TW202308073A - Heater terminal cover, heater unit, and heat treatment device capable of more reliably suppressing pulverization of a molybdenum disilicide heater - Google Patents

Abstract

The present invention aims to provide a heater terminal cover, a heater unit, and a heat treatment device capable of more reliably suppressing pulverization of a molybdenum disilicide heater. The solution of this invention is a heater terminal cover (50), which covers at least a part of the terminals (11A, 11B) made from a molybdenum-containing material in the heater (10). The heater terminal cover (50) has a main body (51) having a cylindrical portion (58, 58) configured to surround the outer peripheral portion of the exposed portion (23, 23) of the terminal (11A, 11B) over the entire circumference; and a nozzle (61) formed on the main body (51) for supplying an inert gas toward the interior of the cylindrical portion (58, 58).

Description

Heater terminal cover, heater unit and heat treatment device

The present invention relates to a heater terminal cover, a heater unit and a heat treatment device.

There are known heaters for heating an object to be processed such as a semiconductor material (for example, refer to Patent Documents 1 to 5).

As one of the above-mentioned heaters, a molybdenum disilicide heater may be used. The molybdenum disilicide heater is mainly composed of molybdenum disilicide, and is usually formed into a rod with a part having a curved shape. The heater has a terminal portion and a heat generating portion. On the surface of the terminal portion, a metal film is formed by spraying metal such as aluminum. The metal film is connected to a power source via wires or the like. The electric power output from the power supply is transmitted to the heat generating part through the electric wire and the metal film, thereby causing the heat generating part to generate heat. Thereby, the gas environment in the furnace in which the object to be processed is accommodated is heated. [Prior Art Literature] [Patent Document]

Patent Document 1: Japanese Patent Laid-Open No. 2012-114327 Patent Document 2: Japanese Patent Laid-Open No. 2000-208236 Patent Document 3: Japanese Patent Laid-Open No. 7-248193 Patent Document 4: Japanese Patent Application Publication No. 2-51234 Patent Document 5: Japanese Patent Application Laid-Open No. 5-61992

(Problem to be solved by the invention)

When the heater is in operation, the temperature inside the furnace is as high as 1400° C., while the temperature of the external terminals arranged in the furnace is not much different from room temperature. Therefore, a temperature difference of 1000 degrees or more is generated between the terminal portion and the heating portion. Therefore, there is a region of about 600°C for the heater. Molybdenum disilicide will be oxidized in the temperature range of about 350° C. to 600° C. When the above-mentioned oxidation progresses as the heater is used for a long period of time, the oxide of molybdenum disilicide is pulverized. That is, there will be a phenomenon (pest) of molybdenum disilicide. If the pulverization phenomenon of molybdenum disilicide progresses, there is a possibility that the strength may be lowered and the molybdenum disilicide may be broken.

In order to suppress the pulverization of molybdenum disilicide, for example, as described in Patent Document 1, it is conceivable to supply an inert gas such as nitrogen gas to the temperature region where molybdenum disilicide is easily oxidized. However, in the configuration described in Patent Document 1, a large amount of inert gas may be consumed if it is used to fill a large cover with inert gas. In addition, if the airtightness of the cover is low, the consumption of the inert gas may further increase.

The present invention was made in view of the above circumstances, and an object of the present invention is to provide a heater terminal cover, a heater unit, and a heat treatment device capable of reducing consumption of inert gas and more reliably suppressing pulverization of a molybdenum disilicide heater. (technical means to solve the problem)

(1) In order to solve the above-mentioned problems, a heater terminal cover according to an aspect of the present invention is a heater terminal cover covering at least a part of the terminals of a heater including terminals formed of a material containing molybdenum. The cover has a main body having a cylindrical portion configured to surround the outer peripheral portion of the terminal over its entire circumference, and a nozzle formed on the main body for supplying inert gas into the cylindrical portion.

According to this configuration, by supplying the inert gas from the nozzle into the cylindrical portion, the gas atmosphere around the outer peripheral portion of the terminal can be made an inert gas atmosphere over the entire circumference of the terminal. Thereby, occurrence of powdering phenomenon caused by oxidation of molybdenum disilicide can be suppressed. Furthermore, since the inert gas is supplied to the narrow area surrounded by the cylindrical portion, the inert gas can be more reliably supplied to the portion in the temperature region that is easily oxidized in the outer peripheral portion of the terminal, and the consumption of the inert gas can be reduced. Therefore, it can suppress pulverization of the molybdenum disilicide heater more surely.

(2) The body includes: the cylindrical portion on which the nozzle is formed; an outer peripheral wall portion arranged to surround the outer peripheral portion of the cylindrical portion; The above-mentioned inert gas is supplied between the cylindrical parts; this is the case.

