TW202322202A - Processing apparatus capable of performing information sharing with high accuracy - Google Patents

Abstract

An object of the present invention is to provide a processing apparatus capable of performing information sharing with high accuracy. To achieve the object, a processing apparatus 1 includes: a holding work table 10 for holding a to-be-processed object 200; a processing unit 20 for processing the to-be-processed object 200 held on the holding work table 10; a display unit 110 for displaying various information; and a control unit 100. The control unit 100 includes: a dynamic image input part 101 for inputting a dynamic image that is obtained as being captured by an image capturing device 70; a dynamic image storage part 102 for storing the dynamic image inputted to the dynamic image input part 101; and a dynamic image reproducing part 103 for reproducing the dynamic image stored in the dynamic image storage part 102. The dynamic image input part 101 causes the display unit 110 to display the dynamic image inputted from the image capturing device 70, and the dynamic image reproducing part 103 causes the display unit 110 to display the reproduced dynamic image.

Description

Processing device

The present invention relates to a processing device.

Semiconductor wafers formed with multiple devices such as IC (integrated circuit), LSI (large scale integrated circuit, Large Scale Integration) can be formed into a predetermined thickness by grinding the back surface with a grinding device, Device wafers are divided into individual device wafers by processing devices such as dicing devices and laser processing devices, and each device wafer that has been separated can be used in electrical equipment such as mobile phones or personal computers.

In recent years, with the expansion of functions of the processing equipment used in such a series of semiconductor manufacturing processes, the operation methods, maintenance methods, and troubleshooting methods related to various processes have become more and more complicated.

In the past, in such a situation, users such as operators who use these processing equipment did not know the maintenance method or troubleshooting method, etc., in order to solve the unclear points or problems, the following actions were taken: re-read Several thick manuals are used to find the matching part, or to consult a skilled person who is familiar with the processing device. However, it may take a lot of time to read a thick manual and find a matching part, and even if the matching part is found, it is often difficult to understand intuitively. Also, in the case of relying on a skilled person, the skilled person may not always be nearby, so there is a problem that it will take a lot of time until the problem is solved.

In order to solve the above-mentioned problems, the following technology has been conceived: the maintenance method that has been prepared in advance can be memorized and displayed on the processing device (see, for example, Patent Document 1), or the processing device can be written arbitrarily, or memory voice And make it play, and save the memo to other operators (see, for example, Patent Document 2 and Patent Document 3). prior art literature patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2010-49466 Patent Document 2: Japanese Patent Laid-Open No. 2014-231123 Patent Document 3: Japanese Patent Laid-Open No. 2020-183001

The problem to be solved by the invention

By the way, when a new function is added to the processing device, the maintenance method or troubleshooting method is not memorized, so it is necessary to train the operator every time to learn it. In addition, in information sharing by writing or voice, it may be difficult to communicate the fine movements of the device.

The present invention is made in view of the above facts, and an object of the present invention is to provide a processing device capable of sharing high-precision information. means to solve problems

In order to solve the above-mentioned problems and achieve the purpose, the processing device of the present invention is a processing device for processing a processed object, which is characterized in that: it has: a holding table for holding the processed object; The processed object of the platform is processed; the display unit displays various information; and the control unit controls each component, The control unit includes: a dynamic image input unit for inputting dynamic images captured by the camera device; a dynamic image memory unit for memorizing the dynamic images that have been input into the dynamic image input unit; The dynamic image of the dynamic image memory, The moving image input part displays the moving image input from the camera device on the display unit, and the moving image playing part displays the played moving image on the display unit.

In the aforementioned processing device, it is also possible that: the control unit includes a video editing unit, and the video editing unit can edit the video stored in the video storage unit. Invention effect

The present invention exerts an effect that high-precision information sharing becomes possible.

form for carrying out the invention

The form (embodiment) for carrying out this invention is demonstrated in detail, referring drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include constituent elements that can be easily assumed by those skilled in the art and substantially the same constituent elements. In addition, the constitution described below can be combined suitably. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1] A processing apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1.

(processed object) The processing device 1 shown in FIG. 1 of Embodiment 1 is a cutting device for cutting a workpiece 200 . The processing object 200 of the processing apparatus 1 shown in FIG. 1 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer with silicon, sapphire, gallium, or the like as a substrate 201 . The workpiece 200 is provided with a plurality of predetermined dividing lines 203 intersecting each other on the front surface 202 , and a device 204 is formed in a region demarcated by the planned dividing lines 203 . The device 204 can be, for example, IC (Integrated Circuit, Integrated Circuit) or LSI (Large Scale Integrated Circuit, Large Scale Integration) integrated circuit, CCD (Charge Coupled Device, Charge Coupled Device), or CMOS (Complementary Metal Oxide Semiconductor, Complementary Metal Oxide Semiconductor) and other image sensors, or memory (semiconductor memory device).

In Embodiment 1, as shown in FIG. 1 , the workpiece 200 is attached to the back surface 206 of the back side of the front surface 202 with a diameter larger than the outer diameter of the workpiece 200, which is in the shape of a disc and is attached to the outer edge. The adhesive tape 209 of the ring frame 210 is supported in the opening of the ring frame 210 . The workpiece 200 is a device 204 that is divided into individual parts by cutting along a planned dividing line 203 .

(processing device) The processing device 1 shown in FIG. 1 is to hold the workpiece 200 with the holding table 10 and perform cutting processing (equivalent to processing) along the dividing line 203 with the cutting blade 21, and the workpiece 200 is divided into one A cutting device for a device 204.

As shown in FIG. 1 , the processing device 1 is provided with: a holding table 10, which attracts and holds a workpiece 200 with a holding surface 11; a cutting unit 20, which cuts the workpiece 200 held on the holding table 10; and an imaging unit. 30 , photographing the workpiece 200 held on the holding table 10 ; and the control unit 100 . As shown in FIG. 1 , the processing device 1 is a cutting device having two cutting units 20 , that is, a dual-spindle dicer, which is a so-called facing dual type cutting device.

