KR20230109135A - The manufacturing method of a glass film laminated body and the cleaning method of a glass plate - Google Patents

Abstract

Glass capable of producing a small-size glass film laminate by making it possible to transport small-sized glass films and supporting glass that cannot be transported by an existing cleaning device with a wide distance between conveying rollers without changing the cleaning device. A method for producing a film laminate is provided. The manufacturing method of the glass film laminate 1 includes a first lamination step (S2) of laminating a glass film 2 on a first carrier glass 4 to produce a first laminate 6, and a second carrier A second lamination step (S3) of laminating the support glass 3 on the glass 5 to produce the second laminate 7, and a first cleaning step (S4) of cleaning the first laminate 6; , the second cleaning step (S5) of washing the second layered body 7, the first peeling step (S6) of peeling the glass film 2 from the first layered body 6, and the second layered body ( The second peeling step (S7) of peeling the supporting glass 3 from 7), and bonding the cleaning surface of the glass film 2 and the cleaning surface of the supporting glass 3 to produce the glass film laminate 1 A third lamination process (S8) is included.

Description

The manufacturing method of a glass film laminated body and the cleaning method of a glass plate

[0001] The present invention relates to a method for manufacturing a glass film laminate and a method for cleaning a glass plate.

[0002] In recent years, substrates and cover glasses used in electronic devices such as flat panel displays are increasingly required to achieve further thinning and high flexibility. In order to impart flexibility to a glass substrate, it is effective to reduce the thickness of the glass substrate, and a glass film having a thickness of 200 µm or less has been proposed.

[0003] The glass substrate is subjected to various manufacturing-related processes such as processing and cleaning. By the way, when thinning a glass substrate, since glass is a brittle material, it is broken by some stress change, and there exists a problem that it is difficult to handle when carrying out the manufacturing related process of various electronic devices.

[0004] Therefore, in order to improve the handleability of a thinned glass film, a glass film laminate in which a glass film is laminated on a supporting glass has been proposed (see Patent Document 1). According to such a glass film laminate, even if a glass film having no strength or rigidity as a single unit is used, since the rigidity of the supporting glass is high, handling of the glass film laminate as a whole becomes easy during processing. In addition, after completion of the treatment, the glass film can be separated from the supporting glass. If the thickness of the glass film laminate is the same as the thickness of a conventional glass substrate, it becomes possible to manufacture an electronic device using a conventional electronic device manufacturing line for glass substrates.

[0005] 1. International Publication No. 2015/056602

[0006] In order to laminate a glass film on the supporting glass, it is necessary to keep the bonding surface of the supporting glass and the glass film clean, and it is necessary to wash the supporting glass and the glass film before bonding. According to the size of various electronic devices, various sizes of glass film laminates are required, and when manufacturing small-sized glass film laminates for small electronic devices, a manufacturing line for large glass film laminates When using the cleaning device used in , the following problems occur.

[0007] In the cleaning device, the glass film and the supporting glass are conveyed using a conveying device in which a plurality of conveying rollers are disposed at regular intervals in order to smoothly flow down the cleaning liquid.

[0008] However, when using an existing cleaning device for a large-sized glass film laminate, the distance between a plurality of conveying rollers is too wide, and small-sized glass films and supporting glass that are shorter than the distance fall off and cannot be conveyed. A problem arises. Therefore, in order to clean the small-sized glass film and the supporting glass, a new cleaning device with a narrow interval between conveying rollers must be newly prepared, which is a major change.

[0009] The present invention enables conveyance of a small-sized glass film and supporting glass, which cannot be conveyed by an existing cleaning device having a wide distance between conveying rollers, without changing the cleaning device, thereby enabling a small-sized glass film to be conveyed. It aims at providing the manufacturing method of the glass film laminated body which can manufacture a laminated body. In addition, the present invention enables conveyance of a small-size glass plate that cannot be conveyed by an existing cleaning device with a wide distance between conveying rollers without changing the cleaning device, thereby providing a glass plate capable of cleaning a small-sized glass plate. It is also an object to provide a cleaning method.

[0010] The present invention is a method for manufacturing a glass film laminate in which a glass film is laminated on a support glass, and a first carrier glass having a larger area than that of the glass film, the support glass, and the glass film. And, a preparation step of preparing a second carrier glass having a larger area than the support glass, a first lamination step of laminating the glass film on the first carrier glass to produce a first laminate, and a second carrier glass A second lamination step of laminating the support glass to produce a second laminate, a first cleaning step of washing the glass film side of the first laminate, and cleaning the support glass side of the second laminate a second cleaning step of peeling the glass film from the first laminate after the first cleaning step; and a first peeling step of peeling the supporting glass from the second laminate after the second cleaning step. a second peeling step; and a third lamination step of bonding the washed surfaces of the glass film after the first peeling step and the supporting glass after the second peeling step to produce the glass film laminate. to be

[0011] According to the above configuration, by supporting the small-sized glass film and the supporting glass on the large-sized first carrier glass and the second carrier glass, conventional cleaning with a wide distance between the conveying rollers is performed. Even if it is a device, it can be transported without changing the cleaning device, and a small-sized glass film laminate can be produced.

