TW202243811A - Dressing board and cutting blade trimming method enabling proper trimming of a cutting blade - Google Patents

Abstract

The present invention provides a dressing board enabling proper trimming of a cutting blade. The dressing board is used for modifying the shape of a cutting blade, comprising: a first layer including a first abrasive grain and a first bonding material that fixes the first abrasive grain; and a plurality of second layers, laminated on the first layer in such a way that the first layer is sandwiched. The thickness of the first layer is smaller than the width of the cutting blade. Each second layer comprises a second abrasive grain with an average particle size smaller than the first abrasive grain and a second bonding material that fixes the second abrasive grain.

Description

Grinding plate and trimming method of cutting blade

The present invention relates to a sharpening board that can be used for correcting the shape of a cutting blade for cutting a workpiece, and a method for dressing a cutting blade using the sharpening board.

A plurality of device wafers each having a device can be produced by dividing and individualizing a wafer formed with a plurality of devices. Also, a package substrate can be obtained by assembling a plurality of device chips on a predetermined substrate and covering the assembled device chips with a sealing material (molding resin) made of resin. A plurality of packaged devices each having a plurality of device chips can be manufactured by dividing and individualizing the package substrate. Device chips or packaged devices can be incorporated into various electronic machines such as mobile phones and personal computers.

Cutting devices are used for the division of workpieces such as wafers and package substrates mentioned above. The cutting device is equipped with a chuck for holding the workpiece, and a cutting unit for cutting the workpiece, and the cutting unit can be equipped with a ring-shaped cutting blade. The workpiece can be cut and divided by rotating the cutting blade and cutting into the workpiece held by the chuck.

If the cutting of the workpiece by the cutting insert is continued, the front end of the cutting insert is gradually worn away, and the front end surface of the cutting insert changes into a rounded shape (R shape). In addition, if the workpiece is cut and divided into a plurality of wafers with worn cutting blades, the shape of the wafers may be broken due to the R-shape of the cutting blades being reflected on the wafers, and the quality of the wafers may be lowered.

Therefore, before the workpiece is cut by the cutting blade, dressing is performed to correct the shape of the cutting blade by deliberately abrading the tip portion of the cutting blade. Dressing can be carried out by holding a member (sharpening plate) for dressing the cutting blade by the work chuck of the cutting device, and cutting the cutting blade into the grinding plate. For example, Patent Document 1 discloses a method of shaping the front end surface of a cutting insert to be straight by cutting the cutting insert into a convex portion formed on a sharpening plate. prior art literature patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2019-18254

The problem to be solved by the invention

As described above, when the front end surface of the cutting insert is to be straightened, for example, a sharpening plate having a convex portion can be used. The sharpening plate having the convex portion is produced by cutting a flat sharpening plate with a cutting blade, and forming a plurality of linear grooves (recesses) on the front side of the sharpening plate. This groove is formed to be deeper than the cutting depth of the cutting blade into the sharpening plate at the time of dressing.

However, if deep grooves are formed in the sharpening plate, the rigidity of the sharpening plate decreases, and a stress difference occurs between the front side and the back side of the sharpening plate, causing the sharpening plate to warp. In particular, when a thin sharpening plate is used for material reduction or the like, warping becomes more likely to occur when grooves are formed. As a result, there may be a situation in which it becomes difficult to accurately cut the cutting blade into the convex portion of the sharpening plate when the sharpening plate cannot be held flat by the work chuck.

The present invention was made in view of the aforementioned problems, and an object of the present invention is to provide a sharpening plate capable of proper dressing of a cutting blade, and a dressing method of a cutting blade using the sharpening blade. means to solve problems

According to one aspect of the present invention, there is provided a sharpening plate for modifying the shape of a cutting blade, the aforementioned sharpening plate comprises: a first layer including first abrasive grains, and a first layer for fixing the first abrasive grains. a binder; and a plurality of second layers laminated on the first layer sandwiching the first layer, The thickness of the first layer is smaller than the width of the cutting insert, and the second layer includes second abrasive grains with an average particle diameter smaller than that of the first abrasive grains and a second bonding material that fixes the second abrasive grains.

