TW202305197A - Crucible and single crystal furnace - Google Patents

Abstract

The invention relates to a crucible and a single crystal furnace, the crucible is applied in the single crystal furnace, the crucible comprises a crucible main body, a heating structure is arranged outside the crucible main body in a surrounding manner, the heating structure is connected with the crucible main body through an insulating heat conduction layer, and the heating structure is covered with a heat insulation protection cover. And a sealed space for accommodating the heating structure is defined by the heat insulation protection cover and the crucible main body.

Description

Crucibles and Single Crystal Furnaces

The invention belongs to the technical field of silicon product production, in particular to a crucible and a single crystal furnace.

The production of single crystal silicon by the Czochralski method is currently the most important method for preparing single crystal silicon. The thermal field system is one of the most important conditions for the crystallization of silicon materials. The temperature gradient distribution of the thermal field directly affects whether the single crystal can be pulled out smoothly. Crystal and control the quality of single crystal, especially in the process of growing single crystal silicon material through the Czochralski method single crystal furnace, the graphite thermal field is usually used to provide growth temperature, gradient control, etc. In the specific process, the polycrystalline raw material is melted in a low vacuum and accompanied by an inert gas environment, and the single crystal material is prepared by contacting the seed crystal and rotating and lifting, and the heat source mainly comes from the graphite heater. In the traditional thermal field structure, the heater is generally a fixed heater located on the outer periphery of the crucible. The heater generates heat energy to heat the crucible and the internal silicon material in the form of radiation. This heating method is indirect heating, and the heating efficiency is low.

In order to solve the above technical problems, the present invention provides a crucible and a single crystal furnace to solve the problem of low heating efficiency.

In order to achieve the above purpose, the technical solution adopted in the embodiment of the present invention is: a crucible, which is applied in a single crystal furnace, includes a crucible body, a heating structure is arranged around the outside of the crucible body, and the heating structure is connected to the The crucible main body is connected, and the outer cover of the heating structure is provided with a heat-insulating protective cover, and the heat-insulating protective cover and the crucible main body are enclosed to form a sealed space for accommodating the heating structure.

Optionally, the crucible body includes a plurality of petals, each of which is provided with the heating structure.

Optionally, the bottom of the crucible body is supported by a supporting structure, the heat insulation protection cover includes a top wall and a side wall, the part of the top wall away from the side wall overlaps with the top of the crucible body, and the side wall surrounds the crucible around; The heat insulation protective cover also includes a bottom wall connected to the bottom of the crucible body, or connected to the supporting structure, or connected to the bottom of the furnace body of the single crystal furnace.

Optionally, a groove is provided on the inner surface of the side wall close to the crucible body, and the heating structure is embedded in the groove.

Optionally, the heating structure includes strip structures longitudinally distributed in a zigzag shape, and the starting end and the ending end of the heating structure are both located at the bottom of the crucible main body.

Optionally, patterned protrusions are provided on the outer wall of the crucible body to form a zigzag groove, and the heating structure is accommodated in the groove to form the same pattern as the groove.

Optionally, the heating structure includes: a first line segment extending from the bottom of the crucible body to the top of the crucible body; A plurality of sets of branch line segments distributed along the extension direction of the first line segment, the first end of the branch line segment is connected to the first line segment, and the second end of the branch line segment extends along the circumference of the crucible body and bends multiple times Fold to form an S shape; A second line segment, the second line segment is parallel to the first line segment, and one end of the second line segment is correspondingly connected to the second end of each branch line segment, and the other end extends to the bottom of the crucible main body.

Optionally, the bottom of the crucible body is supported by a support structure, the support structure includes a support shaft and a support tray, the side of the support tray connected to the crucible body has a groove, and the bottom of the crucible body has a of the bulge.

An embodiment of the present invention also provides a single crystal furnace, including a furnace body, and the above-mentioned crucible.

