TW202402431A - Processing furnace - Google Patents

Abstract

The present application discloses a processing furnace including: a furnace chamber including a heating zone and a cooling zone; at least one heat exchange device including a heat exchange channel, into which an external air is capable of entering from a heat exchange channel inlet and through which the external air flows and then flows out from a heat exchange channel outlet; wherein the heat exchange device is configured to enable gas in the heating zone to exchange heat with the air in the heat exchange channel. With the processing furnace of the present application, it is possible to conveniently adjust the temperature of the furnace chamber gas and the heat exchange device does not affect the composition of the furnace chamber gas, eliminating the need to adjust the gas content after lowering the gas temperature in the furnace chamber, which is particularly suitable for processing furnaces where the working gas is substantially inert.

Description

processing furnace

This case relates to a processing furnace, and in particular to a processing furnace including a heating zone.

The furnace of some processing furnaces includes a heating zone and a cooling zone. The processing components to be processed are transported by a conveying device in the furnace and pass through the heating zone and the cooling zone in sequence to complete the processing procedures of heating and cooling. For different processing elements, there may be different heat treatment temperature requirements. Generally speaking, it is necessary to adjust the temperature in the furnace to a predetermined temperature before processing the processing components.

At least one purpose of this case is to provide a processing furnace that can easily adjust the temperature in the furnace. The processing furnace includes: a furnace including a heating zone and a cooling zone; at least one heat exchange device, the heat exchange device includes a heat exchanger. channel, the heat exchange channel is arranged in the heating area, the heat exchange channel has a heat exchange channel inlet and a heat exchange channel outlet, the heat exchange channel inlet and the heat exchange channel outlet are in fluid communication with the outside world, so as to so that external air can enter the heat exchange channel from the inlet of the heat exchange channel, flow through the heat exchange channel and flow out from the outlet of the heat exchange channel; wherein the heat exchange device is configured to enable the heating The gas in the zone exchanges heat with the air in the heat exchange channel.

According to the above content, the heat exchange device includes a heat exchange tube, the heat exchange tube includes a tube wall, the heat exchange channel is surrounded by the tube wall, and the tube wall is in contact with the gas in the heating zone to This allows the gas in the heating zone and the air in the heat exchange channel to undergo heat exchange through the tube wall.

According to the above content, the furnace includes an internal gas circulation channel, the furnace is configured such that the gas in the furnace flows in the internal gas circulation channel, and the heat exchange tube is disposed in the internal gas circulation channel to Perform heat exchange with the gas in the gas internal circulation channel.

According to the above content, the furnace includes an upper furnace and a lower furnace, and the heat exchange tube is arranged in the upper furnace.

According to the above content, the gas internal circulation channel includes an upper suction channel, an upper exhaust channel, a lower suction channel and a lower exhaust channel. The gas internal circulation channel includes an upper suction channel, an upper exhaust channel, a lower suction channel and a lower exhaust channel. air channel and lower exhaust channel, the upper air suction channel and the upper exhaust channel are provided in the upper furnace, the lower air suction channel and the lower exhaust channel are provided in the lower furnace, The heat exchange tube is arranged in the upper suction channel.

According to the above content, the processing furnace further includes an air discharge pipe, and the heat exchange channel outlet of each heat exchange device is connected to the air discharge pipe, so that the air after heat exchange is merged and discharged.

According to the above content, the heat exchange device further includes a fan configured to drive the air to flow in the heat exchange channel, so that the air flowing in from the inlet of the heat exchange channel can flow from the heat exchange channel. Outflow from the channel exit.

According to the above content, the heat exchange device further includes a plurality of fins, which are arranged in the heat exchange tube and connected to the tube wall.

According to the above content, the heat exchange tube includes a first side tube and a second side tube arranged side by side. One end of the first side tube and the second side tube are connected, and the other ends respectively form the heat exchanger tube. The heat channel inlet and the heat exchange channel outlet, wherein the fins are respectively arranged on the first side tube and the second side tube along the direction in which the first side tube and the second side tube extend. Two lateral tubes.

