TW202348939A - Furnace and sintering furnace comprising same - Google Patents

Abstract

The invention discloses a furnace and a sintering furnace comprising the same, and the furnace comprises a hearth which comprises an upper hearth and a lower hearth which are oppositely arranged; and a conveying device; wherein in the height direction of the hearth, the conveying space comprises a conveying device containing space and a machining element containing space, the conveying device containing space is located below the machining element containing space, and the conveying device is contained in the conveying device containing space; the machining element containing space is used for containing the machining element when the machining element is vertically borne on the conveying device. According to the furnace, the processing element can be vertically carried on the conveying belt and is heated or cooled through the hearth. Compared with a furnace which generally places the machining elements on a conveying belt in a flat laying mode, under the condition of the same conveying speed and length, the furnace can process more machining elements in unit time, and higher working efficiency is achieved.

Description

Furnaces and sintering furnaces including them

This case relates to a furnace, specifically a furnace used for drying photovoltaic devices.

In the production of photovoltaic devices such as crystalline silicon solar cell silicon wafers, a sintering furnace is required for sintering the photovoltaic devices. The sintering furnace usually includes a drying section, a sintering section and a cooling section. The photovoltaic device printed with silver paste and other pastes is transported by a conveyor belt through the drying section, sintering section and cooling section, and then is conveyed by the conveyor belt to leave the sintering furnace.

At least one purpose of the first aspect of this case is to provide a furnace including: a furnace and a conveying device. The furnace includes an upper furnace and a lower furnace arranged oppositely. There is a transportation space extending through the furnace along the length direction of the furnace between the upper furnace and the lower furnace. The conveying device is used to carry and move processing elements through the furnace in the conveying space. Wherein, in the height direction of the furnace, the conveying space includes a conveying device accommodation space and a processing element accommodation space. The conveying device accommodating space is located below the processing element accommodating space, the conveying device is accommodated in the conveying device accommodating space, and the processing element accommodating space is used when the processing element is carried upright. When placed on the conveyor device, the processing element is accommodated.

According to the above first aspect, the upper furnace includes a pair of upper furnace side portions arranged oppositely in the width direction of the furnace and extending along the length direction of the furnace. The lower furnace includes a pair of lower furnace side portions arranged oppositely in the width direction of the furnace and extending along the length direction of the furnace. The pair of upper furnace side portions and the pair of lower furnace side portions are connected correspondingly. And in the height direction of the furnace, the bottom of the upper furnace is spaced at a certain distance from the bottoms of the pair of upper furnace sides, and the top of the lower furnace is spaced from the tops of the pair of lower furnace sides at a certain distance. The distance is such that the conveying space is formed between the bottom of the upper furnace and the top of the lower furnace. The furnace further includes a pair of side elevations. The pair of side raised portions are arranged oppositely in the width direction of the furnace and extend along the length direction of the furnace. The pair of side raised parts are provided at the bottom of the upper furnace side and/or the top of the lower furnace side, so that when the processing element is carried upright on the conveying device, The processing element receiving space can accommodate the processing element.

According to the above first aspect, the pair of side raised portions are respectively provided on the tops of the pair of lower furnace side portions and connected to the pair of upper furnace side portions.

According to the above first aspect, the furnace further includes hinge means. The hinge device includes a connecting rod and a supporting rod. The connecting rod is connected to the upper furnace, the support rod is fixed, the connecting rod and the support rod are rotatably connected through a shaft, wherein the hinge device is configured to drive the connecting rod relative to The support rod rotates to open the upper furnace relative to the lower furnace.

According to the above first aspect, the height of the processing element accommodation space is 200~300mm.

According to the above first aspect, the furnace is configured to provide heat to dry the processing element to remove organic matter from the processing element.

According to the above first aspect, the furnace includes a plurality of heating units, each heating unit being arranged side by side along the length of the furnace and configured to independently provide the heat through a heating element.

