TWI838769B - Array ultrasonic transceiver - Google Patents

Abstract

The purpose of the present invention is to provide an ultrasonic transceiver that shortens the inspection time. The array type ultrasonic transceiver 1 of the present invention has an array probe 4 with a plurality of ultrasonic transducers arranged in a straight line. In a scanning plane above the object and parallel to the object, the arrangement direction of the ultrasonic transducers is set as the Y-axis direction of the scanning plane, and the direction perpendicular to the arrangement direction is set as the X-axis direction of the scanning plane. Based on the preset scanning conditions, the array probe is moved in the X-axis direction non-stationarily. During the movement of the array probe in the X-axis direction, the ultrasonic beams are sequentially sent to a plurality of irradiation points of the object and the reflected waves thereof are received for electronic scanning.

Description

Array ultrasonic transceiver

The present invention relates to an array-type ultrasonic transceiver.

There is an ultrasonic transceiver that irradiates an object to be inspected, such as a semiconductor, with ultrasonic waves, generates image information of the interior of the object based on the reflected waves, and detects defects inside the object. This ultrasonic transceiver can perform non-destructive high-resolution inspections to ensure the reliability of electronic components.

The goal is to shorten the inspection time that has accompanied the high-density mounting of semiconductor wafers in recent years. To achieve this, the ultrasonic transmission and reception process must be shortened.

Therefore, research has been conducted on an ultrasonic inspection device that is composed of a plurality of ultrasonic transducers arranged in a straight line and uses an array probe that enables the ultrasonic transducers to perform electronic scanning (electronic scanning) (see Patent Document 1).

In the ultrasonic inspection device, a specific width is scanned by one electronic scan while the array probe is stationary. Specifically, a single probe is processed by one ultrasonic oscillator, whereas a plurality of ultrasonic oscillators constituting the array probe are used to perform electronic scanning, thereby achieving high-speed processing.

[Prior Art Literature] [Patent Literature]

[Patent document 1] Japanese Patent Publication No. 63-177056

In the above-mentioned prior art, there is disclosed a method of moving to the next inspection position after the electronic scanning process is completed in the state where the array probe is stationary, and then stationary the array probe again to perform the electronic scanning process. That is, it is a method of stationary the array probe during electronic scanning.

To be specific, the time required from sending ultrasound at a certain examination position to sending ultrasound at the next examination position is the sum of the electronic scanning time and the probe movement time.

In order to shorten the inspection time in the ultrasound transceiver, further high-speed processing is required.

The purpose of the present invention is to provide an ultrasonic transceiver that shortens the inspection time.

To solve the above problem, the array type ultrasonic transceiver of the present invention is provided with an array probe having a plurality of ultrasonic transducers arranged in a straight line; and in a scanning plane above the subject and parallel to the subject, the arrangement direction of the ultrasonic transducers is set as the Y-axis direction of the scanning plane, and the direction perpendicular to the arrangement direction is set as the X-axis direction of the scanning plane; based on the preset scanning conditions, the array probe is moved non-stationarily in the X-axis direction. During the movement of the array probe in the X-axis direction, the array probe sequentially transmits ultrasonic beams to the plurality of irradiation points of the object and receives the reflected waves thereof by electronic scanning; in the array ultrasonic wave transceiver, the position of the array probe at the beginning of the initial electronic scanning of the object irradiated with the ultrasonic beam is set as the origin of the scanning plane of the array probe; in the Y-axis direction, the Y coordinate of the position of the array probe at the beginning of the electronic scanning is set as the Y coordinate of the array probe at the beginning of the electronic scanning. _l , the Y coordinate Y _l+1 of the array probe in the Y-axis direction is set to the position of the value of the scanning width of the electronic scan added to Y _l , when moving in the direction away from the origin, the X coordinate of the array probe is moved from X _k to the position of X _k+1 , and when moving in the direction approaching the origin, the X coordinate of the array probe is moved from X _k to the position of X _k-1 ; and the forward scanning action and the reverse scanning action are alternately repeated to perform electronic scanning on the scanning plane, and the forward scanning action includes performing electronic scanning while moving the X coordinate of the array probe in the X-axis direction from X k to X _k -1. The reverse scanning motion includes a motion of moving the X coordinate of the array probe from _{X k} to X _k-1 in the X axis direction while performing electronic scanning, and a motion of moving the Y coordinate of the array probe from Y _l to Y l+1 in the Y axis direction at the end of the movement in the X axis direction. The reverse scanning motion includes a motion of moving the X coordinate of the array probe from X _k to X _k-1 in the X axis direction while performing electronic scanning, and a motion of moving the Y coordinate of the array probe from Y _l to Y _l+1 in the Y axis direction at the end of the movement in the X axis direction.

