TW202302425A - Substrate container system - Google Patents

Abstract

A substrate container including a container body, a filter member, a back cover is provided. The container body having a top face, a bottom face opposing the top face, a back plate of a first height connecting the top face and the bottom face, a front opening located between the top face and the bottom face, and a back opening opposing the front opening. The front opening enables passage of a substrate and the back opening is located on the back plate and has a smaller second height. The filter member covers the back opening. The back cover establishes sealing engagement with the container body. A gas guiding channel extending in a direction of the first height is formed between the back cover and the container body. The back cover and the filter member define a buffering compartment, and the gas guiding channel has an outlet connecting the buffering compartment.

Description

Substrate Container System

The present invention relates to a transportable container for protecting fragile items such as wafers from environmental contamination during storage, shipping and transportation, and more particularly to a system capable of dispensing purging gas within the container system container system.

In modern semiconductor manufacturing, delicate workpieces (eg, wafers, reticles/masks) undergo multiple processes in multiple process tools before they can be made into integrated circuits. Wafers are typically transported or transported from the facility where the wafers are fabricated to another location where the wafers are further processed. The movement of such delicate devices is usually accomplished with dedicated substrate containers (e.g., front opening unified pod, FOUP).

FOUPs are typically used to accommodate 300mm or 450mm wafers between multiple process stations. Conventionally, a FOUP has an enclosure defining an open interior space, and within the enclosure are a plurality of racks for holding a plurality of spaced apart wafers. Also, the housing defines a front opening that may be covered by a front door member that incorporates a sealing member and a latch mechanism to establish an air-tight engagement between the door and the housing.

Ideally, environmental contaminants (eg, air/dust/moisture) that intrude into the substrate container need to be managed during loading or unloading of substrates (eg, when the front door is removed and the interior is exposed). Even if the surrounding environment is a clean room, the intrusion of environmental contaminants into the container can adversely affect the throughput of the substrates disposed therein. To this end, purge equipment is incorporated into the carrier cassette system to support the purging process during loading/unloading of the cassettes.

In view of this, the present invention proposes a substrate container system, which utilizes the method of forming a rear opening with a height smaller than the back plate on the back plate of the container body, and covering the filter assembly at the rear opening, so that the filter assembly can provide purification in a non-solid manner. gas.

According to one aspect of the present invention, a substrate container system is provided, including a container body, a filter assembly, and a rear cover. The container body includes a top surface, a bottom surface opposite to the top surface, and a back plate connecting the top surface and the bottom surface. The container main body has a front opening and a rear opening. The front opening is located between the top surface and the bottom surface for a substrate to pass through. The rear opening is located on the back plate and is opposite to the front opening. Wherein, the back plate has a first height, and the rear opening has a second height smaller than the first height. The filter assembly covers the rear opening. The back cover is used to establish a sealing connection with the container main body, and an air guide channel is formed between the back cover and the container main body, extending along the direction of the first height. The rear cover and the filter assembly jointly define a buffer chamber, and the air guide channel has an outlet connected to the buffer chamber.

In one embodiment, the second height is about 10% to about 90% of the first height.

In a further embodiment, the second height is about 10% to about 50% of the first height, and the rear opening is located adjacent to the top surface.

In one embodiment, the filter element has a gas release surface whose area is larger than that of the rear opening, and the gas release surface has a plane parallel to the back plate.

In yet another embodiment, the filter element has a gas releasing surface, the area of which is larger than that of the rear opening, and the gas releasing surface has a plane with an acute angle with the back plate.

In another embodiment, the filter element has a gas releasing surface, the area of which is larger than that of the rear opening, and the gas releasing surface has a corrugated surface.

In yet another embodiment, the filter element has a gas release surface with an area larger than that of the rear opening, and the gas release surface extends through the rear opening toward the main body of the container to form a curved profile.

In yet another embodiment, the filter element has a gas release surface whose area is larger than that of the rear opening, and the gas release surface extends toward the rear cover through the rear opening to form a curved profile.

