TW202212832A - Probe station - Google Patents

Abstract

A probe station includes: a chuck configured to support a substrate; a probe card disposed above the chuck and configured to electrically test a semiconductor device formed on the substrate; a camera unit disposed above the chuck and configured to image the substrate; and a camera driving part, which is configured to move the camera unit in a horizontal direction and includes a braking unit that uses a eddy current braking force to stop the camera unit at a predetermined position. The camera driving part further includes a movable element that is configured to mount the camera unit thereon.

Description

Probe Station

The present invention relates to a probe station. More particularly, the present invention relates to a probe station for electrically testing a semiconductor device formed on a substrate using a probe card.

Semiconductor devices can be formed on substrates, such as silicon wafers, by repeatedly performing a series of fabrication processes. For example, to fabricate semiconductor devices, various fabrication procedures may be performed on a wafer, such as deposition procedures for forming thin layers on wafers, etching procedures for patterning thin layers to form circuits, Flattening procedures for flattening, etc.

After the semiconductor device is formed, an electrical test procedure for examining the electrical characteristics of the semiconductor device may be performed. The test procedure may be performed by a probe station including a probe card with a plurality of probes, and a test head that provides electrical signals to the semiconductor device and analyzes output signals from the semiconductor device to check the electrical characteristics of the semiconductor device Can be connected with a probe card.

The probe station may include a chuck for supporting the substrate, and the probe card may be disposed above the chuck. The chuck can be configured to be movable in a horizontal direction to achieve alignment between the substrate and the probe card, and can be configured to be movable in a vertical direction to achieve electrical connection between the substrate and the probe card .

A lower camera unit for imaging probes of the probe card may be provided on one side of the chuck, and an upper camera unit for imaging the substrate may be provided above the chuck. The camera unit can be used for alignment between the substrate and the probe card. The upper camera unit can be moved horizontally by the drive unit, which is constructed in a bridge shape. For example, the upper camera unit may be moved to a predetermined position to image the substrate, and the chuck may be moved by the chuck drive unit so that a plurality of points of the substrate are imaged by the upper camera unit.

The driving unit may include a stopper member such that the upper camera unit is stopped at a predetermined position. However, when the movement of the upper camera unit is stopped by the stopper member, shock and vibration due to collision may occur, and since it takes a considerable time to remove the vibration, the test procedure for the substrate may be greatly delayed. In addition, the internal structure of the probe station may be slightly deformed by collision and vibration, and thus the contact accuracy between the substrate and the probe card may be reduced.

Embodiments of the present invention provide a probe station capable of reducing shock and vibration generated when a camera unit for imaging a substrate is stopped.

According to one aspect of the present invention, a probe station may include a chuck configured to support a substrate; a probe card disposed over the chuck and configured to electrically test semiconductor devices formed on the substrate; a camera unit that is disposed above the chuck and is configured to image the substrate; and a camera driving part that is configured to move the camera unit in a horizontal direction. In particular, the camera driving part may include a braking unit for stopping the camera unit at a predetermined position using an eddy current braking force.

According to some embodiments of the present invention, the camera driving part may further include a driving unit for moving the camera unit in the horizontal direction; and a movable member configured to be movable in the horizontal direction by the driving unit, and the camera unit is mounted on the on the movable member.

According to some embodiments of the present invention, the probe station may further comprise a column on which the two sides of the drive unit are mounted.

According to some embodiments of the present invention, the braking unit may include a braking plate mounted on the movable member and made of conductive material; and a magnetic field generating unit mounted on one of the columns and configured to generate a magnetic field. In this case, the braking plate and the magnetic field generating unit may be arranged such that when the movable member is moved to a position close to one of the columns, an eddy current braking force is generated by the magnetic field.

According to some embodiments of the present invention, the magnetic field generating unit may include a plurality of permanent magnets mounted on a side surface of one of the columns.

According to another aspect of the present invention, a probe station may include a chuck configured to support a substrate; a probe card disposed over the chuck and configured to electrically test semiconductor devices formed on the substrate a top plate, on which the probe card is mounted; a plurality of support columns, which are configured to support the top plate; a camera unit, which is arranged between the chuck and the top plate and is configured to image the substrate; a camera driving part, which is configured to move the camera unit in a horizontal direction; and an intermediate post disposed between the support posts. In particular, the camera driving part may be mounted on one of the support columns and the intermediate column and may include a braking unit for stopping the camera unit at a predetermined position using an eddy current braking force.

