TW202227267A - Method of manufacturing glass film laminate and method of washing glass sheet - Google Patents
Method of manufacturing glass film laminate and method of washing glass sheet Download PDFInfo
- Publication number
- TW202227267A TW202227267A TW110143658A TW110143658A TW202227267A TW 202227267 A TW202227267 A TW 202227267A TW 110143658 A TW110143658 A TW 110143658A TW 110143658 A TW110143658 A TW 110143658A TW 202227267 A TW202227267 A TW 202227267A
- Authority
- TW
- Taiwan
- Prior art keywords
- glass
- laminate
- cleaning
- film
- carrier
- Prior art date
Links
- 239000011521 glass Substances 0.000 title claims abstract description 494
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims description 150
- 238000005406 washing Methods 0.000 title abstract description 13
- 238000003475 lamination Methods 0.000 claims abstract description 58
- 238000010030 laminating Methods 0.000 claims abstract description 13
- 238000004140 cleaning Methods 0.000 claims description 176
- 239000010408 film Substances 0.000 claims description 138
- 239000010409 thin film Substances 0.000 claims description 44
- 238000002360 preparation method Methods 0.000 claims description 18
- 238000011144 upstream manufacturing Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 3
- 239000012459 cleaning agent Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000005368 silicate glass Substances 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000003599 detergent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Laminated Bodies (AREA)
- Joining Of Glass To Other Materials (AREA)
Abstract
Description
本發明係關於玻璃薄膜層積體的製造方法及玻璃板的洗淨方法。The present invention relates to a method for producing a glass thin film laminate and a method for cleaning a glass plate.
近年來,於平面面板顯示器等的電子裝置所使用的基板及護蓋玻璃,實現更進一步的薄型化與可撓性的需求提高。對玻璃基板賦予可撓性來說,讓玻璃基板薄型化是有效方法,提案有厚度200μm以下的玻璃薄膜。In recent years, substrates and cover glasses used in electronic devices such as flat panel displays have been increasingly required to achieve further thinning and flexibility. Thinning the glass substrate is an effective method for imparting flexibility to the glass substrate, and a glass thin film having a thickness of 200 μm or less is proposed.
對於玻璃基板,進行加工處理及洗淨處理等各種製造關聯處理。然而,薄型化玻璃基板時,因為玻璃是脆性材料,因為些許的應力變化而導致破損,在進行各種電子裝置的製造關聯處理時,有處理困難的問題。For glass substrates, various manufacturing-related processes such as processing and cleaning are performed. However, when the glass substrate is thinned, since glass is a brittle material, it is broken due to a slight change in stress, and there is a problem that it is difficult to handle when performing processing related to the manufacture of various electronic devices.
因此,為了提升薄型化之玻璃薄膜的可操作性,提案有於支持玻璃上層積玻璃薄膜之玻璃薄膜層積體(參照專利文獻1)。依據此種玻璃薄膜層積體,即使使用單體缺乏強度及剛性的玻璃薄膜,也因為支持玻璃的剛性高,故在處理時作為層積體整體容易進行處理。又,處理結束後,可從支持玻璃剝離玻璃薄膜。將包含玻璃薄膜層積體的厚度設為與先前之玻璃基板的厚度相同的話,也可使用先前之玻璃基板用的電子裝置製造線來製造電子裝置。 [先前技術文獻] [專利文獻] Therefore, in order to improve the handleability of the thinned glass film, a glass film laminate in which a glass film is laminated on a support glass has been proposed (see Patent Document 1). According to such a glass film laminate, even if a glass film lacking strength and rigidity is used alone, since the rigidity of the support glass is high, it is easy to handle the laminate as a whole at the time of handling. Moreover, after completion|finish of a process, the glass film can be peeled off from a support glass. If the thickness of the laminated body including the glass thin film is made the same as the thickness of the conventional glass substrate, an electronic device can also be manufactured using the electronic device manufacturing line for the conventional glass substrate. [Prior Art Literature] [Patent Literature]
[專利文獻1] 國際公開第2015/056602號[Patent Document 1] International Publication No. 2015/056602
[發明所欲解決之課題][The problem to be solved by the invention]
對於為了於支持玻璃上層積玻璃薄膜來說,必須要讓支持玻璃與玻璃薄膜的貼合面成為清淨的狀態,必須在貼合前洗淨支持玻璃與玻璃薄膜。因應各種電子裝置的尺寸,要求各種玻璃薄膜層積體的尺寸,發現為了小型的電子裝置用而製作小尺寸的玻璃薄膜層積體時,使用大型的玻璃薄膜層積體的製造線所用之洗淨裝置的話,會發生以下所述的問題。In order to laminate the glass film on the support glass, the bonding surface of the support glass and the glass film must be in a clean state, and the support glass and the glass film must be washed before bonding. According to the size of various electronic devices, the size of various glass thin film laminates is required, and it is found that when producing small-sized glass thin film laminates for small electronic devices, it is used in the production line of large glass thin film laminates. If the device is cleaned, the following problems will occur.
在洗淨裝置內,為了讓洗淨液順利地留下,使用複數搬送滾筒隔開一定間隔而配置的搬送裝置,搬送玻璃薄膜及支持玻璃。In the cleaning apparatus, in order to allow the cleaning liquid to remain smoothly, a conveying apparatus in which a plurality of conveying rollers are arranged at regular intervals is used to convey the glass film and the supporting glass.
然而,使用現存之大型的玻璃薄膜層積體用的洗淨裝置時,複數搬送滾筒的間隔過寬,比其間隔短之小尺寸的玻璃薄膜及支持玻璃會脫落,故會發生無法搬送的問題。所以,對於為了洗淨小尺寸的玻璃薄膜及支持玻璃來說,必須重新準備搬送滾筒的間隔窄的洗淨裝置,變成大規模的變更。However, when using the existing cleaning device for a large glass film laminate, the interval between the plurality of conveying rollers is too wide, and the glass film and the supporting glass having a smaller size than the interval may fall off, resulting in a problem that the conveyance cannot be carried out. . Therefore, in order to wash a small-sized glass film and a support glass, it is necessary to re-prepare a washing apparatus with a narrow interval between the conveying rollers, which is a large-scale change.
