TW202327713A - Water washing filter device with temperature control device - Google Patents

Abstract

The present invention provides a water washing filter device with temperature control device, which comprises a first water washing component, a second water washing component and a connecting pipe. Water device, a first water spraying component, and a first circulating component. A second watering device, a second water spraying component, and a second circulating component are arranged inside one of the second housings of the second water washing component One end of the connecting pipe is connected to a first accommodating space of the first housing, and the other end of the connecting pipe is connected to a second accommodating space of the second housing; A first temperature control device and the second circulation assembly include a second temperature control device, which makes the fluid flowing through have a temperature difference and improves the overall filtration efficiency.

Description

Water washing and filtering device with temperature control device

The invention relates to a water-washing filter device with a temperature control device, in particular to a water-washing filter device which utilizes a heating device to generate a temperature difference in a fluid.

With the shrinking of the size of semiconductor components, the control and monitoring methods of gaseous molecular pollutants (AMC) are gradually being paid attention to. In order to prevent the electrical properties of electronic products from being affected, the semiconductor and wafer manufacturing processes are placed in a strictly controlled environment, that is, a cleanroom. Conventional clean room air quality control mainly focuses on particles, airflow, temperature and humidity; however, in recent years, the semiconductor industry has begun to rethink the so-called clean room definition. With the shrinking of the volume of semiconductors, the impact of electrostatic damage and gaseous molecular pollutants is becoming more and more obvious, and devices for removing gaseous molecular pollutants are gradually entering the market.

Among them, the common device for removing gaseous molecular pollutants is a water-sprinkling (or spraying) device and a water-washing filter device for water-spraying materials. The water-washing filter device is usually used on a constant temperature and humidity micro-pollution treatment device. Through air contact, to remove trace gaseous molecular pollutants in the air, and air pollutants can be roughly divided into two categories: granular pollutants and gaseous pollutants.

However, although the conventional water-washing filter device has good efficiency in removing gas pollutants, the removal efficiency of granular pollutants, especially sub-micron (sub-micron, PM0.01 ~ PM1), is low. Relatively poor, so the industry needs a water-washing filter device that can effectively remove particulate pollutants.

In view of the above-mentioned problems in the prior art, the present invention provides a water-washing filter device with a temperature control device, in which the first fluid enters the first water-washing component, and the first water-washing component heats the passing first fluid with the heated second fluid After the first fluid flows to the second water washing unit, the second water washing unit is in contact with the third fluid at a lower temperature, so that there is a temperature difference between the passing first fluid and the third fluid, resulting in thermophoresis, which can effectively remove granular pollution Water washing filter device for things.

One object of the present invention is to provide a water washing filter device with a temperature control device, which uses the combination of two water washing components, a first fluid enters the first water washing component, and the temperature control device included in the first water washing component heats the first sprinkler The second fluid in the water device, the second fluid sprays out the first fluid corresponding to the heating process, the first fluid flows to the second water washing unit, and is controlled by the temperature control device included in the second water washing unit. The temperature of the third fluid causes a temperature difference between the passing first fluid and the third fluid, resulting in thermophoresis and improving the overall filtration efficiency.