According to some embodiments of the present invention, the camera driving part may further include a driving unit for moving the camera unit in the horizontal direction; and a movable member configured to be movable in the horizontal direction by the driving unit, and the camera unit is mounted on the on the movable member. In this case, the two sides of the drive unit may be mounted on one of the support columns and the middle column, respectively.

According to some embodiments of the present invention, the braking unit may include a braking plate mounted on the movable member and made of conductive material; and a magnetic field generating unit mounted on the intermediate post and configured to generate a magnetic field. In this case, the braking plate and the magnetic field generating unit may be arranged such that an eddy current braking force is generated by the magnetic field when the movable member is moved to a position close to the intermediate column.

According to some embodiments of the present invention, the magnetic field generating unit may include a plurality of permanent magnets mounted on a side surface of the intermediate column.

According to some embodiments of the invention, the permanent magnets may be arranged such that the polarities alternate in the horizontal direction.

According to some embodiments of the present invention, the magnetic field generating unit may include a plurality of first permanent magnets installed on a side surface of the intermediate column, and a plurality of second permanent magnets disposed to face the first permanent magnets. In this case, the brake plate may be mounted on the movable member so as to be movable between the first permanent magnet and the second permanent magnet by the drive unit.

According to some embodiments of the present invention, the magnetic field generating unit may further include a first mounting bracket mounted on a side surface of the intermediate column, extending in a horizontal direction and having a channel shape with an opened lower portion, and the first permanent magnet and the second permanent magnet may be mounted to face each other on the inner side surface of the first mounting bracket.

According to some embodiments of the present invention, the first permanent magnets may be arranged such that the polarities alternate in the horizontal direction, and the polarity of the second permanent magnets may be arranged to be opposite to the polarity of the first permanent magnets.

According to some embodiments of the present invention, the drive unit may include a pneumatic cylinder mounted on one of the support columns and the middle column and configured to move the movable member; and a guide mechanism mounted on one of the support columns and the middle column on the post and configured to guide the movable member in a horizontal direction.

According to some embodiments of the present invention, the camera driving part may further include a stop member for stopping the camera unit at a predetermined position.

According to some embodiments of the present invention, the camera driving part may further include a shock absorber for absorbing shock caused by the stop member.

According to yet another aspect of the present invention, a probe station may include a chuck configured to support a substrate; a probe card disposed over the chuck and configured to electrically test a semiconductor device formed on the substrate a top plate on which the probe cards are mounted; first and second support columns, the first and second support columns are spaced apart from each other in a first horizontal direction and are configured to support the top plate; third and fourth support columns, The third and fourth support columns are spaced apart from the first and second support columns in a second horizontal direction perpendicular to the first horizontal direction and are configured to support the top plate; a camera unit disposed between the chuck and the top plate and a camera driving part configured to image the substrate; a camera drive part configured to move the camera unit in a second horizontal direction; and an intermediate column disposed between the first and third support columns. In particular, the camera driving part may include a driving unit mounted on the third support column and the intermediate column and used to move the camera unit in the second horizontal direction, and a driving unit mounted on the intermediate column and used to drive the camera unit using an eddy current braking force Stop the braking unit at a predetermined position.

According to some embodiments of the present invention, the probe station may further include a card replacement unit provided on one side of the middle column to replace the probe card. In this case, the middle column may have a lower height than the third support column, and the card exchange unit may transfer the probe card in the first horizontal direction in the upper space of the middle column.

According to some embodiments of the present invention, the probe station may further include a second intermediate column disposed between the second and fourth support columns; and a second camera driving member configured to move in a second horizontal direction camera unit. In this case, the second camera driving part may include a second driving unit mounted on the fourth support column and the second intermediate column and for moving the camera unit in the second horizontal direction, and a second intermediate column mounted on the second intermediate column and a second braking unit for stopping the camera unit at a predetermined position using an eddy current braking force.

According to some embodiments of the present invention, the probe station may further include a substrate transfer robot disposed on one side of the second intermediate column to load the substrate onto the chuck. In this case, the second middle column may have a lower height than the fourth support column, and the substrate transfer robot may transfer the substrate in the first horizontal direction in the upper space of the second middle column.

