TW202227267A - Method of manufacturing glass film laminate and method of washing glass sheet - Google Patents

Abstract

Provided is a method of manufacturing a glass film laminate wherein a small-size glass film and a small-size support glass, which cannot be transported by an existing washing device having wide intervals between transport rollers, can be transported without changing the washing device and thus a small-size glass film laminate can be produced. This method of manufacturing a glass film laminate (1) comprises: a first lamination step (S2) for laminating a glass film (2) onto a first carrier glass (4) to give a first laminate (6); a second lamination step (S3) for laminating a support glass (3) onto a second carrier glass (5) to give a second laminate (7); a first washing step (S4) for washing the first laminate (6); a second washing step (S5) for washing the second laminate (7); a first peeling step (S6) for peeling the glass film (2) from the first laminate (6); a second peeling step (S7) for peeling the support glass (3) from the second laminate (7); and a third lamination step (S8) for bonding the washed surface of the glass film (2) to the washed surface of the support glass (3) to give the glass film laminate (1).

Description

Method for producing glass thin film laminate and method for cleaning glass plate

The present invention relates to a method for producing a glass thin film laminate and a method for cleaning a glass plate.

In recent years, substrates and cover glasses used in electronic devices such as flat panel displays have been increasingly required to achieve further thinning and flexibility. Thinning the glass substrate is an effective method for imparting flexibility to the glass substrate, and a glass thin film having a thickness of 200 μm or less is proposed.

For glass substrates, various manufacturing-related processes such as processing and cleaning are performed. However, when the glass substrate is thinned, since glass is a brittle material, it is broken due to a slight change in stress, and there is a problem that it is difficult to handle when performing processing related to the manufacture of various electronic devices.

Therefore, in order to improve the handleability of the thinned glass film, a glass film laminate in which a glass film is laminated on a support glass has been proposed (see Patent Document 1). According to such a glass film laminate, even if a glass film lacking strength and rigidity is used alone, since the rigidity of the support glass is high, it is easy to handle the laminate as a whole at the time of handling. Moreover, after completion|finish of a process, the glass film can be peeled off from a support glass. If the thickness of the laminated body including the glass thin film is made the same as the thickness of the conventional glass substrate, an electronic device can also be manufactured using the electronic device manufacturing line for the conventional glass substrate. [Prior Art Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2015/056602

[The problem to be solved by the invention]

In order to laminate the glass film on the support glass, the bonding surface of the support glass and the glass film must be in a clean state, and the support glass and the glass film must be washed before bonding. According to the size of various electronic devices, the size of various glass thin film laminates is required, and it is found that when producing small-sized glass thin film laminates for small electronic devices, it is used in the production line of large glass thin film laminates. If the device is cleaned, the following problems will occur.

In the cleaning apparatus, in order to allow the cleaning liquid to remain smoothly, a conveying apparatus in which a plurality of conveying rollers are arranged at regular intervals is used to convey the glass film and the supporting glass.

However, when using the existing cleaning device for a large glass film laminate, the interval between the plurality of conveying rollers is too wide, and the glass film and the supporting glass having a smaller size than the interval may fall off, resulting in a problem that the conveyance cannot be carried out. . Therefore, in order to wash a small-sized glass film and a support glass, it is necessary to re-prepare a washing apparatus with a narrow interval between the conveying rollers, which is a large-scale change.

An object of the present invention is to provide a small-sized glass film layer that can be produced by using a small-sized glass film and a support glass that can be conveyed without changing the cleaning device and which cannot be conveyed by an existing cleaning device that has a wide interval between the conveying drums. A method for producing an integrated glass thin film laminate. Furthermore, an object of the present invention is to provide a glass plate that can be used to clean a small-sized glass plate without changing the cleaning device by conveying a small-sized glass plate that cannot be conveyed by an existing cleaning device that has a wide interval between conveying drums. cleaning method. [means to solve the problem]

The present invention is a method for producing a glass film laminate, which is a method for producing a glass film laminate in which a glass film is laminated on a support glass, and is characterized by comprising: a preparation process for preparing the glass film, the support glass, the area of A first carrier glass larger than the glass film, and a second carrier glass larger in area than the support glass; the first lamination process is to laminate the glass film on the first carrier glass to produce a first laminate; the second The lamination process is to laminate the support glass on the second carrier glass to produce a second laminate; the first cleaning process is to clean the glass film side of the first laminate; the second cleaning process , is to clean the support glass side of the second laminate; the first peeling process is to peel off the glass film from the first laminate after the first cleaning process; the second peeling process is from In the second laminate after the second cleaning process, the support glass is peeled off; and in the third laminate process, the glass film after the first peeling process and the support glass after the second peeling process are separated. , and the cleaned surfaces were bonded to each other to produce the glass thin film laminate.

According to the above-mentioned structure, by making the large-sized first carrier glass and the second carrier glass support the small-sized glass film and the support glass, it is not necessary to change the cleaning device even in the existing cleaning device in which the interval between the conveying rollers is wide. It can be transported and a small-sized glass film laminate can be produced.