[0012] In the above method of manufacturing a glass film laminate, the cleaning device used in the first cleaning step and the second cleaning step supports the lower surfaces of the first laminate and the lower surfaces of the second laminate while supporting them. A plurality of conveying rollers for conveying; a cleaning member for cleaning the upper surface of the first laminate and the upper surface of the second laminate; disposed upstream of the cleaning member in the conveying direction; A pair of first clamping rollers for conveying while sandwiching the upper and lower surfaces of the second laminated body, disposed downstream of the cleaning member in the conveying direction, the upper and lower surfaces of the first laminated body and the upper and lower surfaces of the second laminated body It is provided with a second sandwiching roller pair that conveys while sandwiching, and the distance between the first sandwiching roller pair and the second sandwiching roller pair is the conveying direction in the first carrier glass and the second carrier glass. It is preferable that the length of

[0013] According to the configuration described above, during cleaning by the cleaning member, at least one of the first sandwich roller pair and the second sandwich roller pair can sandwich the first stacked body and the second stacked body. , During cleaning by the cleaning member, the first layered body and the second layered body can be fixed by either pair of sandwiching rollers.

[0014] Further, in the method for manufacturing the glass film laminate, a part of the glass film protrudes from an upstream end of the first carrier glass in the conveying direction in the first laminate, and In the second layered body, it is preferable that a part of the support glass protrudes from an upstream end of the second carrier glass in the transport direction.

[0015] According to the above structure, in the first peeling step and the second peeling step, the glass film and the supporting glass can be easily peeled off by gripping and peeling the protruding part of the glass film and the protruding part of the supporting glass. . Also, since the protruding portion is on the upstream side in the conveying direction, the protruding portion does not get caught on the cleaning member.

[0016] Further, in the method for manufacturing the glass film laminate, the first laminate is produced by laminating a plurality of glass films at different positions on one surface of the first carrier glass, and the second laminate is manufactured. is preferably produced by laminating a plurality of the support glasses at different positions on one surface of the second carrier glass.

[0017] According to the above structure, since a plurality of glass films and a plurality of supporting glasses can be washed at one time, the production efficiency is good.

[0018] Furthermore, the present invention is a method for manufacturing a glass film laminate in which a glass film is laminated on a support glass, wherein preparation is provided for preparing a glass film, a support glass, and a carrier glass having a larger area than the glass film and the support glass. A first lamination step of laminating the glass film and the support glass at different positions on one surface of the carrier glass to produce a laminate, and cleaning the glass film and support glass sides of the laminate A cleaning step, a peeling step of peeling the glass film and the supporting glass from the laminate after the cleaning step, and bonding the glass film and the supporting glass after the peeling step to each other to laminate the glass films. It is characterized in that it includes a second lamination process for producing a sieve.

[0019] According to the configuration described above, by supporting the small-size glass film and the support glass on the large-size carrier glass, even an existing cleaning device with a wide distance between the conveying rollers can be transported without changing the cleaning device, A small-sized glass film laminate can be produced. In addition, since the glass film and the support glass can be washed at once, the production efficiency is good.

Further, the glass plate cleaning method of the present invention includes a preparation step of preparing a plurality of glass plates and a carrier glass having a larger area than the glass plate, and laminating a plurality of the glass plates at different positions on one surface of the carrier glass. It is characterized by including a lamination step of producing a laminate, a cleaning step of washing the glass plate side of the laminate, and a peeling step of peeling the glass plate from the laminate after the cleaning step.

[0021] According to the configuration described above, by supporting a plurality of small-size glass plates on a large-size carrier glass, it is possible to convey the small size even if it is an existing cleaning device with a wide interval between conveying rollers without changing the cleaning device. of the glass plate can be cleaned. Moreover, since a plurality of glass plates can be washed at once, the production efficiency is good.

[0022] According to the method for manufacturing a glass film laminate of the present invention, a small-sized glass film and support glass that cannot be conveyed by an existing cleaning device having a large distance between conveying rollers are transported without changing the cleaning device. By making it possible, it is possible to produce a small-sized glass film laminate. Further, according to the glass plate cleaning method of the present invention, a small-sized glass plate can be transported without changing the cleaning device, so that a small-sized glass plate that cannot be conveyed by an existing cleaning device having a wide distance between conveying rollers can be conveyed. can be cleaned

[0023] Fig. 1 is a diagram explaining a method for manufacturing a glass film laminate according to a first embodiment.
2 is a plan view of the first laminate and the second laminate of the first embodiment.
3 : is a top view of the 1st laminated body and the 2nd laminated body of a modified example.
4 is a schematic diagram of the cleaning device of the first embodiment.
5 : is a figure explaining the manufacturing method of the glass film laminated body of 2nd Embodiment.

[0024] Hereinafter, the manufacturing method of the glass film laminate 1 of the present invention is described by taking the first embodiment and the second embodiment as an example.