The beneficial effect of the present invention is that: the heating structure is connected to the crucible main body through the insulating and heat-conducting layer, and is heated through heat conduction between the fixings, thereby improving the heating efficiency.

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

It is to be understood that the terms "length", "width", "top", "bottom", "front", "rear", "left", "right", "vertical", "horizontal", "top" , "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying No device or element must have a specific orientation, be constructed, and operate in a specific orientation and therefore should not be construed as limiting the invention.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of said features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components or the interaction relationship between two components. Those with ordinary knowledge in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

Referring to Fig. 1 and Fig. 2, in the related art, in the related art, the single crystal furnace includes a furnace body 5, and a crucible (the crucible includes a quartz crucible 3 and a graphite crucible 9) is arranged in the furnace body 5, and the crucible is supported by a support structure 10, heated The device 8 is generally fixed on the outer periphery of the crucible. There is a certain distance between the heater 8 and the crucible. The heater generates heat energy to heat the crucible and the internal silicon material in the form of radiation. This heating method is indirect heating. , low heating efficiency.

Referring to Fig. 2-Fig. 5, in view of the above problems, this embodiment provides a crucible, which is applied in a single crystal furnace, including a crucible main body, and a heating structure 101 is arranged on the outside of the crucible main body, and the heating structure 101 is passed through an insulating and heat-conducting layer Connected with the crucible main body, the outer cover of the heating structure 101 is provided with a heat-insulating protection cover 102 , and the heat-insulating protection cover 102 and the crucible main body form a sealed space for accommodating the heating structure 101 .

The crucible body is surrounded by a heating structure 101, and the heating structure 101 is connected to the crucible body through an insulating and heat-conducting layer, that is, the insulating and heat-conducting layer is in direct contact with the crucible body, and the heating structure 101 is in direct contact with the insulating and heat-conducting layer. , that is, the main body of the crucible, the insulating heat-conducting layer, and the heating structure 101 are in direct contact with each other. Compared with the structure in Figure 1, such a structural connection directly changes the heat transfer of the traditional thermal field structure in the actual application process Method: Transform from heat radiation to heat conduction between solids, which greatly improves the thermal efficiency of the thermal field and equipment, and reduces heat loss; and the heat insulation protective cover 102 located outside the heating structure 101 can cover the heating structure 101 as a whole, On the one hand, it can prevent oxides generated during the manufacturing process from being deposited on the surface of the heating body, affecting the heating effect; on the other hand, it can also reduce the external heat radiation of the heating structure 101, maintain stable heating, and reduce power consumption.

Exemplarily, the insulating and heat-conducting layer is made of materials such as graphite or ceramics.

Exemplarily, the thickness of the crucible body is 1-2 cm, but not limited thereto.

In an exemplary embodiment, the crucible body includes a plurality of petals, each of which is provided with the heating structure 101 .

In an exemplary embodiment, the bottom of the crucible body is supported by the support structure 2, the heat insulation protection cover 102 includes a top wall and a side wall, the part of the top wall away from the side wall overlaps with the top of the crucible body, and the side wall surrounds the crucible; The heat insulation protection cover 102 also includes a bottom wall, which is connected to the bottom of the crucible body, or the bottom wall is connected to the supporting structure 2 , or the bottom wall is connected to the bottom of the furnace body of the single crystal furnace.

In an exemplary embodiment, a groove is provided on the inner surface of the side wall close to the main body of the crucible, and the heating structure 101 is embedded in the groove.

In an exemplary embodiment, the heating structure 101 includes strip structures longitudinally distributed in a zigzag shape, and the starting end and the ending end of the heating structure 101 are located at the bottom of the crucible body.

In an exemplary embodiment, patterned protrusions are provided on the outer wall of the crucible body to form a broken-line groove, and the heating structure 101 is accommodated in the groove to form the same pattern as the groove .