本發明的目的係提供可利用不變更洗淨裝置即可搬送無法以搬送滾筒的間隔寬之現存的洗淨裝置即可搬送之小尺寸的玻璃薄膜及支持玻璃,來製作小尺寸的玻璃薄膜層積體之玻璃薄膜層積體的製造方法。又,本發明的目的係提供可利用不變更洗淨裝置即可搬送無法以搬送滾筒的間隔寬之現存的洗淨裝置搬送之小尺寸的玻璃板,來洗淨小尺寸的玻璃板之玻璃板的洗淨方法。 [用以解決課題之手段] An object of the present invention is to provide a small-sized glass film layer that can be produced by using a small-sized glass film and a support glass that can be conveyed without changing the cleaning device and which cannot be conveyed by an existing cleaning device that has a wide interval between the conveying drums. A method for producing an integrated glass thin film laminate. Furthermore, an object of the present invention is to provide a glass plate that can be used to clean a small-sized glass plate without changing the cleaning device by conveying a small-sized glass plate that cannot be conveyed by an existing cleaning device that has a wide interval between conveying drums. cleaning method. [means to solve the problem]
本發明是一種玻璃薄膜層積體的製造方法,係於支持玻璃上層積玻璃薄膜之玻璃薄膜層積體的製造方法,其特徵為包含:準備工程,係準備前述玻璃薄膜、前述支持玻璃、面積大於前述玻璃薄膜的第1載體玻璃、及面積大於前述支持玻璃的第2載體玻璃;第1層積工程,係於前述第1載體玻璃層積前述玻璃薄膜以製作第1層積體;第2層積工程,係於前述第2載體玻璃層積前述支持玻璃以製作第2層積體;第1洗淨工程,係洗淨前述第1層積體的前述玻璃薄膜側;第2洗淨工程,係洗淨前述第2層積體的前述支持玻璃側;第1剝離工程,係從前述第1洗淨工程後的前述第1層積體,剝離前述玻璃薄膜;第2剝離工程,係從前述第2洗淨工程後的前述第2層積體,剝離前述支持玻璃;及第3層積工程,係將前述第1剝離工程後的前述玻璃薄膜與前述第2剝離工程後的前述支持玻璃,貼合被洗淨的面彼此,以製作前述玻璃薄膜層積體。The present invention is a method for producing a glass film laminate, which is a method for producing a glass film laminate in which a glass film is laminated on a support glass, and is characterized by comprising: a preparation process for preparing the glass film, the support glass, the area of A first carrier glass larger than the glass film, and a second carrier glass larger in area than the support glass; the first lamination process is to laminate the glass film on the first carrier glass to produce a first laminate; the second The lamination process is to laminate the support glass on the second carrier glass to produce a second laminate; the first cleaning process is to clean the glass film side of the first laminate; the second cleaning process , is to clean the support glass side of the second laminate; the first peeling process is to peel off the glass film from the first laminate after the first cleaning process; the second peeling process is from In the second laminate after the second cleaning process, the support glass is peeled off; and in the third laminate process, the glass film after the first peeling process and the support glass after the second peeling process are separated. , and the cleaned surfaces were bonded to each other to produce the glass thin film laminate.
依據前述的構造,藉由使大尺寸的第1載體玻璃及第2載體玻璃支持小尺寸的玻璃薄膜及支持玻璃,即使是搬送滾筒的間隔寬之現存的洗淨裝置,也可不變更洗淨裝置即可進行搬送,可製作小尺寸的玻璃薄膜層積體。According to the above-mentioned structure, by making the large-sized first carrier glass and the second carrier glass support the small-sized glass film and the support glass, it is not necessary to change the cleaning device even in the existing cleaning device in which the interval between the conveying rollers is wide. It can be transported and a small-sized glass film laminate can be produced.
於前述之玻璃薄膜層積體的製造方法中,前述第1洗淨工程及前述第2洗淨工程中所用的洗淨裝置,係具備:複數搬送滾筒,係一邊支持前述第1層積體的下面及前述第2層積體的下面,一邊進行搬送;洗淨構件,係洗淨前述第1層積體的上面及前述第2層積體的上面;第1挾持滾筒對,係配置於前述洗淨構件的搬送方向上游,一邊挾持前述第1層積體的上下面及前述第2層積體的上下面,一邊進行搬送;及第2挾持滾筒對,係配置於前述洗淨構件的搬送方向下游,一邊挾持前述第1層積體的上下面及前述第2層積體的上下面,一邊進行搬送;前述第1挾持滾筒對與前述第2挾持滾筒對的間隔,係為前述第1載體玻璃及前述第2載體玻璃之搬送方向的長度以下為佳。In the above-mentioned method for producing a glass thin film laminate, the cleaning device used in the first cleaning step and the second cleaning step includes a plurality of conveying rollers that support the first layered body. The lower surface and the lower surface of the second layered body are conveyed while being transported; the cleaning member is used to clean the upper surface of the first layered body and the upper surface of the second layered body; the first pinching roller pair is arranged on the above-mentioned The cleaning member is conveyed upstream in the conveyance direction while pinching the upper and lower surfaces of the first layered body and the upper and lower surfaces of the second layered body; and a pair of second pinching rollers is arranged in the conveyance of the cleaning member In the downstream direction, conveyance is performed while pinching the upper and lower surfaces of the first layered body and the upper and lower surfaces of the second layered body; the interval between the first pinching roller pair and the second pinching roller pair is the first The length in the conveyance direction of the carrier glass and the above-mentioned second carrier glass is preferably equal to or less than the length in the conveyance direction.
依據前述的構造,在洗淨構件所致之洗淨中,至少第1挾持滾筒對與第2挾持滾筒對的任一方可挾持第1層積體及第2層積體,故洗淨構件所致之洗淨中,可藉由任一方的挾持滾筒對,固定第1層積體及第2層積體。According to the above-mentioned structure, in the cleaning by the cleaning member, at least one of the pair of first pinching rollers and the pair of second pinching rollers can pinches the first laminate and the second laminate, so the cleaning member is During the cleaning, the first layered body and the second layered body can be fixed by any one of the holding roller pairs.
又,於前述之玻璃薄膜層積體的製造方法中,於前述第1層積體中,前述玻璃薄膜的一部分從前述第1載體玻璃的搬送方向上游側端部突出;於前述第2層積體中,前述支持玻璃的一部分從前述第2載體玻璃的搬送方向上游側端部突出為佳。Moreover, in the manufacturing method of the said glass thin film laminated body, in the said 1st laminated body, a part of the said glass thin film protrudes from the conveyance direction upstream side edge part of the said 1st carrier glass; In the body, it is preferable that a part of the said support glass protrudes from the upstream side edge part of the conveyance direction of the said 2nd carrier glass.
依據前述的構造,於第1剝離工程及第2剝離工程中,藉由抓住玻璃薄膜的突出部分及支持玻璃的突出部分以進行剝離,可容易剝離玻璃薄膜及支持玻璃。又,藉由突出部分為搬送方向上游側,讓突出部分不會勾到洗淨構件。According to the aforementioned structure, in the first peeling step and the second peeling step, the glass film and the support glass can be easily peeled off by grasping the protruding portion of the glass film and the protruding portion of the support glass to peel. In addition, since the protruding portion is on the upstream side in the conveying direction, the protruding portion is prevented from being caught by the cleaning member.
又,於前述之玻璃薄膜層積體的製造方法中,前述第1層積體,係於前述第1載體玻璃的一面之不同位置,層積複數前述玻璃薄膜而製作;前述第2層積體,係於前述第2載體玻璃的一面之不同位置,層積複數前述支持玻璃而製作為佳。Furthermore, in the above-mentioned method for producing a glass film laminate, the first laminate is produced by laminating a plurality of the glass films at different positions on one surface of the first carrier glass; and the second laminate is produced. It is preferable to laminate a plurality of the above-mentioned supporting glasses at different positions on one side of the above-mentioned second carrier glass.
依據前述的構造,可一次洗淨複數玻璃薄膜與複數支持玻璃,故生產效率佳。According to the aforementioned structure, a plurality of glass films and a plurality of supporting glasses can be cleaned at one time, so the production efficiency is good.
