TW202218265A - Connector for electrical connection - Google Patents

Abstract

The electrical connection connector of an embodiment of the present invention is configured between a tested equipment and a testing device and conducts electricity along the up and down directions to electrically connect the tested equipment and the testing device. The electrical connection connector includes: a mask unit, which divides a plurality of grid regions arranged in a grid pattern and extends in the up and down directions; a conductive unit, which extends in the up and down directions and electrically conducts the upper end of the grid region and the lower end of the grid region; and an insulation unit, which insulates the conductive unit and the mask unit in the grid regions.

Description

Connector for electrical connection

The present invention relates to a connector for electrical connection arranged between a device under inspection and a test apparatus.

In an inspection procedure for determining whether or not a device under inspection such as a fabricated semiconductor device is defective, a connector for electrical connection is arranged between the device under inspection and test equipment. There is known an inspection method in which an electrical connection connector electrically connects a device under inspection and a test device, and determines whether or not the device under inspection is defective based on whether or not the device under inspection and the test device are energized.

If the terminals of the device under test are in direct contact with the terminals of the test device without a connector for electrical connection, the terminals of the test device will be worn or damaged during repeated inspections, resulting in the need to replace the entire test device. demand. Connectors for electrical connection can be used to prevent the need to replace the entire test set.

The connector for electrical connection can be used for an inspection method using a radio frequency (RF) signal, which is a high-frequency signal. In the case of the inspection method using the radio frequency signal, it is necessary to match the impedance value of the connector for electrical connection according to the frequency band of the radio frequency signal.

The connector for electrical connection may include a plurality of conductive portions that are in contact with the terminals of the device under test. Whether the device under test and the test device are powered on can be confirmed by applying radio frequency signals to the plurality of conductive parts. If a radio frequency signal is applied to the plurality of conductive parts, the plurality of conductive parts may electromagnetically influence each other.

The problem that the invention seeks to solve

Various embodiments of the present invention provide a connector for electrical connection that provides stable electrical connection to the device under test and easy matching of impedance values.

Also, various embodiments of the present invention provide a connector for electrical connection that reduces the electromagnetic influence between a plurality of conductive parts.

In the inspection method using a radio frequency signal, the electrical connection connector needs to have an impedance value matched according to the conditions of the inspection method. The connector for electrical connection needs to match the impedance value according to the conditions of the inspection method and provide stable electrical connection with the device under inspection. If proper impedance matching is not provided, there may be limitations in reliable inspection due to reflection of inspection signals, etc.

In the connector for electrical connection, as the cross-sectional area of the conductive portion becomes larger, more stable electrical connection between the device under test and the connector for electrical connection can be provided. However, it is technically difficult to make the size of the conductive portion meet the required level when considering the trend of refinement of the equipment under inspection, and electromagnetic interference or crosstalk, which will be described below.

In tests using radio frequency signals, electromagnetic interference may occur between a plurality of conductive parts. Crosstalk (signal interference) may occur with connectors for electrical connection. When crosstalk occurs in the electrical connection connector, it may not be possible to measure whether the electrical connection connector is energized normally. When crosstalk occurs, the reliability of the inspection method using the electrical connection connector may decrease. Embodiments of the present invention address this problem.

Embodiments of the present invention address this problem by easily matching impedance values and providing a stable electrical connection to the device under test.

Various embodiments of the present invention may provide more design margins for the size of the conductive portion.

In addition, the various embodiments of the present invention can prevent electromagnetic interference between the conductive parts of the electrical connection connector. technical means to solve problems

One embodiment of the present invention provides a plurality of examples of electrical connection connectors.

According to an embodiment, the electrical connection connector is disposed between the device under test and the test device, and conducts electricity along the up-down direction, so that the device under test and the test device are electrically connected to each other, and the connector for electrical connection includes: a shield portion a plurality of lattice regions arranged in a lattice pattern are divided and extend in the up-down direction; a conductive portion extends in the up-down direction in the lattice region, so that the upper end of the lattice region and the lower end of the lattice region are electrically conductive; and an insulating portion , insulate the conductive portion and the shield portion in the lattice region.

