TW202317985A - Array type ultrasonic transmitting/receiving apparatus - Google Patents

Abstract

To provide an ultrasonic transmitting/receiving apparatus with reduced inspection time. In an array type ultrasonic transmitting/receiving apparatus 1 of the present invention including an array probe 4 having a plurality of ultrasonic vibrators linearly arranged, where an arrangement direction of the ultrasonic vibrators is defined as a Y-axis direction of a scanning plain, meanwhile, a direction perpendicular to the arrangement direction is defined as an X-axis direction, the array probe is moved in the X-axis direction without standing still on the basis of preset scanning conditions, and the array probe performs an electronic scan of sequentially transmitting an ultrasonic beam to a plurality of irradiation points of a test object and receiving reflection waves during movement in the X-axis direction.

Description

Array Ultrasonic Transceiver

The invention relates to an array type ultrasonic transceiver.

There is an ultrasonic transceiver device that irradiates an object such as a semiconductor with ultrasonic waves, generates image information inside the object based on the reflected wave, and detects defects inside the object. According to the ultrasonic transceiver device, non-destructive high-resolution inspection can be performed to ensure the reliability of electronic parts.

In order to shorten the inspection time accompanying the high-density mounting of semiconductor wafers in recent years. In order to realize this, it is necessary to shorten the sending and receiving process of ultrasonic waves.

Therefore, an ultrasonic inspection device comprising a plurality of ultrasonic transducers arranged linearly and using an array probe for electronic scanning (electronic scan) of the ultrasonic transducers has been studied (refer to Patent Document 1).

In this ultrasonic inspection device, the array probe is configured to scan a predetermined width with one electronic scan while the array probe is stationary. Specifically, a single probe is processed by a single ultrasonic vibrator, whereas a plurality of ultrasonic vibrators constituting an array probe are electronically scanned to achieve high-speed processing. [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 63-177056

[Problem to be solved by the invention]

In the prior art described above, there is disclosed a method of moving to the next inspection position after finishing the electronic scanning process with the array probe in a stationary state, and performing the electronic scanning process with the array probe stationary again. That is, it is a method of keeping the array probes stationary while performing electronic scanning.

Specifically, the time required for sending ultrasonic waves at a certain inspection position until sending ultrasonic waves at the next inspection position is the sum of the electronic scanning time and the moving time of the probe. In order to shorten the inspection time in the ultrasonic transceiver, further high-speed processing is required.

The object of the present invention is to provide an ultrasonic transceiver that shortens the inspection time. [Technical means to solve the problem]

In order to solve the above-mentioned problems, the array type ultrasonic transceiver device of the present invention is equipped with an array probe having a plurality of ultrasonic vibrators arranged in a straight line; and in a scanning plane parallel to the above-mentioned object above the object, Set the arrangement direction of the above-mentioned ultrasonic vibrator as the Y-axis direction of the above-mentioned scanning plane, and set the direction perpendicular to the above-mentioned arrangement direction as the X-axis direction of the above-mentioned scanning plane; based on the preset scanning conditions, the above-mentioned array probe is not static The ground moves in the X-axis direction; during the movement of the above-mentioned array probe in the X-axis direction, electronic scanning is performed to sequentially send ultrasonic beams and receive their reflected waves to a plurality of irradiation points of the above-mentioned subject; In the sound wave transceiver device, the position of the above-mentioned array probe at the beginning of the initial electronic scanning of the above-mentioned subject irradiating the ultrasonic beam is set as the origin of the scanning plane of the above-mentioned array probe; in the Y-axis direction, the electronic scanning When the Y coordinate of the position of the array probe at the beginning is set to _Y1 , the Y coordinate Y1 ₊₁ of the next Y axis direction of the moving above-mentioned array probe is set as _Y1 plus the scanning width of electronic scanning When moving towards the direction away from the above-mentioned origin, the X coordinate of the above-mentioned array probe moves from X _k to the position of X _k+1 , and when moving toward the direction close to the above-mentioned origin, the above-mentioned array probe The X coordinate of the needle moves from X _k to the position of X _k-1 ; and alternately repeats the forward moving scanning action and the reverse moving scanning action to electronically scan the above-mentioned scanning plane, and the above-mentioned forward moving scanning action includes electronic scanning on one side The action of moving the X coordinate of the array probe from X _k to X _k+1 in the X-axis direction, and the movement terminal in the X-axis direction, making the Y coordinate of the array probe in the Y-axis direction change from Y _l to Y _l The action of moving the scanning width of electronic scanning in the manner of ₊₁ , the above-mentioned reverse moving scanning action includes the action of moving the X coordinate of the array probe from X _k to X _k-1 in the X-axis direction while performing electronic scanning, and The movement terminal in the X-axis direction is an action of moving the Y coordinate of the array probe in the Y-axis direction from Y ₁ to Y ₁₊₁ by the scanning width of the electronic scanning. [Effect of Invention]