According to the embodiments of the present invention as described above, when the movable member on which the camera unit is mounted is moved to a predetermined position above the chuck, the moving speed of the movable member can be reduced by the eddy current braking force. Further, the moving speed of the movable member may be decelerated twice by the shock absorber, and then the movable member may be stopped at a predetermined position by the stopper member. Therefore, compared with the related art, the shock and vibration generated when the movable member is stopped can be greatly reduced, and thus the test delay time can be greatly reduced. In addition, the stability of the probe station can be greatly improved by reducing vibration and vibration, and thus the contact accuracy between the substrate and the probe card can be significantly improved.

The above summary of the present invention is not intended to describe each illustrated embodiment or every implementation of the present invention. The following detailed description and claims more particularly illustrate these embodiments.

Hereinafter, embodiments of the present invention are described in more detail with reference to the drawings. However, the present invention is not limited to the embodiments described below and can be implemented in various other forms. The following embodiments are not intended to completely complete the present invention, but are intended to fully convey the scope of the present invention to those skilled in the art.

In the specification, when an element is referred to as being "on" or "connected to another element or layer", it can be directly on, directly connected to, another element or layer, Or intermediate elements or layers may also be present. In contrast, it will be understood that when an element is referred to as being directly on or directly connected to another element or layer, it will mean that there are no intervening elements present. Furthermore, although terms like first, second, and third are used to describe various regions and layers in various embodiments of the present invention, regions and layers are not limited to these terms.

The terms used below are only used to describe specific embodiments, and not to limit the present invention. Additionally, unless otherwise defined herein, all terms including technical or scientific terms may have the same meaning as commonly understood by one of ordinary skill in the art.

Embodiments of the invention are described with reference to schematic illustrations of idealized embodiments. Accordingly, variations and/or tolerances in manufacturing methods may be expected from the form of the drawings. Accordingly, embodiments of the invention are not described as limited to the specific forms or regions in the drawings and to include deviations in form. This region may be entirely schematic and its form may not describe or depict the precise form or structure in any given region and is not intended to limit the scope of the invention.

FIG. 1 is a schematic front view showing a probe station according to an embodiment of the present invention. FIG. 2 is a schematic side view showing the camera driving part shown in FIG. 1 , and FIG. 3 is a schematic top view showing the camera driving part shown in FIG. 1 .

Referring to FIGS. 1 to 3 , a probe station 100 according to an embodiment of the present invention may be used to perform electrical tests on semiconductor devices formed on a substrate 10 , such as a semiconductor wafer. The probe station 100 may include a chuck 110 configured to support the substrate 10; a probe card 120 disposed above the chuck 110 and configured to electrically test a semiconductor device formed on the substrate 10; a camera unit 130, which is disposed above the chuck 110 and is configured to image the substrate 10; and a camera driving part 140, which is configured to move the camera unit 130 in the horizontal direction.

Although not shown in the drawings, the chuck 110 may have a plurality of vacuum holes for vacuum sucking the substrate 10 , a heater for heating the substrate 10 to a predetermined test temperature, and a cooling unit for cooling the substrate 10 It may be provided below the chuck 110 . The probe station 100 may include a chuck drive member 112 for aligning and connecting the substrate 10 and the probe card 120 . Specifically, the chuck driving unit may move and rotate the chuck 110 horizontally to achieve alignment between the substrate 10 and the probe card 120 , and may move the chuck 110 vertically to connect the substrate 10 to the probe card 120 . Also, although not shown in the drawings, a lower camera unit (not shown) for imaging probes of the probe card 120 may be installed on the side of the chuck 110 .

The probe station 100 may include a test chamber 102 providing a space in which an electrical test procedure is performed on the substrate 10 , and the chuck 110 and the probe card 120 may be disposed in the test chamber 102 . In addition, a loader 180 for loading and unloading the substrates 10 onto and from the chucks 110 may be disposed on one side of the test chamber 102 in a first horizontal direction, eg, in the X-axis direction, and A tester 20 for electrically testing the substrate 10 by means of the probe card 120 may be provided on the test chamber 102 .