In order to achieve the above-mentioned purposes and effects, the present invention provides a water-washing filter device with a temperature control device, which includes: a first water-washing component, a second water-washing component, and a connecting pipeline. The first water-washing component includes: A first casing, a first accommodating space is provided on one inner side thereof, an air inlet is opened at one end of the first casing, and the air inlet communicates with the first accommodating space; a first sprinkler device is arranged on The first accommodating space is arranged under one of the air inlets and has an interval space; a first shower assembly is arranged in the first accommodating space and is arranged under the first sprinkling device square; and a first circulation assembly, which includes a first pump and a first temperature control device, one end of the first pump communicates with the bottom of the first accommodating space, and one end of the first temperature control device It is connected to the other end of the first pump, and the other end of the first temperature control device is connected to the first sprinkling device; the second water washing unit is arranged on one side of the first water washing unit, and the second water washing unit includes: A second casing, a second accommodating space is set on one inner side, an air outlet is opened at one end of the second casing, and the air outlet communicates with the second accommodating space; a second sprinkling device is arranged on The second accommodating space is arranged under one of the air outlets and has a space; a second shower assembly is arranged in the second accommodating space and is arranged under the second sprinkling device square; and a second circulation assembly, which includes a second pump and a second temperature control device, one end of the second pump communicates with the bottom of the second accommodating space, and one end of the second temperature control device connected to the other end of the second pump, the other end of the second temperature control device connected to the second sprinkling device; one end of the connecting pipeline connected to the first accommodating space, and the other end The second accommodating space: this structure is used to heat the fluid passing through the first water washing unit, and then mixes with the lower temperature fluid in the second water washing unit to improve the filtration efficiency of the water washing unit.

In an embodiment of the present invention, the second water washing component further includes a dewatering device, and the dewatering device is disposed in the second accommodating space and above one of the second sprinkling devices.

In one embodiment of the present invention, a first fluid enters the first accommodating space through the air inlet, and then the first fluid passes through the first sprinkler device and the first sprinkler assembly sequentially. After a fluid passes through the first shower assembly, the first fluid enters the connecting pipeline, and after the first fluid passes through the connecting pipeline, the first fluid enters the second accommodating space, and the first fluid then The sequence flows to the second sprinkler device and the second shower assembly, and after the first fluid passes through the second shower assembly, the first fluid is discharged from the air outlet.

In an embodiment of the present invention, wherein the first sprinkler sprays a second fluid to the first shower assembly, after the second fluid passes through the first shower assembly, the first pump pumps the second fluid fluid to the first temperature control device, after the second fluid passes through the first temperature control device, the second fluid enters the first sprinkler device; the second sprinkler device sprays a third fluid to the second shower water assembly, after the third fluid passes through the second water shower assembly, the second pump pumps the third fluid to the second temperature control device, and after the third fluid passes through the second temperature control device, the third Fluid enters the second sprinkler.

In an embodiment of the present invention, the temperature of the first fluid is higher than the temperature of the third fluid.

In one embodiment of the present invention, a first temperature sensor is further included, and the first temperature sensor is arranged inside one of the connecting pipelines

In an embodiment of the present invention, it further includes a second temperature sensor, and the second temperature sensor is disposed inside one of the air outlets.

In an embodiment of the present invention, a control device is further included, and the control device is electrically connected to the first temperature sensor, the second temperature sensor, the first temperature control device, and the second temperature control device.

In an embodiment of the present invention, the first shower assembly includes a plurality of first shower layers, and the first shower layers are stacked on top of each other.

In an embodiment of the present invention, the second shower assembly includes a plurality of second shower layers, and the second shower layers are stacked on top of each other.

In order to enable your review committee members to have a further understanding and understanding of the characteristics of the present invention and the achieved effects, the following examples and accompanying descriptions are hereby provided:

In view of the problems of the above-mentioned prior art, the present invention is combined with a first water washing assembly and a second water washing assembly, and a first watering device, a first sprinkler, and a first water washing assembly are arranged inside one of the first casings of the first water washing assembly. A water shower assembly and a first circulation assembly, a second sprinkler device, a second water shower assembly and a second circulation assembly are arranged inside one of the second shells of the second water washing assembly, and the connecting pipeline One end communicates with a first accommodating space of the first housing, and the other end of the connecting pipeline communicates with a second accommodating space of the second housing; the first circulation assembly includes a first temperature control The device, and the second circulation component includes a second temperature control device, which makes the flowing fluid have a temperature difference, improves the overall filtration efficiency, and solves the problem that the conventional technology is difficult to remove tiny particulate pollutants.