In one embodiment, the rear cover has a plurality of ribs protruding toward the main body of the container for abutting against the filter assembly, the ribs are arranged at intervals to form a plurality of grooves therein, and the outlet of the air guide channel is at least Includes grooves.

In one embodiment, the back cover includes an air intake structure curvedly extending below the bottom surface of the container body, and the air intake structure includes an air intake port opposite to the bottom surface and facing downwards, so as to be connected to an external purification device. The substrate container system further includes a gas valve assembly for passing a purge gas. Wherein, the air intake port has a connection structure, and the air valve assembly is connected to the air intake port through the connection structure. The air valve assembly includes an air valve main body and a first elastic material. The first elastic material is arranged on one side of the air valve main body and has a wing. When the air valve assembly is assembled in the connection structure, the tabs are deformed to establish a sealing engagement with the connection structure. The air valve assembly further includes a second elastic material disposed on the other side of the main body of the air valve. The second elastic material has an abutment surface for the external purification equipment to be abutted to form a sealed joint.

In one embodiment, the substrate container system further includes a sealing member having a first sealing ring part and a second sealing ring part, the first sealing ring part is arranged between the back cover and the container main body, and the second sealing ring is arranged Between the filter component and the container body.

In the substrate container system of the embodiment of the present invention, the back plate has a first height, and the rear opening has a second height smaller than the first height, and the filter assembly is arranged at the rear opening, so that the filter assembly can provide the purified gas in a non-uniform manner, so that The internal space of the container body has different purification gas flow rates in the height direction, which can prevent the air outside the door from entering the container body with pollutants such as dust, particles, or moisture during loading or unloading of the substrate, maintaining cleanliness and slowing down Humidity picks up.

This ROC invention patent application claims the international priority of the U.S. patent application No. 17/363,328 titled "SUBSTRATE CONTAINER SYSTEM" filed on June 30, 2021, which was filed on May 12, 2020 Continuation-In-Part of US Application Serial No. 16/872,392, the contents of which are incorporated herein by reference and made a part of this specification.

Hereinafter, the disclosure of the present invention will be described in more detail with reference to the accompanying drawings and supplemented by description. The drawings show exemplary embodiments of the invention and are not intended to limit the invention; indeed, the invention may be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Example. These exemplary embodiments are provided so that the description of the present invention will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art.

In the detailed description of the embodiments, the same reference numerals in the drawings represent the same or similar elements. The terms used in the specification are for the purpose of describing specific exemplary embodiments only, and are not intended to limit the present invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. In addition, when used herein, the scope covered by "comprising", "including" and "having" does not exclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components and/or or groups.

In the substrate container system of the embodiment of the present invention, there is a rear opening on the back plate of the container body, and the rear opening provides the purge gas in a non-full surface, so that the internal space of the container body has different flow rates of the purge gas in the height direction, which can avoid the outside of the door. Gas carries contaminants such as dust, particulates or moisture into the container body to maintain cleanliness and slow humidity rise. The substrate container system according to the embodiment of the present invention will be described in detail below with reference to FIGS. 1 to 25 . In the drawings of the embodiments of the present invention, some elements or structures of the exemplary substrate container system are not shown in the drawings to clearly show the features of the present invention.

Please refer to FIG. 1 and FIG. 2 at the same time. FIG. 1 shows a three-dimensional exploded view of a substrate container system according to an embodiment of the present invention, and FIG. 2 shows a perspective view of the container body in FIG. 1 . The substrate container system 2000 of this embodiment includes a container body 2100 , a filter assembly 2300 and a rear cover 2500 . The substrate container system 2000 is, for example, a front opening unified pod (FOUP). The container body 2100 of this embodiment includes a top surface 2110 , a bottom surface 2130 opposite to the top surface 2110 , and a back plate 2150 connecting the top surface 2110 and the bottom surface 2130 . The container body 2100 has a front opening 2100a and a rear opening 2100b. The front opening 2100a is located between the top surface 2110 and the bottom surface 2130 for passing a substrate. The substrate container system 2000 further includes a front door (not shown in the drawings). The front door includes a latch mechanism and an airtight component. When the front door covers the front opening 2100a and is locked with the container body 2100, the front door and the container body 2100 Form an airtight internal space for carrying wafers, masks or other substrates with high cleanliness requirements.