According to the above first aspect, each of the heating units includes a fan element, an upper partition and a lower partition, the upper partition is disposed in the upper furnace, and the bottom of the upper partition forms the upper furnace the bottom of the lower furnace, the lower partition is disposed in the lower furnace, and the top of the lower partition forms the top of the lower furnace, wherein the fan assembly, the upper partition and the lower partition are configured as The gases in the heating units are able to flow inside the respective units so that the heat provided by the heating elements diffuses evenly to the processing elements.

According to the above first aspect, the furnace further includes two end blocking parts, the two end blocking parts are respectively provided at the inlet end and the outlet end of the furnace, wherein each of the end blocking parts includes An air curtain device and an exhaust device, the end blocking part is configured to block gas circulation inside the furnace and the external environment, so that the oxygen content in the gas in the furnace reaches a preset value.

According to the above first aspect, the processing element is a photovoltaic device.

According to the above first aspect, the processing element is a circuit board, and the furnace is configured for reflow soldering of the circuit board.

At least one object of the second aspect of this case is to provide a sintering furnace, which includes a drying section, a sintering section and a cooling section. The drying section includes the furnace described in any one of the first aspects.

Through the following description of this case with reference to the accompanying drawings, other purposes and advantages of this case will be apparent and can help to have a comprehensive understanding of this case.

Various specific embodiments of the present invention will be described below with reference to the accompanying drawings that form a part of this specification. It should be understood that although terms indicating direction are used in this case, such as "front", "back", "upper", "lower", "left", "right", "top", "bottom", "inner" ”, “outside”, etc. describe various example structural parts and elements of the present invention, but these terms are used here for convenience of explanation only and are determined based on the orientation of the examples shown in the drawings. Since the embodiments disclosed in this case can be arranged in different directions, these terms indicating directions are for illustration only and should not be regarded as limiting.

Figures 1A and 1B are structural diagrams of a furnace 100 according to an embodiment of the present invention, wherein Figure 1A is a three-dimensional structural diagram, and Figure 1B is a simplified schematic diagram of the principle. As shown in FIGS. 1A and 1B , the furnace 100 includes a furnace 112 , a conveying device 118 and a bracket 111 . The furnace 112 is supported above the bracket 111 . The furnace 112 includes an upper furnace 113 and a lower furnace 114, and a transport space 120 provided between the upper furnace 113 and the lower furnace 114. The conveying space 120 extends through the furnace 112 along the length direction L of the furnace 112 . The conveying device 118 penetrates the furnace 112 along the length direction L of the furnace 112, and is used to carry and enable the processing element 110 to enter the conveying space 120 from the entrance end 151 of the furnace 112 (ie, the left end in FIG. 1B), and move through the furnace in the conveying space 120. 112, it is output from the outlet end 152 of the furnace 112 (ie, the right end in Figure 1B). The conveying device 118 is used to carry and move the processing element 110 in the conveying space 120 along the conveying direction through the furnace 112 . The conveying device 118 includes a conveyor belt 115 on which the processing elements 110 are carried.

In the height direction H of the furnace 112, a transport space 120 is formed between the bottom 135 of the upper furnace 113 and the top 136 of the lower furnace 114. The conveying space 120 includes a conveying device accommodating space 142 and a processing element accommodating space 141. The conveying device accommodating space 142 is located below the processing element accommodating space 141. The conveyor accommodation space and the processing element accommodation space 141 are separated by a conveyor belt 115 for carrying the processing element 110 . The processing element accommodating space 141 has a height D1, that is, the distance D1 between the bottom 135 of the upper furnace 113 and the conveyor belt 115. The processing element accommodating space 141 is used to accommodate the processing element 110. The conveying device accommodating space 142 has a height D2, that is, the distance D2 between the top 136 of the lower furnace 114 and the conveyor belt 115, and the conveying device accommodating space 142 is used to accommodate the conveying device 118. In the embodiment of this case, the processing element 110 is placed vertically on the conveyor belt 115 of the conveying device 118, and the height D1 of the processing element accommodation space 141 is set to match the maximum height of the processing element 110, so that the processing element accommodation space 141 Capable of accommodating the processing element 110 when placed upright.