In the above-mentioned method for producing a glass thin film laminate, the cleaning device used in the first cleaning step and the second cleaning step includes a plurality of conveying rollers that support the first layered body. The lower surface and the lower surface of the second layered body are conveyed while being transported; the cleaning member is used to clean the upper surface of the first layered body and the upper surface of the second layered body; the first pinching roller pair is arranged on the above-mentioned The cleaning member is conveyed upstream in the conveyance direction while pinching the upper and lower surfaces of the first layered body and the upper and lower surfaces of the second layered body; and a pair of second pinching rollers is arranged in the conveyance of the cleaning member In the downstream direction, conveyance is performed while pinching the upper and lower surfaces of the first layered body and the upper and lower surfaces of the second layered body; the interval between the first pinching roller pair and the second pinching roller pair is the first The length in the conveyance direction of the carrier glass and the above-mentioned second carrier glass is preferably equal to or less than the length in the conveyance direction.

According to the above-mentioned structure, in the cleaning by the cleaning member, at least one of the pair of first pinching rollers and the pair of second pinching rollers can pinches the first laminate and the second laminate, so the cleaning member is During the cleaning, the first layered body and the second layered body can be fixed by any one of the holding roller pairs.

Moreover, in the manufacturing method of the said glass thin film laminated body, in the said 1st laminated body, a part of the said glass thin film protrudes from the conveyance direction upstream side edge part of the said 1st carrier glass; In the body, it is preferable that a part of the said support glass protrudes from the upstream side edge part of the conveyance direction of the said 2nd carrier glass.

According to the aforementioned structure, in the first peeling step and the second peeling step, the glass film and the support glass can be easily peeled off by grasping the protruding portion of the glass film and the protruding portion of the support glass to peel. In addition, since the protruding portion is on the upstream side in the conveying direction, the protruding portion is prevented from being caught by the cleaning member.

Furthermore, in the above-mentioned method for producing a glass film laminate, the first laminate is produced by laminating a plurality of the glass films at different positions on one surface of the first carrier glass; and the second laminate is produced. It is preferable to laminate a plurality of the above-mentioned supporting glasses at different positions on one side of the above-mentioned second carrier glass.

According to the aforementioned structure, a plurality of glass films and a plurality of supporting glasses can be cleaned at one time, so the production efficiency is good.

Furthermore, the present invention is a method for producing a glass film laminate, which is characterized by comprising: a preparation process for preparing a glass film, a support glass, and a carrier glass having an area larger than the glass film and the support glass; a first lamination process , in different positions on one side of the carrier glass, laminating the glass film and the support glass to make a laminate; cleaning process, cleaning the glass film and the support glass side of the laminate; peeling process In the second lamination process, the glass film and the support glass after the peeling process are laminated and cleaned. face each other to produce the aforementioned glass thin film laminate.

According to the above-mentioned structure, by making the large-sized carrier glass support the small-sized glass film and the supporting glass, even an existing cleaning device with a wide gap between the transfer rollers can be transported without changing the cleaning device, and can be produced. Small-sized glass film laminates. In addition, the glass film and the support glass can be cleaned at one time, so the production efficiency is good.

Moreover, the cleaning method of the glass plate of the present invention is characterized by comprising: a preparation process for preparing a plurality of glass plates and a carrier glass having an area larger than that of the glass plate; and a lamination process at different positions on one side of the carrier glass , laminating a plurality of the glass plates to produce a laminate; a cleaning process, which is to clean the glass plate side of the laminate; and a peeling process, which is to peel off the glass from the laminate after the cleaning process. plate.

According to the above-mentioned structure, by having a large-sized carrier glass supporting a plurality of small-sized glass plates, even an existing cleaning device with a wide gap between the transfer rollers can be transported without changing the cleaning device, and the cleaning device can be cleaned. size glass plate. In addition, since a plurality of glass plates can be washed at one time, the production efficiency is good. [Effect of invention]

According to the method for producing a glass film laminate of the present invention, it is possible to produce a small glass film and a supporting glass by using a glass film and a supporting glass of a small size that cannot be conveyed by an existing cleaning device having a wide interval between the conveying rollers without changing the cleaning device. size glass film laminate. Moreover, according to the cleaning method of the glass plate of the present invention, it is possible to clean the small-sized glass plate without changing the cleaning device by conveying the small-sized glass plate that cannot be conveyed by the existing cleaning device which has a wide interval between the conveying rollers. glass plate.

Hereinafter, the manufacturing method of the glass thin film laminated body 1 of this invention is demonstrated using 1st Embodiment and 2nd Embodiment as an example.

[1st Embodiment] As shown in FIG. 1 , the manufacturing method of the first embodiment includes a preparation process for preparing a glass film 2 , a support glass 3 , a first carrier glass 4 having an area larger than the glass film 2 , and a second carrier glass 5 having an area larger than the support glass 3 . S1. The first lamination process S2 of laminating the glass film 2 on the first carrier glass 4 to make the first laminate 6, and the second lamination process of laminating the support glass 3 on the second carrier glass 5 to make the second laminate 7 2 lamination process S3, first cleaning process S4 of cleaning the glass film 2 side of the first laminated body 6, second cleaning process S5 of cleaning the support glass 3 side of the second laminated body 7, 1. The first peeling step S6 of peeling off the glass film 2 from the first layered body 6 after the cleaning step S4, the second peeling step S7 of peeling the support glass 3 from the second layered body 7 after the second cleaning step S5, And the glass film 2 after the 1st peeling process S6 and the support glass 3 after the 2nd peeling process S7 are bonded together with the cleaned surface, and the 3rd lamination process S8 of producing the glass thin film laminated body 1 is carried out.

According to this manufacturing method, it is possible to transport a glass film of a small size that cannot be transported by the cleaning device 8 (see FIG. 4 ) used in the first cleaning process S4 and the second cleaning process S5 without changing the cleaning device 8 . 2 and the supporting glass 3 to produce a small-sized glass thin film laminate 1 .

