TW202141056A - Inspection method for glass substrate - Google Patents

Inspection method for glass substrate Download PDF

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TW202141056A
TW202141056A TW109113688A TW109113688A TW202141056A TW 202141056 A TW202141056 A TW 202141056A TW 109113688 A TW109113688 A TW 109113688A TW 109113688 A TW109113688 A TW 109113688A TW 202141056 A TW202141056 A TW 202141056A
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voltage
metal wires
voltage sensing
sensing device
voltage signal
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TW109113688A
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TWI759724B (en
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許哲嘉
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興城科技股份有限公司
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Priority to CN202011048046.2A priority patent/CN113554960A/en
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

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  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

A method for inspecting a glass substrate having plural first metal lines and plural second metal lines with a first and a second voltage sensing devices, comprises: providing a first voltage to one end of each first metal line; causing the first and the second voltage sensing devices parallel to each other to move along a direction perpendicular to the plural second metal lines; and when a difference between a first and a second voltage signals sensing by the first and the second voltage sensing devices respectively is not zero, judging that at least one of the two neighboring second metal lines under the first and the second voltage sensing devices respectively having at least one short-circuit with the plural first metal lines.

Description

玻璃基板檢測方法 Glass substrate inspection method

本發明涉及一種用於檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，尤指一種使用一具有一第一與一第二電壓感測裝置之檢測設備以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法。其中，各該第一金屬導線與各該第二金屬導線分別是由數據線/閘極線(檢測閘極線/數據線短路：GDS)，或者是數據線/共源極線(檢測數據線/共源極線短路：DCS)，抑或者是共源極線/閘極線(檢測閘極線/共源極線短路：GCS)所組成群組的其中之一。 The present invention relates to a method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires, in particular to a detection device using a first and a second voltage sensing device to detect A method for a glass substrate with a plurality of first metal wires and a plurality of second metal wires. Wherein, each of the first metal wires and each of the second metal wires are respectively connected by a data line/gate line (detecting gate line/data line short-circuit: GDS), or a data line/common source line (detecting data line). /Common source line short circuit: DCS), or one of the group consisting of common source line/gate line (detecting gate line/common source line short circuit: GCS).

在玻璃基板的各該第一金屬導線與各該第二金屬導線間是否具有短路的檢測方面，先前技術主要是運用非接觸式供電及非接觸式感測器接收感測訊號。前述用於檢測玻璃基板短路之先前技術，主要應用在液晶顯示螢幕(LCD)的前段製程，在LCD的後段製程則無法達到檢測功能，於是促使開發適用於LCD的後段製程之新檢測方法。 In terms of detecting whether there is a short circuit between each of the first metal wires and each of the second metal wires of the glass substrate, the prior art mainly uses non-contact power supply and non-contact sensors to receive sensing signals. The aforementioned prior art for detecting short-circuits of glass substrates is mainly used in the front-end process of liquid crystal display (LCD). The detection function cannot be achieved in the back-end process of LCD. Therefore, the development of a new detection method suitable for the back-end process of LCD is prompted.

目前用於檢測玻璃基板之短路的檢測方法， 其檢測出短路的精確度與速度仍有待提升，以進一步地減少瑕疵與降低生產成本。如何改善現存用於檢查玻璃基板的短路檢測方法，使得玻璃基板上電路的短路的檢出率能被提高，是一值得深思的問題。 The current detection method used to detect the short circuit of the glass substrate, The accuracy and speed of detecting short circuits need to be improved to further reduce defects and reduce production costs. How to improve the existing short-circuit detection methods for inspecting glass substrates, so that the detection rate of short circuits on the glass substrate can be improved, is a question worth pondering.

職是之故，發明人鑒於習知技術之缺失，乃思及改良發明之意念，終能發明出本案之「玻璃基板檢測方法」。本案所實現的是運用接觸式供電及非接觸式感測器接收感測訊號的玻璃基板之各該第一金屬導線與各該第二金屬導線間是否具有短路的檢測方法。 Because of his job, the inventor was able to invent the "glass substrate inspection method" of this case in view of the lack of conventional technology and the idea of improving the invention. What this case achieves is a method for detecting whether there is a short circuit between each of the first metal wires and each of the second metal wires of the glass substrate that uses contact-type power supply and non-contact sensors to receive sensing signals.

本發明的主要目的在於提供一種用於檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的第一金屬導線與第二金屬導線間短路的方法，該方法當供電該複數個第一金屬導線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰第二金屬導線上二感應電壓訊號之一第一差值，當該第一差值不為零時，該兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線間具有至少一短路，以及當供電該複數個第二金屬導線時，使用該第一與該第二電壓感測裝置分別依序感測兩相鄰第一金屬導線上二感應電壓訊號之一第二差值，當該第二差值不為零時，該兩相鄰第一金屬導線的至少其中之一與該複數個第二金屬導線間具有至少一短路，以提升玻璃基板上第一金屬導線與第二金屬導線間短路的檢出率。 The main purpose of the present invention is to provide a method for detecting a short circuit between a first metal wire and a second metal wire of a glass substrate with a plurality of first metal wires and a plurality of second metal wires. In the case of a first metal wire, a first and a second voltage sensing device are used to sense the first difference of one of the two induced voltage signals on two adjacent second metal wires respectively. When the first difference is not When it is zero, there is at least one short circuit between at least one of the two adjacent second metal wires and the plurality of first metal wires, and when power is supplied to the plurality of second metal wires, the first and the second metal wires are used. The two voltage sensing devices respectively sequentially sense a second difference value of one of the two induced voltage signals on two adjacent first metal wires. When the second difference value is not zero, at least one of the two adjacent first metal wires There is at least one short circuit between one of them and the plurality of second metal wires, so as to improve the detection rate of the short circuit between the first metal wire and the second metal wire on the glass substrate.