According to the present invention, the inspection time of the ultrasonic transceiver can be shortened.

1: Ultrasonic transceiver

2:3 axis scanner

3: Sensor

4: Probe (array probe)

8: Subjects

10: Control device

11: Mechanical control department

12: Send and receive command department

14: Oscillator motion signal generating unit

15: Reflection wave signal processing unit

16: Reflection wave image generation unit

17: Display unit

18: Control Department

21: X-axis scanner

22: Y-axis scanner

23: Z-axis scanner

24: Retainer

42: Braid

91: Sink

92: Taiwan

a~g: oscillator/irradiation point

D _m : moving distance

V _m : moving speed

X: Direction

X ₀ ,X _k ,X _k+1 ,X _k-1 ,X _n : coordinates

Y ₀ ,Y _l ,Y _l+1 ,Y _m : coordinates

Y: Direction

Z: Direction

Figure 1 is a diagram showing the overall structure of an ultrasonic transceiver in an implementation form.

Figure 2 is a diagram illustrating the plane scanning action of the probe in the ultrasonic transceiver.

Figure 3A is a diagram illustrating the irradiation point of the ultrasonic beam of the probe.

FIG3B is a diagram showing the position of the irradiation point of the ultrasonic beam in the plane scanning of the probe.

Figure 4 is a diagram illustrating the coordinate system used by the scanner control unit to enable the probe to perform plane scanning.

The following is a detailed description of the implementation of the present invention with reference to the drawings.

Figure 1 is a diagram showing the overall structure of an ultrasonic transceiver in an implementation form.

The ultrasonic transceiver 1 has a three-axis scanner 2 (scanning mechanism) and an ultrasonic array probe (hereinafter referred to as a probe). The three-axis scanner 2 enables the probe 4 to scan the planar subject 8 in two dimensions in the X-axis direction and the Y-axis direction (planar scanning). In this way, the ultrasonic transceiver 1 can image the planar subject 8 by ultrasound.

The probe 4 is a phased array ultrasound probe (ultrasound array probe) in which multiple transducers are arranged in short strips. Specifically, the ultrasound convergence beam (ultrasound beam) is produced by controlling the oscillation timing of a plurality of transducers (transducer group) in a part of the multiple transducers, and the transducer group is electronically switched to change the irradiation position to irradiate the ultrasound beam, thereby performing a one-dimensional scan on the subject 8. In this specification, the scanning of the electronic ultrasound beam of the phased array ultrasound probe is described as electronic scanning.

The reception control of the reflected wave of the ultrasonic beam is also carried out by controlling the vibrator group.

In addition, the probe 4 can focus the ultrasound generated by a single vibrator with an acoustic lens and irradiate the object, and a plurality of the vibrators are configured into a short strip. In this configuration, the irradiation position of the ultrasound beam is changed by electronically switching the vibrators, and the object 8 is electronically scanned.

The probe 4 is configured to be immersed in the water filled in the water tank 91, and the front end of the probe 4 faces the subject 8. The probe 4 is mounted on the three-axis scanner 2 via the holder 24.

The water tank 91 is placed on the table 92.

When the three-axis scanner 2 performs two-dimensional scanning on the probe 4, the scanning position is detected based on the linear position or rotational position (angle position) detected by the built-in encoder for detecting position changes. In this way, the ultrasonic transceiver 1 can two-dimensionally image the relationship between each scanning position (scanning point) of the subject 8 and the echo.