In the length direction L of the furnace 112, the furnace 100 includes two end blocking portions 108 disposed at the furnace inlet end 151 and the outlet end 152, and a plurality of heating units 101 and 101 disposed between the two end blocking portions 108. At least one cooling unit 102. The end blocking portion 108 is used to block the gas flow between the interior of the furnace 112 and the external environment, so that the oxygen content in the gas inside the furnace 112 can be controlled within a predetermined range. In this embodiment, each end blocking portion 108 includes an air curtain device 109 and an exhaust device 154, and the exhaust device 154 is disposed outside the air curtain device 109. The exhaust device 154 is used to discharge air from the inlet end 151 and the outlet end 152 of the furnace. The air curtain device 109 includes a pair of end baffle boxes 107, and the air outlets of the pair of end baffle boxes 107 are placed face to face. Each end baffle box 107 is in fluid communication with an inert gas source 153a and an inert gas source 153b, respectively, to create a gas curtain by counter-flowing inert gas streams. Although the end baffle box 107 in the upper furnace chamber 113 and the end baffle box 107 in the lower furnace chamber 114 are shown in FIG. 1B as being connected to different inert gas sources, in other embodiments, they may also be connected to the same source. Source of inert gas. By providing the exhaust device 154 and the air curtain device 109, the gas circulation inside and outside the furnace 112 can be reduced or substantially blocked. Further, the inert gas source 153a is also in fluid communication with the middle part of the furnace 112 to input inert gas into the interior of the furnace 112. The input inert gas flows from the middle part of the furnace 112 toward the inlet end 151 and the outlet end 152, which can better The air from the external environment of the furnace 112 is blocked from entering the interior of the furnace 112 . The specific structure of the air curtain device 109 will be described in detail with reference to FIGS. 2A-2C. In other embodiments, the end blocking portion 108 can also be provided with other structures or other methods according to specific needs to block the gas flow inside and outside the furnace 112 .

Several heating units 101 and at least one cooling unit 102 are arranged side by side along the length direction L of the furnace 112, with the heating unit 101 being arranged upstream in the conveying direction and the cooling unit 102 being arranged downstream in the conveying direction. An independent heating element 103 is provided in each heating unit 101 to provide heat through the heating element 103 independently. An independent cooling element (not shown in the figure) is provided in each cooling unit 102 to provide cooling through the cooling element independently. In this embodiment, the heating element 103 is a heating rod, and the cooling element is an air-cooling heat exchanger or a water-cooling heat exchanger. A fan element 104 and a partition element are also provided in each heating unit 101 and each cooling unit 102 (see upper partition 245 and lower partition 246 in Figures 2A-2C). By arranging independent fan elements 104 and partition elements in each heating unit 101 and each cooling unit 102, the gas in each heating unit 101 and each cooling unit 102 can flow inside the respective units according to a certain flow path, This allows the heat and cold provided by the heating element 103 and the cooling element to be evenly diffused to the processing element 110 .

In the length direction L of the furnace 112, the furnace 100 also includes several hinge devices 121, and the hinge devices 121 are fixedly connected above the upper furnace 113. The hinge device 121 can drive the upper furnace 113 to move relative to the lower furnace 114 , thereby opening the upper furnace 113 to expose the conveying space 120 .

In this embodiment, the processing element 110 is a photovoltaic device, such as a silicon wafer printed with slurry. The furnace 100 is used to dry the photovoltaic device and remove organic solvents and other organic matter in the slurry to facilitate subsequent processing of the photovoltaic device. sintering. In other embodiments, the processing component 110 may also be a circuit board, and the furnace 100 is used to reflow solder the electronic components on the circuit board.