又,本發明是一種玻璃薄膜層積體的製造方法,其特徵為包含:準備工程,係準備玻璃薄膜、支持玻璃、及面積大於前述玻璃薄膜及前述支持玻璃的載體玻璃;第1層積工程,係於前述載體玻璃的一面之不同位置,層積前述玻璃薄膜及前述支持玻璃以製作層積體;洗淨工程,係洗淨前述層積體的前述玻璃薄膜及前述支持玻璃側;剝離工程,係從前述洗淨工程後的前述層積體,剝離前述玻璃薄膜及前述支持玻璃;及第2層積工程,係將前述剝離工程後的前述玻璃薄膜及前述支持玻璃,貼合被洗淨的面彼此,以製作前述玻璃薄膜層積體。Furthermore, the present invention is a method for producing a glass film laminate, which is characterized by comprising: a preparation process for preparing a glass film, a support glass, and a carrier glass having an area larger than the glass film and the support glass; a first lamination process , in different positions on one side of the carrier glass, laminating the glass film and the support glass to make a laminate; cleaning process, cleaning the glass film and the support glass side of the laminate; peeling process In the second lamination process, the glass film and the support glass after the peeling process are laminated and cleaned. face each other to produce the aforementioned glass thin film laminate.
依據前述的構造,藉由使大尺寸的載體玻璃支持小尺寸的玻璃薄膜及支持玻璃,即使是搬送滾筒的間隔寬之現存的洗淨裝置,也可不變更洗淨裝置即可進行搬送,可製作小尺寸的玻璃薄膜層積體。又,可一次洗淨玻璃薄膜與支持玻璃,故生產效率佳。According to the above-mentioned structure, by making the large-sized carrier glass support the small-sized glass film and the supporting glass, even an existing cleaning device with a wide gap between the transfer rollers can be transported without changing the cleaning device, and can be produced. Small-sized glass film laminates. In addition, the glass film and the support glass can be cleaned at one time, so the production efficiency is good.
又,本發明的玻璃板的洗淨方法,其特徵為包含:準備工程,係準備複數玻璃板,與面積大於前述玻璃板的載體玻璃;層積工程,係於前述載體玻璃的一面之不同位置,層積複數前述玻璃板以製作層積體;洗淨工程,係洗淨前述層積體的前述玻璃板側;及剝離工程,係從前述洗淨工程後的前述層積體,剝離前述玻璃板。Moreover, the cleaning method of the glass plate of the present invention is characterized by comprising: a preparation process for preparing a plurality of glass plates and a carrier glass having an area larger than that of the glass plate; and a lamination process at different positions on one side of the carrier glass , laminating a plurality of the glass plates to produce a laminate; a cleaning process, which is to clean the glass plate side of the laminate; and a peeling process, which is to peel off the glass from the laminate after the cleaning process. plate.
依據前述的構造,藉由使大尺寸的載體玻璃支持複數小尺寸的玻璃板,即使是搬送滾筒的間隔寬之現存的洗淨裝置,也可不變更洗淨裝置即可進行搬送,可洗淨小尺寸的玻璃板。又,可一次洗淨複數玻璃板,故生產效率佳。 [發明的效果] According to the above-mentioned structure, by having a large-sized carrier glass supporting a plurality of small-sized glass plates, even an existing cleaning device with a wide gap between the transfer rollers can be transported without changing the cleaning device, and the cleaning device can be cleaned. size glass plate. In addition, since a plurality of glass plates can be washed at one time, the production efficiency is good. [Effect of invention]
依據本發明的玻璃薄膜層積體的製造方法,可利用不變更洗淨裝置即可搬送無法以搬送滾筒的間隔寬之現存的洗淨裝置搬送之小尺寸的玻璃薄膜及支持玻璃,來製作小尺寸的玻璃薄膜層積體。又,依據本發明的玻璃板的洗淨方法,可利用不變更洗淨裝置即可搬送無法以搬送滾筒的間隔寬之現存的洗淨裝置搬送之小尺寸的玻璃板,來洗淨小尺寸的玻璃板。According to the method for producing a glass film laminate of the present invention, it is possible to produce a small glass film and a supporting glass by using a glass film and a supporting glass of a small size that cannot be conveyed by an existing cleaning device having a wide interval between the conveying rollers without changing the cleaning device. size glass film laminate. Moreover, according to the cleaning method of the glass plate of the present invention, it is possible to clean the small-sized glass plate without changing the cleaning device by conveying the small-sized glass plate that cannot be conveyed by the existing cleaning device which has a wide interval between the conveying rollers. glass plate.
以下,針對本發明的玻璃薄膜層積體1的製造方法,以第1實施形態及第2實施形態為例進行說明。Hereinafter, the manufacturing method of the glass thin film laminated
[第1實施形態]
如圖1所示,第1實施形態的製造方法系包含準備玻璃薄膜2、支持玻璃3、面積大於玻璃薄膜2的第1載體玻璃4、面積大於支持玻璃3的第2載體玻璃5的準備工程S1、於第1載體玻璃4層積玻璃薄膜2以製作第1層積體6的第1層積工程S2、於第2載體玻璃5層積支持玻璃3以製作第2層積體7的第2層積工程S3、洗淨第1層積體6的玻璃薄膜2側的第1洗淨工程S4、洗淨第2層積體7的支持玻璃3側的第2洗淨工程S5、從第1洗淨工程S4後的第1層積體6剝離玻璃薄膜2的第1剝離工程S6、從第2洗淨工程S5後的第2層積體7剝離支持玻璃3的第2剝離工程S7、及將第1剝離工程S6後的玻璃薄膜2與第2剝離工程S7後的支持玻璃3,貼合被洗淨的面彼此,以製作玻璃薄膜層積體1的第3層積工程S8。
