TW202223371A - Non-destructive x-ray coupled synchronous-scan mechanism and calibration method thereof - Google Patents

Abstract

A non-destructive X-ray coupled synchronous-scan mechanism comprises a placement platform for placing the object to be tested, a displacement platform that is connected to the detector and has the function to move the placement platform, a X-ray emission device that is located above the placement platform and emits X-ray for detection, a detector located below the placement platform to receive the X-ray, and a rotating device that rotates the X-ray emission device and the detector. Furthermore, the calibration method of the present invention is to place a calibration device, which has a transparent appearance and a plurality of detecting elements internally, on the placement platform; rotate the X-ray emission device and the detector to scan the calibration device from a plurality of positions or angles and establish the scan tracking diagrams of the detecting elements; then compare the scan tracking diagrams with the standard tracking diagram in order to confirm whether deviations exist.

Description

Non-destructive X-ray linkage synchronous scanning mechanism and its correction method

The present invention relates to a scanning mechanism; more specifically, it particularly refers to a non-destructive X-ray linkage synchronous scanning mechanism and its calibration method.

Generally, in the IC packaging industry, in order to ensure the yield rate of products after sealing, most of them will use an ultrasonic scanning microscope (SAT) for testing. Use 20KHz ultrasonic to detect whether there is delamination, cracks, air holes or other defects, and then dry the products after the inspection, but as long as the products absorb moisture during the inspection process and become defective products, even if There is a drying process after testing, and it is difficult to reverse the impact of moisture on the product.

In view of this, the applicant of this case, based on his years of experience in research and development in related fields, conducted in-depth discussions on the aforementioned deficiencies, and actively sought solutions based on the aforementioned needs. invention.

The main purpose of the present invention is to provide a scanning mechanism that can quickly detect whether a product is defective.

A secondary purpose of the present invention is to simplify the existing detection steps.

In order to achieve the above-mentioned purpose, the present invention produces the following three aspects according to different scanning modes.

The non-destructive X-ray linkage synchronous scanning mechanism of the first aspect of the present invention includes a placing platform, a displacement platform, an X-ray emitting device, a detector and a rotating device.

The placing platform is used for placing the object to be detected, and the placing platform is provided with a hollow block and a positioning block arranged around the hollow block.

The displacement platform is arranged below the placement platform, and the displacement platform allows the placement platform to move along the X axis or the Y axis.

The X-ray emitting device is arranged above the placing platform.

The detector is arranged below the placing platform and the displacement platform, and the detector and the X-ray emitting device are kept on the same straight line.

The rotating device is composed of an upper rotating device connected with the X-ray emitting device and a lower rotating device connected with the detector, and the upper rotating device and the lower rotating device are respectively made by the X-ray emitting device and the detector. The object to be detected rotates independently around the center, and the detector and the X-ray emitting device will remain on the same straight line while the upper rotating device and the lower rotating device are rotating.

The non-destructive X-ray linkage synchronous scanning mechanism of the second aspect of the present invention includes a placing platform, a displacement platform, an X-ray emitting device, a detector and a rotating device.

The placing platform is used for placing the object to be detected, and the placing platform is provided with a hollow block and a positioning block arranged around the hollow block;

The displacement platform is arranged below the placement platform, and the displacement platform is to allow the placement platform to move along the X-axis or the Y-axis;

The X-ray emitting device is arranged above the placing platform;

The detector is arranged below the placement platform and the displacement platform, and the detector and the X-ray emitting device are kept on the same straight line;

The rotating device is composed of a rotating bracket and a transmission device connected with the rotating bracket. The rotating bracket is connected with the X-ray emission device and the detector at the end away from the transmission device, and makes the X-ray emission device and the detector. Rotate with the object to be detected as the center, and the detector and the X-ray emitting device will remain on the same straight line when the rotating bracket rotates.

The non-destructive X-ray linkage synchronous scanning mechanism of the third aspect of the present invention includes a placement platform, a displacement platform, an X-ray emitting device and a detector.

The placing platform is used for placing the object to be detected, and the placing platform is provided with a hollow block and a positioning block arranged around the hollow block.