Figures 2A to 2C illustrate the specific structure of the furnace 112 of the furnace 100 in this case. Figure 2A is a three-dimensional structural view of the furnace 112, Figure 2B is a cross-sectional view of the furnace 112 in the width direction, and Figure 2C is a length direction of the furnace 112. Partial cross-section view. As shown in Figures 2A-2C, the upper furnace 113 includes an upper furnace top 233 and a pair of upper furnace side portions 231. The pair of upper furnace side portions 231 are connected to opposite sides of the upper furnace top 233 in the width direction W, and Each upper furnace side portion 231 extends along the length direction L. The lower furnace 114 includes a lower furnace bottom 234 and a pair of lower furnace side portions 232. The pair of lower furnace side portions 232 are connected to opposite sides of the lower furnace bottom 234 in the width direction W, and each lower furnace side portion 232 extends along the length direction. L extension. The bottom edge of each upper furnace side part 231 is folded outward to form an upper furnace connection part 263, and the bottom edge of each lower furnace side part 232 is folded outward to form a lower furnace connection part 264. The upper furnace connection part 263 and the lower furnace part are The connecting portion 264 is sealingly connected together through a strip-shaped sealing member 227 extending along the length direction L, so that the upper furnace 113 and the lower furnace 114 can be connected together through their respective sides. Thereby, the furnace 112 is sealed in the width direction W, preventing the gas in the furnace 112 from escaping from both sides in the width direction W. There is a certain distance between the bottom edge of the upper furnace side 231 and the bottom 135 of the upper furnace 113 , and there is a certain distance between the top edge of the lower furnace side 232 and the top 136 of the lower furnace 114 . Therefore, when the upper furnace side 231 and the lower furnace side 232 are connected together, the conveying space 120 can be formed between the bottom 135 of the upper furnace 113 and the top 136 of the lower furnace 114 . Those skilled in the art can understand that in this case, the bottom 135 of the upper furnace 113 refers to the bottom of the upper furnace 113 between the pair of upper furnace sides 231 , and the top 136 of the lower furnace 114 refers to the pair of The top of the lower furnace 114 between the lower furnace sides 232 . Specifically, the upper furnace 113 also includes an upper partition 245, the bottom of the upper partition 245 forms the bottom 135 of the upper furnace 113. The lower furnace 114 also includes a lower partition 246 , the top of which forms the top 136 of the lower furnace 114 .

In order to enable the processing element accommodating space 141 of the conveying space 120 to accommodate the uprightly placed processing elements 110, the furnace 112 also includes a pair of side elevated portions 140 extending along the length direction L. The pair of side elevated portions 140 are disposed in the furnace. 112 on opposite sides in the width direction W, and are provided at the bottom of the upper furnace side portion 231 and/or the top of the lower furnace side portion 232 . Compared with a furnace that does not include the side raised portions 140, the furnace 100 can increase the height of the conveying space 120 by providing a pair of side raised portions 140, so that the height D2 of the conveying device accommodating space 142 remains unchanged. In this case, the height of the processing element accommodating space 141 can be increased to reach D1, that is, to meet the height requirement of the vertically placed processing element. In this embodiment, a pair of side raised portions 140 are respectively provided on the tops of a pair of lower furnace side portions 232 and are connected to a corresponding pair of upper furnace side portions 231 . Those skilled in the art can understand that a pair of side raised portions 140 can also be provided at the bottom of a pair of upper furnace side portions 231 and connected to a corresponding pair of lower furnace side portions 232 . Or a pair of side raised portions 140 are respectively provided at the bottom of an upper furnace side portion 231 and the top of a corresponding lower furnace side portion 232 . As long as the height of the furnace side wall can be raised, the height of the processing element accommodating space 141 can be raised. In other embodiments, if the height of the processing element 110 placed vertically on the conveyor belt 115 is small, the height of the conveyor space 120 can also be increased by reducing the height D2 of the conveyor device accommodating space 142 while the height of the conveyor space 120 remains unchanged. The height D1 of the high processing component accommodation space 141 . At this time, it is only necessary to lower the height of the pair of guide rails 219 of the conveying device 118 . As a more specific example, the height of the processing element accommodation space 241 is about 200~300 mm, which can meet the size requirements of most photovoltaic devices.