The 3-axis scanner 2 has an X-axis scanner 21 and a Y-axis scanner 22 for scanning the probe 4, a Z-axis scanner 23 that can change the distance between the probe 4 and the subject 8, and a holder 24 that holds the probe 4.

In addition, the height of the probe 4 is adjusted by the stage 92 before the inspection, and the distance between the probe 4 and the object 8 is adjusted by the Z-axis scanner 23.

The probe 4 is continuously moved (scanning action) at a specific speed by the X-axis scanner 21 of the three-axis scanner 2 in a direction perpendicular to the direction in which the plurality of vibrators are arranged in a straight line (hereinafter referred to as the X-axis direction), that is, the probe 4 is moved in the X-axis direction without being stationary, and then the Y-axis scanner 22 of the three-axis scanner 2 is moved (shift action) by the scanning width of the electronic scanning in parallel with the arrangement direction of the plurality of vibrators.

The holder 24 supports the butt 42 disposed on the upper part of the probe 4, and moves smoothly upward when an upward force is applied to the probe 4. A sensor 3 is disposed on the holder 24 to detect the upward movement of the probe 4.

The control device 10 includes a control unit 18, a transceiver command unit 12, a transducer motion signal generator 14, a reflection wave signal processor 15, a reflection wave image generator 16, and a display unit 17, and performs control of the three-axis scanner 2, transceiver control of the probe 4, and display control of the echo from the subject 8.

The mechanical control unit 11 is a control unit for driving the X-axis scanner 21 and the Y-axis scanner 22 based on the output of the encoder built into the X-axis scanner 21 and the Y-axis scanner 22 according to the scanning conditions described later, so as to move the probe 4 in the scanning plane above the subject 8 and parallel to the subject 8.

The command receiving and transmitting unit 12 is a control unit that instructs the vibrator motion signal generating unit 14 to generate a vibrator motion signal and start the electronic scanning of the probe 4.

The vibrator motion signal generating unit 14 generates a vibrator motion signal according to the vibrator group and scanning sequence selected by the transceiver command unit 12, and sends it to the probe 4 at each scanning point.

The probe 4 irradiates the ultrasonic beam according to the oscillator motion signal of the oscillator motion signal generating unit 14.

The reflected wave signal processing unit 15 receives the reflected wave signal of the ultrasonic beam from the probe 4 at each scanning point, sets a gate corresponding to the depth of the subject 8 to be measured to perform gate processing, thereby obtaining the displacement (amplitude) of the reflected wave, and calculates the signal intensity based on the displacement.

The reflection wave image generation unit 16 converts the signal strength of the reflection wave of each scanning point calculated by the reflection wave signal processing unit 15 into a grayscale of 0 to 255. The reflection wave of the ultrasonic beam is generated at the boundary between the specimen 8 and the water in the water tank 91 or the boundary of the material, peeling part, gap part and other interfaces with acoustic impedance (density) changes inside the specimen 8. The reflection wave image generation unit 16 sets the point without the reflection wave of the ultrasonic beam to grayscale 0. The greater the signal strength of the reflection wave, the greater the grayscale.

The display unit 17 displays the signal intensity of the reflected wave of the ultrasonic beam obtained by the reflected wave image generating unit 16 as a blurred image of the plane scan of the subject 8. Specifically, black is displayed when the grayscale is 0, white is displayed when the grayscale is the maximum value, and gray is displayed according to the grayscale when the grayscale is an intermediate value.

Therefore, the ultrasonic transceiver 1 displays the cavity (with a large density difference from the surrounding area) of the subject 8 scanned by the plane scan as a white image.

The control unit 18 controls the mechanical control unit 11, and controls the command receiving unit 12 in synchronization with the encoder output of the X-axis scanner 21 notified from the mechanical control unit 11. That is, the control unit 18 starts the electronic scanning in synchronization with the scanning action of the probe 4. Therefore, the scanning interval of the X-axis direction of the subject 8 generated by the electronic scanning of the probe 4 is equal to the interval of the encoder output of the X-axis scanner 21.