The test chamber 102 may include a top plate 104 on which the probe cards 120 are mounted, and support posts 106A, 106B, 106C, and 106D for supporting the top plate 104 . The loader 180 may include a substrate transfer robot 182 for transferring the substrate 10 and a substrate transfer chamber 184 in which the substrate transfer robot 182 is disposed. Additionally, although not shown, the loader 180 may include a load port (not shown) on which a container for holding a plurality of substrates is placed.

The camera driving part 140 may include a driving unit 142 for moving the camera in a second horizontal direction, eg, in the Y-axis direction, above the chuck 110 , that is, between the chuck 110 and the probe card 120 unit 130; and a movable member 144 configured to be movable in a second horizontal direction by a drive unit 142, on which movable member 144 the camera unit 130 is mounted. For example, a pneumatic cylinder may be used as the drive unit 142 . In particular, in order to overcome the space, a rodless cylinder can be used as the driving unit 142, and the movable member can be guided in the second horizontal direction by a guide mechanism 150 arranged parallel to the rodless cylinder, for example, by a linear motion guide 144.

According to one embodiment of the present invention, the top plate 104 may be formed by first and second support columns 106A and 106B spaced apart from each other in a first horizontal direction and with first and second support columns 106A and 106B in a second horizontal direction Third and fourth support posts 106C and 106D are supported, spaced apart and spaced apart from each other in a first horizontal direction, as shown in FIG. 3 . Additionally, the first intermediate post 108A may be disposed between the first and third support posts 106A and 106C, and the second intermediate post 108B may be disposed between the second and fourth support posts 106B and 106D.

The drive unit 142 and the guide mechanism 150 may be mounted on the first intermediate column 108A and the third support column 106C. Specifically, the two sides of the rodless cylinder may be mounted on the first intermediate column 108A and the third support column 106C, respectively, and the two sides of the linear motion guide may be mounted on the first intermediate column 108A and the third supporting column 106C, respectively on the support column 106C.

According to an embodiment of the present invention, the probe station 100 may further include a second camera driving part 190 configured to move the camera unit 130 in the second horizontal direction. The second camera driving part 190 may have the same configuration as the camera driving part 140 . For example, the second camera drive member 190 may include a second drive unit mounted on the second intermediate column 108B and the fourth support column 106D, and a second guide mechanism mounted on the second intermediate column 108B and the fourth support column 106D .

The movable member 144 may have a bridge shape, and may include a first movable column 146A coupled to the first camera driving part 140, a second movable column 146B coupled to the second camera driving part 190, and disposed between the first and Movable plate 148 on second movable posts 146A and 146B. In this case, the camera unit 130 may be mounted on the movable plate 148 .

According to an embodiment of the present invention, the camera driving part 140 may include a braking unit 160 for stopping the camera unit 130 at a predetermined position using an eddy current braking force. The braking unit 160 may include a braking plate 162 mounted on the movable member 144, in particular, on the first movable column 146A and made of conductive material, and mounted on the side surface of the first intermediate column 108A and constructed A magnetic field generating unit 164 that generates a magnetic field is generated. The brake plate 162 and the magnetic field generating unit 164 may be arranged such that an eddy current braking force is generated by the magnetic field when the movable member 144 is moved to a position close to the first intermediate post 108A. Specifically, when the brake plate 162 moves close to the magnetic field generating unit 164 , eddy currents may be induced in the brake plate 162 by the magnetic field, and thus eddy currents may be generated in a direction opposite to the moving direction of the brake plate 162 , that is, the movable member 144 . Braking force.

FIG. 4 is a schematic enlarged front view showing an example of the braking unit shown in FIG. 2 , and FIG. 5 is a schematic enlarged top view showing the braking unit shown in FIG. 4 .

Referring to FIGS. 4 and 5 , the magnetic field generating unit 164 may include a plurality of permanent magnets 166 installed on the side surfaces of the first intermediate column 108A. The permanent magnets 166 may be arranged such that the polarity alternates along the direction of movement of the movable member 144 . In particular, as the brake plate 162 moves, the magnetic field generated by the permanent magnet 166 may generate an eddy current braking force in a direction opposite to the direction of movement of the movable member 144 .