The hinge device 121 includes a connecting rod 224 and a supporting rod 222. The connecting rod 224 includes a vertical section and a transverse section, and the transverse section is fixedly connected above the top 233 of the upper furnace 113. The support rod 222 is also fixed, for example to the bracket 111 . One end of the vertical section of the connecting rod 224 and one end of the supporting rod 222 are rotatably connected through a shaft 223 . When the other end of the transverse section of the connecting rod 224 is pushed (for example, the right end in FIG. 2B ), the connecting rod 224 can rotate around the axis 223 to drive the upper furnace chamber 113 to move and be opened at a certain angle, thereby exposing the conveying space 120 . After opening the upper furnace 113, the operator can perform operations such as cleaning and maintenance on the internal space of the furnace 112. After the upper furnace 113 is opened, the overall height of the furnace will be higher due to the increased height of the conveying space 120 . Affected by the overall height of the furnace, it is more convenient to open the upper furnace 113 by arranging the side elevated portions 140 at the top of the pair of lower furnace side portions 232 than at the bottom of the upper furnace side portions 231. , the operator cleans and maintains the internal space of the furnace 112.

The air curtain device 109 includes a pair of end baffle boxes 107 oppositely arranged in the height direction H of the furnace 112 . Each end baffle box 107 includes an air inlet 262 and a plurality of guide fins 261 . The end baffle box 107 is configured to guide the gas entering the end baffle box 107 from the air inlet 262 along each guide fin. Piece 261 flows. For example, the end baffle box 107a located in the upper furnace 113 is configured to guide the gas entering from the air inlet 262 to flow downward along the guide fins 261, and the end baffle box 107b located in the lower furnace 114 is configured to guide The gas entering from the air inlet 262 flows upward along the guide fins 261 . Therefore, the gas flowing in from the air inlet 262 can form an air curtain, and the air curtain can reduce the air flow inside and outside the furnace 112 .

The exhaust device 154 is located outside the end barrier box 107a and is used to extract the air at the inlet end 151 and the outlet end 152 of the furnace 112, so that a negative pressure can be formed at the inlet end 151 and the outlet end 152 of the furnace 112, so the end The gas at the first barrier portion 108 generally flows from the inside of the furnace to the outside of the furnace, thereby better preventing outside air from entering the furnace 112. Moreover, after the gas inside the furnace 112 flows outward, it can also be extracted by the exhaust device 154 in time, thereby basically blocking the gas fluid communication between the inside of the furnace 112 and the external environment. It should be noted that although FIG. 2C only shows the specific structure of the end blocking portion 108 at the inlet end 151 of the furnace 112, those skilled in the art can understand that there is also an end blocking portion 108 at the outlet end 152 of the furnace 112. The end blocking portion 108 has the same structure.

By arranging the air curtain device 109 and the exhaust device 154 of the end barrier 108, and further inputting inert gas into the middle part of the furnace 112 in the length direction L, the oxygen content in the gas in the furnace 112 can be basically maintained within a certain range. Particularly suitable for photovoltaic devices printed with certain pastes.

Figure 3 illustrates a schematic diagram of a sintering furnace 380 including the furnace 100 shown in Figure 1A. As shown in Figure 3, the sintering furnace 380 includes a drying section 370, a sintering section 371 and a cooling section 372. The drying section 370, the sintering section 371 and the cooling section 372 can be connected through the same conveying device 373, or through separate The conveyor is connected. In the drying section 370, organic matter and the like in the slurry printed by the photovoltaic device can volatilize. In the sintering section 371, the electrode material and silicon on the photovoltaic device are heated to the eutectic temperature, and silicon atoms are dissolved into the molten electrode material in a certain proportion. In the cooling section 372, the silicon atoms dissolved in the electrode material crystallize out in a solid state again, so that an ohmic contact is formed between the electrode and the silicon, thereby obtaining a solar cell. In this embodiment, the drying section 370 includes the furnace 100 .

The drying section, sintering section and cooling section of existing sintering furnaces generally have an integrated structure. Due to the limitations of the frame structure, it is very difficult to independently increase the height of the conveying space of the furnace in the drying section. In this case, the reflow oven can be modified to a certain extent to obtain an oven that can dry upright photovoltaic devices. It is particularly suitable for use in the drying section of sintering furnaces, and can also be used to reflow solder electronic components on circuit boards.