In an exemplary embodiment, the heating structure 101 includes: a first line segment 1011 extending from the bottom of the crucible body to the top of the crucible body; A plurality of sets of branch line segments 1012 distributed along the extension direction of the first line segment 1011, the first end of the branch line segment 1012 is connected to the first line segment 1011, and the second end of the branch line segment 1012 is along the circumference of the crucible body Extend and bend multiple times to form an S shape; The second line segment 1013, the second line segment 1013 is parallel to the first line segment 1011, and one end of the second line segment 1013 is correspondingly connected to the second end of each branch line segment 1012, and the other end extends to the bottom of the crucible main body .

Exemplarily, the branch line segment 1012 starts from the first side of the first line segment 1011 and extends along the circumferential direction of the crucible body to the other side of the first line segment 1011 opposite to the first side, Then it is reversely bent to form the branch line segment 1012 after at least one bending.

Exemplarily, the heating structure 101 may include a plurality of heating parts distributed along the circumference of the crucible body, and each heating part includes: a first line segment 1011 extending from the bottom of the crucible body to the top of the crucible body; A plurality of sets of branch line segments 1012 distributed along the extension direction of the first line segment 1011, the first end of the branch line segment 1012 is connected to the first line segment 1011, and the second end of the branch line segment 1012 is along the circumference of the crucible body Extend and bend multiple times to form an S shape; The second line segment 1013, the second line segment 1013 is parallel to the first line segment 1011, and one end of the second line segment 1013 is correspondingly connected to the second end of each branch line segment 1012, and the other end extends to the bottom of the crucible main body .

Exemplarily, the crucible body includes a plurality of petals, each petal is provided with the heating structure 101, each petal includes two opposite sides, and the branch line 1012 repeatedly bends between the two sides. Fold extension settings.

In an exemplary embodiment, the branch line segment includes a plurality of sub-line segments extending along the circumferential direction of the crucible main body, and the distance between two adjacent sub-line segments in the same branch line segment is equal.

Exemplarily, the distances between two adjacent sub-line segments in different branch line segments are equal.

Exemplarily, in the radial direction of the crucible body, the thickness of the heating structure is 2-3 cm, but not limited thereto.

In an exemplary embodiment, the bottom of the crucible body is supported by a support structure 2, the support structure 2 includes a support shaft and a support tray, the side of the support tray connected to the crucible body has a groove, and the bottom of the crucible body has a The groove matches the protrusion.

An embodiment of the present invention also provides a single crystal furnace, including a furnace body, and the above-mentioned crucible.

During the actual manufacturing process, the crucible is rotated. In order to ensure the energized state of the heating structure 101 during the rotation, the single crystal furnace also includes a ring electrode connected to the lead-out electrode of the heating part. The lead-out electrode and the The ring electrodes are connected by a conductive piece, the conductive piece is arranged on the support structure 2, and one end of the conductive piece passes through the support tray and the lead-out electrode of the heating structure 101 (the first line segment 1011 is located at the bottom of the crucible One end of the conductive member and one end of the second line segment 1013 at the bottom of the crucible are both provided with an extraction electrode) to connect, and the other end of the conductive member is connected to the ring electrode and can rotate along the ring electrode.

The support shaft is surrounded by an annular housing, and the inner wall of the annular housing is protruded with an annular protrusion surrounding the support shaft. The annular protrusion forms the annular electrode, and the number of annular electrodes is the same as that of the lead-out electrode. Corresponding to the number, the outer wall of the annular housing is provided with external electrodes connected to the annular electrodes in one-to-one correspondence.

Exemplarily, the support tray is provided with a threaded mounting hole, one end of the conductive member is provided with a bolt electrode connected to the corresponding lead-out electrode, and the other end of the conductive member is provided with a connecting protrusion connected to the ring electrode. In the radial direction of the annular housing, the width of the connecting surface of the connecting protrusion is less than or equal to the width of the connecting surface of the annular housing, and in the axial direction of the annular housing, the thickness of the connecting protrusion is less than The distance between two adjacent ring-shaped protrusions can avoid short circuit.