According to this configuration, the inert gas from the port enters between the outer peripheral wall portion and the cylindrical portion, and is supplied to the inner space of the cylindrical portion through the nozzle of the cylindrical portion. Since the space between the outer peripheral wall portion and the cylindrical portion functions as a chamber space for the inert gas, the inert gas can be supplied from the nozzle to the inner space of the cylindrical portion at a more stable flow rate.

(3) A plurality of the nozzles are formed separately from each other along the circumferential direction of the cylindrical portion; such a case.

According to this configuration, the inert gas supplied from the nozzle to the inner space of the cylindrical portion can be more uniformly supplied in the circumferential direction of the heater terminal.

(4) A pair of the above-mentioned cylindrical portions are provided so as to respectively surround a pair of the above-mentioned terminals, and the above-mentioned outer peripheral wall portion surrounds the pair of the above-mentioned cylindrical portions;

According to this configuration, the surroundings of each of the pair of terminals can be made into an inert gas atmosphere by using one heater terminal cover.

(5) The heater terminal cover further includes a sealing member that seals between the body and the terminal; such a case.

According to this configuration, intrusion of oxygen gas from the outside of the heater terminal cover between the main body and the terminal can be more reliably suppressed.

(6) In the body, the axial one end side of the cylindrical portion is configured to face a member on which the heater terminal cover is attached, and the sealing member is arranged at the other axial end of the cylindrical portion. side part; such a case.

According to this configuration, by arranging the sealing member at the other end side portion in the axial direction where the temperature is relatively low away from the high temperature portion where the heater terminal cover is mounted, the thermal load on the sealing member can be reduced. In addition, in the area between the cylindrical portion and the terminal in the axial end side portion of the cylindrical portion, the intrusion of oxygen is suppressed by a member to which a heater terminal cover is attached.

(7) The above-mentioned main body is formed of a conductive material, and a cylindrical insulator is disposed radially inside the cylindrical portion; such a case.

According to this configuration, the main body can be formed of a high-strength material, and short-circuiting between the main body and the heater terminal can be more reliably suppressed.

(8) In order to solve the above-mentioned problems, a heater unit according to an aspect of the present invention includes: a heater including a terminal formed of a material containing molybdenum; and the heater terminal cover covering at least a part of the terminal. .

(9) In order to solve the above-mentioned problems, a heat treatment apparatus according to an aspect of the present invention has: a heat treatment chamber for heat-treating an object to be processed; for heating.

According to the constitutions of (8) and (9) above, pulverization of the molybdenum disilicide heater can be more reliably suppressed. (compared to the effect of previous technology)

According to the present invention, powdering of the molybdenum disilicide heater can be more reliably suppressed.

Hereinafter, an embodiment for implementing the present invention will be described with reference to the drawings.

Fig. 1 is a schematic sectional view of main parts of a heat treatment apparatus 1 according to an embodiment of the present invention. FIG. 2 is a perspective view schematically showing main parts of the heater unit 3 of the heat treatment apparatus 1 . FIG. 3 is an enlarged view showing a main part of the heater unit 3 of FIG. 1 . Fig. 4 is a sectional view taken along line IV-IV of Fig. 3 . Fig. 5 is a cross-sectional view along line V-V of Fig. 3 .

Referring to FIGS. 1 to 5 , the heat treatment device 1 is configured to perform heat treatment on an object 100 to be processed. In the present embodiment, the heat treatment apparatus 1 is a heat treatment apparatus for semiconductor manufacturing, and is configured to perform oxidation treatment, diffusion treatment, and the like on a disk-shaped object 100 to be processed. The heat processing apparatus 1 is installed in the clean room of a factory, for example. In addition, the heat treatment apparatus 1 can also be used in the manufacture of parts other than semiconductors, for example, can also be used in the manufacture of electronic parts and metal parts.

The heat treatment apparatus 1 has: a heat insulator 2 ; a heater unit 3 held by the heat insulator 2 ; and a tube 4 housed in a space 2 a in the heat insulator 2 .

The heat insulator 2 is the frame of the heat treatment device 1 . The heat insulator 2 is formed using a heat insulating material such as ceramics, and constitutes an outer casing of the heat treatment apparatus 1 . The lower end of the heat insulator 2 is opened and the inside thereof is formed in a hollow shape.

The tube 4 is formed mainly of quartz, for example, and is surrounded by the heat insulator 2 . The pipe 4 is supported by a support member not shown. The pipe member 4 is formed in a cylindrical shape and has a closed upper end. The tube 4 forms a heat treatment chamber 5 for heat treating the object 100 to be processed. The lower end of the tube 4 is opened downward, and the wafer boat 6 can be moved in and out of the tube 4 . An object to be processed 100 is placed on the wafer boat 6 .