Moreover, the processing apparatus 1 is provided with the moving unit 40 which moves the holding table 10 and the cutting unit 20 relatively. The moving unit 40 has at least: a processing feed unit 41, which will keep the table 10 in the direction of the X-axis parallel to the horizontal direction; an index feed unit 42, which will make the cutting unit 20 parallel to the horizontal direction and the X-axis Indexing feed in the Y-axis direction perpendicular to the direction; cutting into the feed unit 43, cutting the cutting unit 20 into the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction; and rotating The moving unit 44 rotates the holding table 10 around an axis parallel to the Z-axis direction. That is, the moving unit 40 relatively moves the holding table 10 and the cutting unit 20 in the X-axis direction, the Y-axis direction, and the Z-axis direction and around the axis.

The machining feed unit 41 is a unit that relatively moves the cutting unit 20 and the holding table 10 along the X-axis direction by moving the holding table 10 and the rotational movement unit 44 in the X-axis direction that is the machining feeding direction. . The index feed unit 42 is a unit that relatively moves the cutting unit 20 and the holding table 10 along the Y-axis direction by moving the cutting unit 20 in the Y-axis direction that is the index feed direction. The cutting feed unit 43 is a unit for relatively moving the cutting unit 20 and the holding table 10 along the Z axis direction by moving the cutting unit 20 in the Z axis direction which is the cutting feed direction.

The rotational movement unit 44 is supported by the machining feed unit 41 , supports the holding table 10 , and is arranged so as to be movable in the X-axis direction together with the holding table 10 . The rotary movement unit 44 is a unit that relatively rotates the cutting unit 20 and the holding table 10 around the axis by rotating the holding table 10 around the axis.

The machining feed unit 41, the index feed unit 42, and the plunging feed unit 43 include: a conventional ball screw provided rotatably around the axis, and a device for rotating the ball screw around the axis. A known motor, and a known guide rail that supports the holding table 10 or the cutting unit 20 so as to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction. Moreover, the rotational movement unit 44 is equipped with the motor which rotates the holding table 10 around the axis|shaft.

The holding table 10 is disc-shaped, and the holding surface 11 holding the workpiece 200 is formed of porous ceramics or the like. In addition, the holding table 10 can be moved between the processing area covering the lower part of the cutting unit 20 and the loading and unloading area separated from the lower part of the cutting unit 20 by the processing feeding unit 41, and the workpiece 200 can be carried in and out. set in a free way, whereby it can be set freely moving in the X-axis direction. The holding table 10 is provided rotatably around an axis parallel to the Z-axis direction by the rotational movement unit 44 .

The holding table 10 attracts and holds the workpiece 200 placed on the holding surface 11 by connecting the holding surface 11 to a suction source not shown, and the holding surface 11 is attracted by the suction source. In Embodiment 1, the holding table 10 sucks and holds the back surface 206 side of the workpiece 200 through the adhesive tape 209 . Moreover, as shown in FIG. 1 , a plurality of clampers 12 for clamping the ring frame 210 are provided around the holding table 10 .

The cutting unit 20 is a machining unit in which a cutting insert 21 is mounted on a spindle 23 and cuts a workpiece 200 held on the holding table 10 . The cutting unit 20 can be freely moved in the Y-axis direction by the index feeding unit 42 relative to the workpiece 200 held on the holding table 10, and can be moved toward the Y-axis direction by the cutting feed unit 43. The Z-axis direction is set freely movable.

The cutting unit 20 is provided on the door-shaped support frame 3 erected from the device body 2 through the index feeding unit 42 and the cutting feeding unit 43 . The cutting unit 20 is configured so that the cutting insert 21 can be positioned at any position on the holding surface 11 of the holding table 10 by the index feeding unit 42 and the plunging feeding unit 43 .

The cutting unit 20 is equipped with a cutting blade 21, a main shaft housing 22, a main shaft 23, and a main shaft motor not shown in the figure. The main shaft 23 is provided freely movable in the axial direction, and the main shaft 23 is rotatably arranged on the main shaft housing 22 and the cutting blade 21 is installed at the front end thereof. The main shaft motor rotates the main shaft 23 around the axial center.

The cutting blade 21 is an extremely thin cutting grindstone having a substantially ring shape. The cutting insert 21 is fixed to the front end of the spindle 23 . In Embodiment 1, the cutting insert 21 is a so-called hub-type insert provided with an annular circular base and an annular cutting edge arranged on the outer peripheral edge of the circular base to cut the workpiece 200. (hub blade). The cutting edge is formed of abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bonding material (bonding material) such as metal or resin, and is formed to a predetermined thickness. Furthermore, in the present invention, the cutting blade 21 may also be a so-called washer blade constituted only by a cutting edge.

Furthermore, the axes of the cutting blades 21 and the spindle 23 of the cutting unit 20 are set to be parallel to the Y-axis direction.

The camera unit 30 is fixed to the cutting unit 20 to move integrally with the cutting unit 20 . The imaging unit 30 includes an imaging element for imaging a region to be divided of the workpiece 200 held on the holding table 10 before cutting. The imaging element may be, for example, a CCD (Charge-Coupled Device, Charge-Coupled Device) imaging element or a CMOS (Complementary Metal Oxide Semiconductor, Complementary MOS) imaging element. The imaging unit 30 photographs the workpiece 200 held on the holding table 10 to obtain an image for performing calibration, etc., and outputs the obtained image to the control unit 100, wherein the aforementioned calibration is performed on the processed object. The alignment between the object 200 and the cutting blade 21.

