JP2008046096A - Ultrasonic microscopic system and adjusting method therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic microscopic system capable of more accurately displaying the ultrasonic image of a sample by adjusting the inclination of a sample, by adjusting the inclination of the sample mounting plate, without having to use an exclusive measuring instrument for measuring the inclination of the sample mounting plate. <P>SOLUTION: The ultrasonic microscopic system 1 is equipped with a glass substrate 20, on which biotissue 21 is mounted, a transducer 13 for irradiating the biomedical tissues 21 with ultrasonic waves, an X-Y stage 14 for two-dimensionally scanning the irradiation point of the ultrasonic waves and a twin-screw goniostage 16 for adjusting the angle of the glass substrate 20. The ultrasonic waves are irradiated onto the surface of the glass substrate 20 from the transducer 13, at a plurality of irradiation points within the scanning range of the X-Y stage 14. Waveform data is acquired from the respective reflected waves, received by the transducer 13, and a twin-screw goniostage 16 is operated on the basis of the respective waveform data, to allow the reception timings of the respective reflected wave to be made to coincide with each other and to adjust the angle of the glass substrate 20. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an adjustment method of an ultrasonic microscope system that visualizes a sample using ultrasonic waves, and an ultrasonic microscope system.

  Conventionally, in the medical field, as a device for diagnosing a living tissue, development of a product applying an ultrasonic microscope has been promoted, and a device capable of observing a living tissue with the same resolution as an optical microscope has been put into practical use. Yes. In the optical microscope, the difference in chemical properties in the living tissue is distinguished by staining, whereas in the ultrasonic microscope, the difference in physical properties can be distinguished without staining. That is, when using an ultrasonic microscope, there is an advantage that a living tissue can be diagnosed without staining.

  A conventional ultrasonic microscope observes the properties of living tissue by analyzing the intensity and phase of a reflected ultrasonic signal using a single frequency burst wave. However, such an ultrasonic microscope has a problem that it takes a long time to measure an ultrasonic signal. In addition, since an analog system such as an oscillator and a measurement system having sufficient accuracy and stability is required, there is a problem that the apparatus becomes large and complicated.

As means for solving these problems and enabling intraoperative diagnosis, the present inventors have already proposed a pulse excitation type ultrasonic microscope (see, for example, Non-Patent Document 1 and Patent Document 1). In observation using this pulse excitation type ultrasonic microscope, the tissue is cut out from a living tissue, and a frozen section 41 having a thickness of several μm is prepared using the tissue, and is first fixed on a glass substrate 42 (see FIG. 14). . Then, to excite the transducer 43 by a pulse wave to output a ultrasonic wave S _o, it irradiates the ultrasonic waves S _o frozen sections 41 via the ultrasonic transmission medium W1, such as water. The combined wave of the reflected wave S _front on the tissue surface and the reflected wave S _rear on the tissue back surface is received by the transducer 43. Further, the received wave is subjected to Fourier transform and compared with direct reflection from the substrate 42 to obtain an intensity and phase spectrum.

が成立している。 By the way, in the conventional method using a burst wave, it is necessary to measure the frequency by switching the frequency at the same measurement point and observe the interference between the reflection on the tissue surface and the reflection on the back surface. On the other hand, the pulse excitation type ultrasonic microscope has an advantage that it can be calculated by one measurement. If the frequency of the signal intensity minimum or maximum point obtained by this measurement is f _m and the phase at that time is φ _m , the reflection from the tissue surface and the back surface is the opposite phase at the minimum point and the same phase at the maximum point. Become. That is, at the minimum point, the reflection from the tissue surface is advanced in phase by (2n−1) π from the reflection from the back surface, and becomes φ _m + (2n−1) π (n is a natural number). Therefore, if the thickness of the tissue is d and the sound velocity is C ₀ in water,

Is established.

Therefore, the tissue thickness d is obtained as in the following equation.

となり、次式のように組織音速Ｃが求まる。

Further, since the phase difference between the wave that has passed the distance 2d at the tissue sound velocity C and the wave that has passed at the sound velocity C ₀ in water is φ _m ,

Thus, the tissue sound velocity C is obtained as in the following equation.

Thus, a two-dimensional sound velocity image is obtained by two-dimensionally scanning the ultrasonic irradiation point while measuring the tissue sound velocity C. The speed of sound C is a parameter related to the hardness of the tissue, and the properties of the frozen section 41 can be observed from the sound speed image.
JP 2005-291827 A “Medical Ultrasound: Pulse Excitation Ultrasonic Sonic Microscope” (“Ultrasonic TECHNO” VOL.15 No.6 (November 11-12, 2003) (101-105 pages), published by Nihon Kogyo Shuppansha)

  By the way, in the above-described ultrasonic microscope, the frozen section 41 is placed on the glass substrate 42, and the glass substrate 42 is placed on the XY stage 45 that is a two-dimensional scanning means. For this reason, the relationship between the transducer 43, the glass substrate 42, and the frozen section 41 is not necessarily in a directly-facing relationship, and a slight inclination may occur. If the inclination is not zero, the thickness d and the tissue sound velocity C of the frozen section 41 cannot be accurately calculated, resulting in a measurement error. In order to eliminate this measurement error, a conventional ultrasonic microscope is provided with a gonio stage for mechanically adjusting the inclination of the glass substrate 42. Then, while confirming the inclination of the glass substrate 42 using a measuring instrument such as a laser measuring instrument, the gonio stage is operated to adjust the inclination to zero. In this case, since a dedicated measuring instrument is required to measure the inclination of the glass substrate 42, there is a problem that the installation cost increases.

  The present invention has been made in view of the above problems, and its purpose is to adjust the tilt of the sample mounting plate without using a dedicated measuring instrument for measuring the tilt of the sample mounting plate. An object of the present invention is to provide an adjustment method of an ultrasonic microscope system that can display an ultrasonic image of a sample more accurately, and an ultrasonic microscope system.

  In order to solve the above problems, in the invention according to claim 1, a sample mounting plate for mounting a sample, a focal ultrasonic transducer for irradiating the sample with ultrasonic waves along the Z-axis direction, Two-dimensional scanning means for two-dimensionally scanning the ultrasonic irradiation point in the X-axis direction and the Y-axis direction orthogonal to the Z-axis direction, and based on a reflected wave obtained by irradiating the sample with ultrasonic waves A method of adjusting an angle of the sample mounting plate with respect to the Z-axis direction in an ultrasonic microscope system for displaying an ultrasonic image of the sample generated in the two-dimensional scanning method, wherein a plurality of different irradiations within a scanning range of the two-dimensional scanning unit Waveform information acquisition step of irradiating ultrasonic waves on the surface of the sample mounting plate from the focal ultrasonic transducer at a point and acquiring a plurality of waveform information from each reflected wave received by the focal ultrasonic transducer And the reception timing of each reflected wave In order to, to a method of adjusting the acoustic microscope system characterized by comprising an angle adjustment step of adjusting the angle of the sample mounting plate on the basis of the acquired plurality of waveform information and the gist thereof.

  According to the first aspect of the present invention, the ultrasonic wave is irradiated from the focal ultrasonic transducer to the surface of the sample mounting plate at a plurality of different irradiation points within the scanning range of the two-dimensional scanning unit, and the focal ultrasonic wave A plurality of waveform information is acquired from each reflected wave received by the vibrator. And the reception timing of each reflected wave can be made to correspond by adjusting the angle of a sample mounting board based on each waveform information. As described above, when the reception timings of the reflected waves are matched, the distance between the focal ultrasonic transducer and the sample mounting plate is constant at each irradiation point. Therefore, the inclination of the sample mounting plate can be adjusted to zero without using a measuring instrument such as a laser measuring instrument as in the prior art. And a clear ultrasonic image can be produced | generated based on the obtained reflected wave, and a sample can be observed correctly.