The heater unit 3 is configured to heat the gas environment in the heat treatment chamber 5 . A plurality of heater units 3 are provided on the heat insulator 2 and are supported by the heat insulator 2 . A plurality of heater units 3 are arranged in the circumferential direction of the heat insulator 2 (for example, two), and one or a plurality of heater units are arranged in the vertical direction. Since the configuration of each heater unit 3 is the same, the configuration of one heater unit 3 will be described below.

The heater unit 3 has a heater 10 including a pair of terminals 11A, 11B formed of a material containing molybdenum, and a heater terminal cover 50 covering at least a part of the terminals 11A, 11B.

The heater 10 is set to heat the heat treatment chamber 5 inside the tube 4 . The heater 10 is a molybdenum disilicide heater. In this embodiment, the maximum temperature of the heater 10 is about 1400°C. By using a molybdenum disilicide heater as the heater 10, it can rapidly heat the gas environment inside the tube 4. In this embodiment, the heater 10 is formed bilaterally symmetrically (symmetrical to the left-right direction of FIG. 4 ). In the present embodiment, the heater 10 is formed in an elongated shape, and is formed in a circular shape in a cross section perpendicular to the longitudinal direction of the heater 10 . In addition, the heater 10 may also be formed in a flat plate shape, and the specific cross-sectional shape of the heater 10 is not limited.

The heater 10 has a main body 12 mainly composed of molybdenum disilicide, and metal parts 13 , 13 respectively formed on opposite ends of the main body 12 . The main body portion 12 is formed in an elongated shaft shape. Each metal part 13, 13 is a conductive member, such as aluminum alloy, for example. And, by the body portion 12 and the metal portions 13 , 13 , a heat generating portion 14 and a pair of terminals 11A, 11B are formed in the heater 10 . That is, the heater 10 has a heat generating part 14 and a pair of terminals 11A and 11B.

The heat generating part 14 is a part that generates heat when electric power is supplied to the heater 10 . The heat generating part 14 is a part of the main body part 12, and is arrange|positioned in the space 2a in the heat insulator 2. As shown in FIG. In this embodiment, the heat generating unit 14 is formed in a U-shape. In addition, the shape of the heating portion 14 may also be other shapes such as a wave shape, and the specific shape is not limited. In the present embodiment, the diameter of the heat generating portion 14 is smaller than the diameter of the pair of terminals 11A, 11B. The pair of terminals 11A and 11B are continuous with a pair of end portions of the heat generating portion 14 .

Each terminal 11A, 11B has: a connection portion 16 extending along the inner wall surface 2d of the heat insulator 2 in the space 2a in the heat insulator 2 and connected to the heat generating portion 14; 2a bends toward the outside of the heat insulator 2 as it moves away from the heat generating portion 14 ; In addition, in FIGS. 1 and 3 , although illustration is omitted, the terminal 11B is bilaterally symmetrical (symmetrical in a direction perpendicular to the paper plane of FIGS. 1 and 3 ) to the terminal 11A. The connecting portion 16 may extend in the vertical direction, may extend in the horizontal direction, or may extend in both the vertical direction and the horizontal direction. In this embodiment, the extension portion 18 extends linearly, preferably horizontally.

The connecting portion 16 and the bending portion 17 are formed by the main body portion 12 mainly composed of molybdenum disilicide. In addition, most of the extension part 18 is formed by the body part 12 , and the remaining part of the extension part 18 , that is, the terminal end part 22 is formed by the body part 12 and the metal parts 13 , 13 . In other words, the extension part 18 has an extension part body 21 formed by the body part 12 , and a terminal end part 22 formed by the body part 12 and the metal parts 13 , 13 .

Most of the extension body 21 is disposed in the through-hole portion 2 b formed in the heat insulator 2 and supported by the heat insulator 2 . A part of the extension body 21 is disposed outside the heat insulator 2 and serves as an exposed portion 23 exposed from the heat insulator 2 . Furthermore, a part of the exposed portion 23 of the extension body 21 is covered with the heater terminal cover 50 . The terminal end portion 22 is continuous with the protruding portion 23 of the extension body 21 .

A bus bar (bus bar) 24 is connected to each terminal end portion 22 of the pair of terminals 11A, 11B. In this embodiment, the bus bar 24 is covered with a cover 25 made of an insulating material. The pair of terminals 11A and 11B are electrically connected to a power source (not shown) using a bus bar 24 or the like.