In addition, the second camera driving part 190 may include a second braking unit 200 for stopping the camera unit 130 at a predetermined position using an eddy current braking force, as shown in FIGS. 1 and 3 . The second braking unit 200 may have the same configuration as the braking unit 160 . For example, the second braking unit 200 may include a plurality of permanent magnets mounted on the second intermediate column 108B and a braking plate mounted on the second movable column 146B.

Referring again to FIG. 2 , the camera driving part 140 may include a stopper member 152 for stopping the camera unit 130 at a predetermined position above the chuck 110 . The movable member 144 may be stopped by being in close contact with the stopper member 152 . In addition, the camera driving part 140 may further include a shock absorber 154 for absorbing shock caused by the stopper member 152 . For example, a cylindrical shock absorber 154 may be used, and the shock absorber 154 and the stop member 152 may be arranged such that the rod portion of the shock absorber 154 protrudes from the stop member 152 toward the movable member 144 .

In particular, when the driving unit 142 includes the rodless cylinder as described above, a constant air pressure can be applied into the rodless cylinder until the movable member 144 stops, and thus a constant force can be applied from the rodless cylinder to the rodless cylinder. The member 144 is moved until the movable member 144 stops. In addition, the braking unit 160 may initially use the eddy current braking force to reduce the moving speed of the movable member 144 , and when the movable member 144 approaches the stop member 152 , the moving speed of the movable member 144 may be doubled by the shock absorber 154 reduce. As a result, with the primary deceleration of the braking unit 160 and the secondary deceleration of the shock absorber 154, the movable member 144 can be brought into close contact with the stopper member 152 without shock and vibration.

Meanwhile, the stopper member 152 and the damper 154 may be mounted on the first center pillar 108A, and although not shown, the second stopper member and the second shock absorber may be mounted on the second center pillar 108B. Also, although not shown, a third stopper member and a third damper may be mounted on the third support column 106C, and a fourth stopper member and a fourth damper may be mounted on the fourth support column 106D .

FIG. 6 is a schematic enlarged bottom view showing another example of the braking unit shown in FIG. 2 , and FIG. 7 is a schematic enlarged side view showing the braking unit shown in FIG. 6 .

Referring to FIGS. 6 and 7 , the magnetic field generating unit 164 may include a first permanent magnet 168 installed on a side surface of the first intermediate column 108A, a second permanent magnet 170 disposed to face the first permanent magnet 168 , and a second permanent magnet 170 installed on the The movable member 144, in particular the brake plate 162 on the first movable post 146A and made of conductive material. In this case, the brake plate 162 may be mounted on the first movable column 146A so as to be movable between the first permanent magnet 168 and the second permanent magnet 170 by the drive unit 142 .

For example, the magnetic field generating unit 164 may include a first mounting bracket 172 mounted on a side surface of the first intermediate column 108A, extending in the second horizontal direction and having a channel shape with an open lower portion, And the first permanent magnet 168 and the second permanent magnet 170 may be installed to face each other on the inner side surface of the first mounting bracket 172 . Additionally, the brake unit 160 may include a second mounting bracket 174 for mounting the brake plate 162 to the first movable post 146A.

In particular, the first permanent magnets 168 may be arranged such that the polarity alternates along the second horizontal direction, that is, the direction of movement of the movable member 144 , and the polarity of the second permanent magnets 170 may be arranged to be the same as that of the first permanent magnets 168 . The polarities are reversed, as shown in Figure 6.

The brake plate 162 may be moved by the drive unit 142 between the first and second permanent magnets 168 and 170 . That is, when the brake plate 162 enters between the first and second permanent magnets 168 and 170, the eddy current braking force may be applied to the brake plate 162 by the magnetic fields formed by the first and second permanent magnets 168 and 170, and thus, The movable member 144 can be sufficiently decelerated in a short time.

Referring to FIGS. 1 to 3 , a card replacement unit 210 for replacing the probe card 120 may be provided on one side of the first intermediate column 108A. The card replacement unit 210 may include a card transfer robot 212 that moves the probe card 120 in the first horizontal direction to replace the probe card 120 . Specifically, the first middle column 108A may have a lower height than the first and third support columns 106A and 106C, and the card transfer robot 212 may transfer probes in the first horizontal direction in the upper space of the first middle column 108A The probe card 120 is replaced to replace the probe card 120 .