According to the above content, the heating area includes several heating sub-areas, wherein one heat exchange device is provided in each heating sub-area.

Through the following description of this case with reference to the accompanying drawings, other purposes and advantages of this case will be apparent and can help to have a comprehensive understanding of this case.

Various specific embodiments of the present invention will be described below with reference to the accompanying drawings that form a part of this specification. It should be understood that although terms indicating direction are used in this case, such as "front", "back", "upper", "lower", "left", "right", "top", "bottom", "inner" ”, “outside”, etc. describe various example structural parts and elements of the present invention, but these terms are used here for convenience of explanation only and are determined based on the orientation of the examples shown in the drawings. Since the embodiments disclosed in this case can be arranged in different directions, these terms indicating directions are for illustration only and should not be regarded as limiting.

Figure 1 is a schematic diagram of the principle of the processing furnace 100 in this case. In the manufacturing process of printed circuit boards, a process called "reflow soldering" is usually used to mount electronic components onto the circuit board. In a typical reflow soldering process, solder paste (eg, solder paste) is deposited onto selected areas on a circuit board, and the leads of one or more electronic components are inserted into the deposited solder paste. The circuit board then passes through a reflow oven where the solder paste is reflowed in a heated zone (i.e., heated to melting or reflow temperature) and then cooled in a cooled zone to form the conductors that electrically and mechanically connect the electronic components. Connect to solder points on the circuit board. The term "circuit board" as used herein includes any type of electronic component substrate component, including, for example, a wafer substrate. In this embodiment, the processing furnace 100 is a reflow furnace for detailed description. Those skilled in the art can understand that in other embodiments, the processing furnace can also be a sintering furnace or other processing furnace, as long as it includes a heating zone.

As shown in Figure 1, the processing furnace 100 has a furnace 110. The furnace 110 includes a heating zone 101 and a cooling zone 105. The heating zone 101 and the cooling zone 105 are arranged side by side along the length direction L of the furnace 110. A heating element (see heating element 211 in FIG. 2A ) is provided in the heating zone 101 so that the gas in the heating zone 101 can be heated. Similarly, cooling elements (not shown in the figure) are provided in the cooling zone 105 so that the gas in the cooling zone 105 can be cooled.

The processing furnace 100 also includes a conveyor channel 112 and a conveyor 118 . The furnace 110 includes an upper furnace 102 and a lower furnace 104 arranged oppositely. The conveying channel 112 is provided between the upper furnace 102 and the lower furnace 104 of the furnace 110 and extends along the length direction L of the furnace 110, passing through the heating zone 101 and the cooling zone in sequence. District 105. The conveying device 118 is used to convey the processing element 103 to be processed along the conveying channel 112 through the heating zone 101 and the cooling zone 105 of the furnace 110, for example, the processing element 103 to be processed is sent into the furnace 110 from the left end of the conveying channel 112, After welding is performed along the length direction L of the furnace 110 (ie, the extension direction of the conveying channel 112) through the heating zone 101 and the cooling zone 105, the processed processing element 103 is output from the right end of the conveying channel 112.

The processing furnace 100 also includes a pair of barrier boxes 108. The pair of barrier boxes 108 are respectively disposed at the left and right ends of the furnace 110, that is, outside the heating zone 101 and the cooling zone 105. When the processing furnace 100 uses a basically inert gas (such as nitrogen) as the working gas, a pair of barrier boxes 108 are used to prevent the heating zone 101 and the cooling zone 105 in the furnace 110 from being connected to the external environment to prevent the influence of air in the external environment. Welding quality.

The processing furnace 100 also includes a barrier exhaust zone 109 disposed between the heating zone 101 and the cooling zone 105 . The barrier exhaust zone 109 can extract or discharge gas from the furnace 110, thereby preventing or reducing the gas containing volatile pollutants from the heating zone 101 from entering the cooling zone 105, and serving as a temperature isolation zone to separate the high-temperature heating zone 101 and the low-temperature zone. The cooling zone 105 is isolated.