[0025] [First Embodiment]

As shown in FIG. 1 , the manufacturing method of the first embodiment includes a glass film 2, a support glass 3, a first carrier glass 4 having a larger area than the glass film 2, and a support glass ( 3) A preparation step (S1) of preparing a second carrier glass 5 having a larger area than the first, and a first step of laminating the glass film 2 on the first carrier glass 4 to produce the first laminate 6 The lamination step (S2), the second lamination step (S3) of laminating the support glass 3 on the second carrier glass 5 to produce the second layered body 7, and the first layered body 6 The 1st cleaning process (S4) which cleans the glass film 2 side, the 2nd cleaning process (S5) which cleans the support glass 3 side of the 2nd laminated body 7, and the 1st cleaning process (S4) ) peeling of the support glass 3 from the 2nd laminated body 7 after the 1st peeling process (S6) which peels the glass film 2 from the 1st laminated body 6 after, and the 2nd cleaning process (S5) The 2nd peeling process (S7) to do, the glass film 2 after the 1st peeling process (S6), and the support glass 3 after the 2nd peeling process (S7) are bonded to the washed surfaces, and the glass film laminated body 3rd lamination|stacking process (S8) which manufactures (1) is included.

[0026] According to this manufacturing method, the small size glass film (2) that cannot be transported by the cleaning device 8 (see FIG. 4) used in the first cleaning step (S4) and the second cleaning step (S5) ) and the support glass 3 can be transported without changing the cleaning device 8, and the glass film laminate 1 of a small size can be produced.

[0027] [preparation process]

In the preparatory step S1, silicate glass, silica glass, borosilicate glass, alkali free glass or the like can be used as the material of the glass film 2 to be prepared. It is preferable that the thickness of the glass film 2 is 300 micrometers or less. Further, the thickness of the glass film 2 is more preferably 200 μm or less, still more preferably 100 μm or less. It is preferable that the thickness of the glass film 2 is 5 micrometers or more from a viewpoint of ensuring the intensity|strength of the glass film 2.

[0028] It is preferable that the length L1 of the glass film 2 in the conveying direction A when conveyed by the cleaning device 8 is less than the distance D1 of the conveying roller 81 (see FIG. 4 ). The shape of the glass film 2 is not particularly limited, and may be, for example, rectangular or square. The glass film 2 used in this embodiment has a square shape of 100 mm long and 100 mm wide, and has a thickness of 100 µm.

[0029] As the material of the supporting glass 3 to be prepared, as in the case of the glass film 2, silicate glass, silica glass, borosilicate glass, alkali-free glass or the like can be used. Regarding the support glass 3, it is preferable to use a glass whose thermal expansion coefficient difference between 30 and 380°C from the glass film 2 is within 5×10 ^-7 /°C. From the viewpoint of suppressing the difference in expansion rate, it is most preferable to use the same material as the glass film 2 for the support glass 3 .

The thickness of the supporting glass 3 is preferably 300 μm or more. In addition, the thickness of the support glass 3 is more preferably 300 to 700 μm, still more preferably 300 to 500 μm. This makes it possible to support the glass film 2 with the support glass 3 and effectively suppress breakage of the glass film 2 that occurs when the glass film 2 is separated from the support glass 3. can

[0031] It is preferable that the support glass 3 is larger than the glass film 2, and the length L2 in the conveying direction A when conveyed by the cleaning device 8 is less than the distance D1 of the conveying roller 81. The shape of the supporting glass 3 is not particularly limited, and may be, for example, rectangular or square. The supporting glass 3 used in this embodiment is a square of 104 mm long and 104 mm wide, and has a thickness of 500 µm.

As the material of the first carrier glass 4 and the second carrier glass 5 to be prepared, as in the case of the glass film 2 and the support glass 3, silicate glass, silica glass, borosilicate glass, alkali free glass etc. can be used. It is preferable that the thickness of the 1st carrier glass 4 and the 2nd carrier glass 5 is 300 micrometers or more similarly to the support glass 3. Moreover, the thickness of the 1st carrier glass 4 and the 2nd carrier glass 5 is more preferably 300-700 micrometers, More preferably, it is 300-500 micrometers.

[0033] This makes it possible to support the glass film 2 with the first carrier glass 4, and at the same time, the glass film 2 generated when peeling the glass film 2 from the first carrier glass 4. ) can be effectively suppressed. In addition, it becomes possible to support the support glass 3 with the second carrier glass 5, and breakage of the support glass 3 that occurs when the support glass 3 is separated from the second carrier glass 5 is prevented. can be effectively suppressed.

When the first carrier glass 4 and the second carrier glass 5 are conveyed by the cleaning device 8, the lengths L3 and L4 in the conveying direction A are equal to or greater than the distance D1 between the conveying rollers 81. And, it is preferable that the interval D2 or more between the first sandwiching roller pair 85 and the second sandwiching roller pair 86 of the cleaning device 8. The shapes of the first carrier glass 4 and the second carrier glass 5 are not particularly limited, and may be rectangular or square, for example. The 1st carrier glass 4 and the 2nd carrier glass 5 used by this embodiment are 370 mm long and 470 mm wide (conveyance direction A) rectangle, and their thickness is 500 micrometers. Thus, the 1st carrier glass 4 has a larger area than the glass film 2, and the 2nd carrier glass 5 has a larger area than the support glass 3.