In addition, the processing device 1 includes an X-axis direction position detection unit (not shown), a Y-axis direction position detection unit (not shown), and a Z-axis direction position detection unit. The X-axis direction position detection unit is used to detect the holding table 10. The position in the X-axis direction, the aforementioned Y-axis direction position detection unit is used to detect the position of the cutting unit 20 in the Y-axis direction, and the aforementioned Z-axis direction position detection unit is used to detect the position of the cutting unit 20 in the Z-axis direction. The position detection unit in the X-axis direction and the position detection unit in the Y-axis direction may be constituted by a linear scale parallel to the X-axis direction or the Y-axis direction, and a reading head. The position detection unit in the Z-axis direction detects the position of the cutting unit 20 in the Z-axis direction by using the pulse of the motor. The position detection unit in the X-axis direction, the position detection unit in the Y-axis direction, and the position detection unit in the Z-axis direction will output the position in the X-axis direction of the holding table 10, the Y-axis direction or the Z-axis direction of the lower end of the cutting edge of the cutting unit 20. to the control unit 100.

Furthermore, in Embodiment 1, the positions in the X-axis direction, the Y-axis direction, and the Z-axis direction of the holding table 10 and the cutting unit 20 of the processing device 1 are determined based on a predetermined reference position (not shown). . In Embodiment 1, the position in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined by the distances in the X-axis direction, Y-axis direction, and Z-axis direction from the reference position. In Embodiment 1, the XY coordinates represented by the X-axis direction and the Y-axis direction of the processing device 1 (by representing the distance in the X-axis direction from the reference position of the position in the X-axis direction and the distance in the Y-axis direction represented by The coordinates expressed by the distance in the Y-axis direction from the reference position) may indicate an arbitrary position of the workpiece 200 held on the holding surface 11 of the holding table 10 .

In addition, the processing device 1 is provided with a cassette elevator 60 and a conveying unit not shown in the figure. The cassette elevator 60 is used to place the cassette 50 for accommodating a plurality of workpieces 200 before and after cutting, and makes the cassette 50 in the The conveying unit moves the workpiece 200 in and out of the magazine 50 by moving up and down in the Z-axis direction, and conveys the workpiece 200 between the magazine 50 and the holding table 10 .

The control unit 100 is a unit that individually controls each component of the processing device 1 so that the processing device 1 performs processing operations on the workpiece 200 . Furthermore, the control unit 100 is a computer having a computing processing device, a memory device and an input/output interface device, the aforementioned computing processing device has a microprocessor such as a CPU (central processing unit, central processing unit), and the aforementioned memory device has a ROM ( Memory such as read only memory (read only memory) or RAM (random access memory, random access memory). The calculation processing device of the control unit 100 performs calculation processing according to the computer program stored in the memory device, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 through the input-output interface device.

In addition, the control unit 100 may be connected with the imaging device 70 which is separate from the imaging unit 30 . The imaging device 70 can be installed at any position of the processing apparatus 1 . The imaging device 70 is provided with an imaging element for imaging an arbitrary position of the processing device 1 . The imaging element may be, for example, a CCD (Charge-Coupled Device, Charge-Coupled Device) imaging element or a CMOS (Complementary Metal Oxide Semiconductor, Complementary MOS) imaging element. The imaging device 70 captures a moving image at an arbitrary position of the processing device 1 , and outputs the obtained moving image to the control unit 100 .

In particular, it is desirable that the imaging device 70 captures a moving image from the outside to the inside of the processing device 1 at the fault location, maintenance location, and function addition location of the processing device 1 . Furthermore, the so-called moving image is an image formed by, for example, 30 still images continuously obtained in one second, and is displayed by the display processing device 1 by continuously displaying, for example, 30 still images in one second. An image of the operating state at an arbitrary position. The camera device 70 can be, for example, a conventional USB (Universal Serial Bus) camera or a stereo camera.

In addition, the processing device 1 is provided with: a display unit 110 connected to the control unit 100, and can be constituted by a liquid crystal display device or the like that displays various information such as the state of the processing operation or images; Use when processing conditions etc. The display unit 110 is controlled by the arithmetic processing device of the control unit 100 to display various information stored in the memory device of the control unit 100 . The display unit 110 includes a display panel such as a Liquid Crystal Display (Liquid Crystal Display), an Organic Electro-Luminescence Display (Organic Electro-Luminescence Display), and a touch panel overlapping the display panel. The input unit 120 can be constituted by a touch panel disposed on the display unit 110 and an external input device such as a keyboard.

The control unit 100 includes a video input unit 101 , a video storage unit 102 , a video playback unit 103 and a video editing unit 104 . If the camera device 70 is connected to the control unit 100 , the video input unit 101 will input the video captured by the camera device 70 . The video input unit 101 displays the video input from the imaging device 70 on the display unit 110 .

The dynamic image storage unit 102 stores the dynamic images input to the dynamic image input unit 101 . The dynamic image playing unit 103 will play the dynamic image stored in the dynamic image storage unit 102 . The video playing unit 103 displays the played video on the display unit 110 . The video editing unit 104 is configured to edit the video stored in the video storage unit 102 .

Moreover, the functions of the video input unit 101, the video playback unit 103, and the video editing unit 104 are realized by the calculation processing device performing calculation processing according to the computer program stored in the memory device. The function of the dynamic image memory unit 102 can be realized by the aforementioned memory device.

Next, the display screen that can be displayed on the display unit 110 will be described according to the drawings. Fig. 2 is a diagram showing an example of a display screen of a top menu displayed on a display unit of the processing device shown in Fig. 1 . Fig. 3 is a diagram showing an example of a display screen of a video selection screen displayed on a display unit when a button image of "movie data" of the top menu shown in Fig. 2 is pressed. 4 is a diagram showing a video, etc. displayed on a display unit when a button image of "record" on the video selection screen shown in FIG. 3 is pressed. 5 is a diagram showing a video data selection screen displayed on a display unit when button images of "Play" and "Edit" on the video selection screen shown in FIG. 3 are pressed. Fig. 6 shows that the "play" button image of the selection image of the dynamic image shown in Fig. 3 is pressed, and the dynamic image name of the selection screen of the dynamic image data shown in Fig. 5 is "flange cleaning". When the button image is pressed, it is displayed on the display screen of the display unit. Fig. 7 shows that the "edit" button image of the selection image of the dynamic image shown in Fig. 3 is pressed, and the dynamic image name of the selection screen of the dynamic image data shown in Fig. 5 is "flange cleaning". When the button image is pressed, it is displayed on the display screen of the display unit.