  According to a second aspect of the present invention, there is provided a sample mounting plate for mounting a sample, a focal-type ultrasonic transducer for irradiating the sample with ultrasonic waves along the Z-axis direction, and the ultrasonic irradiation point as Z Two-dimensional scanning means for two-dimensionally scanning in the X-axis direction and the Y-axis direction orthogonal to the axial direction, and an ultrasonic image of the sample generated based on a reflected wave obtained by irradiating the sample with ultrasonic waves A method of adjusting an angle of the sample mounting plate with respect to the Z-axis direction in an ultrasonic microscope system including a display device for display, wherein the two different scanning lines in the X-axis direction scanned by the two-dimensional scanning unit X is obtained by irradiating the surface of the sample mounting plate from the focal ultrasonic transducer at two irradiation points, and acquiring X-axis direction waveform information from each reflected wave received by the focal ultrasonic transducer. Axial waveform information acquisition step and acquired X-axis Based on the direction waveform information, an X-axis direction waveform display step for displaying the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized is obtained in order to match the reception timing of each reflected wave. X-axis direction for adjusting the angle of the sample mounting plate by rotating the sample mounting plate around the Y-axis direction based on the plurality of X-axis direction waveform information or the display of the display device Irradiating the surface of the sample mounting plate with ultrasonic waves from the focal ultrasonic transducer at two different irradiation points on the Y-axis direction scanning line scanned by the two-dimensional scanning means, A Y-axis direction waveform information acquisition step for acquiring Y-axis direction waveform information from each reflected wave received by the focal ultrasonic transducer, and a waveform of each reflected wave based on the acquired plurality of Y-axis direction waveform information The In order to match the reception timing of each reflected wave with the Y-axis direction waveform display step displayed on the display device in a manner in which the reception timing is recognizable, the acquired plurality of Y-axis direction waveform information or the display device display And an Y-axis direction angle adjusting step for adjusting the angle of the sample mounting plate by rotating the sample mounting plate about the X-axis direction as a rotation center. The gist of this adjustment method is as follows.

  According to the second aspect of the invention, the X-axis direction waveform information is acquired from the reflected waves at two different irradiation points on the X-axis direction scanning line scanned by the two-dimensional scanning unit. Based on the X-axis direction waveform information, the waveform of each reflected wave is displayed on the display device in such a manner that the reception timing can be recognized. By the display of this display device, it is possible to easily confirm the deviation of the reception timing of each reflected wave. Then, the angle of the sample mounting plate is adjusted by rotating the sample mounting plate about the Y axis direction based on the plurality of X-axis direction waveform information or the display of the display device, and each reflected wave Can be matched with each other. As described above, when the reception timing of each reflected wave is matched, the distance between the focal ultrasonic transducer and the sample mounting plate is constant at each irradiation point on the scanning line in the X-axis direction. Further, Y-axis direction waveform information is acquired from each reflected wave at two different irradiation points on the Y-axis direction scanning line scanned by the two-dimensional scanning unit. Based on the Y-axis direction waveform information, the waveform of each reflected wave is displayed on the display device in such a manner that the reception timing can be recognized. By the display of this display device, it is possible to easily confirm the deviation of the reception timing of each reflected wave. The angle of the sample mounting plate is adjusted by rotating the sample mounting plate around the X axis direction based on the plurality of Y-axis direction waveform information or the display of the display device, and each reflected wave Can be matched with each other. As described above, when the reception timing of each reflected wave is matched, the distance between the focal ultrasonic transducer and the sample mounting plate is constant at each irradiation point on the scanning line in the Y-axis direction. Therefore, the inclination of the sample mounting plate can be adjusted to zero without using a measuring instrument such as a laser measuring instrument as in the prior art. And a clear ultrasonic image can be produced | generated based on the obtained reflected wave, and a sample can be observed correctly.

  According to a third aspect of the present invention, in the first or second aspect, prior to the series of steps, an interval between the sample mounting plate and the focal ultrasonic transducer is set to a focal point of the focal ultrasonic transducer. The gist of the present invention is to perform a focusing step that adjusts the distance to match the distance.

  According to the third aspect of the invention, the distance between the sample mounting plate and the focal ultrasonic transducer is adjusted so as to coincide with the focal length of the focal ultrasonic transducer. Waveform information can be reliably acquired from each reflected wave at an appropriate timing. In addition, after adjusting the angle of the sample mounting plate, the distance between the sample mounting plate and the focal ultrasonic transducer is maintained at the focal length at each irradiation point in the scanning range. Can be generated.

  According to a fourth aspect of the present invention, there is provided a sample mounting plate for mounting a sample, a focal ultrasonic transducer for irradiating the sample with ultrasonic waves along the Z-axis direction, and the ultrasonic irradiation point as Z Two-dimensional scanning means for two-dimensionally scanning in the X-axis direction and the Y-axis direction orthogonal to the axial direction, and an ultrasonic image of the sample generated based on a reflected wave obtained by irradiating the sample with ultrasonic waves An ultrasonic microscope system including a display device for displaying, wherein the sample mounting is performed from the focal ultrasonic transducer at two different irradiation points on a scanning line in the X-axis direction scanned by the two-dimensional scanning unit. X-axis direction waveform information acquisition means for acquiring X-axis direction waveform information from each reflected wave received by the focal ultrasonic transducer when the surface of the mounting plate is irradiated with ultrasonic waves, and a plurality of acquired X-axes Based on the direction waveform information, the waveform of each reflected wave is converted into its reception type. X-axis direction waveform display control means for displaying on the display device in a recognizable manner, and by rotating the sample mounting plate about the Y-axis direction as a rotation center, the angle of the sample mounting plate is adjusted. An adjustable X-axis direction angle adjusting means and two different irradiation points on a scanning line in the Y-axis direction scanned by the two-dimensional scanning means from the focal ultrasonic transducer to the surface of the sample mounting plate Based on Y-axis direction waveform information acquisition means for acquiring Y-axis direction waveform information from each reflected wave received by the focal ultrasonic transducer and a plurality of acquired Y-axis direction waveform information when ultrasonic waves are irradiated. Y-axis direction waveform display control means for displaying the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized, and the sample mounting plate is rotated about the X-axis direction as a rotation center. By placing the sample To the angle adjustable in the Y-axis direction angle adjusting means and the gist of the acoustic microscope system characterized by comprising a.

  According to the fourth aspect of the present invention, the X-axis direction waveform is obtained from the reflected waves at two different irradiation points on the X-axis direction scanning line scanned by the two-dimensional scanning unit by the X-axis direction waveform information acquisition unit. Information is acquired. Based on the X-axis direction waveform information, the X-axis direction waveform display control means displays the waveform of each reflected wave on the display device in such a manner that the reception timing can be recognized. By the display of this display device, it is possible to easily confirm the deviation of the reception timing of each reflected wave. Then, the angle of the sample mounting plate is adjusted by the X axis direction angle adjusting means so that the sample mounting plate is rotated about the Y axis direction, and each reflected wave displayed on the display device is adjusted. The reception timing can be matched. As described above, when the reception timing of each reflected wave is matched, the distance between the focal ultrasonic transducer and the sample mounting plate is constant at each irradiation point on the scanning line in the X-axis direction. Further, the Y-axis direction waveform information acquisition means acquires Y-axis direction waveform information from each reflected wave at two different irradiation points on the Y-axis direction scanning line scanned by the two-dimensional scanning means. The Y-axis direction waveform display control means displays the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized based on the Y-axis direction waveform information. By the display of this display device, it is possible to easily confirm the deviation of the reception timing of each reflected wave. Then, the angle of the sample mounting plate is adjusted by the Y axis direction angle adjusting means so that the sample mounting plate is rotated about the X axis direction, and the reception timing of each reflected wave is matched. Can do. As described above, when the reception timing of each reflected wave is matched, the distance between the focal ultrasonic transducer and the sample mounting plate is constant at each irradiation point on the scanning line in the Y-axis direction. Therefore, the inclination of the sample mounting plate can be adjusted to zero without using a measuring instrument such as a laser measuring instrument as in the prior art. And a clear ultrasonic image can be produced | generated based on the obtained reflected wave, and a sample can be observed correctly.