In this embodiment, the heating area 101 includes a plurality of heating sub-regions 115 arranged side by side. Each heating sub-region 115 is independently provided with a heating element (see the heating element 211 in FIG. 2A ) to heat each heating sub-region 115 . The gas in sub-region 115 is heated to different temperatures. Specifically, the gas temperature in each heating sub-region 115 gradually increases from left to right. That is to say, the gas temperature in the heating sub-region 115 near the left end of the furnace 110 is the lowest, and the gas temperature in the heating sub-region 115 near the barrier exhaust region 109 is the highest.

Similarly, the cooling zone 105 also includes a plurality of cooling sub-areas 117 arranged side by side, and each cooling zone sub-area 117 is independently provided with a cooling element (not shown in the figure) to separate each cooling zone sub-area. The gases in 117 are cooled to different temperatures. Specifically, the gas temperature in each cooling zone sub-region 117 gradually decreases from left to right. That is to say, the gas temperature in the cooling zone sub-area 117 close to the barrier exhaust zone 109 is the highest, and the gas temperature in the cooling zone sub-area 117 close to the right end of the furnace 110 is the lowest.

Therefore, when the processing element 103 to be processed is sent into the furnace 110 from the left end of the conveying channel 112 by the conveying device 118, the processing element 103 is first heated in each heating sub-region 115, so that the solder paste on the processing element 103 is The flux gradually vaporizes until it reaches the rightmost heating sub-area 115, where the flux can be basically completely vaporized. The processing component 103 is then gradually cooled in each cooling zone sub-region 117, so that the solder paste on the processing component 103 is cooled and solidified into solder joints, thereby connecting the electronic component to the circuit board to complete the processing procedure. Finally, the processing element 103 is transported out of the furnace 110 from the right end of the transport channel 112 by the transport device 118 .

The processing furnace 100 also includes several heat exchange devices 120. The heat exchange devices 120 are used to exchange heat between the gas in the furnace 110 (hereinafter referred to as the furnace gas) and the outside air to cool the heated furnace gas in the furnace 110. Specifically, the heat exchange device 120 has a heat exchange channel 123, and the heat exchange channel 123 has a heat exchange channel inlet 121 and a heat exchange channel outlet 122. The heat exchange channel 123 is provided inside the furnace 110 so that the outside air flowing through the heat exchange channel 123 can exchange heat with the furnace gas. The heat exchange channel inlet 121 is connected to the outside world, so that the outside air can enter the heat exchange channel 123 from the heat exchange channel inlet 121 . The heat exchange channel outlet 122 is connected to the air discharge pipe 125 so that the heat-exchanged air flowing through the heat exchange channel 123 can be combined in the air discharge pipe 125 and then discharged together. In this embodiment, a heat exchange device 120 is provided in each heating sub-region 115 so that the gas in each heating sub-region 115 can exchange heat with the outside air through the heat exchange device 120 . As an example, each heat exchange device 120 is disposed in the corresponding heating sub-region 115 of the upper furnace 102 .

2A-2C illustrate the specific structure of one embodiment of the heating zone 101 for explaining the external structure of the heating zone 101. 2A and 2B illustrate three-dimensional structural views of the three heating sub-regions 115 in the heating area 101 at two angles, and FIG. 2C illustrates the top view of FIG. 2A. As shown in FIGS. 2A to 2C , three heating sub-regions 115 are arranged side by side along the length direction L of the furnace 110 and are supported by brackets 216 . The structure of each heating sub-region 115 is substantially the same. It will be understood by those skilled in the art that although the heating zone 101 shown in the figure includes three heating sub-regions 115, in other embodiments, the heating zone 101 may include more or fewer heating sub-regions 115. The conveying channel 112 runs through the three heating sub-areas 115 and forms an inlet end 206 at the front end of the heating area 101 and an outlet end 207 at the rear end of the heating area 101 . The processing element 103 can be conveyed by the conveying device 118 from the inlet end 206 into the conveying channel 112, passes through the three heating sub-areas 115 in sequence, and then is output from the outlet end 207.