[preparation process] In the preparation process S1, as the material of the glass thin film 2 to be prepared, silicate glass, silicon glass, borosilicate glass, alkali-free glass, or the like can be used. The thickness of the glass film 2 is preferably 300 μm or less. In addition, the thickness of the glass film 2 is more preferably 200 μm or less, and still more preferably 100 μm or less. From the viewpoint of securing the strength of the glass thin film 2, the thickness of the glass thin film 2 is preferably 5 μm or more.

It is preferable that the length L1 of the conveyance direction A when the glass film 2 is conveyed by the cleaning device 8 is less than the interval D1 of the conveyance roller 81 (see FIG. 4 ). The shape of the glass film 2 is not particularly limited, and may be, for example, a rectangle or a square. The glass film 2 used in the present embodiment is a square of 100 mm in length and 100 mm in width, and has a thickness of 100 μm.

As the material of the prepared support glass 3, silicate glass, silicon glass, borosilicate glass, alkali-free glass, etc. can be used in the same manner as the glass thin film 2 . As for the support glass 3, it is preferable to use a glass whose difference in thermal expansion coefficient from the glass film 2 at 30 to 380°C is within 5×10 ⁻⁷ /°C. From the viewpoint of suppressing the difference in expansion coefficient, it is optimal to use the same material as the glass thin film 2 for the support glass 3 .

The thickness of the support glass 3 is preferably 300 μm or more. Furthermore, the thickness of the support glass 3 is more preferably 300 to 700 μm, and still more preferably 300 to 500 μm. Thereby, the glass thin film 2 can be supported by the supporting glass 3, and the breakage of the glass thin film 2 that occurs when the glass thin film 2 is peeled off from the supporting glass 3 can be effectively suppressed.

The support glass 3 is larger than the glass film 2, and it is preferable that the length L2 in the conveyance direction A when the cleaning device 8 is conveyed is less than the interval D1 of the conveyance rollers 81. The shape of the support glass 3 is not particularly limited, and may be, for example, a rectangle or a square. The support glass 3 used in the present embodiment is a square with a length of 104 mm and a width of 104 mm, and a thickness of 500 μm.

As the materials of the prepared first carrier glass 4 and second carrier glass 5, silicate glass, silicon glass, borosilicate glass, alkali-free glass, etc. can be used in the same manner as the glass film 2 and the support glass 3. The thickness of the 1st carrier glass 4 and the 2nd carrier glass 5 is the same as that of the support glass 3, Preferably it is 300 micrometers or more. Furthermore, the thicknesses of the first carrier glass 4 and the second carrier glass 5 are more preferably 300 to 700 μm, and still more preferably 300 to 500 μm.

Thereby, the glass film 2 can be supported by the first carrier glass 4, and breakage of the glass film 2 that occurs when the glass film 2 is peeled off from the first carrier glass 4 can be effectively suppressed. Moreover, the support glass 3 can be supported by the second carrier glass 5, and breakage of the support glass 3 that occurs when the support glass 3 is peeled off from the second carrier glass 5 can be effectively suppressed.

For the first carrier glass 4 and the second carrier glass 5 , the lengths L3 and L4 in the conveyance direction A when the cleaning device 8 is conveyed are equal to or greater than the interval D1 of the conveyance rollers 81 , and the first pinching roller pair 85 of the cleaning device 8 The distance D2 from the second pinching roller pair 86 is preferably equal to or larger than the distance D2. The shape of the 1st carrier glass 4 and the 2nd carrier glass 5 is not specifically limited, For example, it can be set as a rectangle or a square. The first carrier glass 4 and the second carrier glass 5 used in the present embodiment are rectangles having a length of 370 mm and a width (conveying direction A) of 470 mm, and a thickness of 500 μm. In this way, the area of the first carrier glass 4 is larger than that of the glass film 2 , and the area of the second carrier glass 5 is larger than that of the support glass 3 .

[The first lamination process] As shown in FIGS. 1 and 2 , in the first lamination process S2 , the glass film 2 is laminated on the first carrier glass 4 to produce the first laminate 6 . The lower surface 2a of the glass thin film 2 of the first laminated body 6 is the contact surface in the first lamination process S2, and becomes the guarantee surface in the third lamination process S8. The contact surface is the surface on the side that is in contact with the first carrier glass 4 . The guarantee surface is the surface on the side of the manufacturing-related processing such as the formation of components applied in the manufacture of products such as electronic devices. On the other hand, the upper surface 2b of the glass thin film 2 of the first laminate 6 is a cleaned surface that constitutes a part of the upper surface 6b of the first laminate 6 . The cleaning surface is the surface on the side cleaned in the first cleaning step S4.

The lower surface 4a of the first carrier glass 4 of the first laminate 6 constitutes a conveyance surface of the lower surface 6a of the first laminate 6 . The conveyance surface is the surface on the side supported by the conveyance roller 81 (see FIG. 4 ) when conveyed by the cleaning device 8 . On the other hand, a part of the upper surface 4b of the first carrier glass 4 of the first laminate 6 constitutes a part of the upper surface 6b of the first laminate 6, and the other part is a contact surface. The contact surface is the surface on the side opposite to the glass film 2 in contact.