本案之又一主要目的在於提供一種使用一具 有一第一與一第二電壓感測裝置之檢測設備以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括：自各該第二金屬導線的一端供應一第一電壓，且使各該第二金屬導線的另一端接地；使該第一與該第二電壓感測裝置彼此實質平行地沿垂直於該複數個第一金屬導線的一方向移動；以及當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號間的一第一兩電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第一金屬導線的至少其中之一與該複數個第二金屬導線間具有至少一短路。 Another main purpose of this case is to provide a The method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires includes a detection device having a first and a second voltage sensing device, including: supplying a first metal wire from one end of each of the second metal wires A voltage, and ground the other end of each of the second metal wires; make the first and the second voltage sensing devices move substantially parallel to each other in a direction perpendicular to the plurality of first metal wires; and when the When the difference between a first voltage signal and a second voltage signal sensed by the first and second voltage sensing devices is not zero, it is determined to be located at the first and the second voltage signal respectively. There is at least one short circuit between at least one of the two adjacent first metal wires under the second voltage sensing device and the plurality of second metal wires.

本案之下一主要目的在於提供一種使用一具有一第一與一第二電壓感測裝置之檢測設備以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括：自各該第一金屬導線的一端供應一第一電壓，且使各該第一金屬導線的另一端接地；使該第一與該第二電壓感測裝置彼此實質平行地沿垂直於該複數個第二金屬導線的一方向移動；以及當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號間一第一兩電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線間具有至少一短路。 A main purpose of this case is to provide a method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires using a detection device having a first and a second voltage sensing device, including : Supply a first voltage from one end of each of the first metal wires, and ground the other end of each of the first metal wires; make the first and the second voltage sensing devices substantially parallel to each other and perpendicular to the plurality of The second metal wire moves in one direction; and when the difference between a first voltage signal and a second voltage signal sensed by the first and second voltage sensing devices is not equal to At zero hour, it is determined that there is at least one short circuit between at least one of two adjacent second metal wires located under the first and second voltage sensing devices and the plurality of first metal wires.

本案之另一主要目的在於提供一種使用一第 一與一第二電壓感測裝置以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括：自各該第二金屬導線或各該第一金屬導線的一端供應一第一電壓；使該第一與該第二電壓感測裝置相平行，且沿垂直於未供電的該複數個第一金屬導線或未供電的該複數個第二金屬導線的一方向移動；以及當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第一金屬導線或兩相鄰第二金屬導線的至少其中之一和與該兩相鄰第一金屬導線或該兩相鄰第二金屬導線相交的該複數個第二金屬導線至少其中之一或該複數個第一金屬導線至少其中之一之間具有至少一短路。 Another main purpose of this case is to provide a A method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires with a second voltage sensing device includes: supplying from each of the second metal wires or one end of each of the first metal wires A first voltage; make the first and the second voltage sensing devices parallel and move in a direction perpendicular to the unpowered first metal wires or the unpowered second metal wires; And when the difference between a first voltage signal and a second voltage signal sensed by the first and second voltage sensing devices is not zero, it is determined that they are located in the first and the second voltage sensing devices, respectively At least one of two adjacent first metal wires or two adjacent second metal wires under the device and the plurality of second metals intersecting the two adjacent first metal wires or the two adjacent second metal wires There is at least one short circuit between at least one of the wires or at least one of the plurality of first metal wires.

本案之再一主要目的在於提供一種使用一第一與一第二電壓感測裝置以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括：自各該第一金屬導線的一端供應一第一電壓；使該第一與該第二電壓感測裝置相平行且沿垂直於該複數個第二金屬導線的一方向移動；以及當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線間具有至少一短路。 Another main purpose of this case is to provide a method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires using a first and a second voltage sensing device, including: One end of the metal wire supplies a first voltage; makes the first and the second voltage sensing device parallel and moves in a direction perpendicular to the plurality of second metal wires; and when the first and the second voltage When the difference between a first voltage signal and a second voltage signal sensed by the sensing device is not zero, it is determined that two adjacent second metal wires respectively located under the first and second voltage sensing devices are located There is at least one short circuit between at least one of and the plurality of first metal wires.

1:檢測設備 1: Testing equipment

11:第一電壓感測裝置 11: The first voltage sensing device

12:第二電壓感測裝置 12: The second voltage sensing device

13:橫樑 13: beam

2:玻璃基板 2: Glass substrate

21:閘極線/第二金屬導線 21: Gate wire / second metal wire

22:數據線/第一金屬導線 22: data line/first metal wire

23:外部電源 23: External power supply

24:共源極線/第一金屬導線/第二金屬導線 24: Common source line/first metal wire/second metal wire

aa’:線段 aa’: line segment

d:間距 d: spacing

第一圖：其係顯示一依據本發明構想之第一較佳實施例，當供電複數個閘極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰數據線上二感應電壓訊號之一第一差值之示意圖。 The first figure: It shows a first preferred embodiment according to the concept of the present invention. When a plurality of gate lines are powered, a first and a second voltage sensing device are used to sense two adjacent data in sequence A schematic diagram of the first difference of one of the two induced voltage signals on the line.

第二圖：其係顯示一依據本發明構想之第一較佳實施例，當供電複數個數據線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰閘極線上二感應電壓訊號之一第二差值之示意圖。 The second figure: It shows a first preferred embodiment according to the concept of the present invention. When a plurality of data lines are powered, a first and a second voltage sensing device are used to sense two adjacent gates in sequence. A schematic diagram of the second difference of one of the two induced voltage signals on the line.

第三圖：其係顯示一依據本發明構想之第二較佳實施例，當供電複數個共源極極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰數據線上二感應電壓訊號之一第三差值之示意圖。 The third figure: It shows a second preferred embodiment according to the concept of the present invention. When a plurality of common source lines are powered, a first and a second voltage sensing device are used to sense two adjacent voltages in sequence. A schematic diagram of the third difference of one of the two induced voltage signals on the data line.