Each heating sub-area 115 includes a respective heating element 211 and a pair of fans 213 respectively disposed in the upper furnace 102 and the lower furnace 104 . The heating element 211 is a heating rod. The heating rod is inserted into each heating sub-region 115 from the left side in the width direction W of the furnace 110 (for example, the left side in FIG. 2A ) to the right, and the furnace gas in each heating sub-region 115 is separately heated. Heat. In this embodiment, the heating element 211 is provided in both the upper furnace 102 and the lower furnace 104. Those skilled in the art can understand that the heating element 211 can also be provided in only one of the upper furnace 102 or the lower furnace 104. . A pair of fans 213 are respectively provided at the top and bottom of each heating sub-area 115 for driving the furnace gas flow inside each heating sub-area 115 to form respective gas internal circulation channels (see the gas in Figures 3A and 3B Internal circulation channel 335). The furnace gas in each heating sub-region 115 circulates in the respective internal gas circulation channel 335 so that the furnace gas can be uniformly heated by the heating element 211 .

The heat exchange device 120 is inserted into each heating sub-region 115 from the right side in the width direction W of the furnace 110 (for example, the right side in FIG. 2A ) to the left. The heat exchange passage 123 of the heat exchange device 120 extends into the heating sub-area 115 to exchange heat with the furnace gas in the heating sub-area 115 . The heat exchange channel inlet 121 and the heat exchange channel outlet 122 of the heat exchange device 120 extend outside the heating sub-area 115 and are connected to the outside world. In this embodiment, the heat exchange device 120 also includes a centrifugal fan 214, which is disposed at the entrance 121 of the heat exchange channel. Driven by the centrifugal fan 214, the outside air enters the heat exchange channel 123 from the heat exchange channel inlet 121, flows through the heat exchange channel 123 to exchange heat with the furnace gas in the heating sub-area 115, and then flows from the heat exchange channel outlet 122 flow out, merge in the air discharge pipe 125 and then be discharged. In this embodiment, the heat exchange device 120 of this case can cool the gas temperature in the heating sub-area 115 and heat the air flowing through the heat exchange channel 123, so the air discharged from the air discharge pipe 215 may have a higher temperature. Those skilled in the art can dissipate or cool the air discharged from the air discharge pipe 215 according to actual needs before discharging it to the outside.

3A and 3B illustrate cross-sectional views of the heating zone 101 in FIGS. 2A-2C along lines A-A and B-B to illustrate the internal structure of the heating zone 101, and FIG. 3C illustrates an embodiment of the upper partition 341. structure. For ease of display, only a pair of rails of the conveying device 118 are shown in FIGS. 3A and 3B , and other components of the conveying device 118 are hidden.

As shown in FIGS. 3A to 3C , the track of the conveying device 118 extends along the length direction of the furnace 110 to convey the processing element 103 through each heating sub-region 115 in sequence. Each heating sub-region 115 includes an upper partition 341 and a lower partition 342. By providing the upper partition 341 and the lower partition 342, the fans 213 of the upper furnace 102 and the lower furnace 104 can drive the furnace gas in the heating sub-region 115. Circular flow to form an internal gas circulation channel 335. Specifically, the gas internal circulation channel 335 includes an upper air suction channel 333 and an upper exhaust channel 331 formed inside the upper furnace 102 , and a lower air suction channel 334 and a lower exhaust channel 332 formed inside the lower furnace 104 . Figure 3A illustrates the upper exhaust channel 331 and the lower exhaust channel 332, and Figure 3B illustrates the upper suction channel 333 and the lower suction channel 334. In this embodiment, the upper partition 341 and the lower partition 342 have substantially the same shape. As further shown in FIG. 3C , the upper partition 341 is in the shape of a box with openings 345 at both ends in the width direction W, and has a certain distance from the furnace 110 in both the length direction L and the width direction W of the furnace. Furnace gas flows through.

As shown in FIG. 3A , in each heating sub-area 115 , the furnace gas discharged from the exhaust port of the fan 213 of the upper furnace 102 flows downward from both sides of the length direction L of the furnace 110 and is diffused through the porous plate 343 Blow uniformly to the processing element 103 in the conveying channel 112 to form an upper exhaust channel 331. And the furnace gas discharged from the exhaust port of the fan 213 of the lower furnace 104 flows upward from both sides of the length direction L of the furnace 110, is also diffused by the porous plate 344 and evenly blown to the processing element 103 in the conveying channel 112, so as to A lower exhaust passage 332 is formed.