The shield portion may include: a plurality of first shield walls extending along one side and spaced apart from each other along the other side traversing the one side; and a plurality of second shield walls extending along the other side One side extends and is spaced from each other along said side.

The shield portion may extend from the upper end of the insulating portion to the lower end of the insulating portion along the vertical direction.

The vertical length of the shield portion may be the same as or greater than the vertical length of the conductive portion.

The above-mentioned mask portion may be formed of a metal material.

The shield portion may laterally surround the outer surface of the conductive portion so as to reduce electromagnetic interference to the conductive portion respectively located in the plurality of lattice regions.

The transverse cross-section of the above-mentioned lattice region may be in a rectangular shape.

The conductive portion may include at least one of conductive particles and conductive metal wires, at least one of the conductive particles and conductive metal wires may be maintained by silicone rubber, and the insulating portion may be made of the same material as the silicone rubber.

The ratio of the length of the diameter of the transverse section of the conductive portion to the length of the short side of the transverse section of the lattice region may be 1:2 to 1:5.

The ratio of the diameter length of the transverse section of the conductive portion to the diagonal length of the transverse section of the lattice region may be 1:4 to 1:7.

The shielding portion may include at least one of copper, aluminum, stainless steel, copper alloy, aluminum alloy, and stainless steel alloy, and the insulating portion may include silicone rubber.

The above insulating portion may form a porous foam structure.

The present invention may further include: an upper end film attached to the upper end of the conductive portion; and a lower end film attached to the lower end of the conductive portion.

The upper end film may include an upper end pad electrically connected to the upper portion of the conductive portion, the lower end film may include a lower end pad electrically connected to the lower portion of the conductive portion, and the upper end pad, the conductive portion and the lower end pad may be formed along the upper and lower ends. For the conductive channel with conductive direction, the vertical length of the conductive channel may be greater than the vertical length of the shield portion. Efficacy compared to prior art

According to various embodiments of the present invention, a stable electrical connection to the device under test can be provided.

According to various embodiments of the present invention, impedance values of electrical connection connectors can be easily matched.

According to various embodiments of the present invention, the size design margin of the conductive portion of the electrical connection connector can be larger.

According to various embodiments of the present invention, it is possible to reduce the electromagnetic influence between the plurality of conductive parts of the electrical connection connector.

The various embodiments of the present invention are for the purpose of explaining the technical idea of the present invention. The claimed scope of the present invention is not limited to the various embodiments set forth below or the specific descriptions of these various embodiments.

In the present invention, the "embodiment" is an arbitrary distinction for easily explaining the technical idea of the present invention, and each embodiment does not need to be mutually exclusive. For example, various structures disclosed in one embodiment may be applied and implemented in another embodiment, and may be applied and implemented with modifications without departing from the scope of the present invention.

Unless otherwise defined, all technical and scientific terms used in the present invention have the meanings commonly understood by those of ordinary skill in the art to which the present invention belongs. All terms used in the present invention are selected for the purpose of describing the present invention more clearly, and are not selected for limiting the protection scope of the present invention.

Unless otherwise mentioned in the statement or sentence included in the corresponding expression, expressions such as "comprising", "having", "having" and the like used in the present invention should be understood to include open-ended that may include other embodiments terms (open-ended terms).

Expressions such as "consisting only of the corresponding structure" used in the present invention should be understood to exclude closed-ended terms that may include other structures in addition to that structure.

Unless otherwise mentioned, the singular expression described in the present invention may include the meaning of the plural form, and the same applies to the singular expression described in the protection scope of the invention.

Expressions such as "first" and "second" used in the present invention are used to distinguish a plurality of structural elements from each other, and are not used to limit the order or importance of these structural elements.

Directional terms such as "upper side" and "upper" used in the present invention mean the direction of contact with the device under test with reference to the electrical connection connector 100 , and directional terms such as "lower side" and "lower" mean in the opposite direction to the upper direction. Referring to FIG. 1, the upper direction may be the direction indicated by "U", and the lower direction may be the direction indicated by "D". In addition, in this invention, "horizontal direction" means the direction which traverses "up-down direction". This is only a reference for explaining so that the present invention can be clearly understood, and the upper side and the lower side may be defined differently depending on the reference.