[0035] [First lamination process]

As shown in FIG. 1 and FIG. 2, in the 1st lamination process S2, the glass film 2 is laminated|stacked on the 1st carrier glass 4, and the 1st laminated body 6 is produced. The lower surface 2a of the glass film 2 in the first laminate 6 is a contact surface in the first lamination step S2 and serves as a guarantee surface in the third lamination step S8. The contact surface is a surface on the side that is in contact with the first carrier glass 4 . The guarantee surface is a surface on the side on which manufacturing-related processes such as formation of elements are performed in the manufacture of products such as electronic devices. On the other hand, the upper surface 2b of the glass film 2 in the first laminate 6 is a cleaning surface constituting a part of the upper surface 6b of the first laminate 6 . The washed surface is the surface to be washed in the first cleaning step (S4).

[0036] The lower surface 4a of the first carrier glass 4 in the first laminate 6 is a transport surface constituting the lower surface 6a of the first laminate 6 . The conveying surface is a surface on the side supported by the conveying roller 81 (see FIG. 4 ) when conveying by the cleaning device 8 . On the other hand, a part of the upper surface 4b of the first carrier glass 4 in the first laminate 6 constitutes a part of the upper surface 6b of the first laminate 6, and the other part ) is the contact surface. The contact surface is a surface on the side that is in contact with the glass film 2 .

[0037] When the glass film 2 and the first carrier glass 4 are brought into close contact in the first lamination step (S2), the first laminate 6 is formed by adhering to such an extent that they can be peeled off without an adhesive. It is thought that this phenomenon is mutually fixed by the hydrogen bond of the hydroxyl group formed in the contact surface of the glass film 2 and the contact surface of the 1st carrier glass 4. Or it is also considered that they adhere to each other by forming hydrogen bonds through water molecules present at the interface between the glass film 2 and the first carrier glass 4.

[0038] In the first layered body 6, a part of the glass film 2 protrudes from the end of the first carrier glass 4 to form a protruding portion 2c. This end is an upstream end in the conveyance direction when conveyed by the cleaning device 8 . The protruding amount of the protruding portion 2c can be, for example, 1 to 10 mm. In the first cleaning step S4, because the protruding portion 2c is located upstream in the conveying direction, even if the cleaning member 82 rotates counterclockwise (clockwise in FIG. 1), the protruding portion 2c does not (82) (see Fig. 4). Moreover, in the 1st peeling process S6, the glass film 2 can be peeled easily by holding and peeling the projecting part 2c of the glass film 2.

[0039] In the first laminate 6, the stacking position of the glass film 2 relative to the first carrier glass 4 is not limited to the position described above, for example, the first carrier glass ( You may laminate|stack the glass film 2 in the center of 4).

[0040] Further, as a modified example of the first laminate 6, the first laminate 61 as shown in FIG. 3 may be used. That is, the first laminate 61 is produced by laminating a plurality of glass films 2 at different positions on one surface (upper surface 4b) of the first carrier glass 4 . Thereby, in the first cleaning step S4, since a plurality of glass films 2 can be washed at once, the production efficiency is good.

Further, by making the first carrier glass 4 larger in area, more glass films 2 can be laminated. In addition, although there is no particular limitation on the lamination position of the glass film 2 with respect to the 1st carrier glass 4, it is preferable to set it as the position where the protruding part 2c is formed as shown in FIG.

[0042] [Second lamination process]

As shown in FIG. 1 and FIG. 2, in the 2nd lamination process (S3), the support glass 3 is laminated|stacked on the 2nd carrier glass 5, and the 2nd laminated body 7 is produced. The lower surface 3a of the support glass 3 in the second laminate 7 is a contact surface. The contact surface is a surface on the side that is in contact with the second carrier glass 5 . On the other hand, the upper surface 3b of the support glass 3 in the second laminate 7 is a cleaning surface constituting a part of the upper surface 7b of the second laminate 7 . The washed surface is the surface to be cleaned in the second cleaning step (S5).

[0043] The lower surface 5a of the second carrier glass 5 in the second laminate 7 is a transport surface constituting the lower surface 7a of the second laminate 7 . The conveyance surface is a surface on the side supported by the conveyance roller 81 when conveyed by the cleaning device 8 . On the other hand, a part of the upper surface 5b of the second carrier glass 5 in the second laminate 7 constitutes a part of the upper surface 7b of the second laminate 7, and the other part is a contact surface. . The contact surface is a surface on the side that is in contact with the support glass 3 .

[0044] When the support glass 3 and the second carrier glass 5 are brought into close contact in the second lamination step (S3), as described above, they are adhered to the extent that they can be peeled off without an adhesive, thereby forming the second laminate 7. do. Similar to the first laminate 6, in the second laminate 7, a part of the support glass 3 protrudes from the end of the second carrier glass 5 to form a protruding portion 3c. . This end is an upstream end in the conveyance direction when conveyed by the cleaning device 8 . The protruding amount of the protruding portion 3c can be, for example, 1 to 10 mm. By this protruding part 3c, the same effect as the said protruding part 2c is obtained.

[0045] Also in the second laminate 7, the lamination position of the support glass 3 relative to the second carrier glass 5 is not limited to the position described above, for example, the second carrier glass ( You may laminate|stack the support glass 3 in the center of 5).

[0046] Further, as a modified example of the second laminate 7, the second laminate 71 as shown in FIG. 3 may be used. That is, the second laminate 71 is produced by laminating a plurality of support glasses 3 at different positions on one surface (upper surface 5b) of the second carrier glass 5 . Because of this, in the second cleaning step S5, since a plurality of support glasses 3 can be washed at once, the production efficiency is good.