In the heater 10 having the above configuration, the exposed portions 23 of the pair of terminals 11A, 11B, which are close to the heat insulator 2 , have a temperature of approximately 350° C. to 600° C. when the heat generating portion 14 generates heat. In this temperature range, the oxidation of molybdenum disilicide in the main body portion 12 is accelerated, and powdering of molybdenum disilicide can easily occur. On the other hand, even if the temperature of the main body 12 is the above-mentioned temperature that is easily oxidized, the pulverization of the main body 12 can be suppressed by making the surrounding of the main body 12 a low-oxygen gas atmosphere. In the heater terminal cover 50 , an inert gas is supplied around each exposed portion 23 of the main body 12 to make the surroundings of each exposed portion 23 a low-oxygen gas atmosphere. As an inert gas, nitrogen gas can be illustrated. In addition, as long as the portion of the terminals 11A and 11B at which pulverization occurs can be made into a low-oxygen gas atmosphere, a gas other than nitrogen may be used, and the specific type of gas is not limited.

As described above, the heater terminal cover 50 is disposed so as to cover a part of the exposed portion 23 disposed outside the heat insulator 2 among the terminals 11A and 11B. The heater terminal cover 50 is fixed to the heat insulator 2 in this embodiment along the outer wall surface 2c of the heat insulator 2 . The heater terminal cover 50 is formed in a hollow block shape surrounding the respective exposed portions 23 , 23 of the pair of terminals 11A, 11B.

The heater terminal cover 50 has a main body 51 , insulators 52 and 52 held by the main body 51 , a sealing member 53 , and a pressing member 54 for attaching the sealing member 53 to the main body 51 .

In this embodiment, the main body 51 is formed using metal materials such as stainless steel, and it can also be said to be formed using conductive materials. The main body 51 is along the outer wall surface 2 c of the heat insulator 2 . The main body 51 is formed in a container shape that accommodates the exposed portions 23 . In the present embodiment, the main body 51 is formed by performing sheet metal processing or the like on a metal plate.

The main body 51 has a first side wall 55 and a second side wall 56 as a pair of side walls, and an outer peripheral wall portion 57 and cylindrical portions 58 , 58 arranged between the first side wall 55 and the second side wall 56 .

In the present embodiment, the first side wall 55 and the second side wall 56 are arranged parallel to each other. The first side wall 55 is, for example, along a flat portion of the outer wall surface 2 c of the heat insulator 2 , and the second side wall 56 is separated from the first side wall 55 by a predetermined distance in a direction to be separated from the heat insulator 2 . In this embodiment, the first side wall 55 and the second side wall 56 are formed in a rectangular plate shape. The shape of the second side wall 56 is larger than the shape of the first side wall 55 when viewed from the longitudinal direction of the exposed portions 23 , 23 of the pair of terminals 11A, 11B parallel to each other. A pair of through hole portions 55 a , 55 a through which the pair of terminals 11A, 11B penetrate is formed in the first side wall 55 . Similarly, a pair of through-hole portions 56 a , 56 a through which the pair of terminals 11A, 11B penetrate is formed in the second side wall 56 .

The outer peripheral wall portion 57 is connected to the first side wall 55 and the second side wall 56 . The outer peripheral wall portion 57 is formed in a ring shape, and is formed in a square column shape in this embodiment. In addition, the outer peripheral wall portion 57 may be formed in a polygonal cylindrical shape other than a rectangular shape, or may be formed in a cylindrical shape or an elliptical shape. One end of the outer peripheral wall portion 57 is continuous with the outer peripheral edge portion of the first side wall 55 . The other end of the outer peripheral wall portion 57 is fixed to the inner portion with respect to the outer peripheral edge portion of the second side wall 56 among the second side walls 56 . Thereby, in the 2nd side wall 56, the part which protrudes outside the outer peripheral wall part 57 becomes the flange 56b. The outer peripheral wall portion 57 is disposed so as to surround the outer peripheral portions of the cylindrical portions 58 , 58 .

The cylindrical parts 58, 58 are configured so as to surround the outer peripheral parts of the exposed parts 23, 23 of the terminals 11A, 11B over the entire circumference. Part 23, the cylindrical part of 23. Each cylindrical portion 58 is connected to the first side wall 55 and the second side wall 56 . In this embodiment, each cylindrical portion 58 is formed in a cylindrical shape. In addition, each cylindrical portion 58 may be formed in a shape surrounding the outer peripheral portions of the corresponding exposed portions 23, 23 of the terminals 11A, 11B, and may be formed in a polygonal cylindrical shape other than a cylinder, or may be formed in an elliptical shape. . One end of each cylindrical portion 58 is continuous with the corresponding through hole portions 55 a, 55 a of the first side wall 55 . The other end of each cylindrical portion 58 is continuous with the corresponding through hole portions 56 a, 56 a of the second side wall 56 . Each cylindrical part 58 is arrange|positioned so that it may be surrounded by the outer peripheral wall part 57, and surrounds the periphery of the corresponding exposed part 23, 23 of a pair of terminal 11A, 11B over the whole circumference.