According to the present invention, the inspection time of the ultrasonic transceiver can be shortened.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 is a diagram showing the overall configuration of the ultrasonic transceiver device of the embodiment.

The ultrasonic transceiver 1 includes a triaxial scanner 2 (scanning mechanism), and an ultrasonic array probe (hereinafter, referred to as a probe). The 3-axis scanner 2 scans the probe 4 two-dimensionally in the X-axis direction and the Y-axis direction on the planar subject 8 (planar scanning). Thereby, the ultrasonic transmitting and receiving device 1 can image the planar subject 8 with ultrasonic waves.

The probe 4 is a phased array ultrasonic probe (ultrasonic array probe) in which a plurality of oscillators are arranged in short strips. Specifically, by controlling the oscillation timing of a plurality of vibrators (vibrator groups) that are part of a plurality of vibrators, an ultrasonic converging beam (ultrasonic beam) is produced, and the vibrator group is electronically switched to change the irradiation position and irradiate The ultrasonic beam performs one-dimensional scanning on the subject 8 . In this specification, the scanning of the electronic ultrasonic beam of the phased array ultrasonic probe is referred to as electronic scanning. The reception control of the reflected wave of the ultrasonic beam is also performed by controlling the vibrator group.

In addition, the probe 4 can focus ultrasonic waves generated by a single vibrator with an acoustic lens (acoustic lens) to irradiate the subject, and a plurality of the vibrators can be configured in a strip shape. Also in this configuration, electronic scanning of the subject 8 is performed by electronically switching the vibrator to change the irradiation position of the ultrasonic beam.

The probe 4 is placed so as to be immersed in the water filled with the water tank 91 , and the front end of the probe 4 faces the subject 8 . The probe 4 is attached to the 3-axis scanner 2 via a holder 24 . The water tank 91 is placed on a stand 92 .

The 3-axis scanner 2 detects the scanning position based on the linear position or the rotational position (angular position) detected by a built-in encoder for detecting position change when scanning the probe 4 two-dimensionally. Thereby, the ultrasonic imaging device 1 can two-dimensionally visualize the relationship between each scanning position (scanning point) of the subject 8 and the echo.

The 3-axis scanner 2 includes an X-axis scanner 21 and a Y-axis scanner 22 for scanning the probe 4, a Z-axis scanner 23 for changing the distance between the probe 4 and the subject 8, and a device for holding the probe 4. Holder 24. In addition, the height of the probe 4 is adjusted by the stage 92 before inspection, and the distance between the probe 4 and the object 8 is adjusted by the Z-axis scanner 23 .

The probe 4 is continuously moved at a specific speed by the X-axis scanner 21 of the 3-axis scanner 2 (scan action), that is, to move the probe 4 in the X-axis direction without resting, and then, by the Y-axis scanner 22 of the 3-axis scanner 2, electronic scanning is performed in parallel with the arrangement direction of a plurality of vibrators. The movement of the width (shift action).

This holder 24 supports the flange part 42 provided on the upper part of the probe 4, and moves upward smoothly when upward force is applied to the probe 4. As shown in FIG. The sensor 3 is provided on the holder 24, and detects that the probe 4 moves upward.