Further, by making the second carrier glass 5 have a larger area, more supporting glasses 3 can be laminated. In addition, although there is no particular limitation on the lamination position of the support glass 3 with respect to the 2nd carrier glass 5, it is preferable to set it as the position where the protruding part 3c is formed as shown in FIG.

[0048] [First cleaning process]

The first cleaning step S4 is a step of washing the glass film 2 side of the first laminate 6 . In the first cleaning step (S4), foreign substances on the upper surface 2a of the glass film 2 are removed, and in the third lamination step (S8), air bubbles are removed between the glass film 2 and the support glass 3. occurrence can be reduced.

[0049] Fig. 4 is a side view of a main part of the cleaning device 8 used in the first cleaning step (S4). The cleaning device 8 includes a plurality of transport rollers 81, a cleaning member 82, a plurality of cleaning nozzles 83, a pair of air knives 84, a first pair of holding rollers 85 ) and a second pair of clamping rollers 86.

The conveyance roller 81 is a roller that conveys while supporting the lower surface 6a of the first laminate 6 . The conveying rollers 81 are disposed with a distance D1 across the entirety from the start point to the end point of the cleaning device 8 except between the first sandwiching roller pair 85 and the second sandwiching roller pair 86. . The transport roller 81 has a shaft portion 811 that rotates in the transport direction A, and a plurality of disk bodies 812 fixed to the shaft portion 811 at regular intervals. A ring-shaped buffer member (not shown) made of resin is attached to the outer periphery of the disc body 812 . When a driving force from a drive source (not shown) is input to the shaft portion 811, the shaft portion 811 and the disc 812 rotate in the transport direction A, and the first laminate 6 supported by the disc 812 ) is conveyed in the conveying direction A.

[0051] The cleaning member 82 is a member that cleans the upper surface 6b of the first laminate 6 . The cleaning member 82 is disposed above the conveying roller 81 . As the cleaning member 82, a cleaning brush such as a brush roller or a cleaning sponge such as a sponge roller can be used, for example. The cleaning member 82 of this embodiment is composed of a brush roller having a shaft portion 821 that rotates in a direction opposite to the conveyance direction A, and a cylindrical brush 822 fixed to the shaft portion 821 . When a driving force from a drive source (not shown) is input to the shaft portion 821, the shaft portion 821 and the brush 822 rotate in a direction opposite to the conveyance direction A, and the brush 822 rotates the shaft portion 821 of the first stacked body 6. It comes into contact with the upper surface 6b to scrape off foreign substances.

[0052] The cleaning nozzle 83 is a member that ejects a cleaning agent. The cleaning nozzle 83 is higher than the transport roller 81, between the first pair of holding rollers 85 and the cleaning member 82, and between the cleaning member 82 and the second pair of holding rollers 86. are disposed so as to be able to eject the cleaning agent. The cleaning agent ejected from the cleaning nozzle 83 is sprayed onto the upper surface 6b of the first layered body 6 . Foreign matter on the upper surface 6b of the first layered body 6 is easily removed by the cleaning agent.

[0053] The air knife 84 is a member that ejects compressed air. The air knife 84 is downstream of the second clamping roller pair 86 in the conveying direction, and is disposed above and below the conveying roller 81 so as to face each other. The compressed air ejected from the air knife 84 is blown to the upper surface 6b and the lower surface 6a of the first layered body 6 . Thereby, liquid droplets of the cleaning agent remaining on the upper surface 6b and lower surface 6a of the first layered body 6 are removed. In addition, you may omit the air knife 84 arrange|positioned below the conveyance roller 81.

[0054] The first pair of clamping rollers 85 is disposed upstream of the cleaning member 82 in the conveying direction, and conveys the upper surface 6b and the lower surface 6a of the first stacked body 6 while clamping them. a pair of rollers In addition, the conveying roller 81 is not disposed between the first pair of holding rollers 85 and the cleaning member 82 . The first pair of clamping rollers 85 includes an upper roller 851 disposed above the conveying roller 81 and contacting the upper surface 6b of the first stacked body 6, and the conveying roller 81 ) and has a lower roller 852 which is arranged at the same height and contacts the lower surface 6a of the first stacked body 6.

[0055] The upper roller 851 and the lower roller 852 have a shaft portion 853 that rotates in the conveying direction A, and a plurality of rubber rollers 854 fixed to the shaft portion 853 at regular intervals. In addition, the rubber roller 854 may be one long roller disposed along the shaft portion 853 . In addition, the rubber roller 854 may be a roller using another resin or the like, as long as the first layered body 6 can be held without being damaged.

[0056] When a driving force from a drive source (not shown) is input to the shaft portion 853, the shaft portion 853 and the rubber rollers 854 rotate in the conveying direction A, and the first laminate 6 moves up and down with the rubber rollers. It is conveyed in the conveyance direction A while being clamped by 854. When the first laminate 6 is conveyed while being held by the first pair of clamping rollers 85, even before the first laminate 6 reaches the second pair of clamping rollers 86, the first The laminated body 6 is conveyed without being pushed back by the cleaning member 82 rotating in the direction opposite to the conveyance direction A.