According to the above configuration, the first side wall 55 , the second side wall 56 , the outer peripheral wall portion 57 , and the pair of cylindrical portions 58 and 58 of the main body 51 constitute the chamber 59 . The chamber 59 forms a space surrounded by the first side wall 55 , the second side wall 56 , the outer peripheral wall portion 57 and the pair of cylindrical portions 58 , 58 , and an inert gas is supplied into the chamber 59 . More specifically, a port 60 is formed in the main body 51 . The port 60 is provided to supply an inert gas into the chamber 59 which is a space between the outer peripheral wall 57 and the cylindrical parts 58 , 58 , and is formed on the outer peripheral wall 57 in this embodiment. In addition, the port 60 may also be formed on other members of the main body 51 such as the second side wall 56 .

The port 60 includes a through-hole portion formed in the main body 51 , and an inert gas supply pipe 63 is connected to the port 60 . The inert gas supply pipe 63 is connected to an inert gas supply source (not shown) such as a gas cylinder storing an inert gas. The inert gas system is introduced into the chamber 59 from an inert gas supply source through an inert gas supply pipe 63 . The inert gas in the chamber 59 is supplied to the exposed parts 23, 23 and The surroundings of 23 are the inner spaces 64, 64 of the insulators 52, 52. The flow of inert gas is shown in the figure by arrow F.

The nozzle 61 is provided for supplying an inert gas into each cylindrical part 58 (inner space 64). The nozzle 61 is formed along the radial direction of the corresponding cylindrical portion 58 , 58 and penetrates the corresponding cylindrical portion 58 , 58 . At least one nozzle 61 is formed in each cylindrical portion 58 . In the present embodiment, a plurality of nozzles 61 are formed on each cylindrical portion 58 at intervals along the circumferential direction of the cylindrical portion 58 , preferably a plurality of nozzles are formed at equal intervals in the circumferential direction of the cylindrical portion 58 . . The number of nozzles 61 in each cylindrical portion 58 is, for example, two, three, or four (four in the present embodiment), and may be, for example, five or more.

Each nozzle 61 is formed in a circular shape, for example, when viewed in the radial direction of the corresponding cylindrical portion 58 , 58 . The diameter of each nozzle 61 is not particularly limited. In the present embodiment, the position of the nozzle 61 in the axial direction of the exposed portion 23 is at the center of each cylindrical portion 58 , but it may not be at the center of each cylindrical portion 58 . In addition, a cylindrical insulator 52 is disposed radially inside each cylindrical portion 58 .

The insulators 52, 52 are provided to prevent short circuit between the body 51 and the terminals 11A, 11B. In this embodiment, each insulator 52 is formed of quartz. The insulators 52, 52 are formed in shapes along the inner peripheral surfaces of the corresponding cylindrical portions 58, 58, and are formed in a cylindrical shape in this embodiment.

In this embodiment, the distance D1 between the inner peripheral surface of the insulators 52 , 52 and the exposed portions 23 , 23 of the corresponding terminals 11A, 11B is equal to or less than the diameter D2 of the exposed portions 23 , 23 . The distance D1 is preferably about three times or less the diameter D2 of the exposed portions 23 , 23 . By thus setting the upper limit of the distance D1, the spaces between the insulators 52, 52 and the corresponding exposed portions 23, 23 (inner spaces 64, 64 to which the inert gas is supplied) can be reduced, and the molybdenum disilicide can be suppressed. A sufficient amount of inert gas is supplied to the spaces around the exposed portions 23 , 23 in the temperature range where pulverization occurs, that is, the inner spaces 64 , 64 of the insulators 52 , 52 .

The nozzle 62 is configured to cooperate with the nozzle 61 to supply the inert gas toward the respective exposed portions 23 , 23 . The nozzle 62 is formed along the radial direction of the corresponding insulator 52 , 52 and penetrates the corresponding insulator 52 , 52 . The number of nozzles 62 of each insulator 52 is the same as the number of nozzles 61 of the corresponding cylindrical portion 58 , 58 . The nozzles 62 of the insulators 52 are aligned in the radial direction of the cylindrical parts 58 , 58 corresponding to the nozzles 61 of the corresponding cylindrical parts 58 , 58 . Each nozzle 62 is formed in a circular shape, for example, when viewed in the radial direction of the corresponding insulator 52 , 52 . In addition, the diameter of each nozzle 62 is not particularly limited.