Hereinafter, a plurality of embodiments of the present invention will be described with reference to a plurality of drawings. In the drawings, the same or corresponding structural elements are given the same reference numerals. In addition, in the description of the following embodiments, repeated description of the same or corresponding constituent elements may be omitted. However, even if the description about a structural element is omitted, it does not mean that such a structural element is not included in an embodiment.

FIG. 1 is a vertical cross-sectional view of an electrical connection connector 100 according to an embodiment.

The electrical connection connector 100 of an embodiment can be disposed between the device under test and the test device. The electrical connection connector 100 can electrically connect the device under test and the test apparatus to each other. The electrical connection connector 100 may be anisotropically conductive in the vertical direction.

The electrical connection connector 100 may include a shield portion 110 dividing a plurality of regions 115 . The shield part 110 may extend in the up-down direction. The shield portion 110 may extend in the up-down direction and divide a plurality of regions 115 .

For convenience, the area 115 surrounded and divided by the mask part 110 may be separated from the mask part 110 by a predetermined distance, but not limited thereto, the area 115 may be an area in contact with the inner surface of the mask part 110 . The plurality of regions 115 may be separated, respectively. The plurality of regions 115 can be spaced apart by the same pitch. The separation distance of the plurality of regions 115 may be the lateral thickness of the mask portion 110 . The arrangement of the plurality of regions 115 and the shape of the electrical connection connector 100 based thereon will be referred to FIGS. 2 and 3 .

The electrical connection connector 100 may include the conductive portion 120 that is conductive. The conductive portion 120 may extend in the up-down direction in the region 115 , so that the upper end of the region 115 and the lower end of the region 115 are electrically conductive. The upper end of the conductive part 120 may be in contact with the terminal of the device under test. The lower end of the conductive part 120 may be in contact with the terminal of the test device. A structure having electrical conductivity, for example, an elastic conductor, a metal plate, etc., may also be disposed between the upper end of the conductive portion 120 and the terminal of the device under test. This structure can further improve the electrical contact with the test device. Between the lower end of the conductive portion 120 and the terminal of the test device, a structure having conductivity can be additionally arranged in the same or similar form.

The conductive parts 120 may be respectively arranged in the plurality of regions 115 . A part of the plurality of conductive parts 120 respectively arranged in the plurality of regions 115 may be ground conductive parts that are in contact with the ground terminal of the device under inspection. The ground conductive portion can discharge leakage current, static electricity, etc., which may occur in the device under inspection, to the outside of the electrical connection connector 100 . The ground conductive portion 120 can prevent crosstalk (signal interference) from occurring in the electrical connection connector 100 by releasing leakage current, static electricity, etc. to the outside of the electrical connection connector 100 . Grounding the conductive parts can remove electromagnetic interference or crosstalk between the conductive parts.

The electrical connection connector 100 may include an insulating portion 130 that insulates the conductive portion 120 and the shield portion 110 in the region 115 . The insulating part 130 may include an insulating insulating substance. The insulating part 130 may be filled between the conductive part 120 and the mask part 110 in the region 115 . The insulating part 130 may laterally contact the outer surface of the conductive part 120 and the inner surface of the shield part 110 .

FIG. 2 is an example of a plan view of the electrical connection connector 100 viewed in the “A” direction in FIG. 1 .

As an example of the electrical connection connector 100 , as shown in FIG. 2 , the shield portion 110 can define a cylindrical region 115 . The cylindrical region 115 may be surrounded by the mask portion 110 . When the region 115 is cylindrical, the region 115 may have a circular shaped transverse cross-section. The lateral cross-section of the conductive portion 120 disposed in the region 115 may be circular.

When both the region 115 and the conductive part 120 can have a circular-shaped lateral cross-section, the conductive part 120 and the mask part 110 can be spaced apart by a prescribed distance. The outer surface of the conductive part 120 and the inner surface of the shield part 110 may be laterally spaced apart by the same distance. The distance between the outer surface of the conductive part 120 and the inner surface of the shield part 110 may be constant along the outer circumference of the conductive part 120 . The outer surface of the conductive portion 120 may be a virtual boundary surface where conductive particles and/or conductive metal wires are arranged. The virtual boundary surface can be set based on the average size of the virtual boundary surface in which the conductive particles and/or the conductive metal wires are arranged.