The displacement platform includes an upper-layer XY-axis moving device located above the placing platform, and a lower-layer XY-axis moving device located below the placing platform, and the placing platform is provided with an upper-layer auxiliary slide rail that increases the stability of the upper-layer XY-axis moving device , in addition, a lower auxiliary slide rail is arranged above the placing platform to increase the stability of the lower XY axis moving device.

The displacement platform is located under the placement platform, and the lower displacement platform includes a lower XY axis moving device, a lower adjusting seat arranged on the lower XY axis moving device, a detector arranged on the lower adjusting seat, and a lower XY axis. The lower auxiliary slide to which the mobile device is attached.

The X-ray emitting device is connected with the upper XY axis moving device through the upper adjusting seat.

The detector is connected with the lower XY axis moving device through the lower adjustment seat.

In addition, in order to ensure the accuracy of the above-mentioned mechanism detection, the present invention further provides a method for calibrating a non-destructive X-ray linkage synchronous scanning mechanism. The calibration device of the detection element is placed on the placing platform, and the X-ray emission device and the detector are rotated to scan the calibration device at a number of different positions or angles to establish the scanning trajectory map of the detection element, and then the scanning trajectory map will be scanned. Compare with the standard trajectory map to determine whether the trajectory range on the scanning trajectory map has become larger, smaller or deformed. Finally, according to the difference between the scanning trajectory map and the standard trajectory map, the X-ray emission device or detector will be used. 's correction.

The characteristics of the non-destructive X-ray linkage synchronous scanning mechanism and its calibration method of the present invention are that only X-rays are used to set the object to be inspected to quickly know its internal conditions, thereby simplifying the inspection process. In addition, the present invention establishes a clear calibration system to minimize measurement errors.

In order to allow a more detailed understanding of the purpose, effect, features and structure of the present invention, preferred embodiments are given and described in conjunction with the drawings as follows.

First, please refer to Figure 1, Figure 2 and Figure 3 at the same time.

1 is a schematic diagram of the non-destructive X-ray linked synchronous scanning mechanism of the present invention according to the first aspect, FIG. 2 is a schematic top view of the non-destructive X-ray linked synchronous scanning mechanism of the present invention according to the first aspect, and FIG. 3 is the first aspect The schematic side view of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention.

The non-destructive X-ray linkage synchronous scanning mechanism 1 of the first aspect of the present invention includes a placing platform 11 , a displacement platform 12 , an X-ray emitting device 13 , a detector 14 and a rotating device 15 .

The placing platform 11 is used for placing the object to be detected. The placing platform 11 is provided with a hollow block 111 and a positioning block 112 arranged around the hollow block 111 and used to fix the position of the object to be detected. The hollow block 111 There is also a transparent plate that allows light to penetrate. In addition, the object to be detected can be an IC package product, a high-end PCB circuit board, a lithium battery, a liquid crystal panel, etc.

The displacement platform 12 is arranged below the placement platform 11, and the displacement platform 12 allows the placement platform 11 to move along the X axis or the Y axis, so that the present invention can move the object to be detected placed on the placement platform 11 to a specific position .

The X-ray emitting device 13 is disposed above the placing platform 11 , and the X-ray emitting device 13 is used to emit X-rays for detection.

The detector 14 is disposed below the placing platform 11 and the displacement platform 12 , the detector 14 is used to receive the image generated by the X-ray irradiating the object to be detected, and the detector 14 is connected to the X-ray. The launcher 13 remains on the same line.

The rotating device 15 is composed of an upper rotating device 151 connected with the X-ray emitting device 13 and a lower rotating device 152 connected with the detector 14, and the upper rotating device 151 and the lower rotating device 152 are respectively used to transmit X-rays. The launching device 13 and the detector 14 rotate independently around the object to be detected, so that the present invention can illuminate the object to be detected at various angles, and the detector 152 rotates while the upper rotating device 151 and the lower rotating device 152 rotate. 14 and the X-ray emitting device 13 will remain on the same line.

The detailed description of the first aspect of the present invention and related drawings for reference are as follows:

In the first aspect of the present invention, in practice, the object to be detected is placed on the transparent plate, and the positioning block 112 is used to fix the object to be detected to prevent it from moving during the detection process and affecting the detection result. After the detection object is fixed in position, the detection can be started.