[1st Embodiment]
As shown in FIG. 1 , the manufacturing method of the first embodiment includes a preparation process for preparing a
依據此製造方法,可利用不變更洗淨裝置8即可搬送無法以第1洗淨工程S4及第2洗淨工程S5中所用之洗淨裝置8(參照圖4)搬送之小尺寸的玻璃薄膜2及支持玻璃3,來製作小尺寸的玻璃薄膜層積體1。According to this manufacturing method, it is possible to transport a glass film of a small size that cannot be transported by the cleaning device 8 (see FIG. 4 ) used in the first cleaning process S4 and the second cleaning process S5 without changing the
[準備工程]
於準備工程S1中,作為準備之玻璃薄膜2的材料,可使用矽酸鹽玻璃、矽玻璃、硼矽酸玻璃、無鹼玻璃等。玻璃薄膜2的厚度係為300μm以下為佳。再者,玻璃薄膜2的厚度係更理想為200μm以下,又更理想為100μm以下。根據確保玻璃薄膜2的強度的觀點,玻璃薄膜2的厚度係為5μm以上為佳。
[preparation process]
In the preparation process S1, as the material of the glass
玻璃薄膜2係以洗淨裝置8進行搬送時之搬送方向A的長度L1未滿搬送滾筒81的間隔D1為佳(參照圖4)。玻璃薄膜2的形狀並未特別限定,例如可設為長方形或正方形。本實施形態中所用的玻璃薄膜2係縱100mm、橫100mm的正方形,厚度為100μm。It is preferable that the length L1 of the conveyance direction A when the
作為準備之支持玻璃3的材料,與玻璃薄膜2相同,可使用矽酸鹽玻璃、矽玻璃、硼矽酸玻璃、無鹼玻璃等。關於支持玻璃3,使用與玻璃薄膜2的30~380℃之熱膨脹係數的差為5×10
-7/℃以內的玻璃為佳。根據抑制膨脹率的差的觀點,支持玻璃3使用與玻璃薄膜2相同材料最佳。
As the material of the
支持玻璃3的厚度係為300μm以上為佳。再者,支持玻璃3的厚度係更理想為300~700μm,又更理想為300~500μm。藉此,能以支持玻璃3支持玻璃薄膜2,並且可有效地抑制從支持玻璃3剝離玻璃薄膜2時所發生之玻璃薄膜2的破損。The thickness of the
支持玻璃3係比玻璃薄膜2大,以洗淨裝置8進行搬送時之搬送方向A的長度L2未滿搬送滾筒81的間隔D1為佳。支持玻璃3的形狀並未特別限定,例如可設為長方形或正方形。本實施形態中所用的支持玻璃3係縱104mm、橫104mm的正方形,厚度為500μm。The
作為準備之第1載體玻璃4及第2載體玻璃5的材料,與玻璃薄膜2及支持玻璃3相同,可使用矽酸鹽玻璃、矽玻璃、硼矽酸玻璃、無鹼玻璃等。第1載體玻璃4及第2載體玻璃5的厚度係與支持玻璃3相同,300μm以上為佳。再者,第1載體玻璃4及第2載體玻璃5的厚度係更理想為300~700μm,又更理想為300~500μm。As the materials of the prepared
藉此,能以第1載體玻璃4支持玻璃薄膜2,並且可有效地抑制從第1載體玻璃4剝離玻璃薄膜2時所發生之玻璃薄膜2的破損。又,能以第2載體玻璃5支持支持玻璃3,並且可有效地抑制從第2載體玻璃5剝離支持玻璃3時所發生之支持玻璃3的破損。Thereby, the
第1載體玻璃4及第2載體玻璃5係以洗淨裝置8進行搬送時之搬送方向A的長度L3、L4為搬送滾筒81的間隔D1以上,且洗淨裝置8的第1挾持滾筒對85與第2挾持滾筒對86的間隔D2以上為佳。第1載體玻璃4及第2載體玻璃5的形狀並未特別限定,例如可設為長方形或正方形。本實施形態中所用的第1載體玻璃4及第2載體玻璃5係縱370mm、橫(搬送方向A)470mm的長方形,厚度為500μm。如此,第1載體玻璃4的面積大於玻璃薄膜2,第2載體玻璃5的面積大於支持玻璃3。For the
[第1層積工程]
如圖1及圖2所示,於第1層積工程S2中,於第1載體玻璃4層積玻璃薄膜2以製作第1層積體6。第1層積體6之玻璃薄膜2的下面2a係於第1層積工程S2中為接觸面,於第3層積工程S8中成為保證面。接觸面係與第1載體玻璃4相對接觸之側的面。保證面係於電子裝置等的產品的製造中,施加元件的形成等的製造關聯處理之側的面。另一方面,第1層積體6之玻璃薄膜2的上面2b係構成第1層積體6的上面6b之一部分的洗淨面。洗淨面係於第1洗淨工程S4中被洗淨之側的面。
[The first lamination process]
As shown in FIGS. 1 and 2 , in the first lamination process S2 , the
第1層積體6之第1載體玻璃4的下面4a係構成第1層積體6的下面6a的搬送面。搬送面係以洗淨裝置8進行搬送時,被搬送滾筒81(參照圖4)支持之側的面。另一方面,第1層積體6之第1載體玻璃4的上面4b係一部分構成第1層積體6的上面6b之一部分,其他部分為接觸面。接觸面係與玻璃薄膜2相對接觸之側的面。The
於第1層積工程S2中,密接玻璃薄膜2與第1載體玻璃4的話,無接著劑可剝離程度地固接,形成第1層積體6。該現象可推估為藉由形成於玻璃薄膜2的接觸面與第1載體玻璃4的接觸面之氫氧基彼此的氫鍵結而相互固接者。或者,也可推估為藉由存在於玻璃薄膜2與第1載體玻璃4的界面之水分子而形成氫鍵結而相互固接者。In the 1st lamination process S2, when the
於第1層積體6中,玻璃薄膜2的一部分從第1載體玻璃4的端部突出,形成突出部分2c。該端部係以洗淨裝置8進行搬送時的搬送方向上游側端部。突出部分2c的突出量係例如可設為1~10mm程度。藉由第1洗淨工程S4中突出部分2c位於搬送方向上游側,即使洗淨構件82逆時針旋轉(在圖1中為順時針旋轉),突出部分2c也不會勾到洗淨構件82(參照圖4)。又,於第1剝離工程S6中,藉由抓住玻璃薄膜2的突出部分2c,可容易剝離玻璃薄膜2及支持玻璃。In the 1st
再者,於第1層積體6中,對於第1載體玻璃4之玻璃薄膜2的層積位置並不限定於上述的位置,例如於第1載體玻璃4的中央層積玻璃薄膜2亦可。In addition, in the
又,作為第1層積體6的變形例,作為如圖3所示的第1層積體61亦可。亦即,於第1載體玻璃4的一面(上面4b)之不同位置,層積複數玻璃薄膜2而製作第1層積體61。藉此,於第1洗淨工程S4中,可一次洗淨複數玻璃薄膜2,故生產效率佳。Moreover, as a modification of the 1st
再者,利用將第1載體玻璃4設為更大面積,可層積更多的玻璃薄膜2。又,對於第1載體玻璃4之玻璃薄膜2的層積位置並未特別限定,但是,如圖3所示,設為像形成突出部分2c的位置為佳。Furthermore, by setting the
[第2層積工程]
如圖1及圖2所示,於第2層積工程S3中,於第2載體玻璃5層積支持玻璃3以製作第2層積體7。第2層積體7之支持玻璃3的下面3a係為接觸面。接觸面係與第2載體玻璃5相對接觸之側的面。另一方面,第2層積體7之支持玻璃3的上面3b係構成第2層積體7的上面7b之一部分的洗淨面。洗淨面係於第2洗淨工程S5中被洗淨之側的面。
[Second lamination process]
As shown in FIGS. 1 and 2 , in the second lamination process S3 , the
第2層積體7之第2載體玻璃5的下面5a係構成第2層積體7的下面7a的搬送面。搬送面係以洗淨裝置8進行搬送時,被搬送滾筒81支持之側的面。另一方面,第2層積體7之第2載體玻璃5的上面5b係一部分構成第2層積體7的上面7b之一部分,其他部分為接觸面。接觸面係與支持玻璃3相對接觸之側的面。The
於第2層積工程S3中,密接支持玻璃3與第2載體玻璃5的話,如上所述,無接著劑可剝離程度地固接,形成第2層積體7。與第1層積體6相同,於第2層積體7中,支持玻璃3的一部分從第2載體玻璃5的端部突出,形成突出部分3c。該端部係以洗淨裝置8進行搬送時的搬送方向上游側端部。突出部分3c的突出量係例如可設為1~10mm程度。藉由該突出部分3c,可獲得與前述的突出部分2c相同的作用效果。In the 2nd lamination process S3, when the
再者,於第2層積體7中,對於第2載體玻璃5之支持玻璃3的層積位置並不限定於上述的位置,例如於第2載體玻璃5的中央層積支持玻璃3亦可。In addition, in the second laminate 7, the lamination position of the