The electrical connection connector 100 may include an insulating portion 130 that insulates the conducting portion 120 and the shielding portion 110 between the conducting portion 120 and the shielding portion 110 . The transverse section of the insulating part 130 may be in the shape of a cylinder forming an inner cavity. The lateral thickness of the insulating part 130 may be constant along the outer circumference of the conductive part 120 . The lateral thickness of the insulating part 130 may be the lateral distance between the outer surface of the conductive part 120 and the inner surface of the shield part 110 . The insulating part 130 may laterally contact the outer surface of the conductive part 120 and the inner surface of the shield part 110 . The inner surface of the insulating part 130 may be in contact with the outer surface of the conductive part 120 , and the outer surface of the insulating part 130 may be in contact with the inner surface of the shield part 110 .

Fig. 3 is another example of a plan view of the electrical connection connector 100 viewed in the "A" direction in Fig. 1 .

As another example of the electrical connection connector 100 , as shown in FIG. 3 , the mask portion 110 can divide a region 115 of a rectangular column (including a square column). The area 115 having the lattice pattern may be referred to as a lattice area 115 . The area 115 of the rectangular column may be surrounded by the mask portion 110 . Region 115 may have a rectangular (including square) shaped lateral cross-section. In this case, the lateral cross-section of the conductive portion 120 disposed inside the region 115 may be circular.

When the mask part 110 divides the area 115 of the rectangular column, the mask part 110 may include a wall extending in the up-down direction. The shield portion 110 may include a plurality of first shield walls 110a extending laterally along one side and spaced apart from each other along the other side across the one side. The shield portion 110 may include a plurality of second shield walls 110b extending along the other side and spaced apart from each other along one side.

The distance by which the plurality of first shield walls 110a are separated from each other may be the same as the distance by which the plurality of second shield walls 110b are separated from each other. The plurality of first shield walls 110a and the plurality of second shield walls 110b can be arranged to traverse each other. The area 115 may be divided by a plurality of first mask walls 110a and a plurality of second mask walls 110b.

In the electrical connection connector 100, the regions 115 can be arranged in a lattice pattern. The regions 115 may be arranged at the same distance from each other. The regions 115 may be arranged side by side with each other.

When the region 115 has a rectangular-shaped lateral cross-section, the distance between the conductive portion 120 and the mask portion 110 may vary along the outer circumference of the conductive portion 120 . In the lateral direction, the outer surface of the conductive part 120 and the inner surface of the shield part 110 may be spaced apart at different intervals along the outer circumference of the conductive part 120 . As the separation distance between the conductive part 120 and the mask part 110 is changed, the matching of impedance values may be simpler. Hereinafter, with reference to FIG. 5 , the matching of impedance values based on changes in the separation distance between the conductive portion 120 and the shield portion 110 will be described in more detail.

The electrical connection connector 100 may include an insulating portion 130 that insulates the conducting portion 120 and the shielding portion 110 between the conducting portion 120 and the shielding portion 110 . The lateral cross-section of the insulating part 130 may have a rectangular shape with a circular space formed therein. The lateral thickness of the insulating part 130 may vary along the outer circumference of the conductive part 120 . The insulating part 130 may be in contact with the outer surface of the conductive part 120 and the inner surface of the shield part 110 . The inner surface of the insulating part 130 may be in contact with the outer surface of the conductive part 120 , and the outer surface of the insulating part 130 may be in contact with the inner surface of the shield part 110 . The inner surface of the insulating portion 130 may be in contact with the outer surface of the conductive portion 120 as a virtual boundary surface forming the conductive portion 120 .

FIG. 4 is a perspective view of a part of the electrical connection connector 100 shown in FIG. 3 .

A part of the electrical connection connector 100 shown in FIG. 4 may be a unit structure of the electrical connection connector 100 in which the upper side of the electrical connection connector 100 and the lower side of the electrical connection connector 100 are electrically conductive.

The shield portion 110 of the electrical connection connector 100 may be formed of a metal material. For example, the metallic material may include at least one of copper, aluminum, stainless steel, copper alloys, aluminum alloys, and stainless steel alloys. The shield portion 110 formed of a metal material may laterally surround the outer surfaces of the conductive portions 120 respectively located in the plurality of regions 115 .