In this embodiment, the container body 2100 is integrally formed of plastic, and further includes two sidewalls 2170 connected between the top surface 2110 and the bottom surface 2130 , and the two sidewalls 2170 are respectively located on opposite sides of the back plate 2150 . Overall, the container body 2100 forms a box through the top surface 2110 , the bottom surface 2130 , the side walls 2170 and the back plate 2150 for accommodating the substrate. The front opening 2100a is surrounded by the top surface 2110, the bottom surface 2130, and the two side walls 2170, and its width and height are larger than the rear opening 2100b.

Please refer to FIG. 3 and FIG. 4 at the same time. FIG. 3 is a schematic diagram of the container body 2100 in FIG. 2 , and FIG. 4 is a cross-sectional view of the container body 2100 along the section P1 in FIG. 3 . The rear opening 2100b is located on the back plate 2150, opposite to the front opening 2100a, wherein the back plate 2150 has a first height H1, and the rear opening 2100b has a second height H2 smaller than the first height H1. The distance between the top surface 2110 and the bottom surface 2130 gradually decreases from the front opening 2100 a to the rear opening 2100 b until reaching the position of the back plate 2150 . The back plate 2150 is connected to the top surface 2110 and the bottom surface 2130, and the first height H1 of the back plate 2150 is substantially equal to the height of the container body 2100 here. The second height H2 of the rear opening 2100b is smaller than the first height H1 of the back panel 2150, which means that the rear opening 2100b does not occupy the entire back panel 2150, and the rear opening 2100b is formed in a non-uniform manner.

According to the foregoing, the second height H2 of the rear opening 2100b is smaller than the first height H1 of the back plate 2150. In one embodiment, the second height H2 is about 10% to about 90% of the first height H1; in a further implementation In an example, the second height H2 is about 10% to about 50% of the first height H1, and the rear opening 2100b is located adjacent to the top surface 2110 .

Please refer to FIG. 5 , which shows a rear view of the container body in FIG. 3 . In the embodiment shown in FIG. 5 , the second height H2 is about 40% of the first height H1, and the rear opening 2100b is located adjacent to the top surface 2110 , that is, the rear opening 2100b is close to the upper position of the top surface 2110 in height.

Please refer to FIG. 6 , which shows a rear view of a container body according to another embodiment of the present invention. In the embodiment of FIG. 6 , the second height H2(i) is about 90% of the first height H1(i), and the rear opening 2100b(i) is located adjacent to the top surface 2110(i).

Please refer to FIG. 7 , which shows a rear view of a container body according to another embodiment of the present invention. In the embodiment of FIG. 7 , the second height H2(ii) is about 10% of the first height H1(ii), and the rear opening 2100b(ii) is located adjacent to the top surface 2110(ii).

Please refer to FIG. 8 , which shows a rear view of a container body according to another embodiment of the present invention. In the embodiment of FIG. 8 , the second height H2(iii) is about 50% of the first height H1(iii), and the rear opening 2100b(iii) is located adjacent to the top surface 2110(iii).

Please refer to FIG. 9 , which shows a rear view of a container body according to another embodiment of the present invention. In the embodiment of FIG. 9 , the second height H2(iv) is about 20% of the first height H1(iv), and the rear opening 2100b(iv) has a certain distance from the top surface 2110(iv).

The foregoing embodiments of various first heights H1(i)~H1(iv) and second heights H2(i)~H2(iv) are not intended to limit the present invention, as long as the second height H2 is equal to the first height H1 About 10% to about 90% all belong to the scope of the present invention. In addition, the rear opening 2100b is preferably located above and adjacent to the top surface 2110 in the height direction, so that when the purge gas is provided, the purge gas has different flow rates at different heights, which will be described later.