The display unit 110 is controlled by the control unit 100 to display the top menu 130 shown in FIG. 2 . The top menu 130 is a menu displayed on the display unit 110 after the power of the processing device 1 is turned on and before performing processing operations, etc. In the central main area (main area) 111 of the top-level menu 130 shown in FIG. Button images 131, 132, 133, 134, 135, 136, 137, 138 of each mode of "maintenance", "machine maintenance", "engineering maintenance" and "moving image data", and the software below them The software keyboard area 112 displays button images of item keys such as "blade setup" and "device data" in a selectable operation mode, while nothing is displayed in the input area 113 .

After the control unit 100 accepts the pressing of the button image 138 of "moving image data" in the top menu 130 shown in FIG. Screen 140. The selection screen 140 of this dynamic image is a screen for selecting the following: memory (i.e. recording) the dynamic image input from the camera device 70, play the dynamic image stored in the dynamic image memory section 102, or edit the dynamic image stored in the dynamic image. The dynamic image of the image storage unit 102 .

The dynamic image selection screen 140 displays a button image 141 of "recording", a button image 142 of "play" and a button image 143 of "editing" in the main area 111 in a selectable manner. The image 141 is used to select the video that has been input from the camera 70 to be stored (that is, to be recorded), and the aforementioned "play" button image 142 is used to select the video that has been stored in the video storage unit 102. Playing, the aforementioned "edit" button image 143 is to edit the dynamic image stored in the dynamic image storage unit 102. In addition, the video selection screen 140 displays a button image 144 of “Back” for returning to the top menu 130 in the input area 113 .

When the video input section 101 of the control unit 100 accepts the button image 141 of "recording" in the video selection screen 140 shown in FIG. control, and display the dynamic image 151 captured by the imaging device 70 in the main area 111 as shown in FIG. 4 . Also, the display screen 150 shown in FIG. 4 showing the dynamic image 151 input from the camera 70 in the main area 111 will display a button image 152 of "video recording" and a button image 153 of "stop" in the input area 113. With the button image 154 of "moving image name input", the button image 152 of the aforementioned "recording" is used to store the moving image 151 in the moving image storage unit 102, and the button image 153 of the aforementioned "stop" is used to stop the moving image 151, the button image 154 of the aforementioned "moving image name input" is used to link the "moving image name" to the moving image stored in the moving image storage unit 102 and store it in the moving image storage unit 102. Moreover, the display screen 150 shown in FIG. 4 displays a button image 155 of "return" for returning to the video selection screen 140 in the input area 113 .

In this way, the moving image input unit 101 will display the moving image 151 input from the imaging device 70 on the display unit 110 after accepting the pressing of the button image 141 of "Record" on the moving image selection screen 140 shown in FIG. 111 of the main area. Moreover, the display unit 110 will display the top menu 130 after the control unit 100 accepts the pressing of the button image 144 of “Back” in the input area 113 of the input area 113 of the dynamic image selection screen 140 .

Also, the moving image memory section 102 accepts the "recording" of the input area 113 of the display screen 150 showing the moving image 151 input from the imaging device 70 shown in FIG. After the button image 152 is pressed, the memory (that is, video recording) of the dynamic image 151 input from the imaging device 70 will start, and if the button image 153 of "stop" is pressed, the video recording will be stopped. The memory (that is, video recording) of the dynamic image 151 input by the device 70 . If the moving picture storage unit 102 of the control unit 100 accepts the pressing of the button image 153 of “stop” in the moving picture input unit 101 of the control unit 100 to stop recording (that is, recording) the moving picture 151 input from the imaging device 70, it accepts After the button image 154 of "moving image name input" is pressed, the moving image name input from the input unit 120 and the stored moving image 151 will be linked to be memorized.

In this way, the video storage unit 102 will memorize the video 151 input to the video input unit 101 , and will store the video name input from the input unit 120 in association with the video 151 . Also, the display unit 110 accepts the button image 155 of "return" in the input area 113 of the input area 113 of the display screen 150 showing the video 151 input from the imaging device 70 shown in FIG. When pressed, a video selection screen 140 is displayed.

Moreover, the moving image 151 displayed in the main area 111 of the display screen 150 shown in FIG. Moreover, the moving image 151 displayed on the main area 111 of the display screen 150 shown in FIG. Therefore, the dynamic image name of the dynamic image 151 displayed in the main area 111 of the display screen 150 shown in FIG. Furthermore, in the present invention, it is desirable that the processing device 1 makes the moving image 151 stored in the moving image storage unit 102 be a moving image that is not specified in the manual of the processing device 1 that deteriorates over time. It has moving images to promote attention, to explain new functions, to show the situation when a failure occurs, or to show the operation of inspection or assembly.

The display unit 110 will be controlled by the control unit 100 after the control unit 100 accepts the pressing of the "play" button image 142 of the video selection screen 140 shown in FIG. 3 to display the video as shown in FIG. A data selection screen 160 . The selection screen 160 of the moving image data is to display the button images 161, 162 of the "moving image name" which have been linked with the moving images 151, 171 (shown in Fig. 4 and Fig. 6) stored in the moving image memory section 102. screen.