The plurality of conductive parts 120 respectively located in the plurality of regions 115 may generate electromagnetic influences with each other. The shield portion 110 formed of a metal material can laterally surround the outer surfaces of the plurality of conductive portions 120 to reduce electromagnetic influences that may occur on each of the conductive portions 120 . Since the shield part 110 is grounded, an area for reducing electromagnetic interference can be formed.

The shield portion 110 can laterally surround the outer surface of the conductive portion 120 to reduce electromagnetic interference to the conductive portion 120 . The conductive portion 120 may be electromagnetically shielded by the shielding portion 110 in a predetermined proportion. As the shielding portion 110 reduces electromagnetic interference to the conductive portion 120 , crosstalk such as electromagnetic noise can be prevented from occurring in the electrical connection connector 100 . Therefore, the reliability of the inspection method using the electrical connection connector 100 can be improved.

The conductive portion 120 of the electrical connection connector 100 may include conductive particles and/or conductive metal wires 121 . The conductive part 120 may include a holding part 122 for holding the conductive particles and/or the conductive metal wire 121 . The sustaining portion 122 may include silicone rubber. As the conductive part 120 includes the silicone rubber as the holding part 122 , the conductive part 120 may have elasticity.

The insulating portion 130 of the electrical connection connector 100 may be made of the same material as silicone rubber. The insulating portion 130 of the electrical connection connector 100 may include an insulating substance. The insulating part 130 may include silicone rubber as an insulating substance. The insulating material of the insulating portion 130 may be the same material as that of the maintaining portion 122 of the conductive portion 120 that maintains the conductive particles and/or the conductive metal wire 121 . As the insulating part 130 includes silicone rubber as an insulating substance, the insulating part 130 may have elasticity.

The shield portion 110 of the electrical connection connector 100 may extend from the upper end of the insulating portion 130 to the lower end of the insulating portion 130 . The upper end of the shield part 110 may be located at the same height as the upper end of the insulating part 130 . The lower end of the shield part 110 may be located at the same height as the lower end of the insulating part 130 . The shield portion 110 may laterally contact the outer surface of the insulating portion 130 and extend relative to the entire vertical direction of the insulating portion 130 .

The vertical length of the shield part 110 may be the same as the vertical length of the conductive part 120 . When the conductive portion 120 extends from the upper end of the insulating portion 130 to the lower end of the insulating portion 130 , the shield portion 110 may extend from the upper end of the insulating portion 130 to the lower end of the insulating portion 130 . The vertical length of the conductive portion 120 may be the same as the vertical length of the shield portion 110 .

The vertical length of the shield portion 110 may be greater than the vertical length of the conductive portion 120 . The conductive portion 120 may extend to a part of the vertical length of the insulating portion 130 . For example, the conductive portion 120 may extend 0.2 times to 0.8 times the vertical length of the insulating portion 130 . The shield part 110 may extend from the upper end of the insulating part 130 to the lower end of the insulating part 130 . The vertical length of the shielding portion 110 may be greater than the vertical length of the conductive portion 120 .

As the vertical length of the shield portion 110 is the same as or greater than the vertical length of the conductive portion 120 , the shield portion 110 can laterally surround the entire vertical length of the conductive portion 120 .

Fig. 5 is a plan view of a part of the electrical connection connector viewed in the "B" direction in Fig. 4 . Referring to FIG. 5 , the matching of impedance values of the electrical connection connector 100 will be described in more detail.

When the electrical connection connector 100 is used in the inspection method using the radio frequency signal as a high frequency signal, in order to improve the power transmission efficiency and reduce the distortion of the signal waveform, the impedance value of the electrical connection connector 100 can be determined according to the frequency domain of the radio frequency signal. to match. The impedance value of the electrical connection connector 100 may be based on the impedance value of the region 115 that is a structure in contact with the terminal of the device under test.

The electrical connection connector 100 should provide stable electrical connection with the device under test while matching impedance values. In the device under test to which the electrical connection connector 100 contacts, the size of the terminals may be changed according to a pitch, which is a distance between the designed terminals. For stable electrical connection with the device under test, the electrical connection connector 100 needs to have a conductive portion 120 having a size corresponding to the size of the terminal of the device under test.