In the 1st lamination process S2, when the glass film 2 and the 1st carrier glass 4 are adhere|attached, they are adhere|attached so that peeling is possible without an adhesive agent, and the 1st laminated body 6 is formed. This phenomenon is presumed to be fixed to each other by hydrogen bonding of hydroxyl groups formed on the contact surface of the glass thin film 2 and the contact surface of the first carrier glass 4 . Alternatively, it can be estimated that the water molecules present at the interface between the glass thin film 2 and the first carrier glass 4 form hydrogen bonds and are fixed to each other.

In the 1st laminated body 6, a part of the glass film 2 protrudes from the edge part of the 1st carrier glass 4, and the protrusion part 2c is formed. This end is the upstream end in the conveying direction when conveyed by the cleaning device 8 . The protruding amount of the protruding portion 2c can be, for example, about 1 to 10 mm. Since the protruding portion 2c is located on the upstream side in the conveying direction in the first cleaning step S4, even if the cleaning member 82 rotates counterclockwise (clockwise in FIG. 1 ), the protruding portion 2c does not catch on the cleaning member 82 ( Refer to Figure 4). Moreover, in the 1st peeling process S6, the glass film 2 and the support glass can be peeled easily by grasping the protruding part 2c of the glass film 2.

In addition, in the first laminate 6, the lamination position of the glass film 2 on the first carrier glass 4 is not limited to the above-mentioned position, for example, the glass film 2 may be laminated at the center of the first carrier glass 4. .

Moreover, as a modification of the 1st laminated body 6, the 1st laminated body 61 shown in FIG. 3 may be used. That is, a plurality of glass films 2 are laminated at different positions on one surface (upper surface 4 b ) of the first carrier glass 4 to produce the first laminate 61 . Thereby, in the first cleaning step S4, a plurality of glass thin films 2 can be cleaned at one time, so that the production efficiency is good.

Furthermore, by setting the first carrier glass 4 to have a larger area, more glass films 2 can be stacked. Moreover, the lamination position of the glass thin film 2 of the 1st carrier glass 4 is not specifically limited, However, as shown in FIG. 3, it is preferable to set it as the position of the image forming protrusion part 2c.

[Second lamination process] As shown in FIGS. 1 and 2 , in the second lamination process S3 , the support glass 3 is laminated on the second carrier glass 5 to prepare the second laminate 7 . The lower surface 3a of the support glass 3 of the second laminate 7 is a contact surface. The contact surface is the surface on the side that is in contact with the second carrier glass 5 . On the other hand, the upper surface 3 b of the support glass 3 of the second laminate 7 is a cleaned surface that constitutes a part of the upper surface 7 b of the second laminate 7 . The cleaning surface is the surface on the side cleaned in the second cleaning step S5.

The lower surface 5 a of the second carrier glass 5 of the second laminate 7 constitutes a conveyance surface of the lower surface 7 a of the second laminate 7 . The conveyance surface is the surface on the side supported by the conveyance drum 81 when conveyed by the cleaning device 8 . On the other hand, a part of the upper surface 5b of the second carrier glass 5 of the second laminate 7 constitutes a part of the upper surface 7b of the second laminate 7, and the other part is a contact surface. The contact surface is the surface on the opposite side to contact with the support glass 3 .

In the 2nd lamination process S3, when the support glass 3 and the 2nd carrier glass 5 are closely_contact|adhered, as mentioned above, it will be adhere|attached to the extent that it is peelable without an adhesive agent, and the 2nd laminated body 7 is formed. Like the first laminate 6 , in the second laminate 7 , a part of the support glass 3 protrudes from the end of the second carrier glass 5 to form a protruding portion 3 c . This end is the upstream end in the conveying direction when conveyed by the cleaning device 8 . The protruding amount of the protruding portion 3c can be, for example, about 1 to 10 mm. By this protruding portion 3c, the same functions and effects as those of the aforementioned protruding portion 2c can be obtained.

In addition, in the second laminate 7, the lamination position of the support glass 3 with respect to the second carrier glass 5 is not limited to the above-mentioned position. For example, the support glass 3 may be laminated at the center of the second carrier glass 5. .

Moreover, as a modification of the 2nd laminated body 7, the 2nd laminated body 71 shown in FIG. 3 may be used. That is, a plurality of support glasses 3 are laminated at different positions on one surface (upper surface 5 b ) of the second carrier glass 5 to produce the second laminate 71 . Thereby, in the second cleaning step S5, a plurality of support glasses 3 can be cleaned at one time, so that the production efficiency is good.

Furthermore, by setting the second carrier glass 5 to have a larger area, more support glasses 3 can be stacked. Moreover, the lamination position of the support glass 3 of the 2nd carrier glass 5 is not specifically limited, However, as shown in FIG. 3, it is preferable to set it as the position of the image forming protrusion part 3c.

[1st cleaning process] The first cleaning step S4 is a step of cleaning the glass film 2 side of the first laminate 6 . The foreign matter on the upper surface 2a of the glass film 2 can be removed by the first cleaning step S4, and the generation of air bubbles between the glass film 2 and the support glass 3 can be reduced in the third lamination step S8.

FIG. 4 is a side view of the main part of the cleaning device 8 used in the first cleaning step S4. The cleaning device 8 includes a plurality of conveying drums 81 , a cleaning member 82 , a plurality of cleaning nozzles 83 , a pair of air knives 84 , a first pair of pinching drums 85 , and a pair of second pinching drums 86 .