Furthermore, in the example shown in FIG. 5 , the selection screen 160 of the dynamic image data displays in the main area 111 a button image 161 whose dynamic image name is "maintaining workbench replacement" in a selectable manner, and a dynamic image whose name is Button image 162 of "flange cleaning". The button image 161 whose dynamic image name is "maintain table replacement" is an image for selecting the dynamic image 151 whose dynamic image name is "maintain table replacement", and has been combined with the dynamic image name "maintain table replacement". The dynamic image 151 establishes a connection. The button image 162 whose dynamic image name is "flange cleaning" is to select the image of the dynamic image 171 (shown in FIG. Establish a connection with the dynamic image 171 of "Feng Qing Sweeping".

In addition, the moving image 151 whose moving image name is "replacing the holding table" is a moving image acquired by the imaging device 70 capturing the operation of replacing the holding table 10 . The dynamic image 171 named "flange cleaning" is a dynamic image obtained by the imaging device 70 taking pictures of the following operation: the flange installed on the front end of the main shaft 23 of the cutting unit 20 and used to fix the cutting blade 21 24 (shown in FIG. 6 ) that supports the end face 25 of the cutting insert 21 for cleaning. In addition, the video data selection screen 160 displays a button image 163 of “Back” for returning to the video selection screen 140 in the input area 113 .

After the display unit 110 accepts the pressing of any one of the button images 161, 162 of the button images 161, 162 of the selection screen 160 of the moving image data shown in FIG. The dynamic image 151 , 171 associated with any one of the button images 161 , 162 will be played by the dynamic image player 103 and displayed in the main area 111 . For example, after the display unit 110 accepts the pressing of the button image 162 whose name is "flange cleaning" in the selection screen 160 of the video data shown in FIG. The dynamic image player 103 of the control unit 100 controls, and as shown in FIG. Also, the display screen 170 of the dynamic image 171 shown in the main area 111 shown in FIG. A button image 172 of "Play" and a button image 173 of "Stop" for stopping the playback of the video 171 are displayed in the input area 113 . In addition, the display screen 170 shown in FIG. 6 displays a button image 174 of "return" for returning to the selection screen 160 of video data in the input area 113 .

In this way, if the moving image player 103 accepts the pressing of any button image of the button images 161, 162 showing the name of the moving image on the selection screen 160 of the moving image data shown in FIG. The first still image of the dynamic image 151 , 171 stored in the dynamic image storage unit 102 associated with any one of the pressed button images 161 , 162 is displayed on the main area 111 of the display unit 110 . For example, if the dynamic image player 103 accepts the pressing of the button image 162 whose dynamic image name is "flange cleaning" in the selection screen 160 of the dynamic image data shown in FIG. The still image at the beginning of the dynamic image 171 of the “flange cleaning” stored in the dynamic image storage unit 102 associated with the image 162 is displayed on the main area 111 of the display unit 110 . Moreover, the display unit 110 will display the selection screen 140 of the motion picture after the control unit 100 accepts the pressing of the "return" button image 163 of the input area 113 of the selection screen 160 of the motion picture data shown in FIG. 5 .

Moreover, after the moving image player 103 accepts the pressing of the button image 172 of "Play" in the input area 113 of the display screen 170 displaying the first still images of the moving images 151 and 171 in the main area 111, the moving image starts. The playback of the images 151, 171 displays the dynamic images 151, 171 in the main area 111, wherein the aforementioned dynamic images 151, 171 are associated with any button image of the pressed button images 161, 162 The moving image stored in the moving image storage unit 102 . After the moving image player 103 accepts the pressing of the "stop" button image 173 in the input area 113 of the display screen 170, the playing of the moving images 151, 171 will be stopped, and the moving images 151, 171 will be displayed in the main area 111. A still image when the button image 173 of "Stop" is pressed.

For example, after the video playback unit 103 accepts the pressing of the button image 162 of “Flange Cleaning” on the selection screen 160 of the video data, it will store the video of the “Flange Cleaning” stored in the video storage unit 102. The still image at the beginning of the image 171 is displayed in the main area 111, and when the button image 172 of "play" in the input area 113 of the display screen 170 is accepted, the dynamic image named "flange cleaning" starts Playing the video 171 displays the dynamic video 171 in the main area 111 . After the pressing of the button image 173 of "stop" in the input area 113 of the acceptance display screen 170, the dynamic image player 103 will stop the playback of the dynamic image 171 whose dynamic image name is "flange cleaning", and display it in the main area. 111 displays a still image when the "stop" button image 173 of the moving image 171 whose moving image name is "flange cleaning" is pressed.

The display unit 110 will be controlled by the control unit 100 to display the video as shown in FIG. A data selection screen 160 . After the display unit 110 accepts the pressing of any one of the button images 161 and 162 of the button images 161 and 162 of the selection screen 160 of the moving image data shown in FIG. The dynamic image 151 , 171 associated with any one of the button images 161 , 162 will be controlled by the dynamic image editing unit 104 and displayed in the main area 111 .

For example, after the video editing section 104 of the control unit 100 accepts the pressing of the button image 162 whose video name is "flange cleaning" on the video data selection screen 160 shown in FIG. Controlled by the dynamic image editor 104 of the control unit 100, and as shown in FIG. Also, the display screen 180 of the dynamic image 171 shown in the main area 111 shown in FIG. A button image 181 of "Play", a button image 182 of "Stop" for stopping the playback of the video 171, and a button image 183 of "Reverse Play" for playing the video 171 in reverse are displayed on the input. District 113. Furthermore, the so-called reverse playback refers to playing the moving image 171 toward the beginning still image of the moving image 171 .

Also, the display screen 180 shown in FIG. 7 is to display the following button images in the input area 113: a button image 184 of "partial deletion" for deleting a part of the dynamic image 171, a button image 184 for setting the dynamic image 171 A button image 185 of "start point setting" for deleting a part of the starting point, a button image 186 of "end point setting" for setting the end point of a part of the moving image 171 to be deleted, and a button image 186 for inputting text on the moving image 171, etc. A button image 187 of "character input" and a button image 188 of "return" for returning to the selection screen 160 of video data.