Please refer to FIG. 10 to FIG. 12 at the same time. FIG. 10 shows a schematic diagram of the substrate container system in FIG. 1 before assembly, and FIG. Schematic of the assembled substrate container system. In the substrate container system 2000 of this embodiment, the filter assembly 2300 covers the rear opening 2100b. The back cover 2500 is used to establish a sealing connection with the container body 2100, and an air guide channel 2140 is formed between the back cover 2500 and the container body 2100, extending along the direction of the first height H1. The rear cover 2500 and the filter assembly 2300 jointly define a buffer chamber 2340 , and the air guide channel 2140 has an outlet 2140 a connected to the buffer chamber 2340 .

After the substrate container system 2000 is supplied with the purge gas, the purge gas enters the gas guide channel 2140 from the bottom, then diffuses upward along the direction of the first height H1, and enters the buffer chamber 2340 through the outlet 2140a. The filter assembly 2300 is made of a porous material, such as integrally formed of a porous sintered material, which may include, but is not limited to, ceramic materials and polymer-based materials. When the purified gas enters the buffer chamber 2340 and accumulates to a designed pressure threshold (or called saturation pressure), the purified gas will pass through the filter assembly 2300 uniformly and keep the pressure stable during the purification operation.

The filter assembly 2300 is preferably substantially a flat plate structure, which has a gas release surface 2310 facing the inner space of the container body 2100 . Due to the design of the filter assembly 2300 with a flat structure, compared with other known types of filter assemblies (such as columnar gas diffusion towers), under the same gas release area, the filter assembly 2300 with a flat structure has a smaller internal space. Large ventilation space (comparatively speaking, the internal ventilation space of the columnar gas diffusion tower is relatively small), and the gas release surface 2310 of the filter assembly 2300 with a flat structure is to diffuse the purified gas fully towards the internal space of the container body 2100 (Comparatively speaking, the gas release surface of the columnar gas diffusion tower partly reveals the purified gas toward the rear of the container), which helps to improve the purification efficiency.

Please refer to FIG. 1 , FIG. 13 a and FIG. 13 b at the same time. FIG. 13 a and FIG. 13 b are respectively a perspective view and a side view of the filter assembly in FIG. 1 . The area of the gas release surface 2310 of the filter element 2300 is larger than the area of the rear opening 2100b. The cleaning gas permeates uniformly and stably through the gas release surface 2310 , so as to enter the inner space of the container body 2100 to clean the substrate. In this embodiment, the gas release surface 2310 has a corrugated surface, and the gas release surface is in a concave-convex state. During assembly, the gas release surface 2310 extends into the container body 2100 through the rear opening 2100b (such as extending into the container body 2100 along the extension direction D shown in FIG. 1 and FIG. 10 ), which can increase the gas release surface 2310. The area helps to improve the purification efficiency.

Please refer to FIG. 14a to FIG. 14c at the same time. FIG. 14a and FIG. 14b respectively show a perspective view and a side view of another embodiment of the filter assembly, and FIG. 14c shows a schematic diagram of the filter assembly and the back plate of FIG. 14b. The area of the gas release surface 2310(i) of the filter element 2300(i) is larger than the area of the rear opening 2100b. The cleaning gas penetrates uniformly and stably through the gas releasing surface 2310(i), and thus enters the inner space of the container body 2100 to perform cleaning operation on the substrate. In this embodiment, the gas release surface 2310(i) has a plane parallel to the back plate 2150, which is helpful for the uniformity of the purification gas passing through. During assembly, the gas release surface 2310(i) extends into the interior of the container body 2100 through the rear opening 2100b (such as extending into the interior of the container body 2100 along the extension direction D shown in FIGS. 1 and 10 ), which facilitates purification. Efficiency improvement.

Please refer to FIG. 14d , which shows a schematic view of another embodiment of the filter element and the back plate of FIG. 14c. In various embodiments, the gas release surface 2310(i)' of the filter assembly 2300(i)' has a plane forming an acute angle with the back plate 2150. In such embodiments, the plane is not parallel to the back plate 2150 and can be selectively sloped towards the top surface 2110 or the bottom surface 2130 of the container body 2100 to adjust the angle at which gas escapes from the gas release surface 2310(i)'. The angle between the plane and the back plate 2150 mentioned here can be adjusted and designed according to the requirements or specifications of the product.