As shown in FIG. 3B , in each heating sub-region 115 , the furnace gas in the conveying channel 112 flows upward from both sides of the width direction W of the furnace 110 , and then enters the upper partition toward the middle through the opening 345 of the upper partition 341 The air flows into the component 341 and is received by the suction port of the fan 213 of the upper furnace 102 to form an upper suction channel 333. Similarly, after the gas in the conveying channel 112 flows downward from both sides of the width direction W of the furnace 110, it then enters the lower partition 342 toward the middle through the opening 346 of the lower partition 342, and flows to the fan of the lower furnace 104. The suction port of 213 is received to form a lower suction channel 334. Therefore, driven by the fan 213, the furnace gas in each heating sub-area 115 can form an internal gas circulation channel 335, so that the furnace gas can circulate in each heating sub-area 115.

The heat exchange channel 123 of the heat exchange device 120 is arranged in the upper suction channel 333, so that the furnace gas in the internal gas circulation channel 335 needs to flow through the heat exchange channel 123 when circulating, and interacts with the air in the heat exchange channel 123. Heat exchange. In this embodiment, the heating element 211 is inserted into the boxes of the upper partition 341 and the lower partition 342 from the opening 345 of the upper partition 341 and the opening 346 of the lower partition 342 respectively. The heat exchange channel 123 of the heat exchange device 120 is disposed above the heating element 211 in the upper partition 341 . The heat exchange channel 123 of the heat exchange device 120 is not provided in the lower partition 342 .

Specifically, the heat exchange device 120 includes a heat exchange tube 326, the heat exchange tube 326 has a tube wall 327, and the heat exchange channel 123 is surrounded by the tube wall 327. The outer surface of the tube wall 327 can be in contact with the furnace gas, and the inner surface can be in contact with the air in the heat exchange channel 123, so that the air in the heat exchange channel 123 and the furnace gas outside the heat exchange channel 123 are heated through the tube wall 327. Exchange. In this embodiment, the tube wall is in a square shape to maximize the contact area between the heat exchange tube 326 and the furnace gas. As an example, the heat exchange tube 326 further includes a plurality of fins 328 , which are connected inside the tube wall 327 of the heat exchange tube 326 to increase the contact area between the heat exchange tube 326 and the air in the heat exchange channel 123 .

In some processing furnaces, rollers and other components related to the conveying device 118 usually need to be installed in the lower furnace 104 (not shown in the figure). Therefore, in this embodiment, the heat exchange tube 326 is arranged in the corresponding gas circulation channel in the upper furnace 102 335 in. Depending on the specific structure of the processing furnace, in other embodiments, heat exchange tubes 326 may also be provided in the gas internal circulation channel 335 corresponding to the lower furnace 104 .

Those skilled in the art can understand that this embodiment provides an embodiment of a structure of the upper partition and the lower partition. In other embodiments, the upper partition and the lower partition may have other shapes and structures, and correspondingly allow the gas internal circulation channel to have different flow paths. Moreover, the heat exchange device in this case is not limited to one structure in the embodiment. According to the different flow paths of the furnace gas, those skilled in the art can also design the heat exchange channels into different shapes and structures. It only needs to be ensured that when the furnace gas flows in the internal circulation channel, it needs to flow through the corresponding heat exchange tube and exchange heat with the air in the heat exchange channel.