In this way, if the dynamic image editing section 104 accepts the pressing of any one of the button images 161 and 162 of the button images 161 and 162 showing the names of the dynamic images on the selection screen 160 showing the dynamic image data shown in FIG. The first still image of the dynamic image 151 , 171 stored in the dynamic image storage unit 102 associated with any one of the pressed button images 161 , 162 is displayed on the main area 111 of the display unit 110 . For example, if the dynamic image player 103 accepts the pressing of the button image 162 whose dynamic image name is "flange cleaning" in the selection screen 160 of the dynamic image data shown in FIG. The still image at the beginning of the dynamic image 171 of the “flange cleaning” stored in the dynamic image storage unit 102 associated with the image 162 is displayed on the main area 111 of the display unit 110 .

Moreover, after the moving image editing unit 104 accepts pressing of the button image 181 of "play" in the input area 113 of the display screen 180 displaying the still images at the beginning of the moving images 151 and 171 in the main area 111, the moving image starts. The playback of the images 151, 171 displays the dynamic images 151, 171 in the main area 111, wherein the aforementioned dynamic images 151, 171 are associated with any button image of the pressed button images 161, 162 The moving image stored in the moving image storage unit 102 . After the moving image editing section 104 accepts the pressing of the "stop" button image 182 in the input area 113 of the display screen 180, the playing of the moving images 151, 171 will be stopped, and the moving images 151, 171 will be displayed in the main area 111. A still image when the button image 182 of "Stop" is pressed. After receiving the press of the button image 183 of "reverse playback" in the input area 113 of the display screen 180, the dynamic image editing section 104 will play the dynamic images 151 and 171 in reverse, and will reversely play the dynamic image 151 , 171 are displayed in the main area 111.

For example, after the video editing section 104 accepts the pressing of the button image 162 of "Flange Cleaning" on the selection screen 160 of the video data, it will store the motion of "Flange Cleaning" stored in the video memory section 102. The first still image of the image 171 is displayed in the main area 111 . After the dynamic image editing section 104 accepts the pressing of the button image 181 of "play" in the input area 113 of the display screen 180, it will start to play the dynamic image 171 whose dynamic image name is "flange cleaning" and convert the dynamic image 171 is displayed in the main area 111. After the dynamic image editing section 104 accepts the pressing of the button image 182 of "stop" in the input area 113 of the display screen 180, it will stop the playback of the dynamic image 171 whose dynamic image name is "flange cleaning", and display it in the main area. 111 displays a still image when the button image 182 of "stop" of the moving image 171 whose moving image name is "flange cleaning" is accepted is pressed. After accepting the pressing of the button image 183 of "reverse play" in the input area 113 of the display screen 180, the dynamic image editing section 104 will reversely play the dynamic image 171 whose dynamic image name is "flange cleaning", and A dynamic image 171 named "Flange Cleaning" which is played in reverse is displayed in the main area 111 .

Also, if the moving image editing section 104 is in the state where the moving images 151, 171 or still images of the moving images 151, 171 are displayed in the main area 111, it sequentially accepts pressing of the button image 184 of "partial deletion" and "starting point". After the button image 185 of "setting" and the button image 186 of "end point setting" are pressed, the dynamic images 151, 171 displayed in the main area 111 when the button image 185 of "starting point setting" is pressed The still images are deleted from the still images of the moving images 151 and 171 displayed on the main area 111 when the button image 186 of "end point setting" is pressed. If the moving image editing section 104 accepts the pressing of the button image 187 of "character input" in the state where the moving image 151, 171 or the still image of the moving image 151, 171 is displayed on the main area 111, it will send the input unit 120 The input characters and the like are inserted into predetermined positions of the moving images 151 and 171 , and the moving images 151 and 171 with the inserted characters and the like are stored in the moving image storage unit 102 .

Furthermore, in Embodiment 1, although the video editing unit 104 performs "partial deletion" for deleting a part of the video 151, 171, and "text input" for inserting characters into predetermined positions of the video 151, 171 , as the editing of the dynamic images 151, 171, but in the present invention, it is not limited to these, as long as it is an action of editing the dynamic images 151, 171 such as insertion of other dynamic images or still images, it can also be perform any action. Moreover, in the present invention, the dynamic image editing unit 104 can also allow the operator to operate in the main area 111 to insert desired handwritten characters or graphics into the dynamic image when the dynamic images 151 and 171 are displayed in the main area 111. 151, 171.

In this way, the video editing unit 104 can edit the video images 151 and 171 stored in the video memory unit 102 . Moreover, the display unit 110 will display the selection screen of the moving picture data after the moving picture editing part 104 of the control unit 100 accepts the press of the "return" button image 188 of the input area 113 of the display screen 180 shown in FIG. 160. In this way, the display unit 110 of the processing device 1 can display the moving images 151 and 171 captured by the imaging device 70 in real time, and can be used by the control unit 100 to display the moving images 151 and 171 captured by the imaging device 70. Record and play.

When the processing conditions are set in the control unit 100, the cassette 50 containing the workpiece 200 is set on the cassette lifter 60, and the control unit 100 accepts the instruction to start the processing operation, and the processing device 1 with the aforementioned configuration starts the processing operation. .

When starting the processing operation, the processing device 1 controls the transfer unit by the control unit 100 to take out one workpiece 200 from the magazine 50, and place it on the holding surface of the holding table 10 in the loading and unloading area through the adhesive tape 209. 11. During the processing operation, the processing device 1 attracts and holds the workpiece 200 on the holding surface 11 through the adhesive tape 209 , and clamps the annular frame 210 with the clamp portion 12 .