Please refer to FIG. 15a and FIG. 15b at the same time, which respectively show a perspective view and a side view of a filter assembly in another embodiment. The area of the gas release surface 2310(ii) of the filter element 2300(ii) is larger than the area of the rear opening 2100b. The cleaning gas penetrates uniformly and stably through the gas release surface 2310(ii), and thus enters the inner space of the container body 2100 to perform cleaning operations on the substrate. In this embodiment, the gas release surface 2310(ii) extends toward the rear cover 2500 through the rear opening 2100b (such as along the direction opposite to the extending direction D shown in FIG. 1 and FIG. 10 ), forming a curved contour, thereby forming a concave state , the area of the gas release surface 2310(ii) can be increased, which helps to improve the purification efficiency.

Please refer to FIG. 16a and FIG. 16b at the same time, which respectively show a perspective view and a side view of a filter assembly according to another embodiment. The area of the gas release surface 2310(iii) of the filter element 2300(iii) is larger than the area of the rear opening 2100b. The cleaning gas penetrates uniformly and stably through the gas release surface 2310(iii), and enters the inner space of the container body 2100 to perform cleaning operations on the substrate. In this embodiment, the gas release surface 2310(iii) extends toward the container body 2100 through the rear opening 2100b (such as extending along the extension direction D shown in FIG. 1 and FIG. 10 ), forming a curved contour, thereby forming a convex state, which can Increasing the area of the gas release surface 2310(iii) helps to improve the purification efficiency.

Then please refer to Fig. 17 to Fig. 19 at the same time, Fig. 17 depicts the schematic diagram of the rear cover, filter assembly and sealing member of Fig. 1 before assembly, Fig. 18 depicts the schematic diagram of the rear cover, filter assembly and sealing member of Fig. 1 after assembly, FIG. 19 is a perspective sectional view along the section P2 in FIG. 18 . In this embodiment, the rear cover 2500 has a plurality of ribs 2510 that protrude toward the container body 2100 (such as protruding along the extending direction D shown in FIG. 1 and FIG. 10 ), for abutting against the filter assembly 2300. The ribs 2510 are arranged at intervals to form a plurality of grooves 2510a therein, and the outlet 2140a of the air guide channel 2140 at least includes these grooves 2150a.

Please refer to FIG. 1 , FIG. 10 and FIG. 17 to FIG. 19 . The substrate container system 2000 further includes a sealing member 2700, which has a first sealing ring part 2710 and a second sealing ring part 2720, the first sealing ring part 2710 is arranged between the rear cover 2500 and the container body 2100, and the second sealing ring Portion 2720 is disposed between filter assembly 2300 and container body 2100 . The rear cover 2500 establishes sealing engagement with the container body 2100 via the first sealing ring portion 2710 , and the filter assembly 2300 establishes sealing engagement with the surrounding portion of the container body 2100 corresponding to the rear opening 2100 b via the second sealing ring portion 2720 . With the sealing member 2700 provided between the container body 2100 and the rear cover 2500, the air-guiding channel 2140 between the two can be airtight, avoiding air leakage, and ensuring that the purified gas can only enter the container through the filter assembly 2300 The interior space of the main body 2100 .

Next, the inlet port where the purge gas enters the substrate container system 2000 will be described. Please refer to FIG. 17 to FIG. 21 at the same time. FIG. 20 shows a schematic view of the substrate container system in FIG. 1 and a cross-section P3 , and FIG. 21 shows a cross-sectional view of FIG. 20 along the cross-section P3 . The rear cover 2500 of the substrate container system 2000 includes an air inlet structure 2540 extending curvedly below the bottom surface 2130 of the container body 2100. The air inlet structure 2540 includes an air inlet port 2541 opposite to the bottom surface 2130 and facing downward, thereby connecting to the An external purification device (this peripheral component is not shown in the drawing). The air intake structure 2540 communicates with the air guide channel 2140, and in this embodiment, the air intake structure 2540 and the air guide channel 2140 are arranged in pairs, and are respectively located on opposite sides of the rear opening 2100b (as shown in Figure 1 and Figure 17 ).