The conveyance roller 81 is a roller that conveys while supporting the lower surface 6a of the first layered body 6 . The conveyance roller 81 is arrange|positioned with the space|interval D1 covering all the area|regions from the start point to the end point of the washing|cleaning apparatus 8 except between the 1st pinching roller pair 85 and the 2nd pinching roller pair 86. As shown in FIG. The conveyance roller 81 has a shaft portion 811 that rotates in the conveyance direction A, and a plurality of disk bodies 812 fixed to the shaft portion 811 at equal intervals. An annular buffer member (not shown) made of resin is attached to the outer peripheral portion of the disc body 812 . When a driving force from a driving source (not shown) is input to the shaft portion 811, the shaft portion 811 and the disk body 812 rotate in the conveying direction A, and the first layered body 6 supported by the disk body 812 moves in the conveying direction A. be transported.

The cleaning member 82 is a member for cleaning the upper surface 6b of the first laminate 6 . The cleaning member 82 is arranged above the conveyance drum 81 . As the cleaning member 82, for example, a cleaning brush such as a brush roller or a cleaning foam such as a foam roller can be used. The cleaning member 82 of the present embodiment is composed of a conventional shaft portion 821 that rotates in the opposite direction to the conveyance direction A, and a brush cylinder having a cylindrical brush 822 fixed to the shaft portion 821 . When a driving force from a driving source (not shown) is input to the shaft portion 821, the shaft portion 821 and the brush 822 rotate in the opposite direction to the conveyance direction A, and the brush 822 contacts the upper surface 6b of the first laminate 6 to scrape off foreign matter. .

The cleaning nozzle 83 is a member that sprays the cleaning agent. The cleaning nozzles 83 are located above the conveyance rollers 81, and are arranged so as to spray the cleaning agent between the first pinching roller pair 85 and the cleaning member 82, and between the cleaning member 82 and the second pinching roller pair 86, respectively. . The cleaning agent sprayed from the cleaning nozzle 83 is sprayed on the upper surface 6 b of the first layered body 6 . Foreign matter on the upper surface 6b of the first layered body 6 can be easily removed by the detergent.

The air knife 84 is a member that ejects compressed air. The air knife 84 is downstream of the conveyance direction of the 2nd pinching roller pair 86, and is arrange|positioned so that the upper direction and the downward direction may mutually oppose rather than the conveyance roller 81. As shown in FIG. The compressed air ejected from the air knife 84 is blown onto the upper surface 6b and the lower surface 6a of the first layered body 6 . Thereby, the droplets of the detergent remaining on the upper surface 6b and the lower surface 6a of the first layered body 6 are removed. In addition, the air knife 84 arrange|positioned below the conveyance drum 81 may be abbreviate|omitted.

The 1st pinching roller pair 85 is arrange|positioned upstream of the conveyance direction of the cleaning member 82, and conveys while pinching the upper surface 6b and the lower surface 6a of the 1st laminated body 6. In addition, the conveyance roller 81 is not arrange|positioned between the 1st pinching roller pair 85 and the cleaning member 82. The first pinching roller pair 85 has an upper roller 851 which is arranged above the conveying roller 81 and abuts on the upper surface 6b of the first layered body 6 , and is arranged at the same height as the conveying roller 81 and abuts the first roller 851 . The lower roller 852 of the lower surface 6a of the laminated body 6.

The upper roller 851 and the lower roller 852 have a shaft portion 853 that rotates in the conveyance direction A, and a plurality of rubber rollers 854 fixed to the shaft portion 853 at equal intervals. In addition, the rubber roller 854 may be a long roller arranged along the shaft portion 853 . Moreover, as long as the rubber roller 854 can hold the first laminated body 6 without being damaged, it may be used as a roller using other resins or the like.

When a driving force from a driving source (not shown) is input to the shaft portion 853, the shaft portion 853 and the rubber roller 854 are rotated in the conveying direction A, and the first layered body 6 is conveyed while being held by the upper and lower rubber rollers 854. Transfer in direction A. By conveying the first layered body 6 while being held by the first pair of pinching rollers 85 , the first layered body 6 does not need to be rotated and conveyed even before the first layered body 6 reaches the pair of second pinching rollers 86 . The cleaning member 82 in the opposite direction to the direction A is pushed back and conveyed.

The second pinching roller pair 86 is disposed downstream in the conveyance direction of the cleaning member 82 and conveys while pinching the upper surface 6b and the lower surface 6a of the first layered body 6 . In addition, the conveyance roller 81 is not arrange|positioned between the cleaning member 82 and the 2nd pinching roller pair 86. As shown in FIG. The second pinching roller pair 86 has the same structure as the first pinching roller pair 85 . That is, the upper roller 861 and the lower roller 862 are provided. Then, the upper roller 861 and the lower roller 862 have a shaft portion 863 and a plurality of rubber rollers 864 .

When a driving force from a driving source (not shown) is input to the shaft portion 863, the shaft portion 863 and the rubber roller 864 are rotated in the conveying direction A, and the first layered body 6 is conveyed while being held by the upper and lower rubber rollers 864. Transfer in direction A. Since the first layered body 6 is conveyed while being held by the second pair of pinching rollers 86 , the first layered body 6 is not rotated to be conveyed even after the first layered body 6 has passed through the pair of first pinching rollers 85 . The cleaning member 82 in the opposite direction to the direction A is pushed back and conveyed.

As mentioned above, the conveyance roller 81 is not arrange|positioned between the 1st pinching roller pair 85 and the 2nd pinching roller pair 86. As shown in FIG. Therefore, the space|interval D2 of the 1st pinching roller pair 85 and the 2nd pinching roller pair 86 tends to be wider than the space|interval D1 of the conveyance roller 81. Even if the length L1 of the glass film 2 and the length L2 of the support glass 3 are wider than the interval D1 of the conveyance rollers 81, if the interval D2 of the first pinching roller pair 85 and the second pinching roller pair 86 is narrower than the interval D2 of the first pinching roller pair 85 and the second pinching roller pair 86, the glass film 2 and the supporting glass 3 alone are also difficult to transport.