第四圖：其係顯示一依據本發明構想之第二較佳實施例，當供電複數個數據線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰共源極線上二感應電壓訊號之一第四差值之示意圖。 The fourth figure: It shows a second preferred embodiment according to the concept of the present invention, when a plurality of data lines are powered, a first and a second voltage sensing device are used to sense two adjacent common sources in sequence A schematic diagram of the fourth difference of one of the two induced voltage signals on the polar line.

第五圖：其係顯示一依據本發明構想之第三較佳實施例，當供電複數個閘極極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰共源極線上二感應電壓訊號之一第五差值之示意圖。 Figure 5: It shows a third preferred embodiment according to the concept of the present invention. When a plurality of gate lines are powered, a first and a second voltage sensing device are used to sense two adjacent voltages in sequence. A schematic diagram of the fifth difference of one of the two induced voltage signals on the source line.

第六圖：其係顯示一依據本發明構想之第三較佳實施例，當供電複數個共源極線時，使用一第一與一第二電 壓感測裝置分別依序感測兩相鄰閘極線上二感應電壓訊號之一第六差值之示意圖。 Figure 6: It shows a third preferred embodiment according to the concept of the present invention. When supplying a plurality of common source lines, a first and a second power supply are used. A schematic diagram of the pressure sensing device respectively sequentially sensing the sixth difference of one of the two induced voltage signals on two adjacent gate lines.

第七圖(a)：其係顯示一對應於第一圖或第三圖中aa’線段之橫切面的該第一與該第二電壓感測裝置與該二相鄰數據線之剖面圖。 Figure 7 (a): It shows a cross-sectional view of the first and the second voltage sensing devices and the two adjacent data lines corresponding to the cross-section of the aa' line segment in the first figure or the third figure.

第七圖(b)：其係顯示一對應於第五圖中aa’線段之橫切面的該第一與該第二電壓感測裝置與該二相鄰共源極線之剖面圖。 Figure 7 (b): It shows a cross-sectional view of the first and second voltage sensing devices and the two adjacent common source lines corresponding to the cross section of the aa' line segment in Figure 5.

第一圖是顯示一依據本發明構想之第一較佳實施例，當供電該複數個閘極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰數據線上二感應電壓訊號之一第一差值之示意圖。在第一圖中，一檢測設備1包括一第一電壓感測裝置11、一第二電壓感測裝置12與一橫樑13。該檢測設備1用於檢測一玻璃基板2的GDS。該玻璃基板2包括複數個第二金屬導線21(在本實施例為複數個閘極線21)、複數個第一金屬導線22(在本實施例為複數個數據線22)與一外部電源23。 The first figure shows a first preferred embodiment according to the concept of the present invention. When power is supplied to the plurality of gate lines, a first and a second voltage sensing device are used to sense two adjacent data lines in sequence. A schematic diagram of the first difference of one of the two induced voltage signals. In the first figure, a testing device 1 includes a first voltage sensing device 11, a second voltage sensing device 12 and a beam 13. The inspection device 1 is used to inspect the GDS of a glass substrate 2. The glass substrate 2 includes a plurality of second metal wires 21 (a plurality of gate wires 21 in this embodiment), a plurality of first metal wires 22 (a plurality of data wires 22 in this embodiment), and an external power source 23 .

如第一圖所示，檢測玻璃基板2時，檢測設備1當供應一第一電壓給該複數個閘極線21時，使用該第一電壓感測裝置11與該第二電壓感測裝置12分別依序感測兩相鄰數據線22上二感應電壓訊號之該第一差值是否為零，當該第一差值不為零時，判斷分別位於該第一電壓感 測裝置11及該第二電壓感測裝置12下方的兩相鄰數據線22的至少其中之一與該複數個閘極線21間具有至少一短路。 As shown in the first figure, when inspecting the glass substrate 2, the inspection device 1 uses the first voltage sensing device 11 and the second voltage sensing device 12 when a first voltage is supplied to the plurality of gate lines 21 Sequentially sense whether the first difference between the two induced voltage signals on two adjacent data lines 22 is zero, and when the first difference is not zero, it is determined that they are located in the first voltage sensing unit respectively. There is at least one short circuit between the detection device 11 and at least one of the two adjacent data lines 22 below the second voltage sensing device 12 and the plurality of gate lines 21.

第二圖是顯示一依據本發明構想之第一較佳實施例，當供電複數個數據線時，使用一第一與一第二電壓感測裝置依序感測兩相鄰閘極線上二感應電壓訊號之一第二差值之示意圖。在第二圖中，當供應一第二電壓給該複數個數據線22時，使用該檢測設備1的該第一電壓感測裝置11與該第二電壓感測裝置12分別依序檢測相鄰兩閘極線21上二感應電壓訊號之該第二差值是否為零，當該第二差值不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰閘極線21的至少其中之一與該複數個數據線22間具有至少一短路。 The second figure shows a first preferred embodiment according to the concept of the present invention. When a plurality of data lines are powered, a first and a second voltage sensing device are used to sequentially sense two senses on two adjacent gate lines. A schematic diagram of the second difference of a voltage signal. In the second figure, when a second voltage is supplied to the plurality of data lines 22, the first voltage sensing device 11 and the second voltage sensing device 12 of the detection device 1 are used to detect adjacent Whether the second difference between the two induced voltage signals on the two gate lines 21 is zero, when the second difference is not zero, it is determined that they are located at the first voltage sensing device 11 and the second voltage sensing device respectively There is at least one short circuit between at least one of the two adjacent gate lines 21 below 12 and the plurality of data lines 22.

如第二圖所示，檢測玻璃基板2時，檢測設備1當供應該第二電壓給該複數個數據線22時，使用該第一電壓感測裝置11與該第二電壓感測裝置12分別依序感測兩相鄰閘極線21上二感應電壓訊號之該第二差值是否為零，當該第二差值為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰閘極線21與該複數個數據線22間不具有短路。 As shown in the second figure, when inspecting the glass substrate 2, the inspection device 1 uses the first voltage sensing device 11 and the second voltage sensing device 12 when the second voltage is supplied to the plurality of data lines 22. Sequentially sense whether the second difference between the two induced voltage signals on two adjacent gate lines 21 is zero. When the second difference is zero, it is determined that they are located in the first voltage sensing device 11 and the first voltage sensing device 11, respectively. There is no short circuit between the two adjacent gate lines 21 under the two voltage sensing devices 12 and the plurality of data lines 22.