[0057] The second pair of clamping rollers 86 is disposed downstream of the cleaning member 82 in the conveying direction, and conveys the upper surface 6b and the lower surface 6a of the first stacked body 6 while being clamped therein. a pair of rollers In addition, the conveying roller 81 is not disposed between the cleaning member 82 and the second pair of clamping rollers 86 . The second sandwiching roller pair 86 has a structure similar to that of the first sandwiching roller pair 85 . That is, it has an upper roller 861 and a lower roller 862. The upper roller 861 and the lower roller 862 have a shaft portion 863 and a plurality of rubber rollers 864 .

[0058] When a driving force from a driving source (not shown) is input to the shaft portion 863, the shaft portion 863 and the rubber rollers 864 rotate in the conveying direction A, and the first laminate 6 moves up and down with the rubber rollers. It is conveyed in the conveyance direction A while being clamped by 864. When the first laminate 6 is conveyed while being held by the second pair of clamping rollers 86, even after the first laminate 6 passes through the first pair of clamping rollers 85, the first The laminated body 6 is conveyed without being pushed back by the cleaning member 82 rotating in the direction opposite to the conveyance direction A.

[0059] As described above, between the first pair of support rollers 85 and the pair of support rollers 86, the conveying roller 81 is not disposed. Accordingly, the distance D2 between the first pair of sandwiching rollers 85 and the second pair of sandwiching rollers 86 tends to be wider than the distance D1 between the transport rollers 81 . Even if the length L1 of the glass film 2 and the length L2 of the support glass 3 are longer than the distance D1 between the transport rollers 81, the first pair of holding rollers 85 and the second pair of holding rollers ( When it is shorter than the interval D2 of 86), it is difficult to convey the glass film 2 and the support glass 3 alone.

[0060] However, as in the present embodiment, the first carrier glass 4 having a length L3 in the conveying direction A longer than the distance D1 or distance D2 and a second carrier having a length L4 in the conveying direction A longer than the distance D1 or distance D2 By laminating on the glass 5, the glass film 2 and the support glass 3 can be conveyed.

That is, the lengths L3 and L4 of the conveyance direction A in the first carrier glass 4 and the second carrier glass 5 are the first pair of sandwich rollers 85 and the second pair of sandwich rollers ( 86), the 1st stacked body 6 can be held simultaneously by the 1st clamping roller pair 85 and the 2nd clamping roller pair 86 by being more than the distance D2. Therefore, the 1st laminated body 6 can be conveyed from the 1st clamping roller pair 85 to the 2nd clamping roller pair 86, without falling off. In other words, the first layered body 6 being cleaned by the cleaning member 82 is in a state where it is pinched by at least one of the first sandwiching roller pair 85 and the second sandwiching roller pair 86. Because it is, it is fixed by either one of the first insertion support roller pair 85 or the second insertion support roller pair 86. Therefore, even if the distance D2 between the first sandwiching roller pair 85 and the second sandwiching roller pair 86 is the existing cleaning device 8, the cleaning device 8 is not changed, and the small size glass film (2) and the support glass 3 can be conveyed.

[0062] From the viewpoint of improving the cleaning effect, the first cleaning step (S4) may also include steps of washing with pure water before the above step and washing with alkaline ionized water after the above step. . A device similar to the cleaning device 8 described above can also be used for these steps.

[0063] [Second cleaning process]

The second cleaning step S5 is a step of cleaning the support glass 3 side of the second laminate 7 . Since the second cleaning step S5 can be performed in the same manner as the first cleaning step S4 using the cleaning device 8 described above, detailed descriptions are omitted.

[0064] In addition, the cleaning method used in the first cleaning step (S4) and the second cleaning step (S5) is not limited to the above method as long as it is conveyed using a conveyance roller, and is used for cleaning glass products. A general method can be used. For example, ultrasonic cleaning, photochemical cleaning using ultraviolet light or ozone, physical cleaning using plasma, and the like can be used alone or in appropriate combination. In particular, in the first cleaning process (S4) and the second cleaning process (S5), the first laminated body 6 and the second sandwiching roller pair 85 and the second sandwiching roller pair 86 2 When cleaning is performed by rubbing using the cleaning member 82 while holding the stacked body 7, but rinse cleaning by flowing washing water without using the cleaning member 82, the first clamping roller The pair 85 and the second pair of clamping rollers 86 may be omitted.

[0065] [First Peeling Process]

As shown in FIG. 1, the 1st peeling process S6 is a process of peeling the glass film 2 from the 1st laminated body 6 after the 1st cleaning process S4. In the first peeling step S6, the glass film 2 can be easily peeled from the first carrier glass 4 by gripping and peeling the projecting portion 2c of the glass film 2.

[0066] [Second Peeling Process]

As shown in FIG. 1, the 2nd peeling process S7 is a process of peeling the support glass 3 from the 2nd laminated body 7 after the 2nd cleaning process S5. In the second peeling step S7, the support glass 3 can be easily peeled from the second carrier glass 5 by gripping and peeling the protruding portion 3c of the support glass 3.

[0067] Further, the first carrier glass 4 after the first peeling step (S6) and the second carrier glass 5 after the second peeling step (S7) are again subjected to the first lamination step (S2) and the second It can be used in the lamination step (S3).