  According to a fifth aspect of the present invention, in the fourth aspect, before the angle adjustment by the X-axis direction angle adjusting means and the Y-axis direction angle adjusting means is performed, the sample mounting plate and the focal ultrasonic vibration are used. The gist of the invention is that it further comprises an automatic focusing means for automatically adjusting the distance from the child so as to coincide with the focal length of the focal ultrasonic transducer.

  According to the fifth aspect of the invention, the automatic focusing means automatically adjusts so that the distance between the sample mounting plate and the focal ultrasonic transducer matches the focal length of the focal ultrasonic transducer. Therefore, it is possible to reliably acquire waveform information from each reflected wave at an appropriate timing according to the focal length. In addition, after adjusting the angle of the sample mounting plate, the distance between the sample mounting plate and the focal ultrasonic transducer is maintained at the focal length at each irradiation point in the scanning range. Can be generated.

  A sixth aspect of the present invention is the method according to the fifth aspect, wherein the X-axis direction angle adjustment means is configured to mount the sample on the basis of a plurality of pieces of acquired X-axis direction waveform information so as to match the reception timings of the reflected waves. A first driving unit that automatically rotates the mounting plate about the Y-axis direction as a rotation center, and the Y-axis direction angle adjusting unit includes a plurality of acquired plurality of acquired waves to match the reception timing of each reflected wave. The gist of the present invention is to have second driving means for automatically rotating the sample mounting plate about the X-axis direction as a rotation center based on the Y-axis direction waveform information.

  According to the sixth aspect of the present invention, the first driving means of the X-axis direction angle adjusting means automatically causes the sample mounting plate to rotate around the Y-axis direction based on a plurality of X-axis direction waveform information. It is rotated. Further, the second mounting means of the Y-axis direction angle adjusting means automatically rotates the sample mounting plate with the X-axis direction as the rotation center based on the plurality of Y-axis direction waveform information. In this way, the angle adjustment of the sample mounting plate can be performed quickly and accurately, so that the operability of the ultrasonic microscope system can be improved.

  As described in detail above, according to the invention described in claims 1 to 6, without using a dedicated measuring instrument for measuring the inclination of the sample mounting plate, the inclination of the sample mounting plate is adjusted, An ultrasonic image of the sample can be displayed more accurately.

[First Embodiment]

  DESCRIPTION OF EMBODIMENTS A first embodiment embodying the present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic configuration diagram showing an ultrasonic microscope system.

  As shown in FIG. 1, the ultrasonic microscope system 1 of the present embodiment includes a pulse excitation type ultrasonic microscope 2, an A / D board 3, and a personal computer (personal computer) 4.

  The ultrasonic microscope 2 includes a pulse generation circuit 10, a transmission / reception separation circuit 11, a reception circuit 12, a transducer 13, an XY stage 14, a Z-axis stage 15, a 2-axis gonio stage 16, and an encoder. An (ENC) 17, an XY controller 18, and a Z-axis controller 19 are provided.

  In the ultrasonic microscope 2, a transducer 13 as a focal ultrasonic transducer is fixed to a lower part of a Z-axis stage 15 as automatic focusing means. The Z-axis stage 15 includes a drive motor 22Z, and a Z-axis controller 19 is connected to the motor 22Z. Then, when the motor 22Z is driven in response to the drive signal of the Z-axis controller 19, the transducer 13 moves together with the Z-axis stage 15 in the Z-axis direction (vertical direction in FIG. 1), and irradiation is performed from the transducer 13. The focal position of the ultrasonic wave to be adjusted is adjusted.

  The transducer 13 includes a zinc oxide thin film piezoelectric element 13a and a sapphire rod acoustic lens 13b, and the thin film piezoelectric element 13a is vibrated by an excitation pulse generated by the pulse generation circuit 10, so that ultrasonic waves in a predetermined frequency band are generated by the acoustic lens. It is output through 13b. The ultrasonic waves in the acoustic lens 13b are converged in a conical shape, and are focused on the surface of the glass substrate 20 as a sample mounting plate via an ultrasonic transmission medium W1 such as water. As the transducer 13, a transducer having a diameter of 1.2 mm, a focal length of 1.5 mm, a center frequency of 80 MHz, and a bandwidth of 50 to 105 MHz (-6 dB) is used.

  An XY stage 14 as a two-dimensional scanning unit is provided below the transducer 13, and a glass substrate 20 is fixed on the stage 14. Then, a biological tissue 21 as a sample is placed on the upper surface of the glass substrate 20, and ultrasonic waves are applied to the biological tissue 21 along the Z-axis direction from above. The living tissue 21 is a frozen section (living tissue section) sliced to a thickness of about several μm (usually 4 μm to 10 μm).

  The XY stage 14 includes stages 14X and 14Y for moving the living tissue 21 two-dimensionally in the X-axis direction and the Y-axis direction orthogonal to the Z-axis direction, and motors that drive the respective stages 14X and 14Y. 22X and 22Y are provided. Stepping motors and linear motors are used as these motors 22X and 22Y.

  An XY controller 18 is connected to each of the motors 22X and 22Y, and the motors 22X and 22Y are driven in response to a drive signal of the XY controller 18. By driving these motors 22X and 22Y, the X stage 14X is continuously scanned (continuous feed), and the Y stage 14Y is controlled to be intermittent feed. With this control, the XY stage 14 can be scanned at high speed.

  In the present embodiment, an encoder 17 is provided corresponding to the X stage 14X, and the encoder 17 detects the scanning position of the X stage 14X. Specifically, when the scanning range is divided into 300 × 300 measurement points (pixels), one X-direction (horizontal direction) scan is divided into 300. Then, the position of each measurement point is detected by the encoder 17 and taken into the personal computer 4. The personal computer 4 generates a drive control signal in synchronization with the output of the encoder 17 and supplies the drive control signal to the XY controller 18. The XY controller 18 drives the motor 22X based on this drive control signal. Further, the XY controller 18 drives the motor 22Y when the scanning of one line in the X direction is completed based on the output signal of the encoder 17, and moves the Y stage 14Y by one pixel in the Y direction.

  Further, the XY controller 18 generates a trigger signal in synchronization with the drive control signal and supplies the trigger signal to the pulse generation circuit 10. Thereby, in the pulse generation circuit 10, an excitation pulse is generated at a timing synchronized with the trigger signal. The excitation pulse is supplied to the transducer 13 via the transmission / reception wave separation circuit 11, and ultrasonic waves are emitted from the transducer 13.

  FIG. 2 is a plan view of the XY stage 14 as viewed from the transducer 13 side. As shown in FIG. 2, by performing reciprocal scanning in the X-axis direction by the X stage 14X and scanning in the Y-axis direction by the Y stage, two ultrasonic waves are applied to the living tissue 21 on the glass substrate 20. Dimensionally scanned.