The substrate container system 2000 further includes an air valve assembly 2900 for passing the purge gas, wherein the air inlet port 2541 has a connection structure 2542 , and the air valve assembly 2900 is connected to the air inlet port 2541 through the connection structure 2542 .

Please continue to refer to FIG. 21, the purified gas enters the intake structure 2540 through the gas valve assembly 2900, then diffuses upwards along the gas guide channel 2140 (as shown by the thick black arrow in the figure), and then passes through the outlet 2140a of the gas guide channel (Fig. 21) into the buffer chamber 2340. After the purge gas reaches the saturated pressure in the buffer chamber 2340 , it evenly leaks out towards the inner space of the container body 2100 through the gas release surface 2310 . At the height of the container body 2100 , the flow rate of the purified gas blown corresponding to the position of the filter assembly 2300 will be higher than that of other parts; that is, the purified gas has different flow rates at different heights. Taking the embodiment of FIG. 21 as an example, the filter assembly 2300 is located in the upper half of the container body 2100, so the flow rate of the purified gas in the upper half of the container body 2100 is higher than that in the lower half, as shown in the container body 2100 in the figure shown by the two hollow arrows above and below. Under the same purification gas flow rate, compared with blowing evenly across the entire surface, the embodiment of the present invention uses non-full surface blowing so that the flow velocity of the upper half is higher than that of the lower half, which can more advantageously avoid when the front door is opened, The air outside the door blown from top to bottom carries pollutants such as dust, particles or moisture into the container main body 2100, thereby maintaining cleanliness and slowing down the rise of humidity.

Next, the air valve assembly 2900 will be described. Please refer to FIGS. 22 to 24 at the same time. FIG. 22 shows a perspective view of an air valve assembly according to an embodiment of the present invention. FIG. 23 shows a cross-sectional view of an air valve assembly along the section P4 in FIG. 22 . FIG. 24 shows an air valve assembly Schematic diagram when assembled in the air intake port. The air valve assembly 2900 includes an air valve body 2930 and a first elastic material 2910 . The first elastic material 2910 is disposed on one side of the air valve body 2930 and has a wing 2911 . When the air valve assembly 2900 is assembled on the connection structure 2542 of the inlet port 2541 , the fins 2911 are deformed to establish a sealing engagement with the connection structure 2542 .

In one embodiment, the connection structure 2542 is a sleeve, which is used for the air valve assembly 2900 to be socketed. The fins 2911 protrude from the outer surface of the first elastic material 2910 and extend outward for a certain distance. When the air valve assembly 2900 is assembled on the connection structure 2542, the fins 2911 interfere with the connection structure 2542 and bend (as shown in FIG. 24 ), so that the tab 2911 can establish a sealing engagement with the connection structure 2542 .

Please refer to FIG. 23 to FIG. 25 , FIG. 25 is a perspective view showing another perspective of the air valve assembly in FIG. 22 . The air valve assembly 2900 further includes a second elastic material 2920 disposed on the other side of the air valve body 2930 and has a mating surface 2921 for docking with external purification equipment so as to form a sealed joint. In this embodiment, the first elastic material 2910 and the second elastic material 2920 are located on opposite sides of the air valve body 2930, and the second elastic material 2920 is used to make the external purification equipment and the docking surface 2921 hermetically bonded, which can avoid air leakage and help efficiency of purification operations.