第三圖是顯示一依據本發明構想之第二較佳實施例，當供電複數個共源極極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰數據線上二感應電壓訊號之一第三差值之示意圖。在第三圖中，一檢測設備 1包括一第一電壓感測裝置11、一第二電壓感測裝置12與一橫樑13。該檢測設備1用於檢測一玻璃基板2的DCS。該玻璃基板2包括複數個第二金屬導線24(在本實施例為複數個共源極線24)、複數個第一金屬導線22(在本實施例為複數個數據線22)與一外部電源23。 The third figure shows a second preferred embodiment according to the concept of the present invention. When a plurality of common source lines are powered, a first and a second voltage sensing device are used to sense two adjacent data lines in sequence. A schematic diagram of the third difference of one of the two induced voltage signals. In the third figure, a testing device 1 includes a first voltage sensing device 11, a second voltage sensing device 12, and a beam 13. The inspection device 1 is used to inspect the DCS of a glass substrate 2. The glass substrate 2 includes a plurality of second metal wires 24 (a plurality of common source wires 24 in this embodiment), a plurality of first metal wires 22 (a plurality of data wires 22 in this embodiment), and an external power source twenty three.

如第三圖所示，檢測玻璃基板2時，檢測設備1當供應該第一電壓給該複數個共源極線24時，使用一第一電壓感測裝置11與一第二電壓感測裝置12分別依序感測兩相鄰數據線22上二感應電壓訊號之該第三差值是否為零，當該第三差值不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰數據線22的至少其中之一與該複數個共源極線24間具有至少一短路。 As shown in the third figure, when inspecting the glass substrate 2, the inspection device 1 uses a first voltage sensing device 11 and a second voltage sensing device when the first voltage is supplied to the plurality of common source lines 24 12 respectively sense in sequence whether the third difference between the two induced voltage signals on two adjacent data lines 22 is zero, and when the third difference is not zero, it is determined that they are located in the first voltage sensing device 11 and There is at least one short circuit between at least one of the two adjacent data lines 22 under the second voltage sensing device 12 and the plurality of common source lines 24.

第四圖是顯示一依據本發明構想之第二較佳實施例，當供電複數個數據線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰共源極線上二感應電壓訊號之一第四差值之示意圖。在第四圖中，當供應一第二電壓給該複數個數據線22時，使用該檢測設備1的該第一電壓感測裝置11與該第二電壓感測裝置12分別依序檢測相鄰兩共源極線24上二感應電壓訊號之該第四差值是否為零，當該第四差值不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰共源極線24的至少其中之一與該複數個數據線22間具有至少一短路。 The fourth figure shows a second preferred embodiment according to the concept of the present invention. When a plurality of data lines are powered, a first and a second voltage sensing device are used to sense two adjacent common source lines in sequence. A schematic diagram of the fourth difference of one of the two induced voltage signals. In the fourth figure, when a second voltage is supplied to the plurality of data lines 22, the first voltage sensing device 11 and the second voltage sensing device 12 of the detection device 1 are used to detect adjacent Whether the fourth difference between the two induced voltage signals on the two common source lines 24 is zero, and when the fourth difference is not zero, it is determined that they are located in the first voltage sensing device 11 and the second voltage sensing device 11 and the second voltage sensing device respectively. There is at least one short circuit between at least one of the two adjacent common source lines 24 under the device 12 and the plurality of data lines 22.

如第四圖所示，檢測玻璃基板2時，檢測設備1當供應該第二電壓給該複數個數據線22時，使用該第一電壓感測裝置11與該第二電壓感測裝置12分別依序感測兩相鄰共源極線24上二感應電壓訊號之該第四差值是否為零，當該第四差值為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰共源極線24與該複數個數據線22間不具有短路。 As shown in the fourth figure, when inspecting the glass substrate 2, the inspection device 1 uses the first voltage sensing device 11 and the second voltage sensing device 12 when the second voltage is supplied to the plurality of data lines 22. Sequentially sense whether the fourth difference between the two induced voltage signals on two adjacent common source lines 24 is zero. When the fourth difference is zero, it is determined that they are located in the first voltage sensing device 11 and the There is no short circuit between the two adjacent common source lines 24 under the second voltage sensing device 12 and the plurality of data lines 22.

第五圖是顯示一依據本發明構想之第三較佳實施例，當供電複數個閘極極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰共源極線上二感應電壓訊號之一第五差值之示意圖。在第五圖中，一檢測設備1包括一第一電壓感測裝置11、一第二電壓感測裝置12與一橫樑13。該檢測設備1用於檢測一玻璃基板2的GCS。該玻璃基板2包括複數個第二金屬導線21(在本實施例為複數個閘極線21)、複數個第一金屬導線24(在本實施例為複數個共源極線24)與一外部電源23。 The fifth figure shows a third preferred embodiment according to the concept of the present invention. When a plurality of gate lines are powered, a first and a second voltage sensing device are used to sense two adjacent common source electrodes in sequence. A schematic diagram of the fifth difference of one of the two induced voltage signals on the line. In the fifth figure, a testing device 1 includes a first voltage sensing device 11, a second voltage sensing device 12 and a beam 13. The inspection device 1 is used to inspect the GCS of a glass substrate 2. The glass substrate 2 includes a plurality of second metal wires 21 (a plurality of gate wires 21 in this embodiment), a plurality of first metal wires 24 (a plurality of common source wires 24 in this embodiment) and an external Power supply 23.