  FIG. 3 shows an example of the ultrasonic scanning range R1 in the present embodiment. That is, the ultrasonic scanning range R1 is set so as to include a portion (glass surface 20a) where the surface of the glass substrate 20 is exposed in addition to the living tissue 21. Then, scanning is started from the position of the upper left corner of the scanning range R1, and scanning is sequentially performed two-dimensionally in the X-axis direction and the Y-axis direction as indicated by arrows.

  In the ultrasonic microscope 2 of the present embodiment, the XY stage 14 is placed on the biaxial gonio stage 16. The biaxial goniometer stage 16 is formed by stacking an X-axis goniometer 16X as an X-axis direction angle adjusting means and a Y-axis goniometer 16Y as a Y-axis direction angle adjusting means. The X-axis goniometer 16X and the Y-axis goniometer 16Y are provided with adjustment knobs 16a and 16b for adjusting the angle of the glass substrate 20 by changing the tilt amount of the stage 16, respectively. The X-axis goniometer 16X adjusts the angle of the glass substrate 20 by rotating the glass substrate 20 about the Y-axis direction as a rotation center. The Y-axis goniometer 16Y adjusts the angle of the glass substrate 20 by rotating the glass substrate 20 around the X-axis direction as the rotation center.

  The thin film piezoelectric element 13a of the transducer 13 shown in FIG. 1 is an element for both transmitting and receiving waves, and converts an ultrasonic wave (reflected wave) reflected by the living tissue 21 into an electric signal. The reflected wave signal is supplied to the receiving circuit 12 via the transmission / reception wave separating circuit 11. The reception circuit 12 includes a signal amplification circuit (not shown), amplifies the reflected wave signal, and outputs the amplified signal to the detection circuit 23 of the A / D board 3.

  The detection circuit 23 is a circuit for detecting a reflected wave of an ultrasonic wave, and includes a gate circuit 23a and a peak detection circuit 23b. The gate circuit 23 a of the detection circuit 23 of the present embodiment extracts the reflected wave signal of the glass surface 20 a or the living tissue 21 from the reflected wave signal received by the transducer 13. The ultrasonic waves are repeatedly reflected between the transducer 13 and the glass surface 20a or the living tissue 21. Therefore, the detection circuit 23 (gate circuit 23a) is configured to extract the reflected wave signal obtained first. The peak detection circuit 23b of the detection circuit 23 detects the peak voltage of the reflected wave signal. Then, the reflected wave signal and the peak voltage signal detected by the detection circuit 23 are input to the A / D conversion circuit 24, subjected to A / D conversion, and then transferred to the personal computer 4.

  The personal computer 4 includes a CPU 31, interfaces (I / F) 32 and 33, a memory 34, a storage device 35, an input device 36, and a display device 37, which are connected to each other via a bus 38.

  The CPU 31 executes a control program using the memory 34 and controls the entire apparatus in an integrated manner. As a control program, a program for controlling two-dimensional scanning by the XY stage 14, a program for performing automatic focus adjustment, a program for adjusting the angle of the glass substrate 20, and a program for calculating tissue sound speed Etc.

  The interface 32 is a communication port (for example, a USB port) for taking in transfer data (such as a reflected wave signal after A / D conversion) from the A / D board 3. The interface 33 is an input / output port for outputting a drive control signal to the XY controller 18 and the Z-axis controller 19 and capturing an output signal of the encoder 17.

  The display device 37 is, for example, a color display such as an LCD or a CRT, and is used to display a sound velocity image of the living tissue 21 and an input screen for various settings. The input device 36 is a keyboard, a mouse device, or the like, and is used for inputting requests, instructions, and parameters from the user.

  The storage device 35 is a magnetic disk device or an optical disk device, and the storage device 35 stores a control program and various data. The CPU 31 transfers programs and data from the storage device 35 to the memory 34 in accordance with instructions from the input device 36, and executes them sequentially. Note that the program executed by the CPU 31 may be a program stored in a storage medium such as a memory card, a flexible disk, or an optical disk, or a program downloaded via a communication medium. To do.

  Next, an adjustment method for adjusting the focus of the ultrasonic wave in the ultrasonic microscope system 1 of the present embodiment will be described.

As shown in FIG. 4, when the ultrasonic wave _So is irradiated perpendicularly to the surface of the glass substrate 20 (glass surface 20a) from the transducer 13, the sound pressure of the reflected wave is at the position where the ultrasonic wave _So is in focus. Become the maximum. Thus, the sound pressure of the reflected wave by using the maximum and becomes properties focal position to adjust the focus of the ultrasonic S _o.

Specifically, in a state where the glass substrate 20 does not put the living tissue 21, the irradiation point of the ultrasonic S _o moves the X-Y stage 14 so as to be positioned at the center point P0 of the scanning range R1 (FIG. 5 reference). Then, after setting the Z-axis stage 15 so that the focal point of the transducer 13 is in the vicinity of the glass surface 20a, the ultrasonic wave _So is irradiated from the transducer 13 while driving the Z-axis stage 15, and the peak of the detection circuit 23 at that time The detection circuit 23b detects the peak voltage of the reflected wave signal. Based on the detection result, the position where the reflected wave reaches the maximum sound pressure (the peak voltage of the reflected wave signal is maximum) is determined. Then, by stopping the Z-axis stage 15 at a position where the maximum sound pressure, the focal position of the ultrasonic S _o ultrasound to focus on the glass surface 20a is S _o is adjusted to be emitted from the transducer 13 Is done. In other words, the distance L between the transducer 13 and the glass surface 20 a is adjusted to coincide with the focal length of the transducer 13.

  Next, an angle adjustment method for adjusting the angle of the glass substrate 20 with respect to the Z-axis direction in the ultrasonic microscope system 1 of the present embodiment will be described. The angle adjustment of the glass substrate 20 is also performed in a state before the living tissue 21 is placed on the glass substrate 20 as in the automatic focus adjustment.

First, the X stage 14X is driven to reciprocate the glass substrate 20 on the stage 14 in the X-axis direction. In the present embodiment, as shown in FIG. 5, the X stage 14X is reciprocated so that the transducer 13 (ultrasound irradiation point) is positioned on the X-axis direction scanning line Lx passing through the center point P0 of the scanning range R1. Move. At this time, as shown in FIG. 6, ultrasonic waves are emitted from the transducer 13 toward the glass surface 20a at the irradiation points at both ends in the scanning range R1 (the measurement point Px1 at the left end and the measurement point Px2 at the right end of the scanning line Lx in FIG. 5). _So is irradiated. Then, the received reflected waves _{S r1, S r2} from the glass surface 20a, the waveform information is obtained from the reflected wave _{S r1, S r2} (X-axis direction waveform information acquiring step). Further, by transferring the waveform information to the display device 37, the waveforms of the reflected waves S _r1 and S _r2 are displayed on the screen (X-axis direction waveform display step). Incidentally, until the angle adjustment of the X-axis direction is completed, the irradiation of ultrasonic waves _{S o} in the left and right ends of the measuring points Px1, Px2, the waveform of the reflected wave _{S r1, S r2} at each measurement point Px1, Px2 Display is executed repeatedly.