Then, when the detection starts, the displacement platform 12 will start to move the placing platform 11, so that the part of the object to be detected that needs to be detected is moved to the bottom of the X-ray emission device 13, and the detection part is irradiated with X-rays, and then the X-ray emission devices are rotated respectively. The device 13 and the detector 14 illuminate the same part of the object to be detected from different angles, so that the present invention can analyze the object to be detected more completely.

Then, when the present invention obtains enough image information from the part, the displacement platform 12 will move again, so that the next part to be detected is moved under the X-ray emitting device 13 and transmitted through the X-ray emitting device 13 again. The part is irradiated at various angles, and then the aforementioned actions are repeated continuously until all parts to be detected on the object to be detected have been photographed by the X-ray emitting device 13 .

Finally, the present invention transmits the captured X-ray image to the image processing device for reading and image correction, and then presents the X-ray image on the display through 2D or 3D image processing, allowing the inspector to make a judgment based on the image result. Determine whether the object to be tested is defective.

Please refer to Figure 4, Figure 5 and Figure 6 at the same time.

4 is a schematic diagram of the non-destructive X-ray linked synchronous scanning mechanism of the present invention in the second aspect, FIG. 5 is a schematic top view of the non-destructive X-ray linked synchronous scanning mechanism of the present invention in the second aspect, and FIG. 6 is the second aspect The schematic side view of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention.

The non-destructive X-ray linkage synchronous scanning mechanism 1 of the second aspect of the present invention includes a placing platform 11 , a displacement platform 12 , an X-ray emitting device 13 , a detector 14 and a rotating device 15 .

The placing platform 11 is used for placing the object to be detected. The placing platform 11 is provided with a hollow block 111 and a positioning block 112 arranged around the hollow block 111 and used to fix the position of the object to be detected. The hollow block 111 There is also a transparent plate that allows light to penetrate. In addition, the object to be detected can be an IC package product, a high-end PCB circuit board, a lithium battery, a liquid crystal panel, etc.

The displacement platform 12 is arranged below the placement platform 11, and the displacement platform 12 allows the placement platform 11 to move along the X axis or the Y axis, so that the present invention can move the object to be detected placed on the placement platform 11 to a specific position .

The X-ray emitting device 13 is disposed above the placing platform 11 , and the X-ray emitting device 13 is used to emit X-rays for detection.

The detector 14 is disposed below the placing platform 11 and the displacement platform 12 , the detector 14 is used to receive the image generated by the X-ray irradiating the object to be detected, and the detector 14 is connected to the X-ray. The launcher 13 remains on the same line.

The rotating device 15 is composed of a rotating bracket 153 and a transmission device 154 connected with the rotating bracket 153. The rotating bracket 153 is connected with the X-ray emitting device 13 and the detector 14 at one end away from the transmission device 154, and makes The X-ray emitting device 13 and the detector 14 rotate around the object to be detected, and the detector 14 and the X-ray emitting device 13 will remain on the same straight line when the rotating bracket 153 rotates.

The detailed description of the second aspect of the present invention and related drawings for reference are as follows:

In the second aspect of the present invention, in practice, the object to be detected is placed on the transparent plate, and the positioning block 112 is used to fix the object to be detected to prevent it from moving during the detection process and affecting the detection result. After the detection object is fixed in position, the detection can be started.

Then, when the detection starts, the displacement platform 12 will start to move the placing platform 11, so that the part of the object to be detected that needs to be detected is moved below the X-ray emitting device 13, and the detection part is irradiated with X-rays, and then the rotating bracket 153 will rotate at the same time The X-ray emitting device 13 and the detector 14 illuminate the same part of the object to be detected at different angles, so that the present invention can analyze the object to be detected more completely.

Then, when the present invention obtains enough image information from the part, the displacement platform 12 will move again, so that the next part to be detected is moved under the X-ray emitting device 13 and transmitted through the X-ray emitting device 13 again. The part is irradiated at various angles, and then the aforementioned actions are repeated continuously until all parts to be detected on the object to be detected have been photographed by the X-ray emitting device 13 .