Next, the plane scanning action of the probe 4 in the ultrasonic transceiver 1 is explained with reference to FIG. 2.

The probe 4 is composed of, for example, 192 vibrators arranged in a straight line, but FIG. 2 shows that the probe 4 is composed of 7 vibrators, vibrators a, b, c, d, e, f, and g.

The ultrasonic transceiver 1 sets the position of the subject 8 as the origin of the scan (the upper left corner of the scan area in Figure 2), specifies the size of the scan area, and performs a plane scan of the probe 4.

First, the three-axis scanner 2 is driven to move the probe 4 in such a way that the starting point of the electronic scanning of the probe 4 is located at the origin of the plane scanning. In detail, since the electronic scanning is performed during the movement of the probe 4, the probe 4 is moved in such a way that the moving speed when passing the starting point of the electronic scanning becomes a specific value, including the run-up portion.

At the origin of the plane scan, the probe 4 uses the vibrators a, b, c, d, e, f, and g to perform electronic scanning, and moves in a direction perpendicular to the arrangement direction of the vibrators through the X-axis scanner 21 of the three-axis scanner 2. In addition, the probe 4 synchronizes with the encoder output of the X-axis scanner 21 to perform the next electronic scan. The probe 4 repeats the above action in the width of the scanned area (the size in the X-axis direction).

As described above, the probe 4 continuously moves in the X-axis direction (scanning action 1) while repeating electronic scanning, irradiating the ultrasonic beam to a strip-shaped scanning area whose length in the Y-axis direction is the scanning width of the electronic scanning and whose length in the X-axis direction is the width of the set scanning area, and detecting the reflected wave from the subject 8.

At this time, the control device 10 sets the reflected wave from the subject 8 detected by the probe 4 in a single electronic scan as the reflected wave of the ultrasonic beam at the same position (scanning line) in the X-axis direction, calculates the signal intensity of the reflected wave, and displays it as a faint image.

Next, the probe 4 is moved (displacement action) by the scanning width of the electronic scanning in parallel with the arrangement direction of the plurality of vibrators by the Y-axis scanner 22 of the three-axis scanner 2. Furthermore, the probe 4 is moved by the X-axis scanner 21 in such a way that the starting point of the electronic scanning of the probe 4 and the starting point of the last electronic scanning of the above-mentioned scanning action 1 become the same position in the X-axis direction.

The probe 4 uses the vibrators a, b, c, d, e, f, and g to perform electronic scanning, and moves in a direction perpendicular to the arrangement direction of the vibrators, which is opposite to the scanning action 1, through the X-axis scanner 21 of the three-axis scanner 2. In addition, the probe 4 synchronizes with the encoder output of the X-axis scanner 21 to perform the next electronic scan. The probe 4 repeats the above action in the width of the scanning area (the size in the X-axis direction).

As described above, the probe 4 continuously moves in the X-axis direction (scanning action 2) while repeating electronic scanning, and irradiates the ultrasonic beam to the strip-shaped scanning area whose length in the Y-axis direction is the scanning width of the electronic scanning and whose length in the X-axis direction is the width of the set scanning area, to detect the reflected wave from the subject 8.

The control device 10 ends the plane scanning if the designated scanning area can be covered by the scanning action 1 and scanning action 2 of the probe 4. However, if the area is not covered enough, the probe 4 is moved by performing a shifting action of the scanning width of the electronic scanning, and simultaneously performs the same scanning action 3, shifting action, and scanning action 4 as the previous action while performing the electronic scanning.

The control device 10 repeats the above actions until the designated scanning area is covered, and performs a plane scan of the subject 8.

In this manual, scanning actions 1, 3, etc. of the probe 4 are recorded as forward movement scanning actions, and scanning actions 2, 4, etc. of the probe 4 are recorded as reverse movement scanning actions.