Here, if the glass substrate 20 is inclined, for example, if the right end of the measurement points Px2 was lower than the left end of the measurement points Px1 6, the reflected wave at the right end of the measurement point Px2 S _r2 Is received at a timing later than the reflected wave S _r1 at the measurement point Px1 at the left end because the propagation distance is long. Specifically, as shown in FIG. 7, in the detection circuit 23, the gate circuit 23a operates in response to the gate pulse G1, and the reflected waves S _r1 and S _r2 in the gate section Tg corresponding to the gate pulse G1. Are extracted. Note that the gate pulse G1 is for the output timing is set according to the focal length and sound velocity of the ultrasonic in transfer medium W1 of the transducer 13, the predetermined time T1 from the irradiation time t1 of the ultrasonic S _o is passed Is output when

In the present embodiment, the reflected wave signal (X-axis direction waveform information) corresponding to the gate section Tg is transferred to the display device 37, so that the reflected wave at the measurement point Px1 at the left end as shown in FIG. S _r1 is displayed on the left side of the screen 37a, and the reflected wave S _r2 at the measurement point Px2 at the right end is displayed on the right side of the screen 37a. In the present embodiment, the reflected wave S _r1 at the left end of the measurement points Px1 displayed in yellow, and displays the reflected wave S _r2 at the right end of the measurement point Px2 in green.

Operator checks the respective reflected waves _{S r1, S r2} displayed on the screen 37a of the display device 37, so that the reception timing of the reflected waves _{S r1, S r2} are matched, the two-axis goniometer 16 Adjust (X-axis direction angle adjustment step). That is, the tilt (angle) of the glass substrate 20 is adjusted by operating the adjustment knob 16a of the X-axis goniometer 16X to rotate the glass substrate 20 about the Y-axis direction as a rotation center. Here, when the reflected waves S _r1 and S _r2 match at the center of the screen 37a (inside the broken line shown in FIG. 8), the inclination of the glass substrate 20 in the X-axis direction becomes zero. At this time, the matched reflected wave _Sr is displayed in blue, for example, so that the operator is notified that the matched wave _Sr is matched. When the operator stops the operation of the adjustment knob 16a and selects the adjustment completion button 37b displayed on the screen 37a, the angle adjustment of the glass substrate 20 in the X-axis direction is completed.

Thereafter, the angle adjustment of the glass substrate 20 in the Y-axis direction is started. That is, by driving the Y stage 14Y, the glass substrate 20 on the stage 14 is reciprocated in the Y-axis direction. In this embodiment, as shown in FIG. 5, Y stage as transducer 13 in the Y-axis direction of the scan on lines Ly (irradiation point of the ultrasonic S _o) is positioned through the center point P0 of the scanning range R1 14Y Is reciprocated. At this time, the ultrasonic wave _So is irradiated from the transducer 13 toward the glass surface 20a at the irradiation points at both ends in the scanning range R1 (the measurement point Py1 at the upper end and the measurement point Py2 at the lower end of the scanning line Ly in FIG. 5). And each reflected wave from the glass surface 20a is received, and waveform information is acquired from each reflected wave (Y-axis direction waveform information acquisition step). Further, by transferring the waveform information to the display device 37, the waveform of each reflected wave is displayed on the screen 37a (Y-axis direction waveform display step). Incidentally, until the angle adjustment of the Y-axis direction is completed, repeatedly executes the irradiation of the ultrasonic wave S _o at the upper end and the lower end of the measuring points Py1, Py2, and a display of the reflected wave of the waveform at each measuring point Py1, Py2 To do.

  The operator confirms each reflected wave displayed on the screen 37a of the display device 37 and adjusts the two-axis goniostage 16 so that the reception timing of each reflected wave matches (Y-axis direction angle adjustment step). . That is, the tilt (angle) of the glass substrate 20 is adjusted by operating the adjustment knob 16b of the Y-axis goniometer 16Y to rotate the glass substrate 20 about the X-axis direction as a rotation center. Here, when the reflected waves match at the center of the screen 37a, the inclination of the glass substrate 20 in the Y-axis direction becomes zero. At this time, the matched reflected wave is displayed, for example, in blue to notify the operator that the matched wave has been matched. When the operator stops the operation of the adjustment knob 16b and selects the adjustment completion button 37b displayed on the screen 37a, the angle adjustment of the glass substrate 20 is completed.

  Next, an example of processing executed by the CPU 31 to generate a sound velocity image of the living tissue 21 in the present embodiment will be described with reference to the flowcharts of FIGS. FIG. 9 is a process for performing automatic focus adjustment of ultrasonic waves and an angle adjustment of the glass substrate 20, and FIG. 10 is a process for displaying a sound velocity image of the living tissue 21. The process of FIG. 9 is started after the glass substrate 20 on which the living tissue 21 is not placed is set on the XY stage 14.

First, CPU 31 is a motor 22X by X-Y controller 18 by outputting a control signal to drive the 22Y, X-Y stage so that the irradiation point of the ultrasonic _{S o} is located at the center point P0 of the scanning range R1 14 is moved. Then, CPU 31 drives the motor 22Z by Z-axis controller 19 by outputting a control signal, by moving the Z-axis stage 15 to adjust the focal position of the ultrasonic _{S o} (step 100).

Specifically, the Z-axis stage 15 is moved to an initial position (for example, a position slightly away from the focal length L of the transducer 13) near the focal region of the ultrasonic wave _So. Thereafter, when the excitation pulse is supplied to the transducer 13, ultrasound S _o from the transducer 13 is radiated to the glass surface 20a, the peak voltage of the reflected wave signal is detected by the peak detecting circuit 23b. The CPU 31 takes in the digital data converted by the A / D conversion circuit 24 via the interface 32, associates the data (peak voltage) with the position of the Z-axis stage 15 (Z-axis coordinate data), and the memory 34. To remember.

Then, Z-axis stage 15 is predetermined distance so as to approach the transducer 13 to the glass surface 20a (e.g., 0.01 mm) after being moved by the ultrasonic _{S o} is irradiated to the glass surface 20a, the peak voltage of the reflected wave signal Is detected by the peak detection circuit 23b. The CPU 31 stores the digital data converted by the A / D conversion circuit 24 in the memory 34 in association with the position of the Z-axis stage 15 as a peak voltage.

Similarly, the Z-axis stage 15 is gradually brought closer to the glass surface 20a, and the peak voltage of the reflected wave signal corresponding to the position of the Z-axis stage 15 is acquired and stored in the memory 34 each time. Then, the CPU 31 determines the maximum position (Z-axis coordinates) for each peak voltage stored in the memory 34, and moves the Z-axis stage 15 to that position, thereby focusing on the glass surface 20a. The focal position of the ultrasonic wave _So is adjusted so as to be tied.

  Next, the CPU 31 performs a process for adjusting the angle of the glass surface 20a. Specifically, the CPU 31 outputs a control signal to drive the motor 22X by the XY controller 18 to reciprocate the X stage 14X in the X-axis direction. Here, when the transducer 13 is positioned at the measurement points Px1 and Px2 at the left end and the right end on the scanning line Lx, an excitation pulse is supplied to the transducer 13.

When the excitation pulse is supplied, the ultrasonic wave _So is irradiated from the transducer 13 to the glass surface 20 a, and the reflected wave signal (X-axis direction waveform information) is detected by the detection circuit 23. Then, the CPU 31 as the X-axis direction waveform information acquisition unit acquires the X-axis direction waveform information converted into digital data by the A / D conversion circuit 24 via the interface 32 (step 110). The CPU 31 as the X-axis direction waveform display control means displays the waveform of the reflected wave on the screen 37a of the display device 37 by transferring the waveform information to the display device 37 (step 120). On this screen 37a, the reflected waves S _r1 and S _r2 at the measurement points Px1 and Px2 at the left end and the right end on the scanning line Lx in the X-axis direction are displayed (see FIG. 8).