Furthermore, preferably, the first abrasive grain and the second abrasive grain are green silicon carbide (green carborundum) or white alundum (white alundum), and the first bonding material and the second bonding material are resin Binding agent. Also, it is preferable that the average particle diameter of the first abrasive grains is not less than 1 μm and not more than 200 μm, and that the average particle diameter of the second abrasive grains be not less than 0.1 μm and not more than 20 μm.

In addition, according to another aspect of the present invention, there is provided a sharpening plate for modifying the shape of a cutting blade, the aforementioned sharpening plate includes: a first layer containing abrasive grains, and a bonding material for fixing the abrasive grains ; and a plurality of second layers stacked on the first layer sandwiching the first layer, The thickness of the first layer is smaller than the width of the cutting insert, and the second layer does not contain abrasive grains.

In addition, according to another aspect of the present invention, a method for trimming a cutting blade can be provided, using a sharpening plate to modify the shape of the cutting blade, the method for trimming the cutting blade includes the following steps: In the step of holding, the sharpening plate is held by a work clamp, and the sharpening plate includes a first layer and a plurality of second layers. The first layer includes the first abrasive grains and the first abrasive grains that fix the first abrasive grains. In the binder, the plurality of second layers are laminated on the first layer with the first layer sandwiched therebetween, the thickness of the first layer is smaller than the width of the cutting insert, and the second layer contains The second abrasive grains, which are smaller than the first abrasive grains, and the second bonding material that fixes the second abrasive grains, and the exposed surface of the first layer and the second layer become the upper surface through the work. a clamping table holds the sharpening plate; and The correction step is to move the cutting blade relative to the sharpening plate so that the front end portion of the cutting blade cuts into the upper surface side of the sharpening plate along the first layer, thereby making the lower surface of the cutting blade The shape of the front end of the cutting insert is corrected by contacting the first layer and bringing both side surfaces of the front end of the cutting insert into contact with the second layer.

In addition, according to another aspect of the present invention, a method for trimming a cutting blade can be provided, using a sharpening plate to modify the shape of the cutting blade, the method for trimming the cutting blade includes the following steps: In the step of holding, the sharpening plate is held by the working clamping platform, and the sharpening plate includes a first layer and a plurality of second layers, the first layer includes abrasive grains and a binding material for fixing the abrasive grains, and the aforementioned plurality of layers The second layer is laminated on the first layer so as to sandwich the first layer, the thickness of the first layer is smaller than the width of the cutting insert, the second layer does not contain abrasive grains, and is based on the first layer and the way that the exposed surface of the second layer becomes the upper surface to hold the sharpening plate by the work holder; and The correction step is to move the cutting blade relative to the sharpening plate so that the front end portion of the cutting blade cuts into the upper surface side of the sharpening plate along the first layer, thereby making the lower surface of the cutting blade contacting the first layer, and bringing both side surfaces of the tip end of the cutting insert into contact with the second layer, thereby correcting the shape of the tip end of the cutting insert. Invention effect

A sharpening plate according to one aspect of the present invention includes a first layer and a plurality of second layers, the first layer contains abrasive grains, and the plurality of second layers are laminated on the first layer so as to sandwich the first layer . This makes it possible to perform dressing of the cutting insert without forming deep grooves on the sharpening plate in advance, thereby suppressing occurrence of warping of the sharpening plate. As a result, the shape of the cutting insert can be properly corrected by properly holding the sharpening plate by the chuck.

form for carrying out the invention

Hereinafter, embodiments of the present invention will be described with reference to the attached drawings. First, a configuration example of the sharpening plate of this embodiment will be described. The sharpening plate of this embodiment is used for shaping (dressing) of cutting blades. The cutting insert is a ring-shaped machining tool that penetrates into a workpiece to cut the workpiece.

An example of a workpiece that can be cut by a cutting blade is a disk-shaped silicon wafer. For example, a silicon wafer can be divided into a plurality of rectangular regions by a plurality of dicing lines (planned dividing lines) arranged in a grid-like manner in an intersecting manner. In addition, IC (Integrated Circuit), LSI (Large Scale Integration), LED (Light Emitting Diode), MEMS are respectively formed in the area demarcated by the dicing line. (Micro Electro Mechanical Systems, Micro Electro Mechanical Systems) devices and other devices. A plurality of device wafers each having a device can be produced by cutting the silicon wafer with a cutting blade and dividing it along dicing lines.