In the processing device 1, the control unit 100 allows the main shaft 23 to rotate around the axis, and the control unit 100 controls the moving unit 40 to move the holding table 10 below the camera unit 30, and the camera unit 30 is used to attract The workpiece 200 held on the holding table 10 is imaged, and calibration is performed. In the processing operation, the processing device 1 is such that the control unit 100 controls the moving unit 40 etc. according to the processing conditions, and moves the cutting blade 21 toward the workpiece while relatively moving the cutting blade 21 and the workpiece 200 along the planned dividing line 203. Cutting is performed on the planned dividing line 203 of the workpiece 200 until it reaches the adhesive tape 209 .

The processing device 1 cuts the planned dividing line 203 of the workpiece 200 according to the processing conditions, and divides the workpiece 200 into individual devices 204 . The processing apparatus 1 moves the holding table 10 from the processing area to the loading/unloading area after cutting all the planned dividing lines 203 of the workpiece 200 .

The processing apparatus 1 stops the movement of the holding table 10 in the loading/unloading area, stops the suction holding of the holding table 10 to hold the workpiece 200 , and releases the clamping by the clamp unit 12 . In the processing device 1 , the control unit 100 controls the conveying unit to carry the cut workpiece 200 from the holding table 10 into the cassette 50 . After the processing device 1 performs cutting processing on all the workpieces 200 in the cassette 50, the processing operation ends.

In the processing device 1 of Embodiment 1 described above, the control unit 100 is equipped with: a moving image input unit 101, which displays the moving images 151 and 171 captured by the imaging device 70 on the display unit 110; The dynamic images 151 and 171 that have been input into the dynamic image input unit 101 ;

Therefore, when a new function is added to the processing device 1, the dynamic images 151, 171 of the maintenance method or troubleshooting method captured by the imaging device 70 can be stored in the dynamic image storage unit 102 while being confirmed on the display unit 110. Videos showing appropriate maintenance methods, troubleshooting methods, and the like can be stored in the video memory unit 102 . In addition, by confirming the moving image stored in the moving image storage unit 102 of the processing device 1, it becomes possible for the operator to easily grasp the fine movements of the processing device 1 such as the maintenance method or the troubleshooting method. It is very difficult to share information based on sound or sound.

According to this, the processing device 1 exhibits an effect that high-precision information sharing becomes possible.

In particular, since the processing device 1 can use a moving image to share the action when an additional function is required or when a failure occurs, it is possible to easily communicate the needs or troubles of the user of the processing device 1 to other people, which is helpful. for better proposals or problem solving. In addition, the processing device 1 can contribute to finding out the cause of a failure and the like by memorizing in advance the video during the inspection or operation during the assembly of the processing device 1 . In addition, the processing device 1 also exhibits the effect that the operation of the function under development is captured by taking pictures, and other people who do not know the function can easily imagine it by watching the video when performing troubleshooting or adding functions.

In addition, since the processing device 1 can capture a moving image at an arbitrary position by the imaging device 70, the degree of freedom is high. Furthermore, in the processing device 1, when the imaging device 70 is a stereo camera, it is possible to obtain an easily intelligible video with a wider field of view than a monocular camera.

In addition, this invention is not limited to the invention of the said embodiment. That is, various modifications and implementations are possible without departing from the gist of the present invention. In Embodiment 1, although the processing device 1 is a cutting device, it is not limited to the cutting device in the present invention, and may be various processing devices such as the following: a processing unit that grinds the workpiece 200, that is, a grinding machine. Grinding device with grinding unit, grinding device with grinding unit for grinding workpiece 200, laser processing device with laser irradiation unit for laser processing with laser processing on workpiece 200 wait. In addition, in the present invention, the workpiece 200 is not limited to a wafer, and may be a plate-shaped structure such as various packaging substrates, ceramic substrates, and glass substrates.

In addition, in the above-mentioned embodiment, although the following example is described in which the button image 138 of "moving image data" is displayed in the main area 111 of the top menu 130, the present invention is not limited thereto. For example, even when the button image 131 of "Full Auto" or the button image 132 of "Manual Operation" is selected, the button image 138 of "Movie Data" is still displayed on the screen in such a manner that it can be operated selectably. It is a different area from the main area 111 (such as the input area 113 or the software keyboard area 112, etc.).

In addition, in the present invention, the control unit 100 may confirm the ID (identification) of the operator, and set the display target person or editing authority of the video 151, 171 for each ID, that is, the operator. In addition, the moving images 151 and 171 that can be played and edited can also include various information such as text or audio, still images, graphics, and shooting date and time.

In addition, the processing device 1 can also use an imaging device to capture the ID (identification) of the operator, and use image recognition to analyze the ID, or use the imaging device to capture the operator's face for face authentication, thereby for example In response to the change of the displayed screen by the operator, the screen dedicated to the skilled staff is displayed to the skilled staff, and the screen dedicated to the novice is displayed to the novice.

In addition, the processing device 1 has the following operation: install a barcode reader, etc. to read the ID of the cassette 50, etc., and set corresponding receipt data. Therefore, in the present invention, it is also possible that the processing device 1 reads the ID of the cassette 50 at a specified time point with the attached camera device, and sets the corresponding received data to be automatically set. Although there are multiple types of barcodes such as one-dimensional codes and QR codes (registered trademarks), even if the operation is changed, the same imaging device can still be used. Also, when the processing device 1 reads the ID of the ring frame 210 with an attached imaging device, the same imaging device can be added to cope, and it is not necessary to prepare a barcode for each operation.

Also, in the present invention, if the dynamic images 151, 171 captured by the imaging device 70 are always memorized, the file size of the dynamic images 151, 171 will become larger, so certain actions in the imaging field of view of the imaging device 70 can also be recorded. , or a certain action in the processing device 1 (such as changing to a pre-designated screen, or a screen action performed by the operator, etc.) as a trigger to start and stop video recording.