[0068] [Third lamination process]

As shown in FIG. 1, the 3rd lamination process S8 consists of the cleaning surface of the glass film 2 after the 1st peeling process S6, and the cleaning surface of the support glass 3 after the 2nd peeling process S7. It is a process of manufacturing the glass film laminated body 1 by bonding together. In the third lamination step (S8), the glass film 2 is placed with the cleaned surface (upper surface 2b) facing upward on a flat bonding table 9, and the supporting glass 3 is placed thereon. The cleaning surface (upper surface 3b) is brought into close contact with the face downward. As a result, the glass film 2 and the support glass 3 are adhered to such an extent that they can be peeled off without an adhesive, similarly to the first laminate 6 and the second laminate 7 described above, thereby forming the glass film laminate 1. form

[0069] The third lamination step (S8) may be performed under reduced pressure. Thereby, air bubbles generated between the glass film 2 and the support glass 3 can be reduced.

[0070] [Second Embodiment]

Next, the manufacturing method of the second embodiment will be described. The same code|symbol is attached|subjected to the same member as the member used in 1st Embodiment, and the detailed description is abbreviate|omitted.

As shown in FIG. 5, in the manufacturing method of the second embodiment, the glass film 2, the support glass 3, and the carrier glass having a larger area than the glass film 2 and the support glass 3 ( 12) and the first lamination of preparing the laminate 13 by laminating the glass film 2 and the support glass 3 at different positions on one surface of the carrier glass 12 (S11). Step (S12), cleaning step (S13) of washing the glass film 2 and support glass 3 sides of the laminate 13, and glass film 2 from the laminate 13 after the cleaning step (S13). ) and the support glass 3 are peeled off (S14), and the glass film 2 and the support glass 3 after the peeling step (S14) are bonded to each other to form a glass film laminate (1). It includes a second lamination step (S15) of producing.

[0072] According to this manufacturing method, the same effects as those of the manufacturing method of the first embodiment are obtained. In addition, since the glass film 2 and the supporting glass 3 can be washed at once, the production efficiency is good.

[0073] [preparation process]

In the preparation step (S11), the glass film 2 and the support glass 3 to be prepared are the same as those in the first embodiment. In addition, the prepared carrier glass 12 is the same as the 1st carrier glass 4 of 1st Embodiment.

[0074] [First lamination process]

In the first lamination step (S12), the glass film 2 and the support glass 3 are laminated at different positions on one surface of the carrier glass 12 to form the laminate 13. This is what made the 1st carrier glass 4 and the 2nd carrier glass 5 in 1st Embodiment into the carrier glass 12 of 1 sheet.

[0075] In the laminate 13, parts of the glass film 2 and the support glass 3 protrude from the ends of the carrier glass 12, forming protruding portions 2c and 3c. This end is an upstream end in the conveyance direction when conveyed by the cleaning device 8 . In addition, in the laminate 13, the lamination position of the glass film 2 and the support glass 3 relative to the carrier glass 12 is not limited to the position described above, for example, the position of the carrier glass 12 You may laminate|stack the glass film 2 and the support glass 3 side by side in the center.

Further, by making the carrier glass 12 larger in area, more glass films 2 and support glass 3 can be laminated. That is, each of the glass film 2 and the support glass 3 to be laminated on one sheet of carrier glass may be one or more sheets. By laminating a large number of glass films 2 and support glass 3 on one sheet of carrier glass, the efficiency in the cleaning process is good.

[0077] [cleaning process]

The washing step (S13) is a step of washing the glass film 2 and support glass 3 sides of the layered product 13. The cleaning process (S13) can be performed similarly to the first cleaning process (S4) of the first embodiment using the cleaning device 8 of the first embodiment. By washing the layered product 13 of one sheet in the cleaning step S13, foreign matter on the upper surface 2b of the glass film 2 and the upper surface 3b of the support glass 3 can be removed at once.

[0078] [exfoliation process]

The peeling step (S14) is a step of peeling the glass film 2 and the support glass 3 from the layered product 13 after the washing step (S13). In the peeling step S14, the protruding part 2c of the glass film 2 and the protruding part 3c of the support glass 3 are gripped and peeled off, respectively, so that they can be easily peeled off. In addition, the carrier glass 12 after the peeling step (S14) can be used again in the first lamination step (S12).

[0079] [Second lamination process]

The second lamination step (S15) is a step of bonding the cleaned surface of the glass film 2 and the cleaned surface of the support glass 3 after the peeling step (S14) to produce the glass film laminate 1. The 2nd lamination process (S15) can be performed similarly to the 3rd lamination process (S8) of 1st Embodiment.

[0080] In the above-described embodiment, since it is difficult to handle the glass film 2 as a single unit, it is necessary to make the glass film laminate 1 easy to handle. Conversely, when using a glass plate that is the same size as the glass film 2 and thicker than the glass film 2 and can be handled as a single unit, it is not necessary to produce a glass film laminate. That is, the support glass 3 is unnecessary, and the guarantee surface of the glass plate can be washed.