The single crystal furnace includes a furnace body 5, and a crucible (including a graphite crucible 1 and a quartz crucible 3) is arranged in the furnace body 5, and a silicon melt 6 and a crystal rod 7 are contained in the crucible, and the outside of the crucible is covered with a heating structure 101 , the outer cover of the heating structure 101 is provided with a heat insulating protective cover 102 , and the inner part of the furnace body 5 is also provided with a thermal insulation layer 4 .

Embodiments of the present invention have been described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementations, and the above-mentioned specific implementations are only illustrative, rather than restrictive, and those with ordinary knowledge in the art Under the enlightenment of the present invention, many forms can also be made without departing from the gist of the present invention and the protection scope of the claims, all of which belong to the protection of the present invention.

1: Graphite crucible 101: Heating structure 1011: the first line segment 1012: branch segment 1013: the second line segment 102: heat shield 2: Support structure 3: Quartz crucible 4: Insulation layer 5: furnace body 6: Silicon melt 7: Ingot 8: Heater 9: Graphite crucible 10: Support structure

Fig. 1 shows the structural representation of the single crystal furnace in the related art; Fig. 2 shows the structural representation of the single crystal furnace in the embodiment of the present invention; Fig. 3 shows the structural schematic diagram 1 of the crucible in the embodiment of the present invention; Fig. 4 shows the structural schematic diagram II of the crucible in the embodiment of the present invention; Fig. 5 shows a schematic structural view of the heating structure in the embodiment of the present invention.

1: Graphite crucible

101: Heating structure

102: heat shield

2: Support structure

3: Quartz crucible

4: Insulation layer

5: furnace body

6: Silicon melt

7: Ingot

Claims (9)

A crucible is used in a single crystal furnace. The crucible includes a crucible main body, and a heating structure is arranged on the outside of the crucible main body, and the heating structure is connected to the crucible main body through an insulating and heat-conducting layer. a heat protection cover, and the heat insulation protection cover and the crucible main body are enclosed to form a sealed space for accommodating the heating structure. The crucible according to claim 1, wherein the crucible main body includes a plurality of petals, each of which is provided with the heating structure. The crucible according to claim 1, wherein the bottom of the crucible main body is supported by a supporting structure, the heat insulation protection cover includes a top wall and a side wall, the part of the top wall away from the side wall overlaps with the top of the crucible main body, the side walls surround the crucible; The heat insulation protective cover also includes a bottom wall connected to the bottom of the crucible body, or connected to the supporting structure, or connected to the bottom of the furnace body of the single crystal furnace. The crucible according to claim 3, wherein a groove is provided on the inner surface of the side wall close to the main body of the crucible, and the heating structure is embedded in the groove. The crucible as claimed in item 1, wherein the heating structure comprises strip structures longitudinally distributed in a zigzag shape, and the starting end and the ending end of the heating structure are both located at the bottom of the crucible body. The crucible according to claim 5, wherein patterned protrusions are provided on the outer wall of the crucible body to form a broken-line groove, and the heating structure is accommodated in the groove to form the same pattern as the groove picture of. The crucible as claimed in item 6, wherein the heating structure comprises: a first line segment extending from the bottom of the crucible body to the top of the crucible body; A plurality of sets of branch line segments distributed along the extension direction of the first line segment, the first end of the branch line segment is connected to the first line segment, and the second end of the branch line segment extends along the circumference of the crucible body and bends multiple times Fold to form an S shape; A second line segment, the second line segment is parallel to the first line segment, and one end of the second line segment is correspondingly connected to the second end of each branch line segment, and the other end extends to the bottom of the crucible main body. The crucible according to claim 1, wherein the bottom of the crucible body is supported by a support structure, the support structure includes a support shaft and a support tray, the side of the support tray connected to the crucible body has a groove, and the bottom of the crucible body There is a protrusion that fits into the groove. A single crystal furnace, comprising a furnace body, and the crucible according to any one of Claims 1 to 8.

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