The CPU 31 determines whether or not the adjustment completion button 37b on the screen 37a has been selected by the operator (step 130). If the CPU 31 determines that the adjustment completion button 37b has not been selected, the CPU 31 returns to step 110 and repeats the processing of steps 110 to 130. Thereby, each reflected wave signal is repeatedly detected at the measurement points Px1 and Px2 at the left end and the right end, and the reflected waves S _r1 and S _r2 displayed on the screen 37a are sequentially updated to the latest reflected waves S _r1 and S _r2 corresponding thereto. Updated.

Here, the operator confirms the reflected waves S _r1 and S _r2 displayed on the screen 37a of the display device 37, and the adjustment knob 16a of the X-axis goniometer 16X so that the reflected waves S _r1 and S _r2 match. To operate. Then, when the reflected waves S _r1 and S _r2 match at the center of the screen, the operator stops the operation of the adjustment knob 16b and selects the adjustment completion button 37b. When the CPU 31 detects the button selection, the CPU 31 executes processing from step 140 onward.

  That is, the CPU 31 outputs a control signal to drive the motor 22Y by the XY controller 18 to reciprocate the Y stage 14Y in the Y direction. Here, when the transducer 13 is positioned at the upper and lower measurement points Py1 and Py2 on the scanning line Ly, an excitation pulse is supplied to the transducer 13.

When the excitation pulse is supplied, the ultrasonic wave _So is irradiated from the transducer 13 to the glass surface 20 a, and the reflected wave signal (Y-axis direction waveform information) is detected by the detection circuit 23. Then, the CPU 31 as the Y-axis direction waveform information acquisition unit acquires the Y-axis direction waveform information converted into digital data by the A / D conversion circuit 24 via the interface 32 (step 140). The CPU 31 as the Y-axis direction waveform display control means displays the reflected wave waveform on the screen 37a of the display device 37 by transferring the waveform information to the display device 37 (step 150). On this screen 37a, the waveform of each reflected wave at the measurement points Py1 and Py2 at the upper and lower ends on the scanning line Ly in the Y-axis direction is displayed.

  The CPU 31 determines whether or not the adjustment completion button 37b on the screen 37a has been selected by the operator (step 160). If it is determined that the adjustment completion button 37b is not selected, the CPU 31 returns to step 140 and repeatedly executes the processing of steps 140 to 160. Thereby, each reflected wave signal is repeatedly detected at the measurement points Py1 and Py2 at the upper end and the lower end, and the reflected wave displayed on the screen 37a is sequentially updated to the latest reflected wave corresponding thereto.

  Here, the operator checks each reflected wave displayed on the screen 37a of the display device 37, and operates the adjustment knob 16b of the Y-axis goniometer 16Y so that each reflected wave matches. Then, when the reflected waves match at the center of the screen, the operator stops the operation of the adjustment knob 16b and selects the adjustment completion button 37b. When the CPU 31 detects the button selection, the process of FIG. 9 ends.

  The operator places the biological tissue 21 on the glass substrate 20 as shown in FIGS. After that, the sonic image display button (not shown) displayed on the screen 37a is selected, and the process of FIG. 10 is started.

CPU31 is motor 22X by X-Y controller 18 by outputting a control signal to drive the 22Y, irradiation point of the ultrasonic _{S o} moves X-Y stage 14 so as to be positioned on the glass surface 20a. At this time, the excitation pulse is supplied to the transducer 13, as shown in FIG. 11, the ultrasonic S _o is irradiated to the glass surface 20a from the transducer 13, the signal of the reflected wave S _r is detected by the detection circuit 23 The Then, the CPU 31 takes in the digital data converted by the A / D conversion circuit 24 via the interface 32. Thereafter, the CPU 31 uses the data to perform a Fourier transform to obtain a frequency component, and stores the transform result in the memory 34 as data of a direct reflected wave on the glass surface 20a (step 200).

Next, the CPU 31 drives the motors 22X and 22Y by the XY controller 18 by outputting a control signal, and starts two-dimensional scanning by the XY stage 14. At this time, the CPU 31 acquires coordinate data of the measurement point based on the output of the encoder 17. As shown in FIG. 11, when the living tissue 21 is irradiated with the ultrasonic wave _So , the reflected wave (the combined wave of the reflected wave S _front on the tissue surface and the reflected wave S _rear on the tissue back surface) S _t. The reflected wave signal is extracted by the detection circuit 23. The CPU 31 takes in the digital data converted by the A / D conversion circuit 24 via the interface 32, and stores the data in the memory 34 in association with the coordinate data of each measurement point (step 210). Here, the reflected wave signals at all measurement points in the scanning range R1 are detected, and data for one screen is acquired.

And CPU31 calculates | requires an intensity | strength and a phase spectrum by Fourier-transforming the data of the reflected wave in each measurement point, and comparing the conversion result with the reflected wave signal (Fourier-transform result) in the glass surface 20a (FIG. 12). The CPU 31 determines the frequency f _m of the minimum point of the signal intensity and the phase φ _{m at} that time from the intensity and the phase spectrum. The CPU 31 uses the frequency fm and the phase φ _m to perform a calculation corresponding to the above equation (2) to obtain the thickness d of the living tissue 21 at the measurement point (step 220).

  Further, the CPU 31 performs a calculation corresponding to the equation (4) using the calculated thickness d, and obtains the sound velocity C in the living tissue 21 at the measurement point (step 230). The thickness d and the sound velocity C of the living tissue 21 are obtained for each measurement point, and are stored in the memory 34 in association with the coordinate data at the measurement point.

  Thereafter, the CPU 31 performs image processing for generating a sound velocity image based on the calculated tissue sound velocity C (step 240). Specifically, the CPU 31 performs color modulation processing using the tissue sound speed C and generates image data corresponding to the magnitude of the tissue sound speed C. Then, the CPU 31 transfers each image data to the display device 37 to display the sound velocity image of the living tissue 21 on the screen of the display device 37, and then ends the processing of FIG.

  Therefore, according to the present embodiment, the following effects can be obtained.

(1) In the ultrasonic microscope system 1 of this embodiment, a plurality of waveform information from the reflected wave S _r1, S _r2 received is acquired by the transducer 13, on the basis of their waveform information, the reflected wave S _r1 , S _r2 , the angle of the glass substrate 20 is adjusted to match the reception timing. In this way, the tilt of the glass substrate 20 can be adjusted to zero without using a measuring instrument of a dedicated measuring instrument such as a laser measuring instrument as in the prior art. Therefore, a clear sound velocity image can be generated based on the obtained reflected wave, and the living tissue 21 can be accurately observed.

(2) In the ultrasonic microscope system 1 of the present embodiment, based on the waveform information of the reflected wave _{S r1, S r2,} waveforms of the reflected waves _{S r1, S r2} is displayed on the screen 37a of the display device 37 The Since the reflected waves S _r1 and S _r2 are displayed in different colors on the screen 37a, it is possible to easily determine the reception timing shift of the reflected waves S _r1 and S _r2 . Therefore, the angle of the glass substrate 20 can be quickly adjusted by operating the adjustment knobs 16a and 16b of the biaxial goniometer stage 16 so that the reception timings of the reflected waves S _r1 and S _r2 match.

(3) In the ultrasonic microscope system 1 according to the present embodiment, before the angle adjustment of the glass substrate 20 is performed by the biaxial goniostage 16, the automatic focus adjustment of the ultrasonic wave _So is performed. In this case, when the angle of the glass substrate 20 is adjusted, the waveform information of the reflected waves S _r1 and S _r2 can be reliably acquired in the gate section Tg corresponding to the focal length of the transducer 13. In addition, after the adjustment of the angle of the glass substrate 20, the distance L between the glass substrate 20 and the transducer 13 is maintained at the focal length at each irradiation point in the scanning range R1 of the ultrasonic wave _So , so that the sound speed is clearer. An image can be generated.