Since the probe 4 continuously moves and performs electronic scanning in the above scanning actions 1, 2, 3, and 4, in detail, the position of the irradiation point of the ultrasonic beam in the X-axis direction is offset due to the irradiation timing of the ultrasonic beam. Next, the relationship between the irradiation timing of the ultrasonic beam and the irradiation point is explained.

FIG3A is a diagram illustrating the irradiation point of the ultrasonic beam of the probe 4.

Irradiation points a, b, c, d, e, f, g are irradiation points of ultrasonic beams of electronic scanning of oscillators a, b, c, d, e, f, g of the probe 4. In particular, irradiation point a is an irradiation point corresponding to the origin of the scanning area, and is the irradiation point of the first ultrasonic beam of electronic scanning synchronized with the encoder output of the X-axis scanner 21 during the scanning operation.

The electronic scanning of the probe 4 is performed during the continuous movement of the scanning action. The solid rectangle in Figure 3A represents the position of the probe 4 when the ultrasonic beam is first irradiated, and the dashed rectangle represents the position of the probe 4 when the ultrasonic beam is last irradiated.

In the probe 4, the ultrasonic beam is sequentially irradiated from the irradiation point a to the other end of the probe 4. Therefore, the irradiation points b, c, d, e, f, and g become positions gradually shifted in the scanning direction.

FIG3B is a diagram showing the position of the irradiation point of the ultrasonic beam in the plane scanning of the scanning action 1 and the scanning action 2 of the probe 4.

Since the irradiation point a of the probe 4 is electronically scanned synchronously with the encoder output of the X-axis scanner 21, the position in the X-axis direction is consistent in scanning action 1 and scanning action 2. However, the irradiation points b, c, d, e, f, and g become positions that gradually shift according to the scanning direction.

Next, the processing of plane scanning of the probe 4 of the control device 10 is described in detail.

FIG4 is a diagram illustrating the control coordinate system of the control device 10 for enabling the probe 4 to perform plane scanning.

The mechanical control unit 11 specifies a coordinate system, which sets the direction perpendicular to the arrangement direction of the ultrasonic transducer of the probe 4 as the X-axis direction of the scanning plane, sets the arrangement direction of the ultrasonic transducer as the Y-axis direction of the scanning plane, and sets the position of the probe 4 at the beginning of the initial electronic scanning of the ultrasonic beam irradiating the subject 8 as the origin of the scanning plane.

The coordinates (X _k , Y _l ) are the positions of the probe 4 when the probe 4 irradiates the ultrasonic beam at the irradiation point a (the first irradiation point of the electronic scan) of each electronic scan. Hereinafter, the position of the irradiation point a of each electronic scan represents the position of the probe 4 .

The subscript k of the X _k coordinate represents the serial number of the irradiation point of the ultrasonic beam in the X-axis direction, which is any value from 0 to n. The X ₀ coordinate and the X _n coordinate represent the end position of the movement of the probe 4 in the X-axis direction, and n+1 represents the number of irradiation points in the X-axis direction of the scanning plane.

The subscript l of the Y _l coordinate represents the serial number of the irradiation point in the Y axis direction of the ultrasonic beam, which is any value from 0 to m. The Y ₀ coordinate and the Y _m coordinate represent the end position of the movement of the probe 4 in the Y axis direction, and m+1 represents the number of irradiation points in the Y axis direction of the scanning plane.

n is obtained by dividing the length of the area to be scanned in the X-axis direction (scanning area) by half the resolution of the ultrasonic transceiver 1. That is, n is the value obtained by dividing the length of the scanning area in the X-axis direction by the distance between the X _k coordinates, that is, the moving distance D _m .

Furthermore, m is obtained by dividing the length of the area (scanning area) in the Y-axis direction where the plane scanning is performed by the scanning width of the electronic scanning of the probe 4.