Finally, the present invention transmits the captured X-ray image to the image processing device for reading and image correction, and then presents the X-ray image on the display through 2D or 3D image processing, allowing the inspector to make a judgment based on the image result. Determine whether the object to be tested is defective.

Continued please refer to Figure 7 and Figure 8 at the same time.

7 is a schematic diagram of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the third aspect, and FIG. 8 is a schematic side view of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the third aspect.

The non-destructive X-ray linkage synchronous scanning mechanism 1 of the third aspect of the present invention includes a placing platform 11 , a displacement platform 12 , an X-ray emitting device 13 and a detector 14 .

The placing platform 11 is used for placing the object to be detected. The placing platform 11 is provided with a hollow block 111 and a positioning block 112 arranged around the hollow block 111, and the hollow block 111 is also provided with a light source. A penetrating transparent plate, in addition, the object to be detected can be an IC package product, a high-end PCB circuit board, a lithium battery, a liquid crystal panel, etc.

The displacement platform 12 includes an upper layer XY axis moving device 121 located above the placing platform 11 and a lower layer XY axis moving device 122 located below the placing platform 11, and the placing platform 11 is provided with an additional upper layer XY axis moving device 121 The upper auxiliary slide rail 1211 for stability, in addition, there is a lower auxiliary slide rail 1221 above the placing platform 11 to increase the stability of the lower XY axis moving device 122, and the upper XY axis moving device 121 and the lower layer XY axis moving device 122 are connected with each other. The synchronizing electronic control devices are electrically connected to ensure that the upper layer XY axis moving device 121 and the lower layer XY axis moving device 122 can move to the same position synchronously.

The X-ray emitting device 13 is connected to the upper XY axis moving device 121 through the upper adjustment base.

The detector 14 is connected to the lower XY axis moving device 122 through the lower adjustment base.

The detailed description of the third aspect of the present invention and related drawings for reference are as follows:

In the present invention of the third aspect, in practice, the object to be detected is placed on the transparent plate, and the positioning block 112 is used to fix the object to be detected to prevent it from moving during the detection process and affecting the detection result. After the detection object is fixed in position, the detection can be started.

Then, when the detection starts, the upper XY-axis moving device 121 and the lower XY-axis moving device 122 move the X-ray emitting device 13 and the detector 14 to the upper and lower parts of the object to be detected, respectively, and then use X After light irradiates the detection part, the X-ray emitting device 13 and the detector 14 are moved above and below the next part to be detected until all parts to be detected are photographed by the X-ray emitting device 13 .

Finally, the present invention transmits the captured X-ray image to the image processing device for reading and image correction, and then presents the X-ray image on the display through 2D or 3D image processing, allowing the inspector to make a judgment based on the image result. Determine whether the object to be tested is defective.

Continued, please refer to FIG. 9 and FIG. 10 together with FIG. 1 at the same time.

FIG. 9 is a schematic diagram of scanning calibration of the present invention, and FIG. 10 is a schematic diagram of a standard image trajectory of the present invention.

In addition, in order to ensure the accuracy of the above-mentioned mechanism detection, the present invention further provides a method for calibrating the non-destructive X-ray linkage synchronous scanning mechanism 1 , which is to use a transparent surface with a plurality of inner parts arranged at different depths and distances. The calibration device 2 of the opaque detection element 21 is placed on the placing platform 11, and the X-ray emitting device 13 and the detector 14 are rotated to scan the calibration device 2 at a plurality of different positions or angles to establish the scanning of the detection element 21 After that, compare the scanning trajectory graph with the standard trajectory graph to determine whether the trajectory range on the scanning trajectory graph has become larger, smaller or deformed. Finally, according to the difference between the scanning trajectory graph and the standard trajectory graph. For the calibration of the X-ray emitting device 13 or the detector 14, the detection element 21 is any one of a point, a line, a plane or a three-dimensional object.

The size of the image of the detection element 21 captured by the X-ray emitting device 13 and the detector 14 without any error will be consistent with the actual size, and the trajectory range will also be consistent with the theoretical calculation value.