However, as in the present embodiment, the first carrier glass 4 whose length L3 in the conveying direction A is longer than the interval D1 and the interval D2 can be stacked and the length L4 in the conveying direction A is longer than the interval D1 and the interval D2 The second carrier glass 5 conveys the glass film 2 and the support glass 3 .

That is, since the lengths L3 and L4 in the conveyance direction A of the first carrier glass 4 and the second carrier glass 5 are equal to or larger than the interval D2 between the first pinching roller pair 85 and the second pinching roller pair 86, the first pinching roller can be used. The pair 85 and the second holding roller pair 86 hold the first layered body 6 at the same time. Therefore, the 1st laminated body 6 can be passed from the 1st pinching roller pair 85 to the 2nd pinching roller pair 86 without falling off. In other words, since the first layered body 6 cleaned by the cleaning member 82 is in a state of being held by at least one of the first pinching roller pair 85 and the second pinching roller pair 86, the first pinching roller pair Either 85 or the second pinching roller pair 86 is fixed. Therefore, even in the existing cleaning device 8 in which the interval D2 between the first pinching roller pair 85 and the second pinching roller pair 86 is wide, the small glass film 2 and the supporting glass 3 can be conveyed without changing the cleaning device 8 .

In addition, the 1st cleaning process S4 may include the process of washing with pure water before the above-mentioned process and washing with alkaline ionized water after the above-mentioned process from the viewpoint of improving the cleaning effect. For these processes, the same device as the cleaning device 8 described above can be used.

[The second cleaning process] The second cleaning step S5 is a step of cleaning the support glass 3 side of the second laminated body 7 . The second cleaning step S5 can be performed in the same manner as the first cleaning step S4 using the aforementioned cleaning device 8, so detailed descriptions are omitted.

In addition, the cleaning method used in the first cleaning process S4 and the second cleaning process S5 is not limited to the above-mentioned method if it is conveyed using a conveying roller, and the cleaning method used for cleaning glass products can be used. general method. For example, ultrasonic cleaning, photochemical cleaning using ultraviolet light and ozone, and physical cleaning using plasma can be used alone or in appropriate combination. In particular, in the first cleaning process S4 and the second cleaning process S5 described above, the first layered body 6 and the second layered body 7 are held between the first and second holding roller pairs 85 and 86 while holding the first layered body 6 and the second layered body 7. The wiping cleaning is performed using the cleaning member 82 , but the first pinching roller pair 85 and the second pinching roller pair 86 may be omitted when performing the cleaning cleaning by washing with washing water without using the cleaning member 82 .

[1st peeling process] As shown in FIG. 1, the 1st peeling process S6 is a process of peeling the glass thin film 2 from the 1st laminated body 6 after the 1st cleaning process S4. In the 1st peeling process S6, the glass film 2 can be peeled easily from the 1st carrier glass 4 by grasping the protrusion part 2c of the glass film 2 and peeling.

[Second peeling process] As shown in FIG. 1, the 2nd peeling process S7 is a process of peeling the support glass 3 from the 2nd laminated body 7 after the 2nd cleaning process S5. In the second peeling step S7 , the support glass 3 can be easily peeled off from the second carrier glass 5 by peeling by grasping the protruding portion 3 c of the support glass 3 .

In addition, the 1st carrier glass 4 after the 1st peeling process S6 and the 2nd carrier glass 5 after the 2nd peeling process S7 can be used again in the 1st lamination process S2 and the 2nd lamination process S3.

[The third lamination process] As shown in FIG. 1 , the third lamination process S8 is to bond the cleaned surface of the glass film 2 after the first peeling process S6 and the cleaned surface of the support glass 3 after the second peeling process S7 to form a glass film The construction of the laminate 1. In the third lamination process S8, the glass film 2 is placed on the flat lamination table 9 with the cleaned surface (upper surface 2b) facing upward, and the support glass 3 is placed thereon with the cleaned surface (upper surface 3b) facing upward. Connect below. Thereby, the glass thin film 2 and the support glass 3 are fixed to such a degree that they can be peeled off without an adhesive, and the glass thin film laminated body 1 is formed in the same manner as the above-mentioned first laminated body 6 and second laminated body 7 .

In addition, the 3rd lamination process S8 may be performed under reduced pressure. Thereby, the generation of air bubbles between the glass film 2 and the support glass 3 can be reduced.

[Second Embodiment] Next, the manufacturing method of 2nd Embodiment is demonstrated. The same reference numerals are attached to the same members as those used in the first embodiment, and the detailed description thereof will be omitted.

As shown in FIG. 5 , the manufacturing method of the second embodiment includes: a preparation step S11 of preparing a glass film 2 , a support glass 3 , and a carrier glass 12 having an area larger than that of the glass film 2 and the support glass 3 ; In different positions, the first lamination process S12 of laminating the glass film 2 and the supporting glass 3 to make the laminated body 13, the cleaning process S13 of cleaning the glass thin film 2 and the supporting glass 3 side of the laminated body 13, and the cleaning process S13. The laminated body 13 after the cleaning process S13, the peeling process S14 of peeling off the glass film 2 and the support glass 3, and the glass film 2 and the support glass 3 after the peeling process S14 The cleaned surfaces are bonded to each other to produce glass The second lamination process S15 of the thin film laminate 1 is performed.