However, there are no limitations on the material, shape, structure, size, etc. of the workpiece. For example, the workpiece can also be semiconductors other than silicon (gallium arsenide (GaAs), indium phosphide (InP), gallium nitride (GaN), silicon carbide (SiC), etc.), glass, ceramics, resin, metal, etc. composed of wafers. Also, there are no restrictions on the type, number, shape, structure, size, arrangement, etc. of the devices formed on the workpiece, and no devices may be formed on the workpiece. In addition, the processed object can also be a package substrate such as a CSP (Chip Size Package) substrate, a QFN (Quad Flat Non-leaded package) substrate, or the like.

When machining a workpiece with a cutting insert, dressing of the cutting insert is performed first. Dressing is performed by rotating the cutting blade and cutting the front end of the cutting blade into the sharpening plate. Accordingly, the front end portion of the cutting insert is worn by contact with the sharpening plate, and the shape of the front end surface of the cutting insert can be corrected.

FIG. 1 is a perspective view showing a sharpening board 11 . The sharpening plate 11 is a rectangular parallelepiped member used for trimming of cutting blades, and includes a plurality of first layers 13 and a plurality of second layers 15 . The first layer 13 and the second layer 15 are rectangular plate-shaped members, and are alternately laminated in the thickness direction of the sharpening plate 11 (the thickness direction of the first layer 13 and the second layer 15 ).

The first layer 13 includes a bond (first bond) between abrasive grains (first abrasive grains) and fixed abrasive grains. Moreover, the 2nd layer 15 contains the bond material (2nd bond material) of an abrasive grain (2nd abrasive grain) and a fixed abrasive grain. As the first abrasive grain and the second abrasive grain, green silicon carbide (GC), white alundum (WA), or the like can be used.

Furthermore, the average particle diameter of the abrasive grains (second abrasive grains) contained in the second layer 15 is smaller than the average grain diameter of the abrasive grains (first abrasive grains) contained in the first layer 13 . For example, the average particle diameter of the first abrasive grains is not less than 1 μm and not more than 200 μm, and the average particle diameter of the second abrasive grains is not less than 0.1 μm and not more than 20 μm.

A resin bond made of resin or a vitrified bond made of ceramics can be used as the first bonding material and the second bonding material. In particular, it is preferable to use a resin bond as the first bonding material and the second bonding material because damage to the cutting blade when the cutting blade is cut into the sharpening plate 11 can be suppressed.

For example, a plate can be formed by impregnating abrasive grains with a resin such as phenol resin or epoxy resin, then molding the resin into a plate shape and firing at a predetermined temperature (for example, 150°C or higher and about 200°C or lower). The first layer 13 and the second layer 15 of shape. Furthermore, if abrasive grains are already included in the first layer 13 and the second layer 15, the fluidity of the resin bond will decrease, and the shape of the first layer 13 and the second layer 15 will be easily maintained.

FIG. 2(A) is a perspective view showing the first layer 13 and the second layer 15 . For example, the sharpening board 11 can be manufactured by alternately laminating the large first layer 13 and the second layer 15 and then simultaneously cutting the first layer 13 and the second layer 15 .

The first layer 13 includes a rectangular first surface (front) 13a and a second surface (back) 13b substantially parallel to each other. Similarly, the second layer 15 includes a rectangular first surface (front surface) 15a and a second surface (back surface) 15b substantially parallel to each other. Furthermore, the second layer 15 is laminated on the first layer 13 so as to sandwich the first layer 13 . Specifically, the second surface 15b side of the second layer 15 is fixed on the first surface 13a side of the first layer 13, and the first surface 15a of the second layer 15 is fixed on the second surface 13b side of the first layer 13. side. For example, the first layer 13 and the second layer 15 can be bonded through an adhesive.