4A-4E illustrate the specific structure of the heat exchange device 120. FIG. 4A illustrates a three-dimensional structural view of the heat exchange device 120, FIG. 4B illustrates an exploded perspective view of the heat exchange device 120 from another angle, FIG. 4C illustrates a top view of the heat exchange tube 326, and FIG. 4D and FIG. 4E respectively illustrate the heat exchange device 120. Cross-sectional views of the heat pipe 326 along lines C-C and D-D. As shown in Figures 4A to 4E, the heat exchange tube 326 is "U" shaped and includes a first side tube 436 and a second side tube 437 arranged side by side. The first side tube 436 and the second side tube 437 are Square tube shapes of approximately the same length. The proximal end of the first side tube 436 forms the heat exchange channel inlet 121, the proximal end of the second side tube 437 forms the heat exchange channel outlet 122, and the distal ends of the first side tube 436 and the second side tube 427 The ends are connected through connecting tubes 438 and are in fluid communication. The interiors of the first side tube 436 , the connecting tube 438 and the second side tube 427 are connected with each other to jointly form the heat exchange channel 123 . In this embodiment, the heat exchange channel inlet 121 is disposed at the end of the first side pipe 436 perpendicular to the extension direction of the heat exchange channel 123, so as to facilitate fluid communication with the air outlet end of the centrifugal fan 214, thereby receiving air from the centrifugal fan. The air discharged from the air outlet of 214. The heat exchange channel outlet 122 is arranged on the top of the second side pipe 437 perpendicularly to the heat exchange channel inlet 121 to facilitate connection with the heat exchange channel outlet 122 of other heat exchange devices 120 through the air discharge pipe 125 . 4D illustrates a cross-sectional view of the second side tube 437 and the heat exchange channel outlet 122, and FIG. 4E illustrates a cross-sectional view of the first side tube 436 and the heat exchange channel inlet 121.

The fins 328 are disposed inside the first side tube 436 and the second side tube 437 and extend along the length direction of the first side tube 436 and the second side tube 437 . One edge of each fin 328 is connected to the tube wall 327 of the first side tube 436 and the second side tube 437 , and the other edge is connected to the tube wall 327 of the corresponding first side tube 436 and the second side tube 437 . The walls 327 are spaced apart to allow air to flow through them. The fins 328 can increase the contact area between the tube wall 327 of the heat exchange tube 326 and the air in the tube, and by being connected to the tube wall 327, the fins 328 can also conduct heat from the tube wall 327.

In this embodiment, the centrifugal fan 214 is particularly suitable for driving outside air into the heat exchange passage 123 . The centrifugal fan 214 can increase the pressure of the outside air, so that the air entering the heat exchange channel 123 can smoothly exchange heat in the heat exchange channel 123 and be discharged. By setting the parameters of the centrifugal fan 214, the flow rate and flow rate of the outside air entering the heat exchange channel 123 can be adjusted, thereby facilitating the adjustment of the temperature of the furnace gas to a preset temperature through heat exchange. When there is no need to lower the furnace gas temperature, the centrifugal fan 214 can be turned off.

After the outside air is driven by the centrifugal fan 214 and enters the heat exchange channel 123 from the heat exchange channel inlet 121, it first flows from left to right along the length direction of the first side pipe 436 to the connecting pipe 438 as shown in Figure 4E, and then flows through the connecting pipe 438. Tube 438 flows into second side tube 437 . Then, as shown in FIG. 4D , it flows from right to left along the length direction of the second side tube 437 , and is finally discharged upward from the heat exchange channel outlet 122 .

In a processing furnace, different processing components may have different requirements for the temperature of the furnace gas. In particular, the temperature of the furnace gas in the heating zone will affect the processing quality of the processing components. Therefore, it is necessary to remove the furnace gas in the heating zone before processing. The temperature is adjusted to the predetermined temperature. When the processing furnace is continuously processing processing components, if the furnace gas temperature is lower than the predetermined temperature required for subsequent processing of components, the furnace gas temperature can be directly heated to the predetermined temperature through the heating element. When the furnace gas temperature is higher than the predetermined temperature required for subsequent processing of components, the furnace gas temperature needs to be lowered to the predetermined temperature. Generally speaking, since the temperature of the furnace gas is usually high and the temperature of the outside air is relatively low, reducing the temperature of the furnace gas is achieved by supplementing the outside air into the furnace. Although the temperature of the furnace gas can be reduced to a predetermined temperature through gas mixing, it will affect the composition of the furnace gas. For example, for some processing furnaces that operate with a substantially inert gas (such as nitrogen), supplementing the furnace with outside air will destroy the oxygen and nitrogen content of the furnace gas. Therefore, after the temperature of the furnace gas is reduced to a predetermined temperature required for subsequent processing of components, it is necessary to replenish inert gas such as nitrogen into the furnace, which is costly and time-consuming.