For example, as a first solution, the processing device 1 can also set the imaging device 70 connected to the control unit 100 on the conveying unit to record, and use the start and end of the processing operation as a trigger to start and end the imaging device 70 camera. In this case, the processing device 1 can analyze the occurrence of a problem with a moving image and take a countermeasure.

For example, as a second solution, the processing device 1 may also use the detection results of the sensors for detecting the moving speeds of the units 41, 42, 43, and 44 and the sensors for detecting the falling of the workpiece 200 as triggers, to start and end the imaging by the imaging device 70 . In this case, the processing device 1 may automatically stop the processing operation by generating an alarm when the operation delay becomes longer than a predetermined time.

In addition, as a third aspect, the machining device 1 may designate a screen in consideration of an operation error such as a tool mark inspection error or a blade replacement, and start and end the imaging of the imaging device 70 by using the display of the screen as a trigger. In this case, the processing device 1 can determine the difference between the images before and after imaging and generate an alarm. Specifically, problems such as forgetting to install the cutting insert 21 or leaving the replacement jig in the processing device 1 to cause damage to the workpiece 200 or the processing device 1 can be avoided.

Moreover, as a fourth aspect, the processing apparatus 1 may start and end the imaging by the imaging device 70 by opening and closing the cover covering the apparatus main body 2 as a trigger. In this case, the processing device 1 can determine the difference between the images before and after imaging and generate an alarm. Specifically, although the processing device 1 has the operation of opening the device cover due to the drop of the workpiece 200, abnormal vacuum of the transfer unit, etc., and taking out the workpiece 200 to restart mass production, there will be Restarting with the workpiece 200 left in the processing apparatus results in damage to the workpiece 200 . By judging the difference between images before and after imaging, it is possible to prevent forgetting to take out the workpiece 200 .

Also, as a fifth solution, the processing device 1 can also be provided with a plurality of imaging devices 70 at positions where the operator can be seen, and where the inside of the processing device can be seen, and the conversion of the touch panel into the specific display unit 110 The situation of the screen operation (for example, the designated screen such as the replacement screen of the cutting blade 21 and the error recovery screen) is used as a trigger to start and end the imaging of the imaging device 70 . In this case, the processing apparatus 1 can record who performed the operation, the situation at the time of occurrence, and the like when an operator's error occurs. Also, by automatically editing the video captured in this case to the head of the video of the first, second, third, and fourth examples exemplified above, it is combined into one video Videos become able to record "who did what".

1: Processing device 2: Device body 3: Support frame 10: Hold the workbench 11: keep the surface 12: Fixture Department 20: Cutting unit (processing unit) 21: Cutting blade 22: Spindle housing 23: Spindle 24: Flange 25: end face 30: camera unit 40: mobile unit 41: Processing feed unit 42: Index feed unit 43: cut into feed unit 44:Rotate mobile unit 50:cassette 60: Cassette elevator 70: camera device 100: control unit 101:Motion image input unit 102: Dynamic image memory department 103:Motion image playback department 104: Motion Picture Editing Department 110: display unit 111: main area 112: Software keyboard area 113: input area 120: input unit 130: Top Menu 131~138,141~144,152~155,161~163,172~174,181~188: button image 140,160: Selection screen 150,170,180: display screen 151,171: Moving images 156: text 200: processed object 201: Substrate 202: front 203: Divide scheduled line 204: device 206: back 209: Tape 210: ring frame X, Y, Z: direction

Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. Fig. 2 is a diagram showing an example of a display screen of a top menu displayed on a display unit of the processing device shown in Fig. 1 . Fig. 3 is a diagram showing an example of a display screen of a video selection screen displayed on a display unit when a button image of "movie data" of the top menu shown in Fig. 2 is pressed. 4 is a diagram showing a video, etc. displayed on a display unit when a button image of "record" on the video selection screen shown in FIG. 3 is pressed. 5 is a diagram showing a video data selection screen displayed on a display unit when button images of "Play" and "Edit" on the video selection screen shown in FIG. 3 are pressed. Fig. 6 shows that the "play" button image of the selection image of the dynamic image shown in Fig. 3 is pressed, and the dynamic image name of the selection screen of the dynamic image data shown in Fig. 5 is "flange cleaning". When the button image is pressed, it is displayed on the display screen of the display unit. Fig. 7 shows that the "edit" button image of the selection image of the dynamic image shown in Fig. 3 is pressed, and the dynamic image name of the selection screen of the dynamic image data shown in Fig. 5 is "flange cleaning". When the button image is pressed, it is displayed on the display screen of the display unit.

1: Processing device

2: Device body

3: Support frame

10: Hold the workbench

11: keep the surface

12: Fixture Department

20: Cutting unit (processing unit)

21: Cutting blade

22: Spindle housing

23: Spindle

30: camera unit

40: mobile unit

41: Processing feed unit

42: Index feed unit

43: cut into feed unit

44:Rotate mobile unit

50:cassette

60: Cassette elevator

70: camera device

100: control unit

101:Motion image input unit

102: Dynamic image memory department

103:Motion image playback department

104: Motion Picture Editing Department

110: display unit

120: input unit

200: processed object

201: Substrate

202: front

203: Divide scheduled line

204: device

206: back

209: Tape

210: ring frame

X, Y, Z: direction

Claims (2)

A processing device for processing a workpiece, characterized in that: The aforementioned processing device has: Hold the workbench, hold the workpiece; The processing unit is used to process the processed object that has been held on the holding table; a display unit for displaying various information; and The control unit controls each component, The control unit contains: The dynamic image input unit is used for the input of dynamic images captured by the camera device; a moving image memory unit, which memorizes the moving images input into the moving image input unit; and The dynamic image playback unit plays the dynamic images stored in the dynamic image storage unit, The moving image input part displays the moving image input from the camera device on the display unit, and the moving image playing part displays the played moving image on the display unit. The processing device according to claim 1, wherein the control unit includes a video editing unit, and the video editing unit can edit the video stored in the video storage unit.

Images