Also, the substrate transfer robot 182 may be disposed on one side of the second intermediate column 108B. The second middle column 108B may have a lower height than the second and fourth support columns 106B and 106D, and the substrate transfer robot 182 may transfer the substrate 10 in the upper space of the second middle column 108B in the first horizontal direction to The substrate 10 is loaded and unloaded.

Although example embodiments of the present invention have been described with reference to specific embodiments, they are not limited thereto. Accordingly, those skilled in the art will readily understand that various modifications and changes can be made thereto without departing from the spirit and scope of the appended claims.

10: Substrate 20: Tester 100: Probe Station 102: Test Room 104: Top Plate 106A, 106B, 106C, 106D: support columns 108A: First middle column 108B: Second Intermediate Column 110: Chuck 112: Chuck drive parts 120: Probe card 130: Camera unit 140: Camera driver parts 142: Drive unit 144: Movable components 146A: First movable column 146B: Second movable column 148: Removable board 150: Guiding Mechanism 152: Stop member 154: Shock Absorber 160: Brake unit 162: Brake plate 164: Magnetic Field Generation Unit 166: Permanent Magnet 168: First permanent magnet 170: Second permanent magnet 172: First Mounting Bracket 174: Second Mounting Bracket 180: Loader 182: Substrate Transfer Robot 184: Substrate transfer chamber 190:Second camera drive part 200: Second brake unit 210: Card replacement unit 212: Card Delivery Robot

Embodiments of the present invention can be understood in more detail from the following description in conjunction with the drawings, wherein:

1 is a schematic front view showing a probe station according to an embodiment of the present invention;

Fig. 2 is a schematic side view showing the camera driving part shown in Fig. 1;

FIG. 3 is a schematic top view showing the camera driving part shown in FIG. 1;

Fig. 4 is a schematic enlarged front view showing an example of the braking unit shown in Fig. 2;

Fig. 5 is a schematic enlarged plan view showing the braking unit shown in Fig. 4;

FIG. 6 is a schematic enlarged bottom view showing another example of the braking unit shown in FIG. 2; and

FIG. 7 is a schematic enlarged side view showing the braking unit shown in FIG. 6 .

While various embodiments are amenable to various modifications and alternative forms, specific details thereof have been shown in the drawings by way of example and will be described in greater detail. It should be understood, however, that the intention is not to limit the invention as claimed to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the subject matter as defined by the scope of the claims.

20: Tester

104: Top Plate

106A, 106C: support column

108A: First middle column

120: Probe card

130: Camera unit

140: Camera driver components

142: Drive unit

144: Movable components

146A: First movable column

148: Removable board

150: Guiding Mechanism

152: Stop member

154: Shock Absorber

160: Brake unit

162: Brake plate

164: Magnetic Field Generation Unit

Claims (20)