Existing photovoltaic devices are generally in the shape of thin plates, with large lengths and widths, and small thicknesses. They are carried flat on the conveyor belt for drying, and the work efficiency is limited. The furnace of this case sets the height D1 of the processing element accommodating space to be able to accommodate the processing element when placed upright, that is, the height D1 is set to be greater than or substantially equal to the largest dimension of the length and width of the processing element. Therefore, the furnace of this case enables the processing elements to be carried vertically on the conveyor belt and heated or cooled through the furnace. Compared with furnaces that generally place processing elements flat on a conveyor belt, under the same conveying speed and length, the furnace in this case can process more processing elements per unit time and has higher work efficiency.

In addition, the furnace in this case includes multiple heating units that independently provide heat, and can independently control the temperature of each heating unit, so that the interior of the furnace can have a richer temperature curve, and then the organic matter in the slurry printed on the photovoltaic device can be Provide more possibilities.

In addition, the furnace in this case can also control the oxygen content in the gas inside the furnace according to specific needs, and has a particularly good effect on the removal of certain organic matter in the slurry.

The furnace in this case can be modified from a reflow oven. In addition to maintaining its function of reflow soldering electronic components on circuit boards, it is particularly suitable for the drying section of a sintering furnace.

Although the present invention has been described in connection with the examples of embodiments outlined above, various alternatives, modifications, variations, improvements and/or substantial equivalents, whether known or otherwise, will occur to those of at least ordinary skill in the art. It may be obvious whether it is now or can be foreseen in the near future. In addition, the technical effects and/or technical problems described in this specification are illustrative rather than restrictive; therefore, the disclosure in this specification may be used to solve other technical problems and have other technical effects and/or can solve other technical problems. . Accordingly, the examples of embodiments of the present invention set forth above are intended to be illustrative rather than restrictive. Various changes may be made without departing from the spirit or scope of the case. It is therefore intended to include all known or earlier developed alternatives, modifications, variations, improvements and/or substantial equivalents.

100:furnace 101:Heating unit 102: Cooling unit 103:Heating element 104:Fan components 107: End barrier box 107a: End barrier box 107b: End barrier box 108: End blocking part 109: Air curtain device 110: Processing components 111:Bracket 112:Hearth 113: Upper furnace 114: Lower the furnace 115: Conveyor belt 118:Conveying device 120:Conveying space 121:Hinge device 135:Bottom 136:Top 140: Side raised part 141: Processing component accommodation space 142: Conveying device accommodation space 151: Entrance port 152:Export end 153a: Inert gas source 153b: Inert gas source 154:Exhaust device 219: Guide rail 222:Support rod 223:shaft 224:Connecting rod 227:Seals 231: Upper furnace side 232: Side of lower furnace 233:Top 234: Bottom of lower furnace 245: Upper partition 246:Lower partition 261: Guide fins 262:Air inlet 263: Upper furnace connection part 264:Lower furnace connection part 370: Drying section 371: sintering section 372: Cooling section 380:Sintering furnace D1: height D2: height H: height direction L:Length direction W: Width direction

Figure 1A is a three-dimensional structural view of a furnace according to an embodiment of the present case;

Figure 1B is a schematic diagram of the principle of the furnace shown in Figure 1A;

Figure 2A is a three-dimensional structural view of the furnace in Figure 1A;

Figure 2B is a cross-sectional view of the furnace of Figure 2A along the width direction;

Figure 2C is a partial cross-sectional view of the furnace of Figure 2A along the length and width direction;

Figure 3 is a schematic diagram of a sintering furnace including the furnace shown in Figure 1A.