FIG. 2(B) is a perspective view showing the first layer 13 and the second layer 15 which have been alternately laminated. The sharpening plate 11 of a desired shape and size can be obtained by simultaneously cutting the laminated first layer 13 and second layer 15 with a cutting blade or the like.

In addition, the number of layers of the first layer 13 and the second layer 15 to be laminated is not limited. However, the uppermost layer and the lowermost layer of the sharpening board 11 are set as the second layer 15 . Thereby, all the first layers 13 are sandwiched by the second layers 15 . Also, as will be described later, the first layer 13 is utilized for shaping the front end face of the cutting insert. Therefore, the number of layers of the first layer 13 is preferably two or more. Thereby, it becomes possible to implement shaping|shaping of the front-end|tip surface of a cutting insert multiple times using one sharpening board 11. FIG.

As shown in FIG. 1 , the sharpening board 11 includes a first surface (front surface) 11a and a second surface (back surface) 11b substantially parallel to each other. The first surface 11a corresponds to the first surface 15a of the uppermost second layer 15, and the second surface 11b corresponds to the second surface 15b of the lowermost second layer 15.

Moreover, the sharpening board 11 includes a pair of third surfaces (side surfaces) 11c connected to one of the long sides of the first surface 11a and the second surface 11b, and a pair of short sides connected to the first surface 11a and the second surface 11b. 4th surface (side surface) 11d. The pair of third surfaces 11c are rectangular flat surfaces substantially parallel to the longitudinal direction of the sharpening plate 11 (the longitudinal direction of the first layer 13 and the second layer 15 ) and the thickness direction of the sharpening plate 11 . The pair of fourth surfaces are rectangular flat surfaces substantially parallel to the width direction of the sharpening plate 11 (the width direction of the first layer 13 and the second layer 15 ) and the thickness direction of the sharpening plate 11 .

The side surfaces of the first layer 13 and the side surfaces of the second layer 15 are exposed on the third surface 11c and the fourth surface 11d. Therefore, periodic stripe patterns (horizontal stripe patterns) formed by alternately arranging the side surfaces of the first layer 13 and the side surfaces of the second layer 15 appear on the third surface 11c and the fourth surface 11d.

The above-mentioned sharpening plate 11 can be used for dressing of cutting blades. When trimming the cutting blade, the sharpening plate 11 is firstly supported by a ring-shaped frame. FIG. 3 is a perspective view showing the sharpening plate 11 supported by the ring-shaped frame 17 .

The frame 17 is made of metal such as SUS (stainless steel), for example. A circular opening 17a penetrating through the frame 17 in the thickness direction is provided at the central portion of the frame 17 . Furthermore, the diameter of the opening 17a is larger than the length of each side of the sharpening plate 11 . In addition, the sharpening plate 11 may be arranged inside the opening 17a.

An adhesive tape 19 can be attached to the sharpening board 11 and the frame 17 . Specifically, the central portion of the tape 19 is attached to the sharpening board 11 , and the outer peripheral portion of the tape 19 is attached to the frame 17 . As a result, the sharpening board 11 is supported by the frame 17 through the adhesive tape 19 .

The adhesive tape 19 includes a circular film-like substrate and an adhesive layer (paste layer) provided on the substrate. For example, the substrate is made of polyolefin, polyvinyl chloride, polyethylene terephthalate and other resins, and the adhesive layer is made of epoxy-based, acrylic-based, or rubber-based adhesives. In addition, the adhesive layer may be an ultraviolet curable resin that is cured by ultraviolet irradiation.

In addition, the sharpening board 11 is arrange|positioned so that the adhesive tape 19 may be attached to one of a pair of 3rd surface 11c. Therefore, the sharpening plate 11 is exposed above the other side of the third surface 11c that presents one of the stripe patterns, and the first surface 11a, the second surface 11b, and the fourth surface 11d that presents the stripe pattern are exposed on the side. The state is supported by frame 17.