This case provides a processing furnace that can easily adjust the temperature of the furnace gas without affecting the composition of the furnace gas. The processing furnace in this case includes a heat exchange device for heat exchange between the furnace gas and the outside air, so as to reduce the temperature of the furnace gas in the heating zone through heat exchange. When the furnace gas temperature is higher than the predetermined temperature required for subsequent processing of components, the heat exchange device can be used to exchange heat between the high-temperature gas in the furnace and the low-temperature air outside, thereby achieving the purpose of reducing the furnace gas temperature to the predetermined temperature. When there is no need to lower the temperature of the furnace gas, turning off the centrifugal fan of the heat exchange device can stop the outside air from flowing in the heat exchange channel to avoid the temperature of the furnace gas from lowering, and selectively heat the furnace gas according to the predetermined temperature required for subsequent processing components. The element heats the furnace gases. Therefore, the processing furnace in this case can adjust the temperature of the furnace gas conveniently and quickly. It is especially suitable for situations where the temperature of the furnace gas needs to be quickly adjusted from high temperature to low temperature.

Moreover, the heat exchange device in the processing furnace of this case will not affect the composition of the furnace gas, and there is no need to adjust the gas content after lowering the gas temperature in the furnace. It is particularly suitable for processing furnaces that use basically inert gas as the working gas.

Although the present invention has been described in connection with the examples of embodiments outlined above, various alternatives, modifications, variations, improvements and/or substantial equivalents, whether known or otherwise, will occur to those of at least ordinary skill in the art. It may be obvious whether it is now or can be foreseen in the near future. In addition, the technical effects and/or technical problems described in this specification are illustrative rather than restrictive; therefore, the disclosure in this specification may be used to solve other technical problems and have other technical effects and/or can solve other technical problems. . Accordingly, the examples of embodiments of the present invention set forth above are intended to be illustrative rather than restrictive. Various changes may be made without departing from the spirit or scope of the case. It is therefore intended to include all known or earlier developed alternatives, modifications, variations, improvements and/or substantial equivalents.

100:Processing furnace 101:Heating area 102: Upper furnace 103: Processed components 104:Lower furnace 105: Cooling area 108: Barrier box 109: Block exhaust area 110:furnace 112:Conveyor channel 115: Heating sub-area 117: Cooling zone sub-area 118:Conveying device 120:Heat exchange device 121:Heat exchange channel entrance 122:Heat exchange channel exit 123:Heat exchange channel 125:Air discharge pipe 206: Entrance port 207:Export end 211:Heating element 213:Fan 214:Centrifugal fan 216: Bracket 326:Heat exchange tube 327: Pipe wall 328:Fins 331: Upper exhaust channel 332:Lower exhaust channel 333: Upper suction channel 334:Lower suction channel 335: Gas internal circulation channel 341: Upper partition 342:Lower partition 343:Porous plate 344:Porous plate 345:Open your mouth 346:Open your mouth 436:First side tube 437:Second side tube 438:Connecting pipe A-A:line B-B: line C-C: line D-D: Line L:Length direction W: Width direction

Figure 1 is a schematic diagram of the principle of the processing furnace in this case;

Figures 2A and 2B are three-dimensional structural views of an embodiment of the heating zone in Figure 1 from two angles;

Figure 2C is a top view of Figure 2A;

Figure 3A is a cross-sectional view of the heating zone shown in Figure 2C along line A-A;

Figure 3B is a cross-sectional view of the heating zone shown in Figure 2C along line B-B;

Figure 3C is a three-dimensional structural view of the upper partition in Figure 2C;

Figure 4A is a three-dimensional structural view of the heat exchange device in Figure 2A;

Figure 4B is an exploded view of Figure 4C;

Figure 4C is a top view of the heat exchange tube in Figure 4B;

Figure 4D is a cross-sectional view along line C-C of Figure 4C;

Figure 4E is a cross-sectional view along line D-D of Figure 4C.