(4) In the ultrasonic microscope system 1 of the present embodiment, when the angle of the glass substrate 20 is adjusted, ultrasonic waves are emitted at the irradiation points Px1, Px2, Py1, and Py2 located at the end portions on the scanning lines Lx and Ly. _So was irradiated, and the waveform information of the reflected waves S _r1 and S _r2 was acquired. In this way, it is possible to reliably detect a shift in the reception timing of the reflected waves S _r1 and S _r2 according to the angle of the glass substrate 20.

(5) In the case of the present embodiment, the biaxial goniometer stage 16 is configured to manually adjust the angle, so that the device cost can be reduced compared to the case where the angle is automatically adjusted by an actuator such as a drive motor. be able to.
[Second Embodiment]

  A second embodiment in which the present invention is embodied in an ultrasonic microscope system will be described with reference to FIG.

  As shown in FIG. 13, in the ultrasonic microscope system 1 according to the present embodiment, the first drive motor 26X and the second drive motor 26Y provided on the biaxial goniometer stage 16 and the drive motors 26X and 26Y are controlled. The point provided with the controller 27 is different from the first embodiment. In the first embodiment, the angle adjustment of the glass substrate 20 by the biaxial goniostage 16 is manually performed, whereas in the present embodiment, the angle adjustment by the biaxial goniostage 16 is automatically performed. It is configured.

  Specifically, in the 2-axis goniometer stage 16, the X-axis goniometer 16X is provided with a first drive motor 26X as a first drive means, and the Y-axis goniometer 16Y is provided with a second drive motor 26Y as a second drive means. ing. These drive motors 26X and 26Y are connected to the controller 27.

In the present embodiment, when the angle of the glass substrate 20 is adjusted, the glass substrate 20 is reciprocated in the X-axis direction by the X stage 14X as in the first embodiment, and each measurement point on the scanning line Lx is measured. Waveform information is acquired from the reflected waves S _r1 and S _r2 at Px1 and Px2. Then, based on the waveform information of the reflected wave S _r1, S _r2, to determine the deviation of the reception timing, adjusting the angle of the glass substrate 20 according to the shift amount.

Specifically, at the measurement point Px1 at the left end, the time difference Tx1 between the irradiation time t1 when the ultrasonic wave _So is applied from the transducer 13 and the detection time t2 when the peak voltage of the reflected wave _Sr1 is detected by the peak detection circuit 23b. Is obtained (see FIG. 7). Similarly, at the measurement point Px2 at the right end, a time difference Tx2 between the irradiation time t1 when the ultrasonic wave _So is applied from the transducer 13 and the detection time t3 when the peak voltage of the reflected wave _Sr2 is detected by the peak detection circuit 23b is obtained. (See FIG. 7). Based on these time differences Tx1 and Tx2, the first drive motor 26X is driven by the X-axis goniometer 16X so that the reception timings of the reflected waves S _r1 and S _r2 match (time differences Tx1 and Tx2 match). The glass substrate 20 is rotated about the Y-axis direction as a rotation center, and the angle of the glass substrate 20 is adjusted.

  Thereafter, the glass substrate 20 is reciprocated in the Y-axis direction by the Y stage 14Y, and waveform information is acquired from the reflected waves at the measurement points Py1 and Py2 in the scanning line Ly. Then, based on the waveform information of each reflected wave, the glass substrate 20 is rotated in the X-axis direction by the Y-axis goniometer 16Y by driving the second drive motor 26Y so that the reception timing of the reflected wave matches. It is rotated as the center, and the angle of the glass substrate 20 is adjusted.

Thus, according to this Embodiment, the angle adjustment of the glass substrate 20 can be performed automatically. Therefore, the angle adjustment of the glass substrate 20 can be performed quickly and accurately, and the operability of the ultrasonic microscope system 1 can be improved. Also, as in the present embodiment, when performing angle adjustment automatically, the as in the first embodiment, the reflected wave S _r1, S reception timing of the display device 37 in recognizable aspects of _r2 There is no need to display on the screen 37a, and the display processing of the reflected waves S _r1 and S _r2 (the processing of step 120 and step 150 in FIG. 9) can be omitted.

  In addition, you may change embodiment of this invention as follows.

In the above embodiment, the scanning line Lx which passes through the center point P0, the irradiation point Px1 located at the end of the Ly, Px2, Py1, ultrasound _{S o} in Py2 irradiated in a scanning range R1, the reflected wave _{S r1} The angle of the glass substrate 20 is adjusted based on the reception timing of _Sr2 , but is not limited to this. The position of the irradiation point of the ultrasonic wave _So may be, for example, a corner portion in the scanning range R1. In this case, for example, the ultrasonic wave _So is irradiated at three irradiation points located at the corner portion of the scanning range R1. And the waveform information of each reflected wave is acquired and the waveform of three reflected waves is displayed on the screen 37a of the display apparatus 37 based on those waveform information. Thereafter, the angle of the glass substrate 20 is adjusted by operating the biaxial gonio stage 16 so that the reception timings of these three reflected waves coincide. Even if it does in this way, similarly to the said embodiment, it can adjust so that the inclination of the glass substrate 20 may become zero, without using the measuring device of an exclusive measuring device.

  In the above embodiment, when the reception timing of each reflected wave is matched, the reflected wave waveform is displayed in blue so as to notify the operator of the match, but the present invention is limited to this. It is not a thing. For example, a notification means such as a buzzer or a lamp may be used to notify that the reception timing matches.

In the above embodiment, the XY stage 14 as a two-dimensional scanning unit is provided at a position facing the transducer 13, and the XY stage 14 is driven so that the irradiation point of the ultrasonic wave _So is two-dimensional. However, a two-dimensional scanning unit may be provided on the transducer 13 side. Further, although the focus adjusting Z-axis stage 15 is provided above the XY stage 14, the Z-axis stage 15 may be provided below the XY stage 14.

  -In the ultrasonic microscope system 1 of the said embodiment, although the sonic image of the biological tissue 21 as a sample was displayed, you may display sonic images, such as a resin surface, in addition to that. In addition to the sound velocity image, an ultrasonic image such as an acoustic impedance image or an attenuation image may be displayed.

  In the above embodiment, the ultrasonic microscope system 1 is configured using the personal computer 4, but a computer such as a workstation may be used instead. The display device 37 for displaying the sound velocity image is provided integrally with the personal computer 4, but may be provided separately from the personal computer 4.

  In the ultrasonic microscope system 1 according to the above-described embodiment, the sound velocity image is obtained by color modulation. However, the sound velocity image may be visualized as a luminance-modulated sound velocity image.

  Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the embodiments described above are listed below.

  (1) The method for adjusting an ultrasonic microscope system according to claim 2, wherein in the X-axis direction waveform display step and the Y-axis direction waveform display step, the waveform of each reflected wave is displayed in a different color.

  (2) The method of adjusting an ultrasonic microscope system according to claim 2, wherein the two irradiation points are located at end portions on the scanning line.

  (3) The biaxial structure according to any one of claims 4 to 6, wherein the X-axis goniometer as the X-axis direction angle adjusting means and the Y-axis goniometer as the Y-axis direction angle adjusting means are stacked. An ultrasonic microscope system characterized by providing a gonio stage.