The multiple embodiments disclosed in the foregoing detailed description provide a substrate container system, including: a container body including a top surface, a bottom surface opposite to the top surface, and a back plate connecting the top surface and the bottom surface, the container body has A front opening and a rear opening, the front opening is located between the top surface and the bottom surface for a substrate to pass through, the rear opening is located on the back plate, opposite to the front opening, wherein the back plate has a first height, and the rear opening has a height less than A second height of the first height; a filter assembly covering the rear opening; and a rear cover for establishing a sealing connection with the container body, an air guide channel is formed between the rear cover and the container body along the first height Extending in the direction, the rear cover and the filter assembly jointly define a buffer chamber, and the air guide channel has an outlet connected to the buffer chamber. There is a rear opening on the back plate of the main body of the container, and the rear opening provides the purified gas in a non-integral manner, so that the internal space of the main body of the container has different flow rates of the purified gas in the height direction, which can prevent the air outside the door from carrying dust, particles or moisture Such pollutants enter the main body of the container, maintain cleanliness and slow down the rise of humidity.

Although the present invention has been disclosed above with a number of embodiments, it is not intended to limit the present invention. Anyone who is familiar with this technique can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

2000: Substrate Container System 2100: container body 2100a: front opening 2100b: Rear opening 2100b(i): Rear opening 2100b(ii): Rear opening 2100b(iii): Rear opening 2100b(iv): Rear opening 2110: top surface 2110(i): top surface 2110(ii): top surface 2110(iii): top surface 2110(iv): top surface 2130: Bottom 2140: Air channel 2140a: Export 2150: Backplane 2170: side wall 2300: filter components 2300(i): filter components 2300(i)': filter component 2300(ii): Filter components 2300(iii): Filter components 2310: Gas release surface 2310(i): Gas release surface 2310(i)': Gas release surface 2310(ii): Gas release surface 2310(iii): Gas release surface 2340: buffer room 2500: back cover 2510: convex rib 2510a: groove 2540: intake structure 2541: air intake port 2542: Connection structure 2700: sealing member 2710: the first sealing ring part 2720:Second sealing ring part 2900: air valve assembly 2910: The first elastic material 2911: Wing 2920: second elastic material 2921: butt surface 2930: Air Valve Body D: Extension direction H1: first height H1(i): first height H1(ii): first height H1(iii): first height H1(iv): first height H2: second height H2(i): second height H2(ii): second height H2(iii): second height H2(iv): second height P1: Profile P2: Profile P3: Profile P4: Profile

In order to make the above and other features, advantages and embodiments of the present invention more comprehensible, the accompanying drawings are described as follows: FIG. 1 shows a three-dimensional exploded view of a substrate container system according to an embodiment of the present invention; Fig. 2 depicts a perspective view of the container body of Fig. 1; Fig. 3 depicts a schematic diagram of the container body of Fig. 2; Fig. 4 shows a sectional view of the container body along the section P1 in Fig. 3; Figure 5 depicts a rear view of the container body of Figure 3; Fig. 6 shows a rear view of a container body according to another embodiment of the present invention; Fig. 7 illustrates a rear view of a container body according to yet another embodiment of the present invention; Fig. 8 shows a rear view of a container body according to yet another embodiment of the present invention; Fig. 9 illustrates a rear view of a container body according to another embodiment of the present invention; FIG. 10 is a schematic diagram of the substrate container system shown in FIG. 1 before assembly; FIG. 11 is a schematic diagram of the assembled container body, sealing member and filter assembly of FIG. 1; FIG. 12 is a schematic diagram of the assembled substrate container system of FIG. 1; Figure 13a depicts a perspective view of the filter assembly in Figure 1; Figure 13b shows a side view of the filter assembly in Figure 1; Fig. 14a shows a perspective view of a filter assembly of another embodiment; Figure 14b shows a side view of another embodiment of the filter assembly; Fig. 14c shows a schematic diagram of the filter element and the back plate of Fig. 14b; Figure 14d shows a schematic view of another embodiment of the filter element and the back plate of Figure 14c; Fig. 15a shows a perspective view of a filter assembly according to another embodiment; Fig. 15b shows a side view of a filter assembly according to another embodiment; Fig. 16a shows a perspective view of a filter assembly according to yet another embodiment; Fig. 16b shows a side view of a filter assembly according to another embodiment; Fig. 17 is a schematic diagram showing the rear cover, filter assembly and sealing member of Fig. 1 before assembly; FIG. 18 is a schematic diagram of the assembled rear cover, filter assembly and sealing member of FIG. 1; Fig. 19 illustrates a perspective sectional view along section P2 in Fig. 18; FIG. 20 shows a schematic diagram of the substrate container system of FIG. 1; Fig. 21 depicts a sectional view along section P3 in Fig. 20; 22 is a perspective view of an air valve assembly according to an embodiment of the present invention; Fig. 23 shows a sectional view of the air valve assembly along the section P4 in Fig. 22; FIG. 24 shows a schematic view of the air valve assembly assembled in the air inlet port; and FIG. 25 is a perspective view of another viewing angle of the air valve assembly of FIG. 22 .