According to this manufacturing method, the same effect as the manufacturing method of 1st Embodiment can be acquired. In addition, the glass film 2 and the support glass 3 can be cleaned at one time, so the production efficiency is good.

[preparation process] In the preparation process S11, the glass film 2 and the support glass 3 to be prepared are the same as those of the first embodiment. In addition, the prepared carrier glass 12 is the same as that of the 1st carrier glass 4 of 1st Embodiment.

[The first lamination process] In the 1st lamination process S12, the glass film 2 and the support glass 3 are laminated|stacked on the different position of one surface of the carrier glass 12, and the laminated body 13 is produced. In this case, the first carrier glass 4 and the second carrier glass 5 of the first embodiment are used as one carrier glass 12 .

In the laminated body 13, a part of the glass thin film 2 and the support glass 3 protrudes from the edge part of the carrier glass 12, and the protrusion parts 2c and 3c are formed. This end is the upstream end in the conveying direction when conveyed by the cleaning device 8 . Furthermore, in the laminated body 13, the lamination position of the glass film 2 of the carrier glass 12 and the support glass 3 is not limited to the above-mentioned positions. For example, the glass film 2 and the support glass are laminated side by side at the center of the carrier glass 12. 3 is also possible.

In addition, by making the carrier glass 12 larger in area, more glass films 2 and support glass 3 can be stacked. That is, the number of the glass film 2 and the support glass 3 to be laminated on one carrier glass may be one or more, respectively. By laminating more glass films 2 and supporting glass 3 on one carrier glass, the cleaning process can be made more efficient.

[cleaning process] The cleaning step S13 is a step of cleaning the glass thin film 2 and the support glass 3 side of the laminate 13 . The cleaning process S13 can be performed in the same manner as the first cleaning process S4 of the first embodiment using the cleaning device 8 of the first embodiment. By cleaning one sheet of the laminated body 13 in the cleaning step S13, foreign matter on the upper surface 2b of the glass film 2 and the upper surface 3b of the support glass 3 can be removed at one time.

[Peeling process] The peeling step S14 is a step of peeling off the glass film 2 and the support glass 3 from the laminate 13 after the cleaning step S13. In the peeling step S14, by grasping the protruding portion 2c of the glass film 2 and the protruding portion 3c of the support glass 3, it can be easily peeled off, respectively. In addition, the carrier glass 12 after the peeling process S14 can be used again in the 1st lamination process S12.

[Second lamination process] The second lamination process S15 is a process of laminating the cleaned surface of the glass film 2 and the cleaned surface of the support glass 3 after the peeling process S14 to produce the glass thin film laminate 1 . The second lamination process S15 can be performed in the same manner as the third lamination process S8 of the first embodiment.

In the above-described embodiment, it is difficult to handle the glass thin film 2 alone, so it is necessary to make the glass thin film laminate 1 to facilitate the handling. Conversely, when using a glass plate that is the same size as the glass film 2 and thicker than the glass film 2 and can be handled individually, it is not necessary to prepare a glass film laminate. That is, the support glass 3 is not required, as long as the guarantee surface of the glass plate can be washed.

Moreover, the cleaning method of a glass plate should only include the steps of preparing a plurality of glass plates, a preparation process for a carrier glass having an area larger than the glass plate, and laminating a plurality of glass plates at different positions on one side of the carrier glass to produce a laminate. The process, the cleaning process of cleaning the glass plate side of the laminated body, and the peeling process of peeling off the glass plate from the laminated body after the cleaning process may be sufficient. The preparation process, the lamination process, the cleaning process, and the peeling process can be performed in the preparation process S11, the first lamination process S12, the cleaning process S13, and the peeling process S14 in the second embodiment, and the glass film 2 and the support glass 3 can be separated into Replacement with glass plate to achieve. In addition, in this embodiment, the guarantee surface of a glass plate is laminated|stacked on the upper surface side of the glass plate of a laminated body.

According to this method of cleaning a glass plate, it is possible to transport a small-sized glass plate that cannot be transported by the cleaning device 8 (refer to FIG. 4 ) used in the cleaning process without changing the cleaning device 8 , so that the small-sized glass plate can be cleaned. glass plate. In addition, multiple glass plates can be washed at one time, so the production efficiency is good.

In addition, in this specification, when considering a material, a size, and a use, when the process of a single body can be performed, what laminated|stacked on a carrier glass is demonstrated as a glass plate. Therefore, even if the glass plate is within the thickness range of the above-mentioned glass film 2, it can be used as a glass plate when it can be processed as a single body.

