TW202419208A - 基板處理裝置及基板處理方法 - Google Patents
基板處理裝置及基板處理方法 Download PDFInfo
- Publication number
- TW202419208A TW202419208A TW112122094A TW112122094A TW202419208A TW 202419208 A TW202419208 A TW 202419208A TW 112122094 A TW112122094 A TW 112122094A TW 112122094 A TW112122094 A TW 112122094A TW 202419208 A TW202419208 A TW 202419208A
- Authority
- TW
- Taiwan
- Prior art keywords
- aqueous solution
- concentration
- substrate
- section
- hydrofluoric acid
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 147
- 238000012545 processing Methods 0.000 title claims abstract description 84
- 238000003672 processing method Methods 0.000 title claims description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 133
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 47
- 239000007864 aqueous solution Substances 0.000 claims abstract description 43
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 30
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 20
- 238000011084 recovery Methods 0.000 claims abstract description 19
- 238000003860 storage Methods 0.000 claims description 25
- 230000001105 regulatory effect Effects 0.000 claims description 20
- 238000005498 polishing Methods 0.000 claims description 17
- 238000000227 grinding Methods 0.000 claims description 10
- 230000001276 controlling effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 abstract description 10
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000005530 etching Methods 0.000 description 64
- 239000007788 liquid Substances 0.000 description 60
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 35
- 230000032258 transport Effects 0.000 description 29
- 238000012546 transfer Methods 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 15
- 238000004140 cleaning Methods 0.000 description 14
- 235000011007 phosphoric acid Nutrition 0.000 description 11
- 230000007704 transition Effects 0.000 description 9
- 239000002699 waste material Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022-101701 | 2022-06-24 | ||
JP2022101701 | 2022-06-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW202419208A true TW202419208A (zh) | 2024-05-16 |
Family
ID=89379764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW112122094A TW202419208A (zh) | 2022-06-24 | 2023-06-14 | 基板處理裝置及基板處理方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2023248860A1 (enrdf_load_stackoverflow) |
TW (1) | TW202419208A (enrdf_load_stackoverflow) |
WO (1) | WO2023248860A1 (enrdf_load_stackoverflow) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030021183A (ko) * | 2000-06-30 | 2003-03-12 | 엠이엠씨 일렉트로닉 머티리얼즈 인코포레이티드 | 실리콘 웨이퍼 에칭 공정 |
JP4656923B2 (ja) * | 2004-12-01 | 2011-03-23 | シャープ株式会社 | シリコン結晶基板の製造方法と製造装置 |
KR20080022917A (ko) * | 2006-09-08 | 2008-03-12 | 삼성전자주식회사 | 식각액 공급장치, 식각장치 및 식각방법 |
JP4995237B2 (ja) * | 2009-06-22 | 2012-08-08 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
JP2013065614A (ja) * | 2011-09-15 | 2013-04-11 | Pre-Tech At:Kk | シリコンウェーハのウェットエッチング方法及びウェットエッチング装置 |
JP2018147908A (ja) * | 2015-07-27 | 2018-09-20 | 東京エレクトロン株式会社 | 基板処理方法および基板処理装置 |
-
2023
- 2023-06-13 JP JP2024528869A patent/JPWO2023248860A1/ja active Pending
- 2023-06-13 WO PCT/JP2023/021837 patent/WO2023248860A1/ja active Application Filing
- 2023-06-14 TW TW112122094A patent/TW202419208A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2023248860A1 (ja) | 2023-12-28 |
JPWO2023248860A1 (enrdf_load_stackoverflow) | 2023-12-28 |
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