As described above, the mechanical control unit 11 defines a control coordinate system, which sets the position of the probe 4 at the start of the initial electronic scanning of irradiating the object 8 with an ultrasonic beam as the origin of the scanning plane, sets the Y coordinate of the position of the probe 4 at the start of the electronic scanning as _Y1 in the Y-axis direction, sets the next Y-axis position Y1 ₊₁ of the moving probe 4 as the position obtained by adding the scanning width of the electronic scanning to _Y1 , and sets the X coordinate of the position of the probe 4 at the start of the electronic scanning as _Xk in the X-axis direction.

Furthermore, when the probe 4 is moved in the scanning operation 1 or scanning operation 3 illustrated in FIG. 2 and FIG. 3B , that is, when the probe 4 is moved in the direction away from the origin, the mechanical control unit 11 continuously moves the probe 4 from the coordinate (X _k , Y _l ) to the coordinate (X _k+1 , Y _l ) (k is 0 to n) through the X-axis scanner 21. Furthermore, when the probe 4 is moved in the scanning operation 2 or scanning operation 4 , that is, when the probe 4 is moved in the direction approaching the origin, the mechanical control unit 11 continuously moves the probe 4 from the coordinate (X _k , Y _l ) to the coordinate (X _k-1 , Y _l ) (k is n to 0) through the X-axis scanner 21.

The distance between the _Xk coordinates, i.e., the moving distance _Dm , is divided by the moving time _Tm from the coordinates ( _Xk , _Yl ) to the coordinates (Xk ₊₁ , _Yl ) or the moving time _Tm from the coordinates ( _Xk , _Yl ) to the coordinates (Xk _-1 , _Yl ) to obtain the moving speed _Vm of the probe 4 from the coordinates ( _Xk , _Yl ) to the coordinates (Xk ₊₁ , _Yl ) and the moving speed _Vm from the coordinates ( _Xk , _Yl ) to the coordinates (Xk _-1 , _Yl ).

The moving time _Tm is set to be equal to the sum of the transmission and reception times of a plurality of irradiation points of the electronic scanning, that is, the scanning time Ts, in such a manner that the electronic scanning can be performed once during the movement of the probe 4 in the X-axis direction.

Thus, in the present invention, electronic scanning starts at the _Xk coordinate, and when the electronic scanning is completed and the electronic scanning process starts at the next Xk ₊₁ coordinate, the initial vibrator of the array probe is already located at the Xk ₊₁ coordinate. As is known in the art, the time required to move from the _Xk coordinate to the Xk ₊₁ coordinate after an electronic scanning is completed is 0.

Also, when the probe 4 moves, waves or bubbles may be generated in the immersed water, which may affect the travel of the ultrasonic beam and/or the reflected wave. Therefore, the moving speed _Vm of the probe 4 must be below the maximum speed (Vmax) within the range that does not generate external interference factors such as water waves or bubbles.

Specifically, if the speed of sound in water is set to 1500m/sec, the distance from the vibrator of the probe 4 to the inspection surface of the object to be inspected is set to 10mm, and the number of vibrators of the probe 4 is set to 192, the scanning time of each electronic scan is 0.0025536 seconds. When the resolution of capturing a defect of 0.4mm is to be obtained, the moving distance _Dm is set to 0.2mm, and according to the relationship between the moving distance _Dm and the moving time _Tm (=Ts), the moving speed _Vm is 78.320802mm/sec. Since the maximum value (Vmax) of the moving speed is 300mm/sec according to the experimental results so far, the moving speed _Vm is within Vmax, so external interference factors such as water waves or bubbles will not be generated.

The mechanical control unit 11 memorizes the moving speed V _m as a scanning condition. Furthermore, the mechanical control unit 11 manages the X _k coordinates through the encoder output of the X axis scanner 21 and moves the probe 4 at the moving speed V _m .

At the end of the movement in the X-axis direction, the mechanical control unit 11 drives the Y-axis scanner 22 from the coordinate (X _{k+1 ,} Y _l ) to the coordinate (X _k+1 , Y _l+1 ) or from the coordinate (X k-1 , Y _l ) to the coordinate (X _k-1 , Y _l+1 ) to move the probe 4 in the Y-axis direction.