Please refer to Fig. 1, which is a schematic structural view of an embodiment of the present invention. As shown in the figure, this embodiment is a water-washing filter device 1 with a temperature control device, which includes a first water-washing assembly 10, a second Water washing assembly 20 and a connecting pipeline 30; in this embodiment, the first water washing assembly 10 communicates with one end of the connecting pipeline 30, and the second water washing assembly 20 communicates with the other end of the connecting pipeline 30, so that the fluid It can flow from the first water washing component 10 to the second water washing component 20 .

Referring to Fig. 1 again, as shown in the figure, in this embodiment, the first water washing assembly 10 includes a first housing 12, a first sprinkler 14, a first shower assembly 16 and a first Circulation assembly 18, a first accommodating space 121 is provided inside one side of the first casing 12 for accommodating components, and an air inlet 122 is provided at one end of the first casing 12, and the air inlet 122 communicates with the first The accommodating space 121 allows fluid to enter the first accommodating space 121, the first sprinkler device 14 is arranged in the first accommodating space 121, and is arranged under one of the air inlets 122, and has a space, The first sprinkler assembly 16 is disposed in the first accommodating space 121, and is disposed under one of the first sprinkler devices 14. The first circulation assembly 18 includes a first pump 182 and a first temperature control device 184, one end of the first pump 182 is connected to the bottom of the first accommodating space 121, one end of the first temperature control device 184 is connected to the other end of the first pump 182, and the first temperature control device 184 The other end communicates with the first sprinkling device 14; in this embodiment, the first sprinkling device 14 sprays a second fluid W1, and the second fluid W1 can be water.

Continuing the above, in this embodiment, the second water washing unit 20 is arranged on one side of the first water washing unit 10, and the second water washing unit 20 includes a second housing 22, a second sprinkler 24, a The second shower assembly 26 and a second circulation assembly 28, a second accommodating space 221 is provided inside one of the second casing 22 for accommodating components, and an air outlet is opened at one end of the second casing 22 222, so that the fluid can be discharged from the second accommodating space 221, the air outlet 222 communicates with the second accommodating space 221, the second sprinkler 24 is arranged in the second accommodating space 221, and is arranged in the air outlet 222, the second sprinkler assembly 26 is arranged in the second accommodating space 221, and is arranged in a lower part of the second sprinkler 24, and the second circulation assembly 28 includes a second pump 282 and A second temperature control device 284, one end of the second pump 282 is connected to the bottom of the second accommodating space 221, one end of the second temperature control device 284 is connected to the other end of the second pump 282, the first The other end of the second temperature control device 284 communicates with the second sprinkling device 24, one end of the connecting pipeline 30 communicates with the first accommodating space 121, and the other end of the connecting pipeline 30 communicates with the second accommodating space 221, The connecting pipeline 30 communicates with the first casing 12 and the second casing 22; in this embodiment, the second sprinkler 24 sprays a third fluid W2, and the second fluid W2 can be water .

Continuing the above, in this embodiment, the first shower assembly 16 includes a plurality of first shower layers 16, the first shower layers 162 are a shower filler, and the first shower layers 162 Stacked on top of each other and provided with a plurality of perforations, the first water spray layers 162 are used to receive and spray the second fluid W1 sprayed by the first sprinkler 14, and the second fluid W1 is splashed multiple times to form a Fine water droplets or water film increase the contact area, prolong the contact time between liquid and gas, and ensure that the passing gas can effectively contact the liquid.

Continuing from the above, in this embodiment, the second shower assembly 26 includes a plurality of second shower layers 262, the second shower layers 262 are a shower filler, and the second shower layers 262 Overlaid on top of each other and provided with a plurality of perforations, the second water spraying layers 262 are used to receive and spray the third fluid W2 sprayed by the second sprinkler 24, and the third fluid W2 is splashed multiple times to form a Fine water droplets or water film increase the contact area, prolong the contact time between liquid and gas, and ensure that the passing gas can effectively contact the liquid.