  (4) The ultrasonic microscope system according to any one of claims 4 to 6, further comprising notifying means for notifying that when the reception timing of each reflected wave matches.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows the ultrasonic microscope system of 1st Embodiment which actualized this invention. The top view of the XY stage seen from the transducer side. Explanatory drawing which shows the scanning range of an ultrasonic wave. Explanatory drawing which shows the relationship between a focus position and a sound pressure. Explanatory drawing which shows the irradiation point of the ultrasonic wave in a scanning range. Explanatory drawing which shows the reflected wave in each irradiation point. The time chart which shows each reflected wave and a gate pulse. Explanatory drawing which shows the screen of a display apparatus. The flowchart which shows the process for automatic focus adjustment and angle adjustment. The flowchart which shows the display process of a sound speed image. Explanatory drawing which shows each reflected wave. Explanatory drawing which shows an intensity spectrum and a phase spectrum. The schematic block diagram which shows the ultrasonic microscope system of 2nd Embodiment which actualized this invention. The schematic diagram which shows the measuring method in the conventional pulse excitation type ultrasonic microscope.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Ultrasonic microscope system 13 ... Transducer as a focal-type ultrasonic transducer 14 ... XY stage as a two-dimensional scanning means 15 ... Z-axis stage as an automatic focusing means 16X ... As an X-axis direction angle adjustment means X-axis goniometer 16Y ... Y-axis goniometer as Y-axis direction angle adjusting means 20 ... Glass substrate as sample mounting plate 21 ... Biological tissue as sample 26X ... First drive motor as first drive means 26Y ... Second drive Second drive motor 31 as means 31 ... CPU as information acquisition means and waveform display control means
37 ... display Lx, Ly ... scan lines Px1, Px2, Py1, Py2 ... measuring points as an irradiation point S o _... ultrasonic S _r1, S _{r2 ...} reflected wave

Claims (6)

A sample mounting plate for mounting the sample, a focal-type ultrasonic transducer for irradiating the sample with ultrasonic waves along the Z-axis direction, an X-axis direction orthogonal to the Z-axis direction at the ultrasonic irradiation point, and An ultrasonic microscope system for displaying an ultrasonic image of the sample generated on the basis of a reflected wave obtained by irradiating the sample with ultrasonic waves. A method of adjusting an angle of the sample mounting plate with respect to the Z-axis direction,
Each of the ultrasonic waves applied to the surface of the sample mounting plate from the focal ultrasonic transducer at a plurality of different irradiation points within the scanning range of the two-dimensional scanning means, and received by the focal ultrasonic transducer A waveform information acquisition step for acquiring a plurality of waveform information from the reflected wave;
An adjustment method for an ultrasonic microscope system, comprising: an angle adjustment step of adjusting an angle of the sample mounting plate based on a plurality of acquired waveform information so as to match the reception timing of each reflected wave. A sample mounting plate for mounting the sample, a focal-type ultrasonic transducer for irradiating the sample with ultrasonic waves along the Z-axis direction, an X-axis direction orthogonal to the Z-axis direction at the ultrasonic irradiation point, and A super provided with a two-dimensional scanning means for two-dimensionally scanning in the Y-axis direction, and a display device for displaying an ultrasonic image of the sample generated based on a reflected wave obtained by irradiating the sample with ultrasonic waves A method of adjusting an angle with respect to the Z-axis direction of the sample mounting plate in an acoustic microscope system,
The focal ultrasonic wave is emitted from the focal ultrasonic transducer to the surface of the sample mounting plate at two different irradiation points on the X-axis scanning line scanned by the two-dimensional scanning means. An X-axis direction waveform information acquisition step of acquiring X-axis direction waveform information from each reflected wave received by the vibrator;
An X-axis direction waveform display step for displaying the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized based on the acquired plurality of X-axis direction waveform information;
In order to match the reception timing of each reflected wave, by rotating the sample mounting plate based on the Y-axis direction as a rotation center based on a plurality of acquired X-axis direction waveform information or the display of the display device, An X-axis direction angle adjusting step for adjusting the angle of the sample mounting plate;
The focal ultrasonic wave is emitted from the focal ultrasonic transducer to the surface of the sample mounting plate at two different irradiation points on the scanning line in the Y-axis direction scanned by the two-dimensional scanning means. Y-axis direction waveform information acquisition step for acquiring Y-axis direction waveform information from each reflected wave received by the vibrator;
A Y-axis direction waveform display step for displaying the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized based on the acquired plurality of Y-axis direction waveform information;
In order to match the reception timing of each reflected wave, by rotating the sample mounting plate based on the X-axis direction as the rotation center based on the acquired plurality of waveform information in the Y-axis direction or the display of the display device, A method for adjusting an ultrasonic microscope system, comprising: a Y-axis direction angle adjusting step for adjusting an angle of the sample mounting plate.   Prior to the series of steps, performing a focusing step of adjusting the distance between the sample mounting plate and the focal ultrasonic transducer so as to coincide with the focal length of the focal ultrasonic transducer. The method of adjusting an ultrasonic microscope system according to claim 1 or 2, characterized in that: A sample mounting plate for mounting the sample, a focal-type ultrasonic transducer for irradiating the sample with ultrasonic waves along the Z-axis direction, an X-axis direction orthogonal to the Z-axis direction at the ultrasonic irradiation point, and A super provided with a two-dimensional scanning means for two-dimensionally scanning in the Y-axis direction, and a display device for displaying an ultrasonic image of the sample generated based on a reflected wave obtained by irradiating the sample with ultrasonic waves An acoustic microscope system,
When the ultrasonic wave is irradiated from the focal ultrasonic transducer to the surface of the sample mounting plate at two different irradiation points on the scanning line in the X-axis direction scanned by the two-dimensional scanning means, the focal type X-axis direction waveform information acquisition means for acquiring X-axis direction waveform information from each reflected wave received by the ultrasonic transducer;
X-axis direction waveform display control means for displaying the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized based on the plurality of acquired X-axis direction waveform information;
An X-axis direction angle adjusting means capable of adjusting the angle of the sample mounting plate by rotating the sample mounting plate around the Y-axis direction;
When the surface of the sample mounting plate is irradiated with ultrasonic waves from the focal ultrasonic transducer at two different irradiation points on the scanning line in the Y-axis direction scanned by the two-dimensional scanning means, the focal type Y-axis direction waveform information acquisition means for acquiring Y-axis direction waveform information from each reflected wave received by the ultrasonic transducer;
Y-axis direction waveform display control means for displaying the waveform of each reflected wave on the display device in a manner in which the reception timing can be recognized based on the acquired plurality of Y-axis direction waveform information;
An ultrasonic microscope system comprising Y-axis direction angle adjusting means capable of adjusting the angle of the sample mounting plate by rotating the sample mounting plate about the X-axis direction as a rotation center. .   Before the angle adjustment by the X-axis direction angle adjusting means and the Y-axis direction angle adjusting means is performed, the interval between the sample placement plate and the focal ultrasonic transducer is set to be the same as that of the focal ultrasonic transducer. 5. The ultrasonic microscope system according to claim 4, further comprising automatic focusing means that automatically adjusts the focal length to coincide with the focal length. The X-axis direction angle adjusting means automatically adjusts the sample mounting plate with the Y-axis direction as the center of rotation based on a plurality of acquired X-axis direction waveform information so as to match the reception timing of each reflected wave. First driving means for rotating,
The Y-axis direction angle adjusting means automatically adjusts the sample mounting plate with the X-axis direction as the rotation center based on the acquired plurality of Y-axis direction waveform information so as to match the reception timing of each reflected wave. 6. The ultrasonic microscope system according to claim 5, further comprising second driving means for rotating.

Images