The control device 10 includes a control unit 18, a sending and receiving instruction unit 12, a vibrator operation signal generating unit 14, a reflected wave signal processing unit 15, a reflected wave image generating unit 16, and a display unit 17, and controls and detects the three-axis scanner 2. The sending and receiving control of the needle 4 and the display control of the echo from the subject 8.

The mechanical control part 11 is used to drive the X-axis scanner 21 and the Y-axis scanner 22 based on the encoder output built in the X-axis scanner 21 and the Y-axis scanner 22 according to the scanning conditions described later, so that the probe 4 The control unit for the movement of the scanning plane parallel to the subject 8 above the subject 8 .

The transmitting and receiving instruction unit 12 is a control unit that instructs the vibrator operation signal generating unit 14 to generate a vibrator operation signal to start electronic scanning of the probe 4 .

The vibrator action signal generator 14 generates a vibrator action signal according to the vibrator group and scanning order selected by the transceiver command unit 12 , and sends it to the probe 4 at each scanning point. The probe 4 is irradiated with an ultrasonic beam based on the transducer operation signal from the transducer operation signal generator 14 .

The reflected wave signal processing unit 15 receives the signal of the reflected wave of the ultrasonic beam from the probe 4 at each scanning point, and sets a gate corresponding to the depth of the subject 8 to be measured to perform gate processing, thereby obtaining The displacement (amplitude) of the reflected wave, and the signal strength is calculated according to the displacement.

The reflected wave image generation unit 16 converts, for example, the signal intensity of the reflected wave at each scanning point calculated by the reflected wave signal processing unit 15 into a gray scale of 0 to 255. The reflected wave of the ultrasonic beam is generated at the boundary between the object 8 and the water of the water tank 91 or the boundary surface of the material inside the object 8, the peeling part, the void part, etc. where the acoustic impedance (density) changes. The reflected wave image generation unit 16 sets the points without the reflected waves of the ultrasonic beam as the gray scale level 0, and the higher the signal strength of the reflected wave is, the larger the gray scale level is.

The display unit 17 displays the signal intensity of the reflected wave of the ultrasonic beam obtained by the reflected wave image generating unit 16 as a shaded image of the planar scan of the subject 8 . Specifically, black is displayed when the gray scale is 0, white is displayed when the gray scale is the maximum value, and gray is displayed according to the gray scale when the gray scale is an intermediate value. Therefore, the ultrasonic transmitting and receiving device 1 displays the cavity of the subject 8 scanned in a plane (the density difference between it and the surrounding area is large) as a white image.

The control unit 18 controls the machine control unit 11 and controls the transmission and reception command unit 12 in synchronization with the encoder output of the X-axis scanner 21 notified from the machine control unit 11 . That is, the control unit 18 starts electronic scanning in synchronization with the scanning operation of the probe 4 . Therefore, the scanning pitch of the object 8 in the X-axis direction generated by the electronic scanning of the probe 4 is equal to the output pitch of the encoder of the X-axis scanner 21 .

Next, with reference to FIG. 2 , the operation content of the planar scanning of the probe 4 in the ultrasonic transceiver device 1 will be described. The probe 4 is composed of, for example, 192 vibrators arranged in a straight line, but in FIG. 2 , the probe 4 is shown to be composed of 7 vibrators of vibrators a, b, c, d, e, f, and g.

The ultrasonic transceiver 1 sets the set position of the subject 8 as the origin of scanning (upper left of the scanning area in FIG. 2 ), specifies the size of the scanning area, and performs plane scanning of the probe 4 . First, the three-axis scanner 2 is driven to move the probe 4 so that the start point of electronic scanning of the probe 4 is located at the origin of the planar scan. Specifically, since the electronic scanning is performed during the movement of the probe 4 , the probe 4 moves including an approach run so that the moving speed when the probe 4 passes the start point of the electronic scanning becomes a specific value.

At the origin of plane scanning, the probe 4 uses the vibrators a, b, c, d, e, f, g to perform electronic scanning, and the X-axis scanner 21 of the 3-axis scanner 2 is arranged in a row with the vibrator Move in the vertical direction. And, the probe 4 is synchronized with the encoder output of the X-axis scanner 21 to perform the next electronic scan. The probe 4 is for the width of the scanning area (the size of the X-axis direction), and repeats the above actions.