如第五圖所示，檢測玻璃基板2時，檢測設備1當供應一第一電壓給該複數個閘極線21時，使用該第一電壓感測裝置11與該第二電壓感測裝置12分別依序感測兩相鄰共源極線24上二感應電壓訊號之該第五差值是否為零，當該第五差值不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰共源極線24的至少其中之一與該複數個閘極線21間具有至少一短路。 As shown in the fifth figure, when inspecting the glass substrate 2, the inspection device 1 uses the first voltage sensing device 11 and the second voltage sensing device 12 when a first voltage is supplied to the plurality of gate lines 21. Sequentially sense whether the fifth difference between the two induced voltage signals on two adjacent common source lines 24 is zero, and when the fifth difference is not zero, it is determined that they are located in the first voltage sensing device 11 respectively And there is at least one short circuit between at least one of the two adjacent common source lines 24 under the second voltage sensing device 12 and the plurality of gate lines 21.

第六圖是顯示一依據本發明構想之第三較佳實施例，當供電複數個共源極線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰閘極線上二感應電壓訊號之一第六差值之示意圖。在第六圖中，當供應一第二電壓給該複數個共源極線24時，使用該檢測設備1的該第一電壓感測裝置11與該第二電壓感測裝置12分別依序檢測相鄰兩閘極線21上二感應電壓訊號之該第六差值是否為零，當該第六差值不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰閘極線24的至少其中之一與該複數個共源極線24間具有至少一短路。 The sixth figure shows a third preferred embodiment according to the concept of the present invention. When supplying a plurality of common source lines, a first and a second voltage sensing device are used to sense two adjacent gates in sequence. A schematic diagram of the sixth difference of one of the two induced voltage signals on the line. In the sixth figure, when a second voltage is supplied to the plurality of common source lines 24, the first voltage sensing device 11 and the second voltage sensing device 12 of the detecting device 1 are used to detect sequentially Whether the sixth difference between the two induced voltage signals on two adjacent gate lines 21 is zero, when the sixth difference is not zero, it is determined that they are located in the first voltage sensing device 11 and the second voltage sensing device 11 and the second voltage sensing device respectively. There is at least one short circuit between at least one of the two adjacent gate lines 24 under the test device 12 and the plurality of common source lines 24.

如第六圖所示，檢測玻璃基板2時，檢測設備1當供應該第二電壓給該複數個共源極線24時，使用該第一電壓感測裝置11與該第二電壓感測裝置12分別依序感測兩相鄰閘極線21上二感應電壓訊號之該第六差值是否為零，當該第六差值為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰閘極線21與該複數個共源極線24間不具有短路。 As shown in Figure 6, when inspecting the glass substrate 2, the inspection device 1 uses the first voltage sensing device 11 and the second voltage sensing device when the second voltage is supplied to the plurality of common source lines 24 12 respectively sense in sequence whether the sixth difference between the two induced voltage signals on two adjacent gate lines 21 is zero, and when the sixth difference is zero, it is determined that they are located in the first voltage sensing device 11 and There is no short circuit between the two adjacent gate lines 21 under the second voltage sensing device 12 and the plurality of common source lines 24.

第七圖(a)是顯示一對應於第一圖或第三圖中aa’線段之橫切面的該第一與該第二電壓感測裝置與該二相鄰數據線之剖面圖。第一電壓感測裝置11與第二電壓感測裝置12分別在數據線Y或數據線X位置上方距離d的位置(間距為d)。 The seventh figure (a) is a cross-sectional view of the first and the second voltage sensing devices and the two adjacent data lines corresponding to the cross section of the aa' line segment in the first figure or the third figure. The first voltage sensing device 11 and the second voltage sensing device 12 are respectively located at a distance d above the position of the data line Y or the data line X (distance d).

第七圖(b)是顯示一對應於第五圖中aa’線段 之橫切面的該第一與該第二電壓感測裝置與該二相鄰共源極線之剖面圖。第一電壓感測裝置11與第二電壓感測裝置12分別在共源極線Y或共源極線X位置上方距離d的位置(間距為d)。 The seventh picture (b) shows a line segment corresponding to aa’ in the fifth picture A cross-sectional view of the first and second voltage sensing devices and the two adjacent common source lines of the cross section. The first voltage sensing device 11 and the second voltage sensing device 12 are respectively at a distance d above the position of the common source line Y or the common source line X (distance d).

如第一圖、第三圖或第五圖所示，本案提供一種使用一具有一第一電壓感測裝置11與一第二電壓感測裝置12之檢測設備1以檢測一具有複數個第一金屬導線(在第一圖與第三圖中為數據線22，在第五圖中為共源極線24)22/24與複數個第二金屬導線(在第一圖與第五圖中為閘極線21，在第三圖中為共源極線24)21/24之玻璃基板2的方法。該方法包括：自各該第二金屬導線21/24的一端供應一第一電壓，且使各該第二金屬導線21/24的另一端接地；使該第一電壓感測裝置11與該第二電壓感測裝置12彼此實質平行地沿垂直於該複數個第一金屬導線22/24的一方向移動；以及當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的一第一電壓訊號與一第二電壓訊號間的一第一兩電壓訊號之差不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰第一金屬導線22/24的至少其中之一與該複數個第二金屬導線21/24間具有至少一短路。 As shown in the first, third, or fifth diagrams, this application provides a detection device 1 with a first voltage sensing device 11 and a second voltage sensing device 12 to detect a device with a plurality of first Metal wires (data line 22 in the first and third figures, common source line 24 in the fifth figure) 22/24 and a plurality of second metal wires (in the first and fifth figures are The gate line 21 is the method of the glass substrate 2 of the common source line 24) 21/24 in the third figure. The method includes: supplying a first voltage from one end of each of the second metal wires 21/24, and grounding the other end of each of the second metal wires 21/24; making the first voltage sensing device 11 and the second The voltage sensing device 12 moves substantially parallel to each other in a direction perpendicular to the plurality of first metal wires 22/24; and when the first voltage sensing device 11 and the second voltage sensing device 12 respectively sense When the difference between a first voltage signal and a second voltage signal received is not zero, it is determined that the first voltage sensing device 11 and the second voltage sensing device 12 are located respectively below There is at least one short circuit between at least one of the two adjacent first metal wires 22/24 and the plurality of second metal wires 21/24.