Referring to FIG. 5 , the diameter length of the transverse section of the conductive portion 120 may be a. The diameter of the transverse cross-section of the conductive portion 120 may be measured based on the outer surface of the conductive portion 120 , which is a virtual boundary surface where the conductive particles and/or the conductive metal wires 121 (see FIG. 4 ) of the conductive portion 120 are arranged. The average of the diameter and length.

The transverse cross-section of the region 115 may be rectangular in shape. For example, the shape of the transverse cross-section of the region 115 may be square. The length of the short side of the transverse cross-section of the region 115 may be b1. The diagonal length of the transverse cross-section of the region 115 may be b2. The diagonal line may be a line connecting two vertices that are not adjacent to each other in the transverse cross-section of the region 115 . When the area 115 is a square, since the lengths of the four sides in the lateral cross section of the area 115 are the same, the length of the short side in the area means the length of any one of the four sides.

在數學式1中a可以為在橫向剖面的導電部120的直徑長度，b可以為在橫向剖面包圍導電部120的部分，即，可以為填充絕緣部130的區域115的平均邊長。並且，在數學式1中，ε可以為電容率（permittivity；εγ是介電常數），μ可以為磁導率（permeability），L可以為電感量（inductance），C可以為電容量（capacitance）。 In the electrical connection connector 100, the impedance value of the region 115 can be obtained by the following equation. [Mathematical formula 1]

In Equation 1, a may be the diameter length of the conductive portion 120 in the lateral cross-section, and b may be the portion surrounding the conductive portion 120 in the lateral cross-section, that is, the average side length of the region 115 filled with the insulating portion 130 . In addition, in Mathematical formula 1, ε can be the permittivity (permittivity; εγ is the permittivity), μ can be the permeability, L can be the inductance, and C can be the capacitance. .

Hereinafter, the case where the region 115 has a circular-shaped cross-section and the case where the region 115 has a rectangular-shaped cross-section are compared.

Referring to FIG. 2 , when the region 115 has a circular cross-section, the average side length b of the region 115 may be the diameter of the region 115 .

As shown in FIG. 2 , the distance from the conductive portion 120 to the shield portion 110 is the same along the outer circumference of the conductive portion 120 . Therefore, if the average side length b of the region 115 is determined, the diameter length a of the conductive portion 120 for matching the impedance value can also be determined according to b.

For stable electrical connection with the device under test, the connector 100 for electrical connection should have a size of the conductive portion 120 corresponding to the size of the terminal of the device under test. When the impedance value Z ₀ is determined, the diameter length a of the conductive portion 120 is determined according to the average side length b of the region 115 (the diameter of the circular cross-section of the region 115 ). Therefore, a design margin capable of changing the diameter of the conductive portion 120 can be reduced, making it difficult to increase the diameter of the conductive portion 120 . Therefore, it is difficult to achieve stable electrical connection with the device under inspection.

3 , when the region 115 has a rectangular cross-section, the average side length b of the region 115 can be obtained based on the short side length, the long side length, and the diagonal length of the region 115 .

As shown in FIG. 5 , the distance from the conductive portion 120 to the shield portion 110 may vary along the outer circumference of the conductive portion 120 . The length of the short side of the transverse section of the region 115 may be b1, and the length of the diagonal line of the transverse section of the region 115 may be b2. The average side length b of the region 115 may be a value between b1 and b2 shown in FIG. 5 . The diagonal length b2 of the transverse cross-section of the region 115 is greater than the short side length b1. Therefore, the average side length b of the region 115 may be greater than the short side length b1.

In summary, if the region 115 has a square-shaped cross-section, the region 115 may have a larger average side length b than in the case where the region 115 has a circular-shaped cross-section. Therefore, the diameter a of the conductive portion 120 for matching the impedance value may increase.

For stable electrical connection with the device under test, the connector 100 for electrical connection should have a conductive portion 120 having a size corresponding to the size of the terminal of the device under test. In the case where the region 115 has a rectangular-shaped cross-section, the average side length b may be relatively increased, and therefore, the diameter a of the conductive portion 120 for setting the design impedance Z ₀ may also be increased. Therefore, a stable electrical connection with the device under test can be provided. Also, the design margin of the electrical connection connector 100 may be larger.