As mentioned above, the probe 4 continuously moves the probe 4 in the X-axis direction without rest (scanning action 1), while repeating the electronic scanning. The length in the Y-axis direction is the scanning width of the electronic scanning, and the X-axis The strip-shaped scanning area whose direction length is equal to the width of the set scanning area irradiates the ultrasonic beam and detects the reflected wave from the subject 8 .

At this time, the control device 10 uses the reflected wave from the subject 8 detected by one electronic scan of the probe 4 as the reflected wave of the ultrasonic beam at the same position (scanning line) in the X-axis direction, and calculates the reflected wave The signal strength is displayed as a shaded image.

Next, the probe 4 is moved by the scanning width of the electronic scanning in parallel with the arrangement direction of the plurality of transducers by the Y-axis scanner 22 of the 3-axis scanner 2 (shift operation). Then, the probe 4 is moved by the X-axis scanner 21 so that the starting point of the electronic scanning of the probe 4 is at the same position in the X-axis direction as the starting point of the last electronic scanning in the scanning operation 1 described above.

The probe 4 uses the vibrator a, b, c, d, e, f, g to scan electronically, and through the X-axis scanner 21 of the 3-axis scanner 2, it is perpendicular to the vibrator in the opposite direction to the scanning action 1. Move in the direction of the arrangement direction. And, the probe 4 is synchronized with the encoder output of the X-axis scanner 21 to perform the next electronic scan. The probe 4 is for the width of the scanning area (the size of the X-axis direction), and repeats the above actions.

As mentioned above, the probe 4 performs continuous movement of the probe 4 in the X-axis direction (scanning action 2), while repeating electronic scanning, and the length in the Y-axis direction is the scanning width of the electronic scan, and the length in the X-axis direction The strip-shaped scanning area whose length is equal to the width of the set scanning area irradiates the ultrasonic beam and detects the reflected wave from the subject 8 .

If the control device 10 can cover the specified scanning area through the scanning operation 1 and scanning operation 2 of the probe 4, it will end the planar scanning, but in the case of insufficient, the scanning width of the electronic scanning of the probe 4 Move with the shifting action, and perform the same scanning action 3, shifting action, and scanning action 4 as the previous action at the same time as the electronic scanning. The control device 10 repeats the above-mentioned operations until the designated scanning area is covered, and performs a planar scanning of the subject 8 .

In this specification, the scanning operation 1, scanning operation 3... of the probe 4 is referred to as forward moving scanning operation, and the scanning operation 2, scanning operation 4... of the probe 4 is referred to as reverse moving scanning operation.

Since the probe 4 continuously moves in the above-mentioned scanning operations 1, 2, 3, and 4, while performing electronic scanning, in detail, due to the irradiation timing of the ultrasonic beam, the difference in the X-axis direction of the irradiation point of the ultrasonic beam The position is shifted. Next, the relationship between the irradiation timing of the ultrasonic beam and the irradiation point will be described.

FIG. 3A is a diagram illustrating irradiation points of the probe 4 with an ultrasonic beam. Irradiation points a, b, c, d, e, f, g are the irradiation points of the ultrasonic beams of the electronic scanning of the vibrators a, b, c, d, e, f, g of the probe 4 . In particular, the irradiation point a is the irradiation point corresponding to the origin of the scanning area, and is the irradiation point of the first ultrasonic beam of the electronic scanning synchronized with the encoder output of the X-axis scanner 21 during the scanning operation.

The electronic scanning of the probe 4 takes place during the continuous movement of the scanning action. The solid line rectangle in FIG. 3A indicates the position of the probe 4 when the ultrasonic beam is first irradiated, and the dotted line rectangle indicates the probe 4 position when the ultrasonic beam is finally irradiated. In the probe 4 , the ultrasonic beam is sequentially irradiated from the irradiation point a to the other end of the probe 4 . Therefore, the irradiation points b, c, d, e, f, and g become positions gradually shifted in the scanning direction.

