TW202200671A - 硬化性樹脂組成物、硬化膜、積層體、硬化膜之製造方法及半導體器件 - Google Patents
硬化性樹脂組成物、硬化膜、積層體、硬化膜之製造方法及半導體器件 Download PDFInfo
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- TW202200671A TW202200671A TW110106531A TW110106531A TW202200671A TW 202200671 A TW202200671 A TW 202200671A TW 110106531 A TW110106531 A TW 110106531A TW 110106531 A TW110106531 A TW 110106531A TW 202200671 A TW202200671 A TW 202200671A
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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WO2023157911A1 (ja) * | 2022-02-21 | 2023-08-24 | 富士フイルム株式会社 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、及び、半導体デバイス |
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JP2002296767A (ja) * | 2001-03-29 | 2002-10-09 | Toray Ind Inc | 感光性ポリイミド前駆体組成物 |
JP5657414B2 (ja) | 2010-02-16 | 2015-01-21 | 旭化成イーマテリアルズ株式会社 | ネガ型感光性樹脂組成物、硬化レリーフパターンの製造方法、並びに半導体装置 |
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JP6612343B2 (ja) * | 2015-06-30 | 2019-11-27 | 富士フイルム株式会社 | 前駆体組成物、感光性樹脂組成物、前駆体組成物の製造方法、硬化膜、硬化膜の製造方法および半導体デバイス |
WO2017081922A1 (ja) * | 2015-11-11 | 2017-05-18 | 東レ株式会社 | 半導体装置およびその製造方法 |
TWI625232B (zh) * | 2016-02-26 | 2018-06-01 | Fujifilm Corp | 積層體、積層體的製造方法、半導體元件以及半導體元件的製造方法 |
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