如第一圖、第三圖或第五圖所示之該方法，其中該檢測設備1更包括一可移動之橫樑13，其中該第一電壓感測裝置11與該第二電壓感測裝置12設置於該橫樑13上，藉由該橫樑13之移動以檢測該玻璃基板2，該第一 電壓感測裝置11與該第二電壓感測裝置12實質平行於各該第一金屬導線22/24，以偵測各該第一金屬導線22/24是否因該至少一短路而產生一電流並因而使該第一電壓感測裝置11或該第二電壓感測裝置12分別感測到該第一電壓訊號或該第二電壓訊號。 As shown in the first figure, the third figure or the fifth figure, the detection device 1 further includes a movable beam 13, wherein the first voltage sensing device 11 and the second voltage sensing device 12 Is arranged on the beam 13, and the glass substrate 2 is detected by the movement of the beam 13, the first The voltage sensing device 11 and the second voltage sensing device 12 are substantially parallel to each of the first metal wires 22/24 to detect whether each of the first metal wires 22/24 generates a current due to the at least one short circuit. Therefore, the first voltage sensing device 11 or the second voltage sensing device 12 respectively sense the first voltage signal or the second voltage signal.

如第一圖、第三圖或第五圖所示之方法，其中當該第一兩電壓訊號之差不為零時，則該兩相鄰第一金屬導線22/24的至少其中之一與該複數個第二金屬導線21/24的至少其中之一間具有該至少一短路。而當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的該第一電壓訊號與該第二電壓訊號間的該第一兩電壓訊號之差不為零時，則如第二圖、第四圖或第六圖所示，該方法更包括下列步驟：自各該第一金屬導線22/24(在第二圖與第四圖中為數據線22，在第六圖中為共源極線24)的一端供應一第二電壓，且使各該第一金屬導線22/24的另一端接地；使該第一電壓感測裝置11與該第二電壓感測裝置12彼此實質平行地沿垂直於該複數個第二金屬導線(在第二圖與第六圖中為閘極線21，在第四圖中為共源極線24)21/24的一方向移動；以及當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的一第三電壓訊號與一第四電壓訊號間之一第二兩電壓訊號之差不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰第二金屬導線21/24的至少其中之一與該複數個第一金屬導線22/24間具有該至少一短路。 As in the method shown in the first, third, or fifth diagrams, when the difference between the first two voltage signals is not zero, at least one of the two adjacent first metal wires 22/24 and At least one of the plurality of second metal wires 21/24 has the at least one short circuit. When the difference between the first voltage signal and the second voltage signal sensed by the first voltage sensing device 11 and the second voltage sensing device 12 is not zero , As shown in the second, fourth, or sixth diagrams, the method further includes the following steps: from each of the first metal wires 22/24 (in the second and fourth diagrams, the data line 22, in the In the sixth figure, one end of the common source line 24) supplies a second voltage, and the other end of each of the first metal wires 22/24 is grounded; the first voltage sensing device 11 and the second voltage sensing device 11 are connected to the ground. The devices 12 are substantially parallel to each other along a direction perpendicular to the plurality of second metal wires (gate line 21 in the second and sixth figures, and common source line 24 in the fourth figure) 21/24 Move; and when the difference between a third voltage signal and a fourth voltage signal sensed by the first voltage sensing device 11 and the second voltage sensing device 12 is not At zero hour, it is determined that at least one of the two adjacent second metal wires 21/24 located below the first voltage sensing device 11 and the second voltage sensing device 12 and the plurality of first metal wires 22/ There is at least one short circuit between 24.

如第一至第七圖(b)所示之該方法，其中該第一電壓感測裝置11與該第二電壓感測裝置12設置於該玻璃基板2上方，且該第一電壓感測裝置11與該第二電壓感測裝置12與該玻璃基板2間具有一間距d(見第七圖(a)與第七圖(b))。在第一圖、第三圖或第五圖中，當該第一電壓感測裝置11與該第二電壓感測裝置12分別位於一第N+1個與一第N個第一金屬導線22/24上方，且該第一兩電壓訊號之差等於該第N+1個第一金屬導線22/24的該第一電壓訊號的值減去該第N個第一金屬導線22/24的該第二電壓訊號的值，且為一正值，而當該第一與該第二電壓感測裝置分別移動至一第N+2個與該第N+1個第一金屬導線22/24上方，且該第一兩電壓訊號之差等於該第N+2個第一金屬導線22/24的該第一電壓訊號的值減去該第N+1個第一金屬導線22/24的該第二電壓訊號的值，且為一負值，其中N為一正整數時，則判斷該第N+1個第一金屬導線22/24具有該至少一短路。 As shown in the method shown in the first to seventh images (b), the first voltage sensing device 11 and the second voltage sensing device 12 are disposed above the glass substrate 2, and the first voltage sensing device There is a distance d between the second voltage sensing device 12 and the glass substrate 2 (see the seventh figure (a) and the seventh figure (b)). In the first figure, the third figure or the fifth figure, when the first voltage sensing device 11 and the second voltage sensing device 12 are located on an N+1th and an Nth first metal wire 22, respectively /24 above, and the difference between the first two voltage signals is equal to the value of the first voltage signal of the N+1th first metal wire 22/24 minus the value of the Nth first metal wire 22/24 The value of the second voltage signal is a positive value, and when the first and second voltage sensing devices move to an N+2th and N+1th first metal wire 22/24, respectively , And the difference between the first two voltage signals is equal to the value of the first voltage signal of the N+2th first metal wire 22/24 minus the value of the N+1th first metal wire 22/24 The value of the two voltage signals is a negative value, and when N is a positive integer, it is determined that the (N+1)th first metal wire 22/24 has the at least one short circuit.