When the appropriate impedance value Z ₀ of the electrical connection connector 100 has been determined, the ratio of the diameter length a of the transverse section of the conductive portion 120 to the short side length b1 of the transverse section of the region 115 may be 1:2 to 1:5 .

When an appropriate impedance value Z ₀ of the electrical connection connector 100 has been determined, the ratio of the diameter length a of the lateral cross section of the conductive portion 120 to the diagonal length b 2 of the lateral cross section of the region 115 may be 1:4 to 1:4: 7.

FIG. 6 is a perspective view of a part of an electrical connection connector 100 according to still another embodiment.

The electrical connection connector 100 of still another embodiment may include the same structural elements of the electrical connection connector 100 of the one embodiment. In the drawings, the same reference numerals may refer to the same structural elements.

In yet another embodiment of the electrical connection connector 100 , the insulating portion 130 may form a porous foam structure. A plurality of pores may be formed in the porous foam structure of the insulating part 130 . As the insulating portion 130 forms a porous foam structure, the permittivity (permittivity) of the insulating portion 130 may decrease. When the permittivity of the insulating portion 130 is lowered, electromagnetic interference between the plurality of conductive portions 120 of the electrical connection connector 100 can be prevented more effectively. As the insulating portion 130 forms a porous foam structure, the insulating portion 130 may have elasticity.

FIG. 7 is a vertical cross-sectional view of an electrical connection connector 100 according to another embodiment.

The electrical connection connector 100 of another embodiment may include an upper end film 140 attached to the upper end of the conductive portion 120 . The upper end film 140 may include an upper end pad 141 electrically connected to the upper portion of the conductive part 120 . The upper end film 140 may be in contact with the upper portion of the conductive part 120 . The shape and size of the upper end pad 141 may correspond to the shape and size of the conductive portion 120 . The upper end pad 141 may have conductivity. The upper end pad 141 may include conductive particles. The upper end film 140 may include an upper end maintenance sheet 142 that maintains the upper end pad 141 . The upper end maintenance sheet 142 may include at least one of silicone rubber, silicone rubber, and synthetic resin (eg, polyimide). The maintaining sheet 142 can be formed of silicone rubber, silicone rubber and synthetic resin as a film shape.

The electrical connection connector 100 of another embodiment may include a lower end film 150 attached to the lower end of the conductive portion 120 . The lower end film 150 may include a lower end pad 151 electrically connected to a lower portion of the conductive part 120 . The lower end film 150 may be in contact with the lower portion of the conductive part 120 . The shape and size of the lower end pad 151 may correspond to the shape and size of the conductive portion 120 . The lower end pad 151 may have conductivity. The lower end pad 151 may include conductive particles. The lower end film 150 may include a lower end maintaining sheet 152 that maintains the lower end pad 151 . The lower end maintaining sheet 152 may include at least one of silicone rubber, silicone rubber, and synthetic resin (eg, polyimide).

The upper end pad 141 , the conductive portion 120 and the lower end pad 151 can form a conductive channel 160 that conducts electricity along the up-down direction. The upper end of the electrical connection connector 100 and the lower end of the electrical connection connector 100 can conduct electricity through the conductive channel 160 .

The vertical length of the conductive portion 120 may be the same as the vertical length of the shield portion 110 or smaller than the vertical length of the shield portion 110 . The vertical length of the conductive channel 160 including the upper end pad 141 , the conductive portion 120 and the lower end pad 151 may be greater than the vertical length of the shield portion 110 .

Various embodiments provide a connector 100 for electrical connection that is stably electrically connected to a device under test. According to various embodiments of the present invention, the impedance value of the electrical connection connector 100 can be easily matched. In addition, according to various embodiments of the present invention, the electromagnetic influence between the plurality of conductive parts 120 of the electrical connection connector 100 can be reduced.

In the above, although the technical idea of the present invention has been described through some embodiments and examples shown in the accompanying drawings, various substitutions can be made within the technical idea and scope of the present invention that can be understood by those skilled in the art to which the present invention belongs. , deformation and alteration. Moreover, such replacements, deformations and changes should fall within the protection scope of the appended invention claims.