According to the above configuration, the inert gas in the chamber 59 is supplied through the nozzles 61 , 62 to the surroundings of the exposed portions 23 , 23 of the pair of terminals 11A, 11B, that is, the inner spaces 64 , 64 of the insulators 52 , 52 . One end of the chamber 59 is along the outer wall surface 2c of the heat insulator 2 . On the other hand, a sealing member 53 is arranged at the other end portion of the chamber 59 . That is, in the main body 51 , the first side wall 55 , which is one end portion in the axial direction of the cylindrical portions 58 , 58 , is configured to face the heat insulator 2 on which the heater terminal cover 50 is attached. On the other hand, the sealing member 53 is arranged at the other end side part in the axial direction of the cylindrical parts 58 , 58 .

The sealing member 53 seals between the main body 51 and the exposed portions 23 , 23 of the terminals 11A, 11B. The sealing member 53 can hermetically seal between the main body 51 and the exposed parts 23 , 23 , and can also provide a gap for promoting the flow of the inert gas in the heater terminal cover 50 . The sealing member 53 is a member having a heat-resistant temperature of 600° C. or higher, and is a flexible sheet made of ceramic cloth in this embodiment.

The sealing member 53 is provided along the outer surface of the second side wall 56 . A pair of through-hole portions 53 a, 53 a are formed in the sealing member 53 . The exposed portions 23 , 23 of the pair of terminals 11A, 11B penetrate through the pair of through-hole portions 53 a, 53 a, respectively. Preferably, each through-hole portion 53a is in contact with the outer peripheral surface of the corresponding exposed portion 23 , 23 over the entire area in the circumferential direction of the exposed portion 23 , 23 . The sealing member 53 is arranged between the second side wall 56 and the pressing member 54 .

The pressing member 54 is configured to install the sealing member 53 on the body 51 . The pressing member 54 presses the sealing member 53 to the body 51 . The pressing member 54 is formed of, for example, the same material as that of the main body 51 . In addition, the material of the pressing member 54 may be different from that of the main body 51 . The pressing member 54 is substantially a rigid plate. In the present embodiment, the pressing member 54 is formed in a rectangular plate shape. In addition, the pressing member 54 should just be a structure which can press the sealing member 53 against the 2nd side wall 56, and a specific shape is not limited.

Through-hole portions 54 a , 54 a are formed in the pressing member 54 . The through-holes 54 a , 54 a are provided as portions through which the exposed portions 23 , 23 of the pair of terminals 11A, 11B pass through, and are used to allow bending deformation of portions around the through-holes 53 a , 53 a in the sealing member 53 . The through-hole portions 54a, 54a are adjacent to the corresponding through-hole portions 53a, 53a, respectively, and are formed to have a diameter larger than that of the corresponding through-hole portions 53a, 53a.

A plurality of sealing and fixing members 65 are arranged on the outer peripheral portion of the pressing member 54 . The seal fixing member 65 is, for example, a screw member. In the present embodiment, the sealing and fixing members 65 are respectively arranged at the four corners of the pressing member 54 . Each sealing fixing member 65 penetrates the pressing member 54 and the sealing member 53 , and is screwed to the inner screw portion 56 c formed on the flange 56 b of the second side wall 56 . Thereby, the pressing member 54 attaches the sealing member 53 to the second side wall 56 of the main body 51 and is supported by the second side wall 56 .

In addition, a plurality of main body fixing members 66 are arranged on the outer peripheral portion of the pressing member 54 . The body fixing member 66 is, for example, a screw member. In the present embodiment, the main body fixing member 66 is arranged in a pair of upper and lower pairs at the center of the pressing member 54 in the left-right direction. Each main body fixing member 66 passes through the pressing member 54 , the sealing member 53 , and the flange 56 b of the second side wall 56 , and is screwed to, for example, a female screw portion formed on the heat insulator 2 . Thereby, the heater terminal cover 50 including the main body 51 , the sealing member 53 and the pressing member 54 is supported by the heat insulator 2 .

According to the above configuration, the inert gas in the chamber 59 is supplied to the inner spaces 64 , 64 corresponding to the insulators 52 , 52 through the nozzles 61 , 62 , and is discharged mainly toward the heat insulator 2 side.

As described above, according to this embodiment, by supplying the inert gas from the nozzles 61, 62 into the cylindrical portions 58, 58, the exposed portions 23, The gas environment around 23 is an inert gas environment. Thereby, occurrence of powdering phenomenon caused by oxidation of molybdenum disilicide can be suppressed. Moreover, since the inert gas is supplied to the narrow inner spaces 64, 64 surrounded by the cylindrical portions 58, 58, it is possible to more reliably treat the temperature range portion (exposed portion 23, which is easily oxidized) in the outer peripheral portion of the terminals 11A, 11B. , 23) Supply inert gas. Therefore, pulverization of the molybdenum disilicide heater 10 can be more reliably suppressed. In addition, since the narrow inner spaces 64 , 64 in the cylindrical portions 58 , 58 are only required to be in an inert gas atmosphere, it is possible to reduce the consumption of the inert gas.