FIG. 3B is a diagram showing the position of the irradiation point of the ultrasonic beam in the scanning operation 1 and the scanning operation 2 of the probe 4 in the planar scanning. Since the irradiation point a of the probe 4 is electronically scanned synchronously with the encoder output of the X-axis scanner 21 , the positions in the X-axis direction are consistent in the scanning operation 1 and scanning operation 2 . However, the irradiation points b, c, d, e, f, and g are positions gradually shifted in accordance with the scanning direction.

Next, the processing of planar scanning of the probe 4 of the control device 10 will be described in detail. FIG. 4 is a diagram illustrating a control coordinate system in which the control device 10 causes the probe 4 to perform planar scanning.

The mechanical control unit 11 defines a coordinate system in which the direction perpendicular to the arrangement direction of the ultrasonic vibrators of the probe 4 is set as the X-axis direction of the scanning plane, and the arrangement direction of the ultrasonic vibrators is set as the Y-axis direction of the scanning plane. The position of the probe 4 at the start of the first electronic scanning for irradiating the subject 8 with an ultrasonic beam is set as the origin of the scanning plane. The coordinates (X _k , Y _l ) are the position of the probe 4 when the ultrasonic beam is irradiated at the irradiation point a (the initial irradiation point of the electronic scanning) of each electronic scanning of the probe 4 . Hereinafter, the position of the irradiation point a in each electronic scan represents the position of the probe 4 .

The subscript k of the X _k coordinate represents the serial number of the irradiation point in the X-axis direction of the irradiation point of the ultrasonic beam, and is any value from 0 to n. The X ₀ coordinate and the X _n coordinate represent the end position of the movement of the probe 4 in the X-axis direction, and n+1 represents the number of irradiation points in the X-axis direction of the scanning plane. The subscript l of the Y _l coordinate is the serial number of the irradiation point in the Y-axis direction representing the irradiation point of the ultrasonic beam, which is any value from 0 to m. The Y ₀ coordinate and the Y _m coordinate represent the end position of the movement of the probe 4 in the Y-axis direction, and m+1 represents the number of irradiation points in the Y-axis direction of the scanning plane.

n is obtained by dividing the length in the X-axis direction of the region (scanning region) where planar scanning is performed by half the resolution of the ultrasonic transceiver 1 . That is, n is a value obtained by dividing the length of the scanning area in the X-axis direction by the distance between the X _k coordinates, that is, the moving distance D _m . Further, m is obtained by dividing the length in the Y-axis direction of the area (scanning area) where planar scanning is performed by the scanning width of the electronic scanning of the probe 4 .

As described above, the mechanical control unit 11 defines a control coordinate system in which the position of the probe 4 at the start of the first electronic scanning of irradiating the subject 8 with an ultrasonic beam is set as the origin of the scanning plane, In the Y-axis direction, when the Y coordinate of the position of the probe 4 at the beginning of the electronic scanning is set as _Y1 , the position _{Y1+1 of the next Y-axis direction of the moving probe 4 is set as Y1+ 1} As for the position of the scanning width of the upper electronic scanning, in the direction of the X axis, the X coordinate of the position of the probe 4 at the start of the electronic scanning is defined as X _k .

And, when performing the movement control of the probe 4 in the scanning operation 1 or scanning operation 3 illustrated in FIG. 2 and FIG. The scanner 21 continuously moves the probe 4 from the coordinate (X _k , Y _l ) to the coordinate (X _k+1 , Y _l ) (k is 0 to n). In addition, when the movement control of the probe 4 in the scanning operation 2 or the scanning operation 4 is performed, that is, when the probe 4 is moved in a direction close to the origin, the mechanical control part 11 uses the X-axis scanner 21 to move the probe 4 Continuously move from coordinate (X _k , Y _l ) to coordinate (X _k-1 , Y _l ) (k is n to 0).