2000: Substrate Container System

2100: container body

2100a: front opening

2100b: Rear opening

2110: top surface

2130: Bottom

2140: Air channel

2150: Backplane

2170: side wall

2300: filter components

2500: back cover

2700: sealing member

2710: the first sealing ring part

2720:Second sealing ring part

D: Extension direction

Claims (14)

A substrate container system comprising: A container body, comprising a top surface, a bottom surface opposite to the top surface, and a back plate connecting the top surface and the bottom surface, the container body has a front opening and a rear opening, the front opening is located on the top surface Between the bottom surface and a substrate for passing through, the rear opening is located on the back plate, opposite to the front opening, wherein the back plate has a first height, and the rear opening has a first height smaller than the first height two heights; a filter assembly covering the rear opening; and a back cover, used to establish a sealing connection with the container body, an air guide channel is formed between the back cover and the container body, extending along the direction of the first height, the back cover and the filter assembly jointly define a buffer chamber, the air guide channel has an outlet, connected to the buffer chamber. The substrate container system of claim 1, wherein the second height is about 10% to about 90% of the first height. The substrate container system of claim 2, wherein the second height is about 10% to about 50% of the first height, and the rear opening is located adjacent to the top surface. The substrate container system as claimed in claim 1, wherein the filter element has a gas release surface with an area larger than that of the rear opening, and the gas release surface has a plane parallel to the back plate. The substrate container system as claimed in claim 1, wherein the filter element has a gas release surface with an area larger than that of the rear opening, and the gas release surface has a plane forming an acute angle with the back plate. The substrate container system as claimed in claim 1, wherein the filter element has a gas release surface with an area larger than that of the rear opening, and the gas release surface has a corrugated surface. The substrate container system as claimed in claim 1, wherein the filter element has a gas release surface with an area larger than that of the rear opening, and the gas release surface extends through the rear opening toward the container body to form a curved profile. The substrate container system as claimed in claim 1, wherein the filter element has a gas release surface having an area larger than that of the rear opening, and the gas release surface extends through the rear opening toward the rear cover to form a curved profile. The substrate container system as claimed in claim 1, wherein the rear cover has a plurality of ribs protruding toward the container body for abutting against the filter assembly, and the ribs are arranged at intervals to form a plurality of Grooves, the outlet of the air guide channel at least includes these grooves. The substrate container system as described in claim 1, further comprising: A sealing member has a first sealing ring part and a second sealing ring part, the first sealing ring part is arranged between the back cover and the container main body, the second sealing ring is arranged between the filter assembly and the container between subjects. The substrate container system as claimed in claim 1, wherein the rear cover comprises: An air intake structure extends curvedly below the bottom surface of the container body, and the air intake structure includes an air intake port opposite to the bottom surface and facing downwards, so as to be connected to an external purification device. The substrate container system as described in claim 11, further comprising: An air valve assembly is used for passing a purge gas, wherein the air inlet port has a connection structure, and the air valve assembly is connected to the air inlet port through the connection structure. The substrate container system of claim 12, wherein the air valve assembly comprises: an air valve body; and A first elastic material is disposed on one side of the air valve body and has a wing that is deformed when the air valve assembly is assembled in the connection structure so as to establish a sealing engagement with the connection structure. The substrate container system as claimed in claim 13, wherein the air valve assembly further comprises: A second elastic material is arranged on the other side of the main body of the air valve and has an abutment surface for the external purification device to be abutted so as to form a sealed joint.

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