如第二圖、第四圖或第六圖所示之該方法，其中當該第一電壓感測裝置11與該第二電壓感測裝置12分別位於一第M個與一第M+1個第二金屬導線21/24上方，且該第二兩電壓訊號之差等於該第M+1個第二金屬導線21/24的該第四電壓訊號的值減去該第M個第二金屬導線21/24的該第三電壓訊號的值，且為一正值，而當該第一電壓感測裝置11與該第二電壓感測裝置12分別移動至該第M+1個與一第M+2個第二金屬導線21/24上方，且該 第二兩電壓訊號之差等於該第M+2個第二金屬導線21/24的該第四電壓訊號的值減去該第M+1個第二金屬導線21/24的該第三電壓訊號的值，且為一負值，其中M為一正整數時，則判斷該第M+1個第二金屬導線21/24具有該至少一短路，而該第一與該第二電壓是由一外部電源23(見第一圖至第六圖)所提供。 The method as shown in the second, fourth or sixth figure, wherein when the first voltage sensing device 11 and the second voltage sensing device 12 are respectively located at an Mth and an M+1th Above the second metal wire 21/24, and the difference between the second two voltage signals is equal to the value of the fourth voltage signal of the M+1 second metal wire 21/24 minus the M second metal wire The value of the third voltage signal 21/24 is a positive value, and when the first voltage sensing device 11 and the second voltage sensing device 12 move to the M+1 th and M th respectively +2 second metal wires 21/24 above, and the The difference between the second two voltage signals is equal to the value of the fourth voltage signal of the M+2 second metal wire 21/24 minus the third voltage signal of the M+1 second metal wire 21/24 And is a negative value, where M is a positive integer, it is determined that the M+1th second metal wire 21/24 has the at least one short circuit, and the first and the second voltage are caused by a The external power supply 23 (see Figures 1 to 6) is provided.

如第二圖、第四圖或第六圖所示，本案提供一種使用一具有一第一電壓感測裝置11與一第二電壓感測裝置12之檢測設備1以檢測一具有複數個第一金屬導線22/24與複數個第二金屬導線21/24之玻璃基板2的方法。該方法包括：自各該第一金屬導線22/24的一端供應一第一電壓，且使各該第一金屬導線22/24的另一端接地；使該第一電壓感測裝置11與該第二電壓感測裝置12彼此實質平行地沿垂直於該複數個第二金屬導線21/24的一方向移動；以及當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的一第一電壓訊號與一第二電壓訊號間一第一兩電壓訊號之差不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰第二金屬導線21/24的至少其中之一與該複數個第一金屬導線22/24間具有至少一短路。 As shown in the second, fourth or sixth figure, the present application provides a detection device 1 with a first voltage sensing device 11 and a second voltage sensing device 12 to detect a device with a plurality of first The method of the glass substrate 2 with metal wires 22/24 and a plurality of second metal wires 21/24. The method includes: supplying a first voltage from one end of each of the first metal wires 22/24, and grounding the other end of each of the first metal wires 22/24; making the first voltage sensing device 11 and the second The voltage sensing device 12 moves substantially parallel to each other in a direction perpendicular to the plurality of second metal wires 21/24; and when the first voltage sensing device 11 and the second voltage sensing device 12 respectively sense When the difference between a first voltage signal and a second voltage signal is not zero, it is determined that the two voltage signals located below the first voltage sensing device 11 and the second voltage sensing device 12 are located respectively. There is at least one short circuit between at least one of the adjacent second metal wires 21/24 and the plurality of first metal wires 22/24.

如第二圖、第四圖或第六圖所示之該方法，其中當該第一兩電壓訊號之差不為零時，則該兩相鄰第二金屬導線21/24至少其中之一與該複數個第一金屬導線22/24的至少其中之一間具有該至少一短路。而當該第一 電壓感測裝置11及該第二電壓感測裝置12所分別感測到的該第一電壓訊號與該第二電壓訊號間的該第一兩電壓訊號之差不為零時，則如第一圖、第三圖或第五圖所示，該方法更包括下列步驟：自各該第二金屬導線21/24的一端供應一第二電壓，且使各該第二金屬導線21/24另一端接地；使該第一電壓感測裝置11與該第二電壓感測裝置12彼此實質平行地沿垂直於該複數個第一金屬導線22/24的一方向移動；以及當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的一第三電壓訊號與一第四電壓訊號間之一第二兩電壓訊號之差不為零時，判斷分別位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰第一金屬導線22/24的至少其中之一具有該至少一短路。 As shown in the second figure, fourth figure or sixth figure, when the difference between the first two voltage signals is not zero, at least one of the two adjacent second metal wires 21/24 and At least one of the plurality of first metal wires 22/24 has the at least one short circuit. And when the first When the difference between the first two voltage signals between the first voltage signal and the second voltage signal sensed by the voltage sensing device 11 and the second voltage sensing device 12 is not zero, it is like the first As shown in Figure, Figure 3 or Figure 5, the method further includes the following steps: supplying a second voltage from one end of each of the second metal wires 21/24, and grounding the other end of each of the second metal wires 21/24 Make the first voltage sensing device 11 and the second voltage sensing device 12 move substantially parallel to each other in a direction perpendicular to the plurality of first metal wires 22/24; and when the first voltage sensing device When the difference between the second and the second voltage signals between a third voltage signal and a fourth voltage signal sensed by the second voltage sensing device 12 is not zero, it is determined that they are located in the first voltage sensing device. At least one of the two adjacent first metal wires 22/24 under the measuring device 11 and the second voltage sensing device 12 has the at least one short circuit.