Divide the distance between X _k coordinates, that is, the moving distance D _m , by the moving time T _m from coordinate (X _k , Y _l ) to coordinate (X _k+1 , Y _l ), or from coordinate (X _k , Y _l ) to the coordinate (X _k-1 , Y _l ) moving time T _m to obtain the moving speed V m of the probe 4 _from the coordinate (X _k , Y _l ) to the coordinate (X _k+1 , Y _l ) , and the moving speed V _m from coordinate (X _k , Y _l ) to coordinate (X _k-1 , Y _l ). The movement time _Tm is set to be equal to the sum of the transmission and reception times of a plurality of irradiation points of the electronic scanning, that is, the scanning time Ts so that one electronic scanning can be performed during the movement of the probe 4 in the X-axis direction. Thus, in the present invention, the electronic scanning starts at the X _k coordinate, and when the electronic scanning ends and the electronic scanning process starts at the next X _k+1 coordinate, the first vibrator of the array probe is already located at the X _k+1 coordinate . As is known in the art, the time required to move from the X _k coordinate to the X _k+1 coordinate after one electronic scan is zero.

Also, when the probe 4 moves, fluctuations or air bubbles may be generated in the dipped water, which affects the progress of the ultrasonic beam and/or reflected waves. Therefore, the moving speed _Vm of the probe 4 must be equal to or less than the maximum speed (Vmax) in the range where external disturbance factors such as water fluctuations and air bubbles do not occur.

Specifically, if the speed of sound in water is set to 1500 m/s, the distance from the vibrator of probe 4 to the inspection surface of the subject is set to 10 mm, and the number of vibrators of probe 4 is set to 192, then every 1 The scan time of the next electronic scan is 0.0025536 seconds. When it is desired to obtain the resolution of capturing a defect of 0.4 mm, the moving distance D _m is set to 0.2 mm, and according to the relationship between the moving distance D _m and the moving time T _m (=Ts), the moving speed V _m is 78.320802 mm/sec. Since the maximum value (Vmax) of the moving speed is 300 mm/sec from the experimental results so far, and the moving speed V _m is within Vmax, there will be no external disturbance factors such as water fluctuations or air bubbles.

The mechanical control unit 11 memorizes this moving speed V _m as a scanning condition. And, the mechanical control unit 11 manages the X _k coordinates by the encoder output of the X-axis scanner 21, and moves the probe 4 at the moving speed V _m .

The movement terminal of the mechanical control unit 11 in the X-axis direction is from coordinate (X _k+1 , Y _l ) to coordinate (X _k+1 , Y _l+1 ), or from coordinate (X _k-1 , Y _l ) to The Y-axis scanner 22 is driven at coordinates (X _k-1 , Y _l+1 ) to move the probe 4 in the Y-axis direction.

As mentioned above, the ultrasonic transceiving device 1 alternately repeats the forward moving scanning action and the reverse moving scanning action to electronically scan the scanning plane. The action of the X coordinate moving from X _k to X _k+1 in the direction of the X axis, and the movement terminal in the direction of the X axis, so that the Y coordinate of the probe 4 moves from Y _l to Y _l+1 in the direction of the Y axis Action, the above-mentioned reverse moving scanning action includes the action of moving the X coordinate of the probe 4 from X _k to X _k-1 in the X-axis direction while performing electronic scanning, and moving the terminal in the X-axis direction to make the probe 4. The Y coordinate moves from Y _l to Y _l+1 in the direction of the Y axis.

The present invention is not limited to the above-described embodiments, but includes various modifications. The above-described embodiments are described in detail for the sake of easy understanding of the present invention, and are not limited to those that must include all the components described.

1: Ultrasonic transceiver device 2: 3-axis scanner 3: Sensor 4: Probe (array probe) 8: Subject 10: Control device 11: Mechanical control unit 12: Transceiver instruction unit 14: Vibrator action signal Generation unit 15: Reflected wave signal processing unit 16: Reflected wave image generation unit 17: Display unit 18: Control unit 21: X-axis scanner 22: Y-axis scanner 23: Z-axis scanner 24: Holder 42: Neck Part 91: Water tank 92: Stages a to g: Vibrator/Irradiation point D _m : Moving distance V _m : Moving speed X: Direction X ₀ , X _k , X _k+1 , X _k-1 , X _n : Coordinate Y ₀ ,Y _l ,Y _l+1 ,Y _m : Coordinate Y: Direction Z: Direction