In addition, according to the present embodiment, the inert gas from the port 60 enters between the outer peripheral wall portion 57 and the cylindrical portions 58 , 58 , and is supplied to the inner space 64 of the cylindrical portions 58 , 58 through the nozzles 61 , 62 . , 64. The space between the outer peripheral wall portion 57 and the cylindrical portions 58, 58 can function as a chamber space for the inert gas, so it can flow more stably from the nozzles 61, 62 to the inner spaces of the cylindrical portions 58, 58. 64, 64 supply inert gas.

In addition, according to the present embodiment, a plurality of nozzles 61, 62 are formed separately from each other along the circumferential direction of the corresponding cylindrical parts 58, 58, respectively. According to this configuration, the inert gas can be supplied more uniformly in the circumferential direction of the heater terminals 11A, 11B, and the inert gas is supplied from the nozzles 61 , 62 to the inner spaces 64 , 64 of the cylindrical portions 58 , 58 .

In addition, according to the present embodiment, the pair of cylindrical portions 58 are provided to surround the pair of terminals 11A, 11B, respectively, and the outer peripheral wall portion 57 surrounds the pair of cylindrical portions 58 , 58 . According to this configuration, one heater terminal cover 50 can be used to make the surroundings of the respective exposed portions 23 , 23 of the pair of terminals 11A, 11B an inert gas atmosphere.

In addition, according to the present embodiment, the sealing member 53 seals between the exposed portions 23 , 23 of the pair of terminals 11A, 11B and the main body 51 . According to this configuration, the intrusion of oxygen into the inner spaces 64 , 64 from the outside of the heater terminal cover 50 can be more reliably suppressed.

In addition, according to the present embodiment, the first side wall 55 , which is one end portion in the axial direction of the cylindrical portions 58 and 58 in the main body 51 , is arranged to face the heat insulator 2 on which the heater terminal cover 50 is attached, and the sealing member The reference numeral 53 is disposed on the other end side portion in the axial direction of the cylindrical portions 58 , 58 (the portion on the second side wall 56 side). According to this configuration, by arranging the sealing member 53 at a lower temperature part away from the high temperature part where the heater terminal cover 50 is mounted, the thermal load on the sealing member 53 can be reduced. In addition, the area between the cylindrical portions 58, 58 near the first side wall 55 and the corresponding exposed portions 23, 23 of the pair of terminals 11A, 11B is sealed by the heat insulator 2 to which the heater terminal cover 50 is attached. Inhibits the entry of oxygen.

In addition, according to the present embodiment, the main body 51 is formed of a conductive material, and the cylindrical insulators 52 , 52 are arranged radially inside the cylindrical portions 58 , 58 . According to this structure, the main body 51 can be formed with a high-strength material (stainless steel material in this embodiment), and the short circuit between the main body 51 and heater terminal 11A, 11B can be suppressed more reliably.

As mentioned above, although the embodiment of this invention was described, this invention is not limited to the said embodiment. Various modifications can be made to the present invention within the scope described in the claims.

(1) In the above-mentioned embodiment, an example in which one sealing member 53 is provided on the second side wall 56 side of the main body 51 has been described. However, it may not be the case. As shown in FIG. 6 , which is a sectional view of main parts of a modified example, the seal member 53 may be provided not only on the second side wall 56 side of the main body 51 but also on the first side wall 55 side. The sealing member 53 on the side of the first side wall 55 is sandwiched between the first side wall 55 and the heat insulator 2 , and the exposed portions 23 , 23 corresponding to the pair of terminals 11A, 11B penetrate through the pair of through holes 53 a, 53 a. According to this modified example, both axial ends of the inner spaces 64 , 64 of the insulators 52 , 52 can be closed by the pair of sealing members 53 , 53 . Accordingly, the amount of the inert gas in the inner spaces 64 , 64 of the insulators 52 , 52 leaking to the outside can be further reduced. Therefore, it can further reduce the consumption of inert gas.

(2) In the above-mentioned embodiment, the embodiment in which the heater terminal cover 50 is fixed to the heat insulator 2 has been described as an example. However, the member on which the heater terminal cover 50 is provided is not limited, and may be another member than the heat insulator 2 .

(3) In the above-mentioned embodiment, the example in which part of the exposed portions 23 , 23 of the pair of terminals 11A, 11B of the heater 10 are surrounded by the heater terminal cover 50 has been described. However, the heater terminal cover 50 may be configured as long as it surrounds at least part of the pair of terminals 11A, 11B of the heater 10 , and its specific configuration is not limited.