Please refer to Fig. 2A to Fig. 2B, which are schematic diagrams of fluid flow according to an embodiment of the present invention. As shown in the figure, in this embodiment, a first fluid A (such as air) passes through the first housing 12 The air inlet 122 enters, the first fluid A flows into the accommodating space 121 of the first casing 12, and flows to the first sprinkler device 14, and the first fluid A passes through the first sprinkler After the device 14, the first fluid A flows to the first shower assembly 16, and the first fluid A passes through the first shower layers 162, and after the first fluid A passes through the first shower assembly 16 , the first fluid A enters the connecting pipeline 30, after the first fluid A passes through the connecting pipeline 30, the first fluid A enters the second accommodating space 221, and flows to the second sprinkler device 24. After the first fluid A passes through the second sprinkler device 24, the first fluid A flows to the second shower assembly 26, and the first fluid A passes through the second shower layers 262, the After the first fluid A passes through the second shower assembly 26 , the first fluid A is discharged from the air outlet 222 to complete a cycle.

Referring to Figure 2A to Figure 2B again, as shown in the figure, in this embodiment, the first sprinkler device 14 sprays the second fluid W1 to the first shower assembly 16, and the second fluid W1 passes through The first water spray layers 162 contact and mix with the first fluid A to remove the gaseous molecular pollutants contained in the first fluid A. After the second fluid W1 passes through the first water shower assembly 16, the second fluid W1 The fluid W1 flows to the bottom of the first accommodating space 121 to collect, for example, the second fluid W1 flows to the sump of the first accommodating space 121 to collect, the first pump 182 included in the first circulation component 18 Extract the second fluid W1 from the bottom of the first accommodating space 121, and deliver the second fluid W1 to the first temperature control device 184. After the first temperature control device 184 heats the second fluid W1, the The second fluid W1 flows to the first sprinkler 14, where a cycle is completed, wherein, the second fluid W1 is correspondingly heated to contact the first fluid A, so that the temperature of the first fluid A is correspondingly increased; in this embodiment , the temperature of the second fluid W1 is greater than the temperature of the first fluid A.

Referring to Figure 2A to Figure 2B again, as shown in the figure, in this embodiment, the second sprinkler 24 sprays the third fluid W2 to the second shower assembly 26, and the third fluid W2 passes through The second water spray layers 262 contact and mix with the first fluid A to remove the gaseous molecular pollutants contained in the first fluid A. After the third fluid W2 passes through the second water shower assembly 26, the third The fluid W2 flows to the bottom of the second accommodating space 221 to collect, for example, the third fluid W2 flows to the sump of the second accommodating space 221 to collect, the second pump 282 included in the second circulation component 28 Extract the third fluid W2 from the bottom of the second accommodating space 221, and deliver the third fluid W2 to the second temperature control device 284. After the second temperature control device 284 heats the third fluid W2, the The third fluid W2 flows to the second sprinkler 24, where a cycle is completed; in this embodiment, the temperature of the first fluid A is greater than the temperature of the third fluid W2, so that the first fluid A and the first fluid The third fluid W2 produces thermophoresis phenomenon (or thermophoresis for short).

Continuing from the above, thermophoresis refers to the fact that particles in a gas with a temperature gradient collide with the particles with higher kinetic energy than gas molecules in the higher temperature part, causing the particles to move from the high temperature part to the low temperature part. The phenomenon of movement, in which the force acting on the particles is called heat flow force, which causes the first fluid A and the third fluid W2 to generate thermophoresis, which can cause particulate pollutants to move toward the washing liquid due to thermophoresis, increasing the particle size. The chance of contact between the pollutants and the washing liquid improves the efficiency of removing pollutants.

Please refer to Figure 3, which is a schematic diagram of other components of an embodiment of the present invention. As shown in the figure, in this embodiment, a water removal device 27 is further included, and the water removal device 27 is arranged in the second container Space 221, and is arranged on the top of this second sprinkling device 24, and this dewatering device 27 is used for removing the moisture contained in this first fluid A that passes through; In this embodiment, this dewatering device 27 is dehumidifier.