又,作為第2層積體7的變形例,作為如圖3所示的第2層積體71亦可。亦即,於第2載體玻璃5的一面(上面5b)之不同位置,層積複數支持玻璃3而製作第2層積體71。藉此,於第2洗淨工程S5中,可一次洗淨複數支持玻璃3,故生產效率佳。Moreover, as a modification of the 2nd laminated body 7, the 2nd
再者,利用將第2載體玻璃5設為更大面積,可層積更多的支持玻璃3。又,對於第2載體玻璃5之支持玻璃3的層積位置並未特別限定,但是,如圖3所示,設為像形成突出部分3c的位置為佳。Furthermore, by setting the
[第1洗淨工程]
第1洗淨工程S4係洗淨第1層積體6的玻璃薄膜2側的工程。藉由第1洗淨工程S4,可去除玻璃薄膜2的上面2a的異物,於第3層積工程S8中減低玻璃薄膜2與支持玻璃3之間產生氣泡的狀況。
[1st cleaning process]
The first cleaning step S4 is a step of cleaning the
圖4係第1洗淨工程S4中所用之洗淨裝置8的要部側視圖。洗淨裝置8係具備複數搬送滾筒81、洗淨構件82、複數洗淨噴嘴83、一對氣刀84、第1挾持滾筒對85、第2挾持滾筒對86。FIG. 4 is a side view of the main part of the
搬送滾筒81係一邊支持第1層積體6的下面6a一邊進行搬送的滾筒。搬送滾筒81係除了第1挾持滾筒對85與第2挾持滾筒對86之間,從洗淨裝置8的起點到終點為止涵蓋所有區域具有間隔D1而配置。搬送滾筒81係具有旋轉於搬送方向A的軸部811,與等間隔地固定於軸部811的複數圓盤體812。於圓盤體812的外周部安裝樹脂製的環狀緩衝構件(未圖示)。藉由來自驅動源(未圖示)的驅動力輸入至軸部811,軸部811及圓盤體812旋轉於搬送方向A,被圓盤體812支持的第1層積體6往搬送方向A被搬送。The
洗淨構件82係洗淨第1層積體6的上面6b的構件。洗淨構件82係配置於比搬送滾筒81更靠上方。作為洗淨構件82,例如可使用刷子滾筒等的洗淨刷子或泡棉滾筒等的洗淨泡棉。本實施形態的洗淨構件82係以往與搬送方向A相反方向旋轉的軸部821,與具有固定於軸部821之圓筒狀的刷子822的刷子滾筒所構成。藉由來自驅動源(未圖示)的驅動力輸入至軸部821,軸部821及刷子822往與搬送方向A相反方向旋轉,刷子822接觸第1層積體6的上面6b而刮除異物。The cleaning
洗淨噴嘴83係噴出洗淨劑的構件。洗淨噴嘴83係比搬送滾筒81更靠上方,配置成可分別對第1挾持滾筒對85與洗淨構件82之間,及洗淨構件82與第2挾持滾筒對86之間噴出洗淨劑。從洗淨噴嘴83噴出的洗淨劑係噴吹第1層積體6的上面6b。藉由洗淨劑,容易去除第1層積體6的上面6b的異物。The cleaning
氣刀84係噴出壓縮空氣的構件。氣刀84係在第2挾持滾筒對86的搬送方向下游,以比搬送滾筒81更靠上方與下方相互對向之方式配置。從氣刀84噴出的壓縮空氣係噴吹至第1層積體6的上面6b及下面6a。藉此,去除殘留於第1層積體6的上面6b及下面6a的洗淨劑的液滴。再者,省略配置於比搬送滾筒81更靠下方的氣刀84亦可。The
第1挾持滾筒對85係配置於洗淨構件82的搬送方向上游,一邊挾持第1層積體6的上面6b及下面6a,一邊進行搬送的滾筒對。再者,第1挾持滾筒對85與洗淨構件82之間並未配置搬送滾筒81。第1挾持滾筒對85係具有配置於比搬送滾筒81更靠上方,抵接於第1層積體6的上面6b的上滾筒851,與配置於與搬送滾筒81相同高度,抵接於第1層積體6的下面6a的下滾筒852。The 1st
上滾筒851及下滾筒852係具有旋轉於搬送方向A的軸部853,與等間隔地固定於軸部853的複數橡膠滾筒854。再者,橡膠滾筒854作為沿著軸部853配置的一長滾筒亦可。又,橡膠滾筒854係只要可不破損而挾持第1層積體6,作為使用其他樹脂等的滾筒亦可。The
藉由來自驅動源(未圖示)的驅動力輸入至軸部853,軸部853及橡膠滾筒854旋轉於搬送方向A,第1層積體6一邊被上下的橡膠滾筒854挾持,一邊往搬送方向A搬送。藉由第1層積體6一邊被第1挾持滾筒對85挾持一邊搬送,即使在第1層積體6到達第2挾持滾筒對86之前,第1層積體6也可不會被旋轉於搬送方向A的相反方向的洗淨構件82推回而進行搬送。When a driving force from a driving source (not shown) is input to the
第2挾持滾筒對86係配置於洗淨構件82的搬送方向下游,一邊挾持第1層積體6的上面6b及下面6a,一邊進行搬送的滾筒對。再者,在洗淨構件82與第2挾持滾筒對86之間並未配置搬送滾筒81。第2挾持滾筒對86具有與第1挾持滾筒對85相同的構造。亦即,具有上滾筒861與下滾筒862。然後,上滾筒861及下滾筒862係具有軸部863與複數橡膠滾筒864。The second
藉由來自驅動源(未圖示)的驅動力輸入至軸部863,軸部863及橡膠滾筒864旋轉於搬送方向A,第1層積體6一邊被上下的橡膠滾筒864挾持,一邊往搬送方向A搬送。藉由第1層積體6一邊被第2挾持滾筒對86挾持一邊搬送,即使在第1層積體6通過第1挾持滾筒對85之後,第1層積體6也可不會被旋轉於搬送方向A的相反方向的洗淨構件82推回而進行搬送。When a driving force from a driving source (not shown) is input to the
如上所述,在第1挾持滾筒對85與第2挾持滾筒對86之間並未配置搬送滾筒81。因此,第1挾持滾筒對85與第2挾持滾筒對86的間隔D2有比搬送滾筒81的間隔D1寬的傾向。即使玻璃薄膜2的長度L1及支持玻璃3的長度L2比搬送滾筒81的間隔D1還寬的狀況中,比第1挾持滾筒對85與第2挾持滾筒對86的間隔D2還窄的話,玻璃薄膜2及支持玻璃3單體也難以搬送。As mentioned above, the
但是,如本實施形態般,可藉由層積於搬送方向A的長度L3比間隔D1及間隔D2還長的第1載體玻璃4及搬送方向A的長度L4比間隔D1及間隔D2還長的第2載體玻璃5,搬送玻璃薄膜2及支持玻璃3。However, as in the present embodiment, the
亦即,藉由第1載體玻璃4及第2載體玻璃5之搬送方向A的長度L3、L4為第1挾持滾筒對85與第2挾持滾筒對86的間隔D2以上,可利用第1挾持滾筒對85與第2挾持滾筒對86同時挾持第1層積體6。因此,可讓第1層積體6不脫落地從第1挾持滾筒對85交給第2挾持滾筒對86。換句話說,利用洗淨構件82洗淨的第1層積體6係成為至少被第1挾持滾筒對85與第2挾持滾筒對86的任一方挾持的狀態,故藉由第1挾持滾筒對85或第2挾持滾筒對86的任一方固定。因此,即使是第1挾持滾筒對85與第2挾持滾筒對86的間隔D2寬之現存的洗淨裝置8,也可不變更洗淨裝置8即可搬送小尺寸的玻璃薄膜2及支持玻璃3。That is, since the lengths L3 and L4 in the conveyance direction A of the
再者,第1洗淨工程S4係根據提升洗淨效果的觀點,包含在上述的工程前利用純水洗淨,在上述的工程後利用鹼性離子水洗淨的工程亦可。該等工程也可使用與前述的洗淨裝置8相同的裝置。In addition, the 1st cleaning process S4 may include the process of washing with pure water before the above-mentioned process and washing with alkaline ionized water after the above-mentioned process from the viewpoint of improving the cleaning effect. For these processes, the same device as the
[第2洗淨工程]
第2洗淨工程S5係洗淨第2層積體7的支持玻璃3側的工程。第2洗淨工程S5係可使用前述的洗淨裝置8,與第1洗淨工程S4同樣地進行,故省略詳細的說明。
[The second cleaning process]
The second cleaning step S5 is a step of cleaning the