Dressing of the cutting blade can be performed by cutting the cutting blade into the sharpening plate 11 already supported by the frame 17 . For dressing of cutting inserts, cutting devices can be used. FIG. 4 is a perspective view showing the cutting device 2 . In addition, in FIG. 4 , the X-axis direction (machining feed direction, first horizontal direction) and the Y-axis direction (index feed direction, second horizontal direction) are directions perpendicular to each other. In addition, the Z-axis direction (vertical direction, vertical direction, and height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

The cutting device 2 includes a work chuck (holding table) 4 capable of holding a workpiece and a sharpening plate 11 . The upper surface of the work holder 4 is a flat surface substantially parallel to the horizontal direction (XY plane direction), and constitutes a holding surface 4a for holding a workpiece or a sharpening plate 11 (see FIG. 5 ). The holding surface 4 a is connected to a suction source (not shown) such as an ejector through a flow path (not shown), a valve (not shown) and the like formed inside the chuck 4 .

The working clamp table 4 has been connected with a moving mechanism (not shown) and a rotary drive source (not shown). The aforementioned moving mechanism is a ball screw type mechanism that moves the working clamping table 4 along the X-axis direction. The aforementioned rotating drive source It is a drive source such as a motor that rotates the work chuck 4 around a rotation axis substantially parallel to the Z-axis direction. In addition, a plurality of jigs 6 capable of holding and fixing the frame 17 are provided around the work jig table 4 (see FIG. 5 ).

Above the work clamping table 4, a cutting unit 8 capable of cutting the workpiece and the sharpening plate 11 is provided. The cutting unit 8 includes a cylindrical housing 10 , and a cylindrical main shaft 12 arranged along the Y-axis direction is housed in the housing 10 (see FIG. 5 ). The front end (one end) of the main shaft 12 is exposed to the outside of the casing 10 , and a rotational drive source such as a motor is connected to a base end (the other end) of the main shaft 12 .

A ring-shaped cutting insert 14 for cutting a workpiece may be mounted on the front end of the main shaft 12 . The cutting insert 14 is rotated around a rotation axis substantially parallel to the Y-axis direction by the power transmitted from the rotation drive source through the spindle 12 .

As the cutting insert 14 , for example, a hub-type cutting insert (hub-type insert) can be used. A hub-type insert is a cutting insert in which an annular base made of metal, etc., and an annular cutting edge formed along the outer peripheral edge of the base are integrated. The cutting edge of the hub-type blade can be formed by electroformed grinding stones, which include abrasive grains composed of diamonds, cubic boron nitride (cBN: cubic Boron Nitride), etc., and nickel-plated fixed abrasive grains. Bonding material for cladding, etc.

However, a washer-type cutting insert (washer-type insert) may also be used as the cutting insert 14 . The washer-type insert is constituted only by an annular cutting edge containing abrasive grains and a bond (metal bond, resin bond, vitrified bond, etc.) that fixes the abrasive grains.

When the cutting blade 14 is mounted on the cutting unit 8 , the cutting blade 14 will be covered by the blade cover 16 fixed on the casing 10 . The blade cover 16 includes a pair of connecting parts 18 connected to a pipe (not shown) capable of supplying cutting fluid such as pure water, and a pair of nozzles 20 connected to the pair of connecting parts 18 . The pair of nozzles 20 are arranged on both side surfaces (front side and back side) of the cutting insert 14 so as to sandwich the lower end portion of the cutting insert 14 . In addition, supply ports (not shown) that open toward the cutting insert 14 are respectively provided in the pair of nozzles 20 .

When the cutting fluid is supplied to the pair of connection portions 18 , the cutting fluid flows into the pair of nozzles 20 , and the cutting fluid is supplied toward both sides (front and back) of the cutting insert 14 from the injection ports of the pair of nozzles 20 . The cutting fluid cools the cutting blade 14, the workpiece held by the chuck 4, or the sharpening plate 11, and washes away chips (chips) generated by cutting.

A ball screw type moving mechanism (not shown) for moving the cutting unit 8 is connected to the cutting unit 8 . This moving mechanism moves the cutting unit 8 in the Y-axis direction, and raises and lowers it in the Z-axis direction. The position of the cutting blade 14 in the index feed direction, or the depth of penetration of the cutting blade 14 into the workpiece or the sharpening plate 11 can be adjusted by the moving mechanism.