Domestic storage information (please note in order of storage institution, date and number) without Overseas storage information (please note in order of storage country, institution, date, and number) without

102: Upper furnace

104:Lower furnace

112:Conveyor channel

121:Heat exchange channel entrance

122:Heat exchange channel exit

125:Air discharge pipe

213:Fan

214:Centrifugal fan

Claims (10)

A processing furnace, characterized by including: Furnace (110), which includes a heating zone (101) and a cooling zone (105); At least one heat exchange device (120), the heat exchange device (120) includes a heat exchange channel (123), the heat exchange channel (123) is arranged in the heating zone (101), the heat exchange channel (123) 123) It has a heat exchange channel inlet (121) and a heat exchange channel outlet (122). The heat exchange channel inlet (121) and the heat exchange channel outlet (122) are in fluid communication with the outside world, so that the outside air can flow from The heat exchange channel inlet (121) enters the heat exchange channel (123), flows through the heat exchange channel (123) and then flows out from the heat exchange channel outlet (122); The heat exchange device (120) is configured to enable heat exchange between the gas in the heating zone (101) and the air in the heat exchange channel (123). Processing furnace according to claim 1, wherein: The heat exchange device (120) includes a heat exchange tube (326), the heat exchange tube (326) includes a tube wall (327), the heat exchange channel (123) is surrounded by the tube wall (327), and the heat exchange channel (123) is surrounded by the tube wall (327). The tube wall (327) is in contact with the gas in the heating zone (101), so that the gas in the heating zone (101) and the air in the heat exchange channel (123) pass through the tube wall (327) ) for heat exchange. Processing furnace according to claim 2, wherein: The furnace (110) includes an internal gas circulation channel (335), and the furnace (110) is configured such that the gas in the furnace (110) flows in the internal gas circulation channel (335). The heat exchange tube (326) is arranged in the gas internal circulation channel (335) to perform heat exchange with the gas in the gas internal circulation channel (335). Processing furnace according to claim 3, wherein: The furnace (110) includes an upper furnace (102) and a lower furnace (104), and the heat exchange tube (326) is arranged in the upper furnace (102). Processing furnace according to claim 4, wherein: The gas internal circulation channel (335) includes an upper suction channel (333), an upper exhaust channel (331), a lower suction channel (334) and a lower exhaust channel (332). The gas internal circulation channel (335) ) includes an upper suction channel (333), an upper exhaust channel (331), a lower suction channel (334) and a lower exhaust channel (332), the upper suction channel (333) and the upper exhaust channel (331) is provided in the upper furnace (102), the lower suction channel (334) and the lower exhaust channel (332) are provided in the lower furnace (104), wherein the heat exchange tube ( 326) is provided in the upper suction channel (333). Processing furnace according to claim 1, wherein: The processing furnace (100) also includes an air discharge pipe (125), and the heat exchange channel outlet (122) of each heat exchange device (120) is connected to the air discharge pipe (125), so that the heat After the exchange is completed, the air is combined and discharged. Processing furnace according to claim 1, wherein: The heat exchange device (120) also includes a fan (214) configured to drive the air to flow in the heat exchange channel (123), so that the air flows from the heat exchange channel inlet (214). 121) The inflowing air can flow out from the heat exchange channel outlet (122). Processing furnace according to claim 2, wherein: The heat exchange device (120) also includes several fins (328), which are arranged in the heat exchange tube (326) and connected to the tube wall (327). Processing furnace according to claim 8, wherein: The heat exchange tube (326) includes a first side tube (436) and a second side tube (437) arranged side by side. The first side tube (436) and the second side tube (437) One end is connected, and the other end forms the heat exchange channel inlet (121) and the heat exchange channel outlet (122) respectively, wherein the fins (328) are along the first side tube (436) and the The extending directions of the second side tube (437) are respectively arranged in the first side tube (436) and the second side tube (437). Processing furnace according to claim 1, wherein: The heating area (101) includes several heating sub-areas (115), wherein one heat exchange device (120) is provided in each heating sub-area (115).

Images