Referring again to Fig. 3 and Fig. 4, Fig. 4 is a schematic diagram of signal transmission of an embodiment of the present invention, as shown in the figure, this embodiment further includes a first temperature sensor 31, a first Two temperature sensors 29 and a control device 40, the first temperature sensor 31 is arranged on one inner side of the connecting pipeline 30 for sensing the temperature of the first fluid A passing through the connecting pipeline 30, The second temperature sensor 29 is disposed inside the air outlet 222 for sensing the temperature of the first fluid A discharged from the air outlet 222, and the control device 40 is electrically connected to the first temperature sensor 31. The second temperature sensor 29, the first temperature control device 184 and the second temperature control device 284, wherein the first temperature control device 184 and the second temperature control device 284 respectively control the second fluid W1 and the temperature of the third fluid W2.

Continuing the above, in this embodiment, the first temperature sensor 31 senses the temperature of the first fluid A passing through the connecting pipeline 30, and transmits a first temperature signal 312 to the control device 40, the first temperature sensor 31 The second temperature sensor 29 senses the temperature of the first fluid A discharged from the air outlet 222, and transmits a second temperature signal 292 to the control device 40, and the control device 40 is based on the first temperature signal 312 and the second temperature signal. The second temperature signal 292 sends a first control signal 42 and a second control signal 44. The first temperature control device 184 receives the first control signal 42 to control the temperature of the second fluid W1. The second temperature control device 284 receives the second control signal 44 and correspondingly controls the temperature of the third fluid W2 so that the temperature of the first fluid A is always higher than the temperature of the third fluid W2 to generate thermophoresis and improve the efficiency of filtration.

To sum up, the present invention provides a water-washing filter device with a temperature control device, which uses the combination of two water-washing components, wherein the first water-washing component includes a temperature control device, and the temperature control device heats the second sprinkler in the first sprinkling device. Fluid (such as water), through the first sprinkler device corresponding to the first fluid (such as air) heated through, the heated first fluid flows to the second water washing unit, and is controlled by the temperature control device included in the second water washing unit Set the temperature of the third fluid (such as water) in the second sprinkler device, so that there is a temperature difference between the passing first fluid and the third fluid, resulting in thermophoresis, and improving the efficiency of filtering routine pollutants. This device solves the problem It is difficult to remove tiny particulate pollutants in conventional water-washing filter devices.

Therefore, the present invention is novel, progressive and can be used in the industry. It should meet the patent application requirements of my country's patent law. I file an invention patent application in accordance with the law. I pray that the bureau will grant the patent as soon as possible. I sincerely pray.

However, the above is only an embodiment of the present invention, and is not used to limit the scope of the present invention. Therefore, all equivalent changes and modifications made in accordance with the shape, structure, characteristics and spirit described in the scope of the patent application of the present invention, All should be included in the patent scope of the present invention.

1: Water washing and filtering device with temperature control device 10: The first washing component 12: The first shell 121: The first storage space 122: air inlet 14: First Sprinkler 16: The first shower assembly 162: The first water spray layer 18: First loop component 182:First pump 184: The first temperature control device 20: The second washing component 22: Second shell 221: Second storage space 222: Air outlet 24: Second sprinkler 26: The second shower assembly 262: Second shower layer 28: Second loop component 282:Second pump 284: Second temperature control device 27: Water removal device 29: Second temperature sensor 292: Second temperature signal 30: Connect pipe fittings 31: The first temperature sensor 312: The first temperature signal 40: Control device 42: The first control signal 44: The second control signal A: first fluid W1: second fluid W2: third fluid

Figure 1: It is a structural schematic diagram of an embodiment of the present invention; Figure 2A to Figure 2B: It is a schematic diagram of fluid flow in an embodiment of the present invention; Figure 3: It is a schematic diagram of other components of an embodiment of the present invention; and Figure 4: It is a schematic diagram of signal transmission according to an embodiment of the present invention.