再者,第1洗淨工程S4及第2洗淨工程S5中所用的洗淨方法係如果是使用搬送滾筒搬送的形態的話,並不限定於前述的方法,可使用玻璃產品的洗淨所用之一般的方法。例如可單獨或適當組合使用超音波洗淨、使用紫外光及臭氧的光化學洗淨、使用電漿的物理洗淨等。尤其,在前述第1洗淨工程S4及第2洗淨工程S5中,一邊以第1挾持滾筒對85與第2挾持滾筒對86挾持第1層積體6及第2層積體7,一邊使用洗淨構件82進行擦拭洗淨,但是,不使用洗淨構件82而進行洗淨水沖洗的清洗洗淨等時,省略第1挾持滾筒對85與第2挾持滾筒對86亦可。In addition, the cleaning method used in the first cleaning process S4 and the second cleaning process S5 is not limited to the above-mentioned method if it is conveyed using a conveying roller, and the cleaning method used for cleaning glass products can be used. general method. For example, ultrasonic cleaning, photochemical cleaning using ultraviolet light and ozone, and physical cleaning using plasma can be used alone or in appropriate combination. In particular, in the first cleaning process S4 and the second cleaning process S5 described above, the first
[第1剝離工程]
如圖1所示,第1剝離工程S6係從第1洗淨工程S4後的第1層積體6剝離玻璃薄膜2的工程。於第1剝離工程S6中,藉由抓住玻璃薄膜2的突出部分2c剝離,可容易從第1載體玻璃4剝離玻璃薄膜2。
[1st peeling process]
As shown in FIG. 1, the 1st peeling process S6 is a process of peeling the glass
[第2剝離工程]
如圖1所示,第2剝離工程S7係從第2洗淨工程S5後的第2層積體7剝離支持玻璃3的工程。於第2剝離工程S7中,藉由抓住支持玻璃3的突出部分3c剝離,可容易從第2載體玻璃5剝離支持玻璃3。
[Second peeling process]
As shown in FIG. 1, the 2nd peeling process S7 is a process of peeling the
再者,第1剝離工程S6後的第1載體玻璃4及第2剝離工程S7後的第2載體玻璃5係可再次在第1層積工程S2及第2層積工程S3中利用。In addition, the
[第3層積工程]
如圖1所示,第3層積工程S8係貼合第1剝離工程S6後的玻璃薄膜2的洗淨面,與第2剝離工程S7後的支持玻璃3的洗淨面,以製作玻璃薄膜層積體1的工程。於第3層積工程S8中,將玻璃薄膜2的洗淨面(上面2b)朝上載置於平坦的貼合台9上,並於其上使支持玻璃3以洗淨面(上面3b)朝下密接。藉此,玻璃薄膜2與支持玻璃3係與上述的第1層積體6及第2層積體7相同,以無接著劑可剝離程度地固接,形成玻璃薄膜層積體1。
[The third lamination process]
As shown in FIG. 1 , the third lamination process S8 is to bond the cleaned surface of the
再者,第3層積工程S8係在減壓下進行亦可。藉此,可減低玻璃薄膜2與支持玻璃3之間所發生的氣泡。In addition, the 3rd lamination process S8 may be performed under reduced pressure. Thereby, the generation of air bubbles between the
[第2實施形態] 接著,針對第2實施形態的製造方法進行說明。對與第1實施形態中使用的構件相同構件附加相同符號,省略其詳細說明。 [Second Embodiment] Next, the manufacturing method of 2nd Embodiment is demonstrated. The same reference numerals are attached to the same members as those used in the first embodiment, and the detailed description thereof will be omitted.
如圖5所示,第2實施形態的製造方法係包含:準備玻璃薄膜2、支持玻璃3、及面積大於玻璃薄膜2及支持玻璃3的載體玻璃12的準備工程S11、於載體玻璃12的一面之不同位置,層積玻璃薄膜2及支持玻璃3以製作層積體13的第1層積工程S12、洗淨層積體13的玻璃薄膜2及支持玻璃3側的洗淨工程S13、從洗淨工程S13後的層積體13,剝離玻璃薄膜2及支持玻璃3的剝離工程S14、及將剝離工程S14後的玻璃薄膜2及支持玻璃3,貼合被洗淨的面彼此,以製作玻璃薄膜層積體1的第2層積工程S15。As shown in FIG. 5 , the manufacturing method of the second embodiment includes: a preparation step S11 of preparing a
依據此製造方法,可獲得與第1實施形態的製造方法相同的效果。此外,可一次洗淨玻璃薄膜2與支持玻璃3,故生產效率佳。According to this manufacturing method, the same effect as the manufacturing method of 1st Embodiment can be acquired. In addition, the
[準備工程]
於準備工程S11中,準備的玻璃薄膜2及支持玻璃3與第1實施形態者相同。又,準備的載體玻璃12與第1實施形態的第1載體玻璃4相同。
[preparation process]
In the preparation process S11, the
[第1層積工程]
於第1層積工程S12中,於載體玻璃12的一面之不同位置,層積玻璃薄膜2及支持玻璃3以製作層積體13。此係將第1實施形態的第1載體玻璃4與第2載體玻璃5設為1張載體玻璃12者。
[The first lamination process]
In the 1st lamination process S12, the
於層積體13中,玻璃薄膜2及支持玻璃3的一部分從載體玻璃12的端部突出,形成突出部分2c、3c。該端部係以洗淨裝置8進行搬送時的搬送方向上游側端部。再者,於層積體13中,對於載體玻璃12之玻璃薄膜2及支持玻璃3的層積位置並不限定於上述的位置,例如於載體玻璃12的中央並排層積玻璃薄膜2及支持玻璃3亦可。In the
又,利用將載體玻璃12設為更大面積,可層積更多的玻璃薄膜2及支持玻璃3。亦即,層積於1張載體玻璃的玻璃薄膜2及支持玻璃3只要分別為1張以上即可。藉由於1張載體玻璃層積更多的玻璃薄膜2及支持玻璃3,可讓洗淨工程的效率佳。In addition, by making the
[洗淨工程]
洗淨工程S13係洗淨層積體13的玻璃薄膜2及支持玻璃3側的工程。洗淨工程S13係可使用第1實施形態的洗淨裝置8,與第1實施形態的第1洗淨工程S4同樣地進行。利用藉由洗淨工程S13洗淨1張層積體13,可一次去除玻璃薄膜2的上面2b及支持玻璃3的上面3b的異物。
[cleaning process]
The cleaning step S13 is a step of cleaning the glass
[剝離工程]
剝離工程S14係從洗淨工程S13後的層積體13剝離玻璃薄膜2及支持玻璃3的工程。於剝離工程S14中,藉由抓住玻璃薄膜2的突出部分2c、支持玻璃3的突出部分3c,可容易分別剝離。再者,剝離工程S14後的載體玻璃12係可再次在第1層積工程S12中利用。
[Peeling process]
The peeling step S14 is a step of peeling off the
[第2層積工程]
第2層積工程S15係貼合剝離工程S14後的玻璃薄膜2的洗淨面與支持玻璃3的洗淨面,以製作玻璃薄膜層積體1的工程。第2層積工程S15可與第1實施形態的第3層積工程S8同樣地進行。
[Second lamination process]
The second lamination process S15 is a process of laminating the cleaned surface of the
在上述的實施形態中,難以進行玻璃薄膜2單體的處理,故需要製成玻璃薄膜層積體1讓處理變得容易。反過來說,在使用與玻璃薄膜2相同大小且比玻璃薄膜2厚,可單體處理的玻璃板時,不需要製作玻璃薄膜層積體。亦即,不需要支持玻璃3,只要可洗淨玻璃板的保證面即可。In the above-described embodiment, it is difficult to handle the glass