Continued, please refer to FIG. 11 and FIG. 12 together with FIG. 9 and FIG. 10 .

FIG. 11 is a schematic diagram (1) of the front and rear offset image trajectories of the detector of the present invention, and FIG. 12 is a schematic diagram (2) of the front and rear offset image trajectories of the detector of the present invention.

When the detector 14 is shifted forward and backward, the two ends of the captured image will be different in size. When the detector 14 is shifted forward, the range of the trajectory above the trajectory graph will become smaller. The range of the track becomes larger, and the image of the detection element 21 shows the situation that the upper part is large and the lower part is small.

When the detector 14 is shifted backwards, the upper track range of the track graph becomes larger, the lower track range becomes smaller, and the image of the detection element 21 shows a situation that the upper part is small and the lower part is large.

Continued, please refer to FIGS. 13 and 14 together with FIGS. 9 and 10 .

FIG. 13 is a schematic diagram (1) of the left and right shifting image trajectory of the detector according to the present invention, and FIG. 14 is a schematic diagram (2) of the left and right shifting image trajectory of the detector according to the present invention.

When the detector 14 is shifted to the left, the right end of the trajectory graph will be higher than the left end, and the detection element 21 will display a uniform size image.

In addition, when the detector 14 is shifted to the right, the left end of the trajectory graph will be higher than the right end, and the detection element 21 will also display an image of a uniform size.

Therefore, when the present invention finds that the detector 14 has front, rear, left and right offsets when using the correction device 2 for correction, it is only necessary to calculate the distance between each track and the distance between the detection elements 21, The correction value can be obtained and the scanning accuracy of the present invention can be ensured.

To sum up the above, the advantages of the non-destructive X-ray linkage synchronous scanning mechanism and its calibration method of the present invention are that only X-rays are used to set the object to be inspected to quickly know its internal conditions and thus simplify the inspection process. In addition, the present invention establishes a clear Calibration system to minimize measurement error.

Therefore, the present invention has excellent progress and practicability among similar products, and at the same time, after searching domestic and foreign technical data and documents about such structures, it is true that no identical or similar structures exist before the application in this case. Therefore, this case The patent requirements for "creativeness", "suitability for industrial utilization" and "progressiveness" should be met, and the application should be filed in accordance with the law.

However, the above are only preferred embodiments of the present invention, and other equivalent structural changes made by applying the description of the present invention and the scope of the patent application should be included in the scope of the patent application of the present invention.

1: Non-destructive X: Optical linkage synchronous scanning mechanism 11: Place the platform 111: Hollow block 112: Positioning block 12: Displacement platform 121: Upper XY axis moving device 1211: Upper Auxiliary Rail 122: Lower XY axis moving device 1221: Lower Auxiliary Rails 13: X-ray emission device 14: Detector 15: Rotary device 151: Upper Rotary Device 152: Lower rotation device 153: Swivel bracket 154: Transmission 2: Correction device 21: Detection element

Figure 1: Schematic diagram of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the first aspect; Figure 2: a schematic top view of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the first aspect; Figure 3: a schematic side view of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the first aspect; Figure 4: A schematic diagram of the non-destructive X-ray linkage synchronous scanning mechanism of the second aspect of the present invention; 5: A schematic top view of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the second aspect; Figure 6: a schematic side view of the non-destructive X-ray linkage synchronous scanning mechanism of the second aspect of the present invention; Fig. 7: Schematic diagram of the non-destructive X-ray linkage synchronous scanning mechanism of the present invention in the third aspect; Figure 8: a schematic side view of the non-destructive X-ray linkage synchronous scanning mechanism of the third aspect of the present invention; Figure 9: a schematic diagram of scanning calibration of the present invention; Figure 10: Schematic diagram of the standard image trajectory of the present invention; Figure 11: Schematic diagram of the front and rear offset image tracks of the detector of the present invention (1); Figure 12: Schematic diagram (2) of the front and rear offset image tracks of the detector of the present invention; Figure 13: Schematic diagram (1) of the left and right offset image trajectory of the detector of the present invention; Figure 14: Schematic diagram (2) of the left and right offset image trajectory of the detector of the present invention;

none.