1: Water washing and filtering device with temperature control device

10: The first washing component

12: The first shell

121: The first storage space

122: air inlet

14: First Sprinkler

16: The first shower assembly

162: The first water spray layer

18: First loop component

182:First pump

184: The first temperature control device

20: The second washing component

22: Second shell

221: Second storage space

222: Air outlet

24: Second sprinkler

26: The second shower assembly

262: Second shower layer

28: Second loop component

282:Second pump

284: Second temperature control device

30: Connect pipe fittings

W1: second fluid

W2: third fluid

Claims (10)

A water washing and filtering device with a temperature control device, comprising: A first water washing component, which includes: A first casing, a first accommodating space is provided on an inner side thereof, an air inlet is opened at one end of the first casing, and the air inlet communicates with the first accommodating space; A first sprinkling device, which is arranged in the first accommodating space and under one of the air inlets; a first shower assembly, which is arranged in the first accommodating space and under one of the first sprinkler devices; and A first circulation component, which includes a first pump and a first temperature control device, one end of the first pump communicates with the bottom of the first accommodating space, and one end of the first temperature control device communicates with the first The other end of a pump and the other end of the first temperature control device are connected to the first sprinkler device; A second water washing component, which is arranged on one side of the first water washing component, the second water washing component includes: and A second casing, a second accommodating space is provided on one inner side thereof, an air outlet is opened at one end of the second casing, and the air outlet communicates with the second accommodating space; A second sprinkling device, which is arranged in the second accommodating space and under one of the air outlets; a second shower assembly, which is arranged in the second accommodating space and under one of the second sprinklers; and A second circulation component, which includes a second pump and a second temperature control device, one end of the second pump communicates with the bottom of the second accommodating space, and one end of the second temperature control device communicates with the first The other end of the second pump and the other end of the second temperature control device are connected to the second sprinkling device; A connecting pipeline, one end of which communicates with the first accommodating space, and the other end of the connecting pipeline communicates with the second accommodating space. The water washing filter device with a temperature control device as described in claim 1, wherein the second water washing unit further includes a water removal device, the water removal device is installed in the second accommodating space, and is installed in the second sprinkler above one of the devices. The water washing filter device with a temperature control device as described in claim 1, wherein a first fluid enters the first accommodation space through the air inlet, and then passes through the first sprinkler device and the first fluid in sequence The first shower assembly, after the first fluid passes through the first shower assembly, the first fluid enters the connecting pipeline, after the first fluid passes through the connecting pipeline, the first fluid enters the second container space, the first fluid flows to the second sprinkler device and the second shower assembly in sequence, and after the first fluid passes through the second shower assembly, the first fluid is discharged from the air outlet. The water washing filter device with a temperature control device as described in claim 3, wherein the first sprinkling device sprays a second fluid to the first shower assembly, and after the second fluid passes through the first shower assembly, the The first pump pumps the second fluid to the first temperature control device, and after the second fluid passes through the first temperature control device, the second fluid enters the first sprinkler device; the second sprinkler device sprays a The third fluid is sent to the second shower assembly, and after the third fluid passes through the second shower assembly, the second pump pumps the third fluid to the second temperature control device, and the third fluid passes through the second After the temperature control device, the third fluid enters the second sprinkler. The water washing filter device with a temperature control device as described in claim 4, wherein the temperature of the first fluid is higher than the temperature of the third fluid. The water washing filter device with a temperature control device as described in claim 1 further includes a first temperature sensor, and the first temperature sensor is arranged inside one of the connecting pipelines. The water washing filter device with a temperature control device as described in Claim 6 further includes a second temperature sensor, and the second temperature sensor is arranged inside one of the air outlets. The water washing filter device with a temperature control device as described in claim 7 further includes a control device electrically connected to the first temperature sensor, the second temperature sensor, and the first temperature control device And the second temperature control device. The water washing and filtering device with a temperature control device as described in claim 1, wherein the first shower assembly includes a plurality of first shower layers, and the first shower layers are stacked on top of each other. The water washing and filtering device with a temperature control device as described in claim 1, wherein the second shower assembly includes a plurality of second shower layers, and the second shower layers are stacked on top of each other.

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