又,玻璃板的洗淨方法只要包含:準備複數玻璃板,與面積大於玻璃板的載體玻璃的準備工程、於載體玻璃的一面之不同位置,層積複數玻璃板以製作層積體的層積工程、洗淨層積體的玻璃板側的洗淨工程、及從洗淨工程後的層積體,剝離玻璃板的剝離工程即可。準備工程、層積工程、洗淨工程及剝離工程可於第2實施形態的準備工程S11、第1層積工程S12、洗淨工程S13及剝離工程S14中,將玻璃薄膜2及支持玻璃3分別置換成玻璃板來實現。再者,於本實施形態中,玻璃板的保證面係層積於層積體的玻璃板的上面側。Moreover, the cleaning method of a glass plate should only include the steps of preparing a plurality of glass plates, a preparation process for a carrier glass having an area larger than the glass plate, and laminating a plurality of glass plates at different positions on one side of the carrier glass to produce a laminate. The process, the cleaning process of cleaning the glass plate side of the laminated body, and the peeling process of peeling off the glass plate from the laminated body after the cleaning process may be sufficient. The preparation process, the lamination process, the cleaning process, and the peeling process can be performed in the preparation process S11, the first lamination process S12, the cleaning process S13, and the peeling process S14 in the second embodiment, and the
依據此玻璃板的洗淨方法,可利用不變更洗淨裝置8即可搬送無法以洗淨工程中所用之洗淨裝置8(參照圖4)搬送之小尺寸的玻璃板,可洗淨小尺寸的玻璃板。此外,可一次洗淨複數玻璃板,故生產效率佳。According to this method of cleaning a glass plate, it is possible to transport a small-sized glass plate that cannot be transported by the cleaning device 8 (refer to FIG. 4 ) used in the cleaning process without changing the
再者,於本說明書中,考慮材料及大小、用途,可進行單體的處理時,將層積於載體玻璃者作為玻璃板進行說明。所以,即使玻璃板在上述的玻璃薄膜2的厚度範圍內,在可進行單體的處理時,可作為玻璃板使用。In addition, in this specification, when considering a material, a size, and a use, when the process of a single body can be performed, what laminated|stacked on a carrier glass is demonstrated as a glass plate. Therefore, even if the glass plate is within the thickness range of the above-mentioned
1:玻璃薄膜層積體 2:玻璃薄膜 2a:玻璃薄膜的下面 2b:玻璃薄膜的上面 2c:突出部分 3:支持玻璃 3c:突出部分 4:第1載體玻璃 4a:第1載體玻璃的下面 4b:第1載體玻璃的上面 5:第2載體玻璃 5a:第2載體玻璃的下面 5b:第2載體玻璃的上面 6:第1層積體 6a:第1層積體的下面 6b:第1層積體的上面 7:第2層積體 7a:第2層積體的下面 7b:第2層積體的上面 8:洗淨裝置 12:載體玻璃 13:層積體 61:第1層積體 81:搬送滾筒 82:洗淨構件 83:洗淨噴嘴 84:氣刀 85:第1挾持滾筒對 86:第2挾持滾筒對 811:軸部 812:圓盤體 821:軸部 822:刷子 851:上滾筒 852:下滾筒 853:軸部 854:橡膠滾筒 A:搬送方向 D1:間隔 D2:間隔 L1:長度 L2:長度 L3:長度 L4:長度 S1:準備工程 S2:第1層積工程 S3:第2層積工程 S4:第1洗淨工程 S5:第2洗淨工程 S6:第1剝離工程 S7:第2剝離工程 S8:第3層積工程 S11:準備工程 S12:第1層積工程 S13:洗淨工程 S14:剝離工程 S15:第2層積工程 1: Glass film laminate 2: glass film 2a: Below the glass film 2b: Above the glass film 2c: Protruding part 3: Support glass 3c: Protruding part 4: 1st carrier glass 4a: Underside of the first carrier glass 4b: Top of the first carrier glass 5: 2nd carrier glass 5a: Underside of the second carrier glass 5b: The upper surface of the second carrier glass 6: 1st layered body 6a: Bottom of the first layered body 6b: Top of the first layered body 7: Layer 2 body 7a: Bottom of the second layered body 7b: The upper surface of the second layered body 8: Cleaning device 12: Carrier glass 13: Laminate 61: 1st layered body 81: Conveying roller 82: Cleaning components 83: Clean the nozzle 84: Air Knife 85: 1st clamping roller pair 86: 2nd clamping roller pair 811: Shaft 812: disc body 821: Shaft 822: Brush 851: Upper Roller 852: Lower Roller 853: Shaft 854: Rubber Roller A: Conveying direction D1: Interval D2: Interval L1: length L2: length L3: length L4: length S1: Preparation works S2: 1st lamination process S3: The second lamination process S4: 1st cleaning process S5: The second cleaning process S6: 1st peeling process S7: The second peeling process S8: 3rd lamination process S11: Preparation works S12: The first lamination process S13: Cleaning process S14: Stripping Project S15: The second lamination process
[圖1]說明第1實施形態的玻璃薄膜層積體的製造方法的圖。 [圖2]第1實施形態的第1層積體及第2層積體的俯視圖。 [圖3]變形例的第1層積體及第2層積體的俯視圖。 [圖4]第1實施形態的洗淨裝置的示意圖。 [圖5]說明第2實施形態的玻璃薄膜層積體的製造方法的圖。 [ Fig. 1] Fig. 1 is a diagram illustrating a method for producing the glass thin film laminate of the first embodiment. [ Fig. 2] Fig. 2 is a plan view of the first laminate and the second laminate of the first embodiment. [ Fig. 3] Fig. 3 is a plan view of a first layered body and a second layered body of a modified example. [ Fig. 4] Fig. 4 is a schematic diagram of the cleaning apparatus according to the first embodiment. It is a figure explaining the manufacturing method of the glass thin film laminated body of 2nd Embodiment.