100: connector for electrical connection 110: shield part 110a: first shield wall 110b: second shield wall 115: area 120: conductive part 121: conductive particles and/or conductive metal wire 122: maintenance part 130 : insulating part 140 : upper end film 141 : upper end pad 142 : upper end supporting sheet 150 : lower end film 151 : lower end pad 152 : lower end supporting sheet 160 : conductive paths a, b, b ₁ , b ₂ : length D: lower direction U : upside direction

FIG. 1 is a vertical cross-sectional view of an electrical connection connector according to an embodiment. Fig. 2 is an example of a plan view of the electrical connection connector viewed in the "A" direction in Fig. 1 . Fig. 3 is another example of a plan view of the electrical connection connector viewed in the "A" direction in Fig. 1 . FIG. 4 is a perspective view of a part of the electrical connection connector shown in FIG. 3 . Fig. 5 is a plan view of a part of the electrical connection connector viewed in the "B" direction in Fig. 4 . FIG. 6 is a perspective view of a part of an electrical connection connector according to still another embodiment. FIG. 7 is a vertical cross-sectional view of an electrical connection connector according to another embodiment.

100: Connector for electrical connection

110: Mask part

110a: first mask wall

110b: Second mask wall

115: Area

120: Conductive part

130: Insulation part

Claims (14)

A connector for electrical connection is arranged between a device under test and a test device, and conducts electricity along an up-down direction, so that the device under test and the test device are electrically connected to each other, wherein, include: a mask part, which divides a plurality of lattice areas arranged in a lattice pattern and extends in the up-down direction; a conductive portion extending in the up-down direction in the lattice region, so that the upper end of the lattice region and the lower end of the lattice region are electrically conductive; and The insulating portion insulates the conductive portion and the shield portion in the lattice region. The electrical connection connector of claim 1, wherein the shield portion includes: a plurality of first mask walls extending along one side and spaced apart along the other side across the one side; and A plurality of second shield walls extend along the other side and are spaced apart from each other along the one side. The electrical connection connector according to claim 1, wherein the shield portion extends from the upper end of the insulating portion to the lower end of the insulating portion along the vertical direction. The electrical connection connector according to claim 1, wherein the vertical length of the shield portion is the same as or greater than the vertical length of the conductive portion. The electrical connection connector of claim 1, wherein the shield portion is formed of a metal material. The electrical connection connector according to claim 5, wherein the shield portion laterally surrounds the outer surface of the conductive portion so as to reduce electromagnetic interference to the conductive portions respectively located in the plurality of grid regions. The electrical connection connector according to claim 1, wherein the cross-section of the lattice region is a rectangular shape. The electrical connection connector of claim 1, wherein, The above-mentioned conductive part includes at least one of conductive particles and conductive metal wires, At least one of the above-mentioned conductive particles and conductive metal wires is maintained by the silicone rubber, The above-mentioned insulating portion is made of the same material as the above-mentioned silicone rubber. The electrical connection connector according to claim 1, wherein the ratio of the diameter length of the transverse cross section of the conductive portion to the short side length of the transverse cross section of the lattice region is 1:2 to 1:5. The electrical connection connector according to claim 1, wherein the ratio of the diameter length of the transverse section of the conductive portion to the diagonal length of the transverse section of the lattice region is 1:4 to 1:7. The electrical connection connector of claim 1, wherein, The above-mentioned shield portion includes at least one of copper, aluminum, stainless steel, copper alloy, aluminum alloy and stainless steel alloy, The above-mentioned insulating portion includes silicone rubber. The electrical connection connector according to claim 1, wherein the insulating portion has a porous foam structure. The electrical connection connector of claim 1, which further includes: an upper end film attached to the upper end of the above-mentioned conductive portion; and The lower end film is attached to the lower end of the conductive portion. The electrical connection connector of claim 13, wherein, The upper end film includes an upper end pad electrically connected to the upper portion of the conductive portion, The lower end film includes a lower end pad electrically connected to the lower portion of the conductive portion, The upper end pad, the conductive portion and the lower end pad form a conductive channel that conducts electricity along the up-down direction, The vertical length of the conductive channel is greater than the vertical length of the shield portion.

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