A workpiece such as a silicon wafer can be cut by the cutting device 2 described above. For example, the cutting blade 14 cuts the silicon wafer along the dicing line and divides it into a plurality of device wafers.

Furthermore, if the cutting of the workpiece by the cutting insert 14 is continued, the front end of the cutting insert 14 will be worn, and the front end of the cutting insert 14 will change into a rounded shape (R shape) (refer to FIG. 5). In addition, if the workpiece is cut and divided into a plurality of wafers with the worn cutting blade 14, the shape of the wafer may be broken due to the R-shape of the cutting blade 14 being reflected on the wafer, and the quality of the wafer may be lowered. .

Therefore, before the workpiece is machined with the cutting insert 14 , dressing is carried out to correct the shape of the cutting insert 14 by deliberately abrading the tip portion of the cutting insert 14 . Dressing is performed by cutting the cutting blade 14 into the sharpening plate 11 . Hereinafter, a specific example of the dressing method of the cutting insert 14 in which the shape of the cutting insert 14 is corrected using the sharpening plate 11 will be described.

First, the sharpening plate 11 is held by the work chuck 4 (holding step). FIG. 5 is a partial sectional front view showing the sharpening plate 11 held by the work chuck 4 .

In the holding step, the sharpening plate 11 supported by the frame 17 is arranged on the holding surface 4 a of the work holder 4 through the adhesive tape 19 . Also, the frame 17 is fixed by a plurality of jigs 6 . In this state, if the suction force (negative pressure) of the suction source is applied to the holding surface 4a, the sharpening plate 11 can be sucked and held by the work chuck 4 through the adhesive tape 19 . Thereby, the sharpening plate 11 is held by the work holder 4 such that the third surface 11c (see FIG. 1 etc.) showing the stripe pattern with the side surfaces of the first layer 13 and the second layer 15 exposed becomes the upper surface.

Next, the shape of the tip portion of the cutting insert 14 is corrected by cutting the cutting insert 14 into the upper surface side of the sharpening plate 11 (dressing step). FIG. 6(A) is a partially cutaway front view showing the sharpening plate 11 and the cutting blade 14 in the dressing step.

In the dressing step, first, the work chuck 4 is rotated to align the longitudinal direction of the sharpening plate 11 (the longitudinal direction of the third surface 11 c ) with the X-axis direction. Thereby, the sharpening board 11 is arrange|positioned so that the longitudinal direction may extend along the X-axis direction, the thickness direction may extend along the Y-axis direction, and the width direction may extend along the Z-axis direction.

Furthermore, the cutting unit 8 (see FIGS. 4 and 5 ) is moved in the Y-axis direction, and the first layer 13 of the sharpening plate 11 is aligned with the Y-axis direction of the cutting blade 14 . For example, the cutting blade 14 can be positioned such that the center of the thickness direction of the first layer 13 (the left-right direction of the paper in FIG. 6(A) ) and the width direction of the cutting blade 14 (the left-right direction of the paper in FIG. The positions in the Y-axis direction of the center of the center are the same. Furthermore, the cutting unit 8 (see FIGS. 4 and 5 ) is moved in the Z-axis direction, and the lower end of the cutting blade 14 is positioned below the upper surface (third surface 11 c ) of the sharpening plate 11 .

Thereafter, while rotating the cutting insert 14, the chuck table 4 is moved in the X-axis direction. Thereby, the sharpening plate 11 and the cutting blade 14 relatively move along the machining feed direction, and the tip portion of the cutting blade 14 cuts into the upper surface side of the sharpening plate 11 along the first layer 13 . As a result, the upper surface side of the sharpening plate 11 is cut by the cutting blade 14 , and linear grooves are formed along the first layer 13 on the upper surface side of the sharpening plate 11 . Also, the front end portion of the cutting insert 14 is worn due to contact with the sharpening plate 11, so that the shape of the lower surface (front end surface) 14a of the cutting insert 14 can be corrected.