1: Glass film laminate 2: glass film 2a: Below the glass film 2b: Above the glass film 2c: Protruding part 3: Support glass 3c: Protruding part 4: 1st carrier glass 4a: Underside of the first carrier glass 4b: Top of the first carrier glass 5: 2nd carrier glass 5a: Underside of the second carrier glass 5b: The upper surface of the second carrier glass 6: 1st layered body 6a: Bottom of the first layered body 6b: Top of the first layered body 7: Layer 2 body 7a: Bottom of the second layered body 7b: The upper surface of the second layered body 8: Cleaning device 12: Carrier glass 13: Laminate 61: 1st layered body 81: Conveying roller 82: Cleaning components 83: Clean the nozzle 84: Air Knife 85: 1st clamping roller pair 86: 2nd clamping roller pair 811: Shaft 812: disc body 821: Shaft 822: Brush 851: Upper Roller 852: Lower Roller 853: Shaft 854: Rubber Roller A: Conveying direction D1: Interval D2: Interval L1: length L2: length L3: length L4: length S1: Preparation works S2: 1st lamination process S3: The second lamination process S4: 1st cleaning process S5: The second cleaning process S6: 1st peeling process S7: The second peeling process S8: 3rd lamination process S11: Preparation works S12: The first lamination process S13: Cleaning process S14: Stripping Project S15: The second lamination process

[ Fig. 1] Fig. 1 is a diagram illustrating a method for producing the glass thin film laminate of the first embodiment. [ Fig. 2] Fig. 2 is a plan view of the first laminate and the second laminate of the first embodiment. [ Fig. 3] Fig. 3 is a plan view of a first layered body and a second layered body of a modified example. [ Fig. 4] Fig. 4 is a schematic diagram of the cleaning apparatus according to the first embodiment. It is a figure explaining the manufacturing method of the glass thin film laminated body of 2nd Embodiment.

1: Glass film laminate

2: glass film

2a: Below the glass film

2b: Above the glass film

2c: Protruding part

3: Support glass

3a: Top of support glass

3b: Underside of support glass

3c: Protruding part

4: 1st carrier glass

4a: Underside of the first carrier glass

4b: Top of the first carrier glass

5: 2nd carrier glass

5a: Top of the second carrier glass

5b: Underside of the second carrier glass

6: 1st layered body

6a: Bottom of the first layered body

6b: Top of the first layered body

7: Layer 2 body

7a: Bottom of the second layered body

7b: The upper surface of the second layered body

8: Cleaning device

9: Fitting table

82: Cleaning components

L1: length

L2: length

L3: length

L4: length

S1: Preparation works

S2: 1st lamination process

S3: The second lamination process

S4: 1st cleaning process

S5: The second cleaning process

S6: 1st peeling process

S7: The second peeling process

S8: 3rd lamination process

Claims (6)

A method for manufacturing a glass film laminate, which is a method for manufacturing a glass film laminate in which a glass film is laminated on a support glass, and is characterized by comprising: The preparation process is to prepare the glass film, the support glass, a first carrier glass with an area larger than the glass film, and a second carrier glass with an area larger than the support glass; The first lamination process is to laminate the glass film on the first carrier glass to produce a first laminate; The second lamination process is to laminate the support glass on the second carrier glass to produce a second laminate; The first cleaning step is to clean the glass film side of the first laminate; The second cleaning step is to clean the support glass side of the second laminate; The first peeling step is to peel off the glass film from the first laminate after the first cleaning step; The second peeling step is to peel off the support glass from the second laminate after the second cleaning step; and In the third lamination step, the glass film after the first peeling step and the support glass after the second peeling step are bonded to the cleaned surfaces to produce the glass film laminate. The method for producing a glass thin film laminate according to claim 1, wherein: The cleaning apparatus used in the above-mentioned first cleaning process and the above-mentioned second cleaning process is provided with: A plurality of conveying rollers are conveyed while supporting the lower surface of the first layered body and the lower surface of the second layered body; a cleaning member for cleaning the upper surface of the first layered body and the upper surface of the second layered body; The first pair of pinching rollers is disposed upstream in the conveying direction of the cleaning member, and conveys while pinching the upper and lower surfaces of the first layered body and the upper and lower surfaces of the second layered body; and The second pinching roller pair is disposed downstream of the cleaning member in the conveying direction, and conveys the upper and lower surfaces of the first layered body and the upper and lower surfaces of the second layered body while pinching them; The space|interval of the said 1st pinching roll pair and the said 2nd pinching roll pair is below the length of the conveyance direction of the said 1st carrier glass and the said 2nd carrier glass. The method for producing a glass thin film laminate according to claim 2, wherein: In the said 1st laminated body, a part of the said glass film protrudes from the upstream side edge part of the conveyance direction of the said 1st carrier glass; In the said 2nd laminated body, a part of the said support glass protrudes from the upstream side edge part of the conveyance direction of the said 2nd carrier glass. The method for producing a glass thin film laminate according to any one of claims 1 to 3, wherein, The first laminate is produced by laminating a plurality of the glass films at different positions on one side of the first carrier glass; The said 2nd laminated body is produced by laminating|stacking a plurality of said support glasses on different positions of one surface of the said 2nd carrier glass. A method for manufacturing a glass film laminate, which is a method for manufacturing a glass film laminate in which a glass film is laminated on a support glass, and is characterized by comprising: The preparation process is to prepare the glass film, the support glass, and the carrier glass whose area is larger than the aforementioned glass film and the aforementioned support glass; The first lamination process is to laminate the glass film and the support glass at different positions on one side of the carrier glass to produce a laminate; The cleaning process is to clean the glass film and the supporting glass side of the laminate; The peeling process is to peel off the glass film and the support glass from the laminate after the cleaning process; and In the second lamination process, the glass film and the support glass after the peeling process are bonded to the cleaned surfaces to produce the glass film laminate. A method for cleaning a glass plate, characterized by comprising: The preparation project is to prepare a plurality of glass plates and a carrier glass whose area is larger than the aforementioned glass plates; The lamination process is to laminate a plurality of the aforementioned glass plates at different positions on one side of the aforementioned carrier glass to make a laminate; The cleaning process is to clean the glass plate side of the laminate; and The peeling step is to peel off the glass plate from the laminate after the cleaning step.

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