム - Google Patents

積層フィルム

Info

Publication number
JP7730864B2
JP7730864B2 JP2023113722A JP2023113722A JP7730864B2 JP 7730864 B2 JP7730864 B2 JP 7730864B2 JP 2023113722 A JP2023113722 A JP 2023113722A JP 2023113722 A JP2023113722 A JP 2023113722A JP 7730864 B2 JP7730864 B2 JP 7730864B2
Authority
JP
Japan
Prior art keywords
film
layer
chamber
plasma
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023113722A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025011543A5 (https=
JP2025011543A (ja
Inventor
一裕 中島
紗也加 山下
広宣 待永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2023113722A priority Critical patent/JP7730864B2/ja
Priority to PCT/JP2024/024748 priority patent/WO2025013857A1/ja
Priority to KR1020257037564A priority patent/KR20260037625A/ko
Priority to CN202480042594.4A priority patent/CN121398961A/zh
Priority to TW113126037A priority patent/TW202509527A/zh
Publication of JP2025011543A publication Critical patent/JP2025011543A/ja
Publication of JP2025011543A5 publication Critical patent/JP2025011543A5/ja
Application granted granted Critical
Publication of JP7730864B2 publication Critical patent/JP7730864B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
JP2023113722A 2023-07-11 2023-07-11 積層フィルム Active JP7730864B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2023113722A JP7730864B2 (ja) 2023-07-11 2023-07-11 積層フィルム
PCT/JP2024/024748 WO2025013857A1 (ja) 2023-07-11 2024-07-09 積層フィルム
KR1020257037564A KR20260037625A (ko) 2023-07-11 2024-07-09 적층 필름
CN202480042594.4A CN121398961A (zh) 2023-07-11 2024-07-09 层叠膜
TW113126037A TW202509527A (zh) 2023-07-11 2024-07-11 積層膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023113722A JP7730864B2 (ja) 2023-07-11 2023-07-11 積層フィルム

Publications (3)

Publication Number Publication Date
JP2025011543A JP2025011543A (ja) 2025-01-24
JP2025011543A5 JP2025011543A5 (https=) 2025-01-31
JP7730864B2 true JP7730864B2 (ja) 2025-08-28

Family

ID=94215812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023113722A Active JP7730864B2 (ja) 2023-07-11 2023-07-11 積層フィルム

Country Status (5)

Country Link
JP (1) JP7730864B2 (https=)
KR (1) KR20260037625A (https=)
CN (1) CN121398961A (https=)
TW (1) TW202509527A (https=)
WO (1) WO2025013857A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001277424A (ja) 2000-04-03 2001-10-09 Mitsubishi Shindoh Co Ltd 金属化ポリイミドフィルムおよびその製造方法
JP2005017707A (ja) 2003-06-26 2005-01-20 Nitto Denko Corp 反射防止フィルム、偏光板、光学素子および画像表示装置
WO2022014571A1 (ja) 2020-07-13 2022-01-20 日東電工株式会社 防汚層付き光学フィルム
WO2022014567A1 (ja) 2020-07-13 2022-01-20 日東電工株式会社 防汚層付き光学フィルム
WO2022014696A1 (ja) 2020-07-17 2022-01-20 デクセリアルズ株式会社 光学積層体、物品、光学積層体の製造方法
JP2022065437A (ja) 2020-10-15 2022-04-27 日東電工株式会社 反射防止フィルムおよび画像表示装置
WO2025013860A1 (ja) 2023-07-11 2025-01-16 日東電工株式会社 反射防止フィルム

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001277424A (ja) 2000-04-03 2001-10-09 Mitsubishi Shindoh Co Ltd 金属化ポリイミドフィルムおよびその製造方法
JP2005017707A (ja) 2003-06-26 2005-01-20 Nitto Denko Corp 反射防止フィルム、偏光板、光学素子および画像表示装置
WO2022014571A1 (ja) 2020-07-13 2022-01-20 日東電工株式会社 防汚層付き光学フィルム
WO2022014567A1 (ja) 2020-07-13 2022-01-20 日東電工株式会社 防汚層付き光学フィルム
WO2022014696A1 (ja) 2020-07-17 2022-01-20 デクセリアルズ株式会社 光学積層体、物品、光学積層体の製造方法
JP2022065437A (ja) 2020-10-15 2022-04-27 日東電工株式会社 反射防止フィルムおよび画像表示装置
WO2025013860A1 (ja) 2023-07-11 2025-01-16 日東電工株式会社 反射防止フィルム

Also Published As

Publication number Publication date
JP2025011543A (ja) 2025-01-24
CN121398961A (zh) 2026-01-23
WO2025013857A1 (ja) 2025-01-16
TW202509527A (zh) 2025-03-01
KR20260037625A (ko) 2026-03-17

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