Here, the thickness d1 of the _first layer 13 is smaller than the thickness (width) D of the cutting insert 14 . Therefore, the lower surface 14a of the cutting insert 14 is in contact with the first layer 13 containing abrasive grains (first abrasive grains) with a relatively large particle size, and both side surfaces of the front end of the cutting insert 14 are in contact with the first layer 13 containing abrasive grains with a small diameter. The second layer 15 of abrasive grains (second abrasive grains). Therefore, abrasion is facilitated on the lower surface 14 a of the cutting insert 14 , and abrasion is hardly advanced on both side surfaces of the front end portion of the cutting insert 14 .

Furthermore, the thicknesses of the first layer 13 and the second layer 15 can be appropriately set according to the thickness D of the cutting insert 14 . Alternatively, the sum of the thickness d ₂ of the second layer 15 and the thickness d ₁ of the two first layers sandwiching the second layer 15 (d ₂ +2d ₁ ) may be smaller than the thickness D of the cutting insert 14. . In this case, when cutting the cutting blade 14 into the sharpening board 11, the lower surface 14a of the cutting blade 14 contacts the first layer 13 of two or more layers.

FIG. 6(B) is a front view showing the cutting insert 14 after the dressing step. As mentioned above, when the cutting blade 14 is cut into the sharpening plate 11 along the first layer 13, the region of the front end portion of the cutting blade 14 that is in contact with the first layer 13 will be preferentially worn, and the lower edge of the cutting blade 14 will be gradually eliminated. The rounded corners of the surface 14a. And, when the lower surface 14a of the cutting insert 14 becomes flat, the dressing of the cutting insert 14 is completed.

Furthermore, the number of times the cutting blade 14 cuts into the sharpening plate 11 can be appropriately set according to the shape, material, size, etc. of the cutting blade 14 . When the cutting blade 14 is cut into the sharpening plate 11 multiple times, after the cutting blade 14 is cut into the sharpening plate 11 along the first first layer 13, the cutting blade 14 is moved in the Y-axis direction, And cut into the sharpening plate 11 along the second first layer 13 . By repeating this operation, the cutting blade 14 can be cut into the sharpening plate 11 a desired number of times. And, if grooves are formed along all the first layers 13, the used sharpening board 11 will be replaced with a new sharpening board 11 (unused sharpening board 11).

As above, the sharpening plate 11 of the present embodiment is composed of a first layer 13 and a plurality of second layers 15, the first layer 13 contains abrasive grains, and the plurality of second layers 15 sandwich the first layer 13 Laminated on the first layer 13 in a manner. This makes it possible to perform dressing of the cutting insert 14 without forming deep grooves on the sharpening plate 11 in advance, and to suppress the occurrence of warping of the sharpening plate 11 . As a result, the shape of the cutting insert 14 can be properly corrected by properly holding the sharpening plate 11 by the chuck 4 .

In addition, in the said embodiment, the case where the 2nd layer 15 contains the abrasive grain (2nd abrasive grain) with an average particle diameter smaller than the 1st layer 13 was demonstrated. However, as the second layer 15, a layer not containing abrasive grains may be used. In this case, it becomes difficult to wear both side surfaces of the tip portion of the cutting insert 14 in contact with the second layer 15, and it becomes easy to correct the lower surface 14a of the cutting insert 14 to a flat shape.

In addition, the structure, method, etc. of the above-mentioned embodiment can be changed suitably and implemented as long as it does not deviate from the objective of this invention.

2: Cutting device 4: Work chuck (holding table) 4a: Holding surface 6: Fixture 8: Cutting unit 10: Housing 11: Grinding plate 11a: First surface (front) 11b: Second surface (back) 11c: 3rd surface (side) 11d: 4th surface (side) 12: Spindle 13: 1st layer 13a, 15a: 1st surface (front) 13b, 15b: 2nd surface (back) 14: Cutting insert 14a: Bottom surface (tip surface) 15: Second layer 16: Blade cover 17: Frame 17a: Opening 18: Connecting part 19: Tape 20: Nozzle d ₁ : Thickness d of 1st layer ₂ : Thickness of 2nd layer D: Cutting Blade thickness X, Y, Z: direction

Fig. 1 is a perspective view showing a sharpening board. FIG. 2(A) is a perspective view showing the first layer and the second layer, and FIG. 2(B) is a perspective view showing the first layer and the second layer of the alternate strata. Fig. 3 is a perspective view showing a sharpening board supported by a ring-shaped frame. Fig. 4 is a perspective view showing a cutting device. Fig. 5 is a partial sectional front view showing the sharpening plate held by the work chuck. FIG. 6(A) is a partial sectional front view showing the sharpening plate and the cutting insert in the dressing step, and FIG. 6(B) is a front view showing the cutting insert after the dressing step.