[0081] Therefore, a glass plate cleaning method includes a preparation step of preparing a plurality of glass plates and a carrier glass having a larger area than the glass plate, and laminating a plurality of glass plates at different positions on one surface of the carrier glass to produce a laminate. What is necessary is just to include the lamination process, the washing process of washing|cleaning the glass plate side of a laminated body, and the peeling process of peeling a glass plate from the laminated body after a washing process. The preparation process, the lamination process, the cleaning process, and the peeling process are the glass film 2 in the preparation process (S11), the first lamination process (S12), the cleaning process (S13), and the peeling process (S14) of the second embodiment. ) and the support glass 3 can be realized by transferring each to a glass plate. Moreover, in this embodiment, the guarantee surface of a glass plate becomes the upper surface side of the glass plate laminated|stacked in the laminated body.

[0082] According to this glass plate cleaning method, a small-size glass plate that cannot be transported by the cleaning device 8 (see FIG. 4) used in the cleaning process can be transported without changing the cleaning device 8. As a result, a small-sized glass plate can be cleaned. Moreover, since a plurality of glass plates can be washed at once, the production efficiency is good.

[0083] Also, in this specification, when handling as a single unit is possible in consideration of material, size, and use, a glass plate is described as being laminated on a carrier glass. Therefore, even if a glass plate is in the range of the thickness of the glass film 2 mentioned above, it is possible to use it as a glass plate, when handling as a single thing is possible.

1: glass film laminate
2: glass film
3: support glass
4: 1st carrier glass
5: second carrier glass
6: 1st laminated body
7: 2nd laminated body
8: cleaning device
12: carrier glass
13: laminate
81: conveying roller
82: cleaning member
85: first pair of insertion support rollers
86: second pair of insertion support rollers
A: Conveyance direction
D1: Interval
D2: Interval
S1: Preparation process
S2: First lamination process
S3: Second lamination process
S4: First cleaning process
S5: Second cleaning process
S6: 1st peeling process
S7: 2nd peeling process
S8: Third lamination process
S11: Preparation process
S12: First lamination process
S13: cleaning process
S14: Peeling process
S15: Second lamination process

Claims (6)

A method for producing a glass film laminate in which a glass film is laminated on a supporting glass, comprising:
a preparation step of preparing the glass film, the support glass, a first carrier glass having a larger area than the glass film, and a second carrier glass having a larger area than the support glass;
a first lamination step of laminating the glass film on the first carrier glass to produce a first laminate;
A second lamination step of laminating the support glass on the second carrier glass to produce a second laminate;
a first cleaning step of cleaning the glass film side of the first laminate;
A second cleaning step of cleaning the support glass side of the second laminate;
a first peeling step of peeling the glass film from the first laminate after the first cleaning step;
A second peeling step of peeling the support glass from the second laminate after the second cleaning step;
A third lamination step of manufacturing the glass film laminate by bonding the washed surfaces of the glass film after the first peeling step and the supporting glass after the second peeling step to each other.
A method for manufacturing a glass film laminate comprising a. According to claim 1,
The cleaning device used in the first cleaning process and the second cleaning process,
A plurality of conveying rollers for conveying while supporting the lower surface of the first laminate and the lower surface of the second laminate;
A cleaning member for cleaning the upper surface of the first laminate and the upper surface of the second laminate;
a pair of first clamping rollers disposed upstream of the cleaning member in the conveying direction and conveying while sandwiching the upper and lower surfaces of the first laminate and the upper and lower surfaces of the second laminate;
A second gripping roller pair disposed downstream of the cleaning member in the conveying direction and conveying while sandwiching the upper and lower surfaces of the first laminate and the upper and lower surfaces of the second laminate,
The distance between the first pair of sandwiching rollers and the second pair of sandwiching rollers is equal to or less than the length of the first carrier glass and the second carrier glass in the conveying direction.
A method for producing a glass film laminate, characterized in that: According to claim 2,
In the first laminate, a part of the glass film protrudes from an upstream end of the first carrier glass in the conveying direction;
In the second laminate, a part of the support glass protrudes from an upstream end of the second carrier glass in the conveying direction.
A method for producing a glass film laminate, characterized in that: According to any one of claims 1 to 3,
The first laminate is produced by laminating a plurality of the glass films at different positions on one surface of the first carrier glass,
The second laminate is produced by laminating a plurality of the support glasses at different positions on one surface of the second carrier glass.
A method for producing a glass film laminate, characterized in that: A method for producing a glass film laminate in which a glass film is laminated on a supporting glass, comprising:
a preparation step of preparing a glass film, a support glass, and a carrier glass having a larger area than the glass film and the support glass;
a first lamination step of laminating the glass film and the supporting glass at different positions on one surface of the carrier glass to produce a laminate;
a cleaning step of cleaning the glass film and the supporting glass side of the laminate;
a peeling step of peeling the glass film and the supporting glass from the laminate after the cleaning step;
A second lamination step of manufacturing the glass film laminate by bonding the washed surfaces of the glass film and the support glass after the peeling step to each other.
A method for manufacturing a glass film laminate comprising a. A preparation step of preparing a plurality of glass plates and a carrier glass having a larger area than the glass plate;
A lamination step of laminating a plurality of the glass plates at different positions on one surface of the carrier glass to produce a laminate;
A cleaning step of cleaning the glass plate side of the laminate;
Peeling process of peeling the said glass plate from the said laminated body after the said washing process
A method for cleaning a glass plate comprising a.