Fig. 1 is a diagram showing the overall configuration of the ultrasonic transceiver device of the embodiment. Fig. 2 is a diagram for explaining the operation content of the planar scanning of the probe in the ultrasonic transceiver. FIG. 3A is a diagram illustrating irradiation points of an ultrasonic beam of a probe. FIG. 3B is a diagram showing the position of the irradiation point of the ultrasonic beam in the planar scanning of the probe. FIG. 4 is a diagram illustrating a coordinate system in which a scanner control unit makes a probe scan a plane.

a,g: irradiation point

X: direction

Y: Direction

Claims (4)

An array type ultrasonic transceiver device, which includes an array probe, the array probe has a plurality of ultrasonic vibrators arranged in a straight line; The arrangement direction of the above-mentioned ultrasonic vibrator is set as the Y-axis direction of the above-mentioned scanning plane, and the direction perpendicular to the above-mentioned arrangement direction is set as the X-axis direction of the above-mentioned scanning plane. Based on the preset scanning conditions, the above-mentioned array probes are not stationary. Moving in the X-axis direction, during the movement of the above-mentioned array probe in the X-axis direction, the multiple irradiation points of the above-mentioned subject are sequentially sent to the electronic scanning of the ultrasonic beam and receive the reflected wave, and the arrayed ultrasonic The transmitting and receiving device is characterized in that: the position of the array probe at the beginning of the first electronic scanning of irradiating the ultrasonic beam to the subject is set as the origin of the scan plane of the array probe, and in the Y-axis direction, When the Y coordinate of the position of the array probe at the beginning of the electronic scanning is set as _Y1 , and the Y coordinate Y1 ₊₁ of the next Y axis direction of the moving above-mentioned array probe is set as adding electronic scanning to _Y1 When the position of the value of the scanning width of , when moving toward the direction away from the above-mentioned origin, the X coordinate of the above-mentioned array probe moves from X _k to the position of X _k+1 , when moving toward the direction close to the above-mentioned origin, The X coordinate of the above-mentioned array probe moves from X _k to the position of X _k-1 , and alternately repeats the following actions to electronically scan the above-mentioned scanning plane: Forward moving scanning action, which includes one side of electronic scanning and one side of the array probe The X coordinate moves from X _k to X _k+1 in the X axis direction, and the movement terminal in the X axis direction makes the Y coordinate of the array probe change from Y _l to Y _l+1 in the Y axis direction The action of moving the scanning width of the electronic scanning; and the reverse moving scanning action, which includes the action of moving the X coordinate of the array probe from X _k to X _k-1 in the X-axis direction while performing electronic scanning, and at X The moving terminal in the axis direction is the action of moving the Y coordinate of the array probe in the Y axis direction from Y _l to Y _l+1 by the scanning width of electronic scanning. Such as the array type ultrasonic transceiver device of claim 1, wherein when the X coordinate of the position of the above-mentioned array probe at the beginning of the above-mentioned electronic scanning is set as X _k , the above-mentioned when the above-mentioned X _k reaches the beginning of the next electronic scanning The X coordinate of the position of the array probe, that is, the moving speed V _m of the array probe of X _k-1 or X _k+1 , is set as the scanning condition described above. An array type ultrasonic transceiver device as in claim 2, wherein the X coordinate of the position of the above-mentioned array probe from the above-mentioned X _k to the start of the next electronic scan is the moving time T _m of X _k-1 or X _k+1 , which is set to be equal to the sum of the sending and receiving times of the plurality of irradiation points in the above-mentioned electronic scanning, that is, the scanning time T _s , according to the above-mentioned moving time T _m , and the above-mentioned array detection from the above-mentioned X _k to the above-mentioned X _k-1 or X _k+1 The moving distance D _m of the needle is used to obtain the above moving speed V _m . The array type ultrasonic transceiver device according to claim 2, wherein the moving speed V _m does not affect the progress of the ultrasonic beam and/or the reflected wave when the array probe moves in the X-axis direction The maximum speed (300 mm/s) within the scope of external disturbance factors of fluctuations or air bubbles.

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