11: Sharpening board

11a: Side 1 (Front)

11b: Side 2 (Back)

11c: Surface 3 (side)

11d: 4th side (side)

13: Layer 1

15: Layer 2

15a: Side 1 (Front)

15b: Side 2 (Back)

Claims (6)

A sharpening plate used for modifying the shape of a cutting blade, the aforementioned sharpening plate is characterized by: Include: The first layer includes first abrasive grains and a first bonding material that fixes the first abrasive grains; and A plurality of second layers are laminated on the first layer with the first layer sandwiched therebetween, the thickness of the first layer is less than the width of the cutting insert, The second layer includes second abrasive grains having an average particle diameter smaller than that of the first abrasive grains, and a second bonding material that fixes the second abrasive grains. As the sharpening plate of claim 1, wherein the first abrasive grain and the second abrasive grain are green silicon carbide or white alundum, The first binder and the second binder are resin bonds. The sharpening plate according to claim 1 or 2, wherein the average particle diameter of the first abrasive grains is not less than 1 μm and not more than 200 μm, The average particle diameter of the second abrasive grains is not less than 0.1 μm and not more than 20 μm. A sharpening plate used for modifying the shape of a cutting blade, the aforementioned sharpening plate is characterized by: Include: Layer 1, comprising abrasive grains, and a bonding material that fixes the abrasive grains; and A plurality of second layers are laminated on the first layer with the first layer sandwiched therebetween, the thickness of the first layer is less than the width of the cutting insert, This second layer does not contain abrasive grains. A method for trimming a cutting blade, using a sharpening board to modify the shape of the cutting blade, the method for trimming the cutting blade is characterized in that it includes the following steps: In the step of holding, the sharpening plate is held by a work clamp, and the sharpening plate includes a first layer and a plurality of second layers. The first layer includes the first abrasive grains and the first abrasive grains that fix the first abrasive grains. In the binder, the plurality of second layers are laminated on the first layer with the first layer sandwiched therebetween, the thickness of the first layer is smaller than the width of the cutting insert, and the second layer contains The second abrasive grains, which are smaller than the first abrasive grains, and the second bonding material that fixes the second abrasive grains, and the exposed surface of the first layer and the second layer become the upper surface through the work. a holder holds the sharpening plate; and The correction step is to move the cutting blade relative to the sharpening plate so that the front end portion of the cutting blade cuts into the upper surface side of the sharpening plate along the first layer, thereby making the lower surface of the cutting blade The shape of the front end of the cutting insert is corrected by contacting the first layer and bringing both side surfaces of the front end of the cutting insert into contact with the second layer. A method for trimming a cutting blade, using a sharpening board to modify the shape of the cutting blade, the method for trimming the cutting blade is characterized in that it includes the following steps: In the step of holding, the sharpening plate is held by the working clamping platform, and the sharpening plate includes a first layer and a plurality of second layers, the first layer includes abrasive grains and a binding material for fixing the abrasive grains, and the aforementioned plurality of layers The second layer is laminated on the first layer so as to sandwich the first layer, the thickness of the first layer is smaller than the width of the cutting insert, the second layer does not contain abrasive grains, and is based on the first layer and the way that the exposed surface of the second layer becomes the upper surface to hold the sharpening plate by the work holder; and The correction step is to move the cutting blade relative to the sharpening plate so that the front end portion of the cutting blade cuts into the upper surface side of the sharpening plate along the first layer, thereby making the lower surface of the cutting blade The shape of the front end of the cutting insert is corrected by contacting the first layer and bringing both side surfaces of the front end of the cutting insert into contact with the second layer.

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