(4) In the above-mentioned embodiment, an example has been described in which the exposed portions 23 , 23 of the pair of terminals 11A, 11B are surrounded by one heater terminal cover 50 . However, a heater terminal cover may be provided for each terminal 11A, 11B. In this case, it is configured such that one heater terminal cover surrounds one terminal.

(5) In the above-mentioned embodiment, an embodiment in which the main body 51 is formed of a conductive material and the insulators 52, 52 are provided has been described as an example. However, it is also possible to omit the insulators 52 , 52 . When the insulators 52 and 52 are omitted, it is preferable that the main body 51 is made of an insulating material.

(6) In the above-mentioned embodiment, the mode in which the nozzle 61 is formed in each cylindrical portion 58 has been described as an example. However, the nozzle 61 may be formed outside the cylindrical portion 58 as long as the inert gas can be supplied to the inner space 64 of each cylindrical portion 58 . The nozzle 61 may be formed by, for example, a pipe extending from the second side wall 56 and opening in the inner spaces 64 , 64 , and its specific shape is not limited. (industrial availability)

The present invention is applicable to a heater terminal cover, a heater unit, and a heat treatment device.

1: Heat treatment device 2: Insulator 2a: space 2b: Through hole part 2c: Outer wall 2d: Inner wall surface 3: Heater unit 4: Fittings 5: Heat treatment chamber 6: crystal boat 10: heater 11A, 11B: terminals 12: Main body 13: Metal Department 14:Heating Department 16: Connecting part 17: Bending part 18: Extension 21: Extension body 22: Terminal end 23: exposed part 24: bus bar 25: cover 50: Heater terminal cover 51: Ontology 52: Insulator 53: sealing member 53a: Through hole portion 54: Press member 54a: Through hole portion 55: 1st side wall 55a: Through hole portion 56: Second side wall 56a: Through hole portion 56b: Flange 56c: Internal screw part 57: Peripheral wall 58: Cylindrical part 59: chamber 60: port 61: Nozzle 62: Nozzle 63: Inert gas supply pipe 64: inner space 65: sealing and fixing components 66: body fixing member 100: processed object D1, D2: distance F: arrow

Fig. 1 is a schematic sectional view of main parts of a heat treatment apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view schematically showing a main part of a heater unit of a heat treatment apparatus. Fig. 3 is an enlarged view showing a main part of the heater unit of Fig. 1 . Fig. 4 is a sectional view taken along line IV-IV of Fig. 3 . Fig. 5 is a cross-sectional view along line V-V of Fig. 3 . Fig. 6 is a sectional view of main parts of a modified example.

3: Heater unit

10: heater

11A, 11B: terminals

18: Extension

21: Extension body

23: exposed part

50: Heater terminal cover

51: Ontology

52: Insulator

55: 1st side wall

57: Peripheral wall

58: Cylindrical part

59: chamber

60: port

61: Nozzle

62: Nozzle

63: Inert gas supply pipe

64: inner space

D1, D2: distance

F: arrow

Claims (9)

A heater terminal cover covering at least a part of the terminals of a heater including a terminal formed of a material containing molybdenum; The heater terminal cover features: a body having a cylindrical portion configured to surround the outer peripheral portion of the terminal; and The nozzle is formed on the above-mentioned main body, and is used for supplying inert gas into the above-mentioned cylindrical part. The heater terminal cover as claimed in claim 1, wherein, The above ontology contains: The above-mentioned cylindrical portion formed with the above-mentioned nozzle; an outer peripheral wall portion disposed so as to surround the outer peripheral portion of the cylindrical portion; and A port for supplying the inert gas between the outer peripheral wall portion and the cylindrical portion. Such as the heater terminal cover of claim 2, wherein, A plurality of the nozzles are formed separately from each other along the circumferential direction of the cylindrical portion. Such as the heater terminal cover of claim 2, wherein, A pair of the above-mentioned cylindrical parts are provided so as to respectively surround a pair of the above-mentioned terminals, The said outer peripheral wall part surrounds a pair of said cylindrical parts. The heater terminal cover as claimed in claim 1, wherein, It further includes a sealing member that seals between the body and the terminal. Such as the heater terminal cover of claim 5, wherein, One axial end side of the cylindrical portion in the body is configured to face a member to which the heater terminal cover is attached, The sealing member is arranged at the other end side in the axial direction of the cylindrical portion. The heater terminal cover as claimed in claim 1, wherein, The above-mentioned system is formed by using conductive materials, A cylindrical insulator is disposed radially inside the cylindrical portion. A heater unit having: a heater comprising terminals formed from a material containing molybdenum; and The heater terminal cover according to any one of claims 1 to 7, which covers at least a part of the terminal. A kind of heat treatment device, it has: a heat treatment chamber, which is used for heat treatment of the object to be treated; and The heater unit described in claim 8 is used for heating the gas environment in the heat treatment chamber.

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