1:玻璃薄膜層積體 1: Glass film laminate
2:玻璃薄膜 2: glass film
2a:玻璃薄膜的下面 2a: Below the glass film
2b:玻璃薄膜的上面 2b: Above the glass film
2c:突出部分 2c: Protruding part
3:支持玻璃 3: Support glass
3a:支持玻璃的上面 3a: Top of support glass
3b:支持玻璃的下面 3b: Underside of support glass
3c:突出部分 3c: Protruding part
4:第1載體玻璃 4: 1st carrier glass
4a:第1載體玻璃的下面 4a: Underside of the first carrier glass
4b:第1載體玻璃的上面 4b: Top of the first carrier glass
5:第2載體玻璃 5: 2nd carrier glass
5a:第2載體玻璃的上面 5a: Top of the second carrier glass
5b:第2載體玻璃的下面 5b: Underside of the second carrier glass
6:第1層積體 6: 1st layered body
6a:第1層積體的下面 6a: Bottom of the first layered body
6b:第1層積體的上面 6b: Top of the first layered body
7:第2層積體
7:
7a:第2層積體的下面 7a: Bottom of the second layered body
7b:第2層積體的上面 7b: The upper surface of the second layered body
8:洗淨裝置 8: Cleaning device
9:貼合台 9: Fitting table
82:洗淨構件 82: Cleaning components
L1:長度 L1: length
L2:長度 L2: length
L3:長度 L3: length
L4:長度 L4: length
S1:準備工程 S1: Preparation works
S2:第1層積工程 S2: 1st lamination process
S3:第2層積工程 S3: The second lamination process
S4:第1洗淨工程 S4: 1st cleaning process
S5:第2洗淨工程 S5: The second cleaning process
S6:第1剝離工程 S6: 1st peeling process
S7:第2剝離工程 S7: The second peeling process
S8:第3層積工程 S8: 3rd lamination process
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020-196186 | 2020-11-26 | ||
JP2020196186 | 2020-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW202227267A true TW202227267A (en) | 2022-07-16 |
Family
ID=81754314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110143658A TW202227267A (en) | 2020-11-26 | 2021-11-24 | Method of manufacturing glass film laminate and method of washing glass sheet |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2022113874A1 (en) |
KR (1) | KR20230109135A (en) |
CN (1) | CN116457112A (en) |
TW (1) | TW202227267A (en) |
WO (1) | WO2022113874A1 (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103655555B (en) | 2012-09-14 | 2018-08-28 | 中山大学 | Application of the 3- normal-butyls -1-isoindolinone in the drug for preparing prevention and treatment cerebral infarction |
JP2015091746A (en) * | 2013-09-30 | 2015-05-14 | 日本電気硝子株式会社 | Method of producing film-like glass, method of producing electronic device and method of producing glass film laminate |
KR102254291B1 (en) * | 2013-10-16 | 2021-05-21 | 니폰 덴키 가라스 가부시키가이샤 | Method for manufacturing glass film laminate, glass film laminate, and method for manufacturing electronic device |
CN106132688B (en) * | 2014-01-27 | 2020-07-14 | 康宁股份有限公司 | Article and method for controlled bonding of a sheet to a carrier |
JP2017024947A (en) * | 2015-07-23 | 2017-02-02 | パナソニックIpマネジメント株式会社 | Laminated body and method for manufacturing the same, and electronic device and method for manufacturing the same |
CN105271835A (en) * | 2015-11-17 | 2016-01-27 | 湖南普照爱伯乐平板显示器件有限公司 | Attaching method for flexible glass |
JPWO2018211978A1 (en) * | 2017-05-16 | 2020-05-14 | 日本電気硝子株式会社 | Electronic device manufacturing method |
-
2021
- 2021-11-18 KR KR1020237015029A patent/KR20230109135A/en unknown
- 2021-11-18 WO PCT/JP2021/042418 patent/WO2022113874A1/en active Application Filing
- 2021-11-18 CN CN202180074996.9A patent/CN116457112A/en active Pending
- 2021-11-18 JP JP2022565282A patent/JPWO2022113874A1/ja active Pending
- 2021-11-24 TW TW110143658A patent/TW202227267A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20230109135A (en) | 2023-07-19 |
CN116457112A (en) | 2023-07-18 |
WO2022113874A1 (en) | 2022-06-02 |
JPWO2022113874A1 (en) | 2022-06-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5716678B2 (en) | LAMINATE MANUFACTURING METHOD AND LAMINATE | |
JP5887946B2 (en) | Method for manufacturing electronic device and method for manufacturing glass laminate | |
TWI240012B (en) | Method and apparatus for fabricating electro-optical device and method and apparatus for fabricating liquid crystal panel | |
WO2010047273A1 (en) | Glass substrate laminated device and method for producing laminate glass substrate | |
WO2010079688A1 (en) | Glass laminate and manufacturing method therefor | |
KR20120098640A (en) | Glass laminate, glass laminate manufacturing method, display panel manufacturing method, and display panel obtained by means of display panel manufacturing method | |
JP7136275B2 (en) | LAMINATED BODY, ELECTRONIC DEVICE MANUFACTURING METHOD, LAMINATED PRODUCTION METHOD | |
TW200902171A (en) | Dusting method and dusting device for conveyed objects | |
JP2000169166A (en) | Production of sheet glass product | |
KR102267241B1 (en) | Glass film laminate and liquid crystal panel manufacturing method | |
JP2009186916A (en) | Method of manufacturing display device panel | |
JP2010286664A (en) | Film sticking method and film sticking device | |
JP2015028971A (en) | Wafer washing apparatus and wafer washing method | |
JP2013237159A (en) | Glass film laminate and method of manufacturing the same | |
TWI650296B (en) | Method for producing glass film laminate, glass film laminate, and method for manufacturing electronic device | |
TW202227267A (en) | Method of manufacturing glass film laminate and method of washing glass sheet | |
JP2003292160A (en) | Takeout apparatus of glass substrate | |
JP2005238109A (en) | Apparatus and method for cleaning substrate, and method for manufacturing electro-optics device | |
TWI584957B (en) | Laminated processing methods, the processing of the laminated board | |
JP6661587B2 (en) | Thin glass bonded article on a supporting substrate, method of making the same and use thereof | |
KR102286402B1 (en) | manufacturing method of ultra thin glass | |
JP4241203B2 (en) | Flexible film laminating method, laminating apparatus, and circuit board manufacturing method | |
TW202106642A (en) | Method for manufacturing glass plate and device for cleaning glass plate | |
JP6361440B2 (en) | Glass laminate, method for producing the same, and method for producing electronic device | |
KR20150014314A (en) | System for treating substrate and apparatus of laminating including thereof, and method for treating substrate |