Domestic storage information (please note in order of storage institution, date and number) without Overseas storage information (please note in order of storage country, institution, date, and number) without

100:furnace

101:Heating unit

102: Cooling unit

108: End blocking part

110: Processing components

113: Upper furnace

114: Lower the furnace

115: Conveyor belt

120:Conveying space

135:Bottom

136:Top

141: Processing component accommodation space

142: Conveying device accommodation space

151: Entrance port

152:Export end

153a: Inert gas source

153b: Inert gas source

154:Exhaust device

D1: height

D2: height

H: height direction

L:Length direction

Claims (12)

A furnace is characterized by including: A furnace including an upper furnace and a lower furnace arranged opposite each other, with a transport space extending through the furnace along the length direction of the furnace between the upper furnace and the lower furnace; and a conveying device for carrying and moving processing elements through the furnace in the conveying space; Wherein in the height direction of the furnace, the conveying space includes a conveying device accommodating space and a processing element accommodating space, the conveying device accommodating space is located below the processing element accommodating space, and the conveying device is accommodated in the In the conveying device accommodation space, the processing element accommodation space is used to accommodate the processing element when the processing element is carried upright on the conveying device. Furnace according to claim 1, wherein: The upper furnace includes a pair of upper furnace side portions arranged oppositely in the width direction of the furnace and extending along the length direction of the furnace, and the lower furnace includes a pair of upper furnace side portions oppositely arranged in the width direction of the furnace. a lower furnace side extending along the length direction of the furnace, wherein the pair of upper furnace sides and the pair of lower furnace sides are connected correspondingly, and in the height direction of the furnace, the upper furnace The bottom of the upper furnace is spaced a certain distance from the bottom of the pair of upper furnace sides, and the top of the lower furnace is spaced a certain distance from the top of the pair of lower furnace sides, so that the bottom of the upper furnace and the The conveying space is formed between the tops of the lower furnace; The furnace further includes a pair of side raised portions, the pair of side raised portions are oppositely arranged in the width direction of the furnace and extend along the length direction of the furnace, and the pair of side raised portions A raised portion is provided at the bottom of the upper furnace side and/or the top of the lower furnace side, so that when the processing element is carried upright on the conveyor, the processing element is accommodated The space is capable of accommodating the processing elements. Furnace according to claim 2, wherein: The pair of side raised portions are respectively disposed on the tops of the pair of lower furnace side portions and connected to the pair of upper furnace side portions. Furnace according to claim 3, wherein: The furnace also includes a hinge device. The hinge device includes a connecting rod and a support rod. The connecting rod is connected to the upper furnace hearth. The support rod is fixed. The connecting rod and the support rod are rotatable through an axis. ground connection, wherein the hinge device is configured to be able to flip the upper furnace chamber relative to the lower furnace chamber by driving the connecting rod to rotate relative to the support rod. Furnace according to claim 2, wherein: The height of the processing element accommodation space is 200~300mm. Furnace according to claim 1, wherein: The oven is configured to provide heat to dry the processing element to remove organic matter from the processing element. Furnace according to claim 6, wherein: The furnace includes a plurality of heating units, each heating unit being arranged side by side along the length of the furnace and configured to each independently provide the heat via a heating element. Furnace according to claim 7, wherein: Each of the heating units includes a fan element, an upper partition and a lower partition. The upper partition is disposed in the upper furnace, and the bottom of the upper partition forms the bottom of the upper furnace. The lower partition A partition is disposed in the lower furnace, and a top of the lower partition forms a top of the lower furnace, wherein the fan assembly, the upper partition and the lower partition are configured as the heating unit. Gases can flow inside the respective units so that the heat provided by the heating elements diffuses evenly to the processing elements. Furnace according to claim 6, wherein: The furnace also includes two end blocking parts, the two end blocking parts are respectively provided at the inlet end and the outlet end of the furnace, wherein each of the end blocking parts includes an air curtain device and an exhaust device. , the end blocking part is configured to block gas circulation inside the furnace and the external environment, so that the oxygen content in the gas in the furnace reaches a preset value. Furnace according to claim 6, wherein: The processing element is a photovoltaic device. Furnace according to claim 1, wherein: The process element is a circuit board and the oven is configured for reflow soldering of the circuit board. A sintering furnace, wherein: The sintering furnace includes a drying section, a sintering section and a cooling section; The drying section includes the furnace described in any one of claims 1-11.