As described above, the ultrasonic transceiver 1 electronically scans the scanning plane by alternately repeating the forward scanning motion and the reverse scanning motion. The forward scanning motion includes the motion of moving the X coordinate of the probe 4 from X _k to X _k+1 in the X-axis direction while performing the electronic scanning of the probe 4, and the motion of moving the Y coordinate of the probe 4 from Y _l to Y _l+1 in the Y-axis direction at the end of the movement in the X-axis direction. The reverse scanning motion includes the motion of moving the X coordinate of the probe 4 from X _k to X _k-1 in the X-axis direction while performing the electronic scanning, and the motion of moving the Y coordinate of the probe 4 from Y _l to Y _l+1 in the Y-axis direction at the end of the movement in the X-axis direction.

The present invention is not limited to the above-mentioned embodiments, but includes various variations. The above-mentioned embodiments are described in detail for easy understanding of the present invention, and are not limited to all the components that must be described.

a,g: irradiation point

X: Direction

Y: Direction

Claims (4)

An array type ultrasonic transceiver includes an array probe, the array probe has a plurality of ultrasonic transducers arranged in a straight line; and in a scanning plane above a subject and parallel to the subject, the arrangement direction of the ultrasonic transducers is set as the Y-axis direction of the scanning plane, and the direction perpendicular to the arrangement direction is set as the X-axis direction of the scanning plane. Based on a preset scanning condition, the array probe is moved in the X-axis direction non-stationarily. During the movement in the X-axis direction, the array probe performs electronic scanning to sequentially send ultrasonic beams to a plurality of irradiation points of the subject and receive their reflected waves. The array type ultrasonic transceiver is characterized in that: The position of the array probe at the start of the initial electronic scanning of irradiating the object with an ultrasonic beam is set as the origin of the scanning plane of the array probe. In the Y-axis direction, the Y coordinate of the position of the array probe at the start of the electronic scanning is set as Y _l , and the Y coordinate Y _l+1 of the next Y-axis direction of the moved array probe is set as the position of Y _l plus the value of the scanning width of the electronic scanning. When moving in a direction away from the origin, the X coordinate of the array probe moves from X _k to the position of X _k+1 , and when moving in a direction approaching the origin, the X coordinate of the array probe moves from X _k to the position of X _k-1 , and the following actions are alternately repeated to perform electronic scanning on the scanning plane: The forward scanning motion includes the motion of moving the X coordinate of the array probe from X _k to X _k+1 in the X-axis direction while performing electronic scanning, and the motion of moving the Y coordinate of the array probe from Y _l to Y _l+1 in the Y-axis direction by the scanning width of the electronic scanning at the end of the movement in the X-axis direction; and the reverse scanning motion includes the motion of moving the X coordinate of the array probe from X _k to X _k-1 in the X-axis direction while performing electronic scanning, and the motion of moving the Y coordinate of the array probe from Y _l to Y _l+1 in the Y-axis direction by the scanning width of the electronic scanning at the end of the movement in the X-axis direction. In the array ultrasonic transceiver of claim 1, when the X coordinate of the position of the array probe at the start of the electronic scan is set to X _k , the moving speed V _m of the array probe from X _k to the X coordinate of the position of the array probe at the start of the next electronic scan, i.e., X _k-1 or X _k+1 , is set as the scanning condition. In the array ultrasonic transceiver of claim 2, the moving time T _m from X _k to the X coordinate of the position of the array probe at the start of the next electronic scan, i.e., X _k-1 or X _k+1 , is set equal to the sum of the transceiver times of the plurality of irradiation points of the electronic scan, i.e., the scanning time T _s . The moving speed V _m is calculated based on the moving time T _m and the moving distance D _m of the array probe from X _k to X _k-1 or X _k+1 . As in claim 2, the array ultrasonic transceiver, wherein the moving speed V _m is the maximum speed (300 mm/sec) within a range where no external interference factors such as ripples or bubbles that affect the movement of the ultrasonic beam and/or the reflected wave are generated when the array probe moves in the X-axis direction.