A probe station is characterized in that, comprising: a chuck configured to support the substrate; a probe card disposed over the chuck and configured to electrically test semiconductor devices formed on the substrate; a camera unit disposed over the chuck and configured to image the substrate; and a camera driving part configured to move the camera unit in a horizontal direction, Wherein the camera driving part includes a braking unit for stopping the camera unit at a predetermined position using an eddy current braking force. The probe station as claimed in claim 1, wherein the camera driving component further comprises: a drive unit for moving the camera unit in the horizontal direction; and A movable member configured to be movable in the horizontal direction by the driving unit, and the camera unit is mounted on the movable member. The probe station according to claim 2, further comprising: A column on which the two sides of the drive unit are mounted. The probe station as claimed in claim 3, wherein the braking unit comprises: a brake plate mounted on the movable member and made of a conductive material; and a magnetic field generating unit mounted on one of the columns and configured to generate a magnetic field, wherein the brake plate and the magnetic field generating unit are arranged such that the eddy current braking force is generated by the magnetic field when the movable member moves to a position close to one of the columns. The probe station of claim 4, wherein the magnetic field generating unit includes a plurality of permanent magnets mounted on a side surface of one of the columns. A probe station comprising: a chuck configured to support the substrate; a probe card disposed over the chuck and configured to electrically test semiconductor devices formed on the substrate; a top plate on which the probe card is mounted; a plurality of support columns configured to support the top plate; a camera unit disposed between the chuck and the top plate and configured to image the substrate; a camera driving part configured to move the camera unit in a horizontal direction; and an intermediate post disposed between the support posts, Wherein the camera driving part is mounted on one of the support columns and the intermediate column and includes a braking unit for stopping the camera unit at a predetermined position using an eddy current braking force. The probe station as claimed in claim 6, wherein the camera driving component further comprises: a drive unit for moving the camera unit in the horizontal direction; and a movable member configured to be movable in the horizontal direction by the drive unit, and the camera unit is mounted on the movable member, Wherein the two side parts of the driving unit are respectively mounted on one of the supporting columns and the middle column. The probe station as claimed in claim 7, wherein the braking unit comprises: a brake plate mounted on the movable member and made of a conductive material; and a magnetic field generating unit mounted on the intermediate post and configured to generate a magnetic field, wherein the brake plate and the magnetic field generating unit are arranged such that the eddy current braking force is generated by the magnetic field when the movable member moves to a position close to the intermediate post. The probe station of claim 8, wherein the magnetic field generating unit includes a plurality of permanent magnets mounted on a side surface of the intermediate column. The probe station of claim 9, wherein the permanent magnets are arranged such that polarities alternate in the horizontal direction. The probe station as claimed in claim 8, wherein the magnetic field generating unit comprises: a plurality of first permanent magnets mounted on the side surface of the intermediate post; and a plurality of second permanent magnets arranged to face the first permanent magnet, Wherein the brake plate is mounted on the movable member so as to be movable between the first permanent magnet and the second permanent magnet by the driving unit. The probe station of claim 11, wherein the magnetic field generating unit further includes a first mounting bracket mounted on the side surface of the intermediate column, extending in the horizontal direction and having a channel shape with an open lower portion ,and The first permanent magnet and the second permanent magnet are mounted to face each other on the inner side surface of the first mounting bracket. The probe station of claim 11, wherein the first permanent magnet is arranged such that polarities alternate in the horizontal direction, and The polarity of the second permanent magnet is arranged to be opposite to the polarity of the first permanent magnet. The probe station as claimed in claim 7, wherein the drive unit comprises: a pneumatic cylinder mounted on one of the support columns and the intermediate column and configured to move the movable member; and A guide mechanism mounted on one of the support columns and the intermediate column and configured to guide the movable member in the horizontal direction. The probe station of claim 6, wherein the camera driving part further includes a stopper member for stopping the camera unit at the predetermined position. The probe station of claim 15, wherein the camera driving part further includes a shock absorber for absorbing shock caused by the stop member. A probe station is characterized in that, comprising: a chuck configured to support the substrate; a probe card disposed over the chuck and configured to electrically test semiconductor devices formed on the substrate; a top plate on which the probe card is mounted; first and second support columns spaced apart from each other in a first horizontal direction and configured to support the top plate; third and fourth support columns spaced from the first and second support columns in a second horizontal direction perpendicular to the first horizontal direction and configured to support the top plate; a camera unit disposed between the chuck and the top plate and configured to image the substrate; a camera drive part configured to move the camera unit in the second horizontal direction; and an intermediate post disposed between the first and third support posts, The camera driver components include: a drive unit mounted on the third support column and the intermediate column and for moving the camera unit in the second horizontal direction; and A braking unit mounted on the intermediate column and used to stop the camera unit at a predetermined position using an eddy current braking force. The probe station according to claim 17, further comprising: a card replacement unit, which is provided on one side of the middle column to replace the probe card, Wherein the middle column has a lower height than the third support column, and the card exchange unit transfers the probe card in the first horizontal direction in the upper space of the middle column. The probe station according to claim 17, further comprising: a second intermediate post disposed between the second and fourth support posts; and a second camera driving part configured to move the camera unit in the second horizontal direction, Wherein the second camera driving component includes: a second drive unit mounted on the fourth support column and the second intermediate column and for moving the camera unit in the second horizontal direction; and A second braking unit mounted on the second intermediate column and used to stop the camera unit at the predetermined position using an eddy current braking force. The probe station according to claim 19, further comprising: a substrate transfer robot disposed on one side of the second intermediate column to load the substrate onto the chuck, Wherein the second middle column has a lower height than the fourth support column, and the substrate transfer robot transfers the substrate in the first horizontal direction in the upper space of the second middle column.

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