1: Non-destructive X-ray linkage synchronous scanning mechanism

11: Place the platform

111: Hollow block

112: Positioning block

12: Displacement platform

13: X-ray emission device

Claims (9)

A non-destructive X-ray linkage synchronous scanning mechanism includes a placing platform, a displacement platform, an X-ray emitting device, a detector and a rotating device; The placing platform is used for placing the object to be detected, and the placing platform is provided with a hollow block and a positioning block arranged around the hollow block; The displacement platform is arranged below the placement platform, and the displacement platform is to allow the placement platform to move along the X-axis or the Y-axis; The X-ray emission device is arranged above the placing platform; The detector is arranged below the placing platform and the displacement platform, and the detector and the X-ray emitting device are kept on the same straight line; The rotating device is composed of an upper rotating device connected with the X-ray emitting device and a lower rotating device connected with the detector, and the upper rotating device and the lower rotating device are respectively made by the X-ray emitting device and the detector. The object to be detected rotates independently around the center, and the detector and the X-ray emitting device will remain on the same straight line while the upper rotating device and the lower rotating device are rotating. The non-destructive X-ray linkage synchronous scanning mechanism according to claim 1, wherein a transparent plate is arranged on the hollow block. A non-destructive X-ray linkage synchronous scanning mechanism includes a placing platform, a displacement platform, an X-ray emitting device, a detector and a rotating device; The placing platform is used for placing the object to be detected, and the placing platform is provided with a hollow block and a positioning block arranged around the hollow block; The displacement platform is arranged below the placement platform, and the displacement platform is to allow the placement platform to move along the X-axis or the Y-axis; The X-ray emission device is arranged above the placing platform; The detector is arranged below the placing platform and the displacement platform, and the detector and the X-ray emitting device are kept on the same straight line; The rotating device is composed of a rotating bracket and a transmission device connected with the rotating bracket. The rotating bracket is connected with the X-ray emission device and the detector at the end away from the transmission device, and makes the X-ray emission device and the detector. Rotate with the object to be detected as the center, and the detector and the X-ray emitting device will remain on the same straight line when the rotating bracket rotates. The non-destructive X-ray linkage synchronous scanning mechanism according to claim 3, wherein a transparent plate is arranged on the hollow block. A non-destructive X-ray linkage synchronous scanning mechanism includes a placement platform, a displacement platform, an X-ray emission device and a detector; The placing platform is used for placing the object to be detected, and the placing platform is provided with a hollow block and a positioning block arranged around the hollow block; The displacement platform includes an upper-layer XY-axis moving device located above the placing platform, and a lower-layer XY-axis moving device located below the placing platform, and the placing platform is provided with an upper-layer auxiliary slide rail that increases the stability of the upper-layer XY-axis moving device , in addition, there is a lower auxiliary slide rail above the placement platform to increase the stability of the lower XY axis moving device; The X-ray emitting device is connected with the upper XY axis moving device through the upper adjusting seat; The detector is connected with the lower XY axis moving device through the lower adjustment seat. The non-destructive X-ray linkage synchronous scanning mechanism according to claim 5, wherein a transparent plate is arranged on the hollow block. The non-destructive X-ray linkage synchronous scanning mechanism according to claim 5, wherein the upper XY axis moving device and the lower XY axis moving device are electrically connected with the synchronous electronic control device. A calibration method of a non-destructive X-ray linkage synchronous scanning mechanism is to place a calibration device with a transparent appearance and a plurality of opaque detection elements arranged at different depths and distances inside it on a placing platform, and rotate the X-ray emission The device and the detector make it scan the correction device at multiple different positions or angles and establish the scanning trajectory map of the detection element, and then compare the scanning trajectory map with the standard trajectory map to determine whether the trajectory range on the scanning trajectory map is not. If it becomes larger, smaller or deformed, the X-ray emitting device or detector is calibrated according to the difference between the scanning trajectory and the standard trajectory. The method for calibrating a non-destructive X-ray linkage synchronous scanning mechanism according to claim 8, wherein the detection element is any one of a point, a line, a plane or a three-dimensional object.

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