如第一圖至第六圖所示，本案揭露一種使用一第一電壓感測裝置11與一第二電壓感測裝置12以檢測一具有複數個第一金屬導線22/24與複數個第二金屬導線21/24之玻璃基板2的方法。該方法包括：自各該第二金屬導線21/24或各該第一金屬導線22/24的一端供應一第一電壓；使該第一電壓感測裝置11與該第二電壓感測裝置12相平行，且沿垂直於未供電的該複數個第一金屬導線22/24或未供電的該複數個第二金屬導線21/24的一方向移動；以及當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的一第一電壓訊號與一第二電壓訊號之差不為零時，判斷分別位於該第一電壓感測裝置11及該 第二電壓感測裝置12下方的兩相鄰第一金屬導線22/24或兩相鄰第二金屬導線21/24的至少其中之一和與該兩相鄰第一金屬導線22/24或該兩相鄰第二金屬導線21/24相交的該複數個第二金屬導線21/24至少其中之一或該複數個第一金屬導線22/24至少其中之一之間具有至少一短路。 As shown in the first to sixth figures, this application discloses a first voltage sensing device 11 and a second voltage sensing device 12 to detect a device having a plurality of first metal wires 22/24 and a plurality of second The method of the glass substrate 2 of the metal wire 21/24. The method includes: supplying a first voltage from one end of each of the second metal wires 21/24 or each of the first metal wires 22/24; making the first voltage sensing device 11 and the second voltage sensing device 12 phase Parallel and move along a direction perpendicular to the unpowered first metal wires 22/24 or the unpowered second metal wires 21/24; and when the first voltage sensing device 11 and the When the difference between a first voltage signal and a second voltage signal sensed by the second voltage sensing device 12 is not zero, it is determined that they are located in the first voltage sensing device 11 and the second voltage signal respectively. At least one of the two adjacent first metal wires 22/24 or the two adjacent second metal wires 21/24 under the second voltage sensing device 12 and the two adjacent first metal wires 22/24 or the At least one of the plurality of second metal wires 21/24 or at least one of the plurality of first metal wires 22/24 intersecting two adjacent second metal wires 21/24 has at least one short circuit.

如第一圖至第六圖所示之該方法，更包括提供一檢測設備1，其中該檢測設備1包括該第一電壓感測裝置11及該第二電壓感測裝置12與一可移動之橫樑13。該第一電壓感測裝置11及該第二電壓感測裝置12設置於該橫樑13上，且藉由該橫樑13之移動以檢測該玻璃基板2。 As shown in the first to sixth figures, the method further includes providing a detection device 1, wherein the detection device 1 includes the first voltage sensing device 11 and the second voltage sensing device 12 and a movable Crossbeam 13. The first voltage sensing device 11 and the second voltage sensing device 12 are arranged on the beam 13, and the glass substrate 2 is detected by the movement of the beam 13.

如第二圖、第四圖或第六圖所示，本案提供一種使用一第一電壓感測裝置11與一第二電壓感測裝置12以檢測一具有複數個第一金屬導線22/24與複數個第二金屬導線21/24之玻璃基板2的方法。該方法包括：自各該第一金屬導線22/24的一端供應一第一電壓；使該第一電壓感測裝置11與該第二電壓感測裝置12相平行且沿垂直於該複數個第二金屬導線21/24的一方向移動；以及當該第一電壓感測裝置11及該第二電壓感測裝置12所分別感測到的一第一電壓訊號與一第二電壓訊號之差不為零時，判斷位於該第一電壓感測裝置11及該第二電壓感測裝置12下方的兩相鄰第二金屬導線21/24的至少其中之一與該複數個第一金屬導線22/24間具有至少一短路。 As shown in the second, fourth, or sixth diagrams, the present application provides a method for detecting a first voltage sensing device 11 and a second voltage sensing device 12 that has a plurality of first metal wires 22/24 and A method of multiple second metal wires 21/24 on the glass substrate 2. The method includes: supplying a first voltage from one end of each of the first metal wires 22/24; making the first voltage sensing device 11 and the second voltage sensing device 12 parallel and perpendicular to the plurality of second The metal wire 21/24 moves in one direction; and when the difference between a first voltage signal and a second voltage signal sensed by the first voltage sensing device 11 and the second voltage sensing device 12 is not equal to At zero hour, it is determined that at least one of the two adjacent second metal wires 21/24 located under the first voltage sensing device 11 and the second voltage sensing device 12 and the plurality of first metal wires 22/24 There is at least one short circuit between.

綜上所述，本發明提供一種用於檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的 第一金屬導線與第二金屬導線間短路的方法，該方法當供電該複數個第一金屬導線時，使用一第一與一第二電壓感測裝置分別依序感測兩相鄰第二金屬導線上二感應電壓訊號之一第一差值，當該第一差值不為零時，該兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線間具有至少一短路，以及當供電該複數個第二金屬導線時，使用該第一與該第二電壓感測裝置分別依序感測兩相鄰第一金屬導線上二感應電壓訊號之一第二差值，當該第二差值不為零時，該兩相鄰第一金屬導線的至少其中之一與該複數個第二金屬導線間具有至少一短路，以提升玻璃基板上第一金屬導線與第二金屬導線間短路的檢出率，故其確實具有新穎性與進步性。 In summary, the present invention provides a method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires A method for short-circuiting between a first metal wire and a second metal wire. This method uses a first and a second voltage sensing device to sense two adjacent second metals in sequence when power is supplied to the plurality of first metal wires A first difference value of one of the two induced voltage signals on the wire. When the first difference value is not zero, there is at least one short circuit between at least one of the two adjacent second metal wires and the plurality of first metal wires , And when power is supplied to the plurality of second metal wires, the first and the second voltage sensing devices are used to sense the second difference of one of the two induced voltage signals on two adjacent first metal wires respectively, when When the second difference is not zero, there is at least one short circuit between at least one of the two adjacent first metal wires and the plurality of second metal wires to improve the first metal wire and the second metal wire on the glass substrate The detection rate of short circuits between wires is indeed novel and progressive.

是以，縱使本案已由上述之實施例所詳細敘述而可由熟悉本技藝之人士任施匠思而為諸般修飾，然皆不脫如附申請專利範圍所欲保護者。 Therefore, even though this case has been described in detail by the above-mentioned embodiments and can be modified in many ways by those familiar with the art, it still does not deviate from the protection of the scope of the attached patent application.

1:檢測設備 1: Testing equipment

11:第一電壓感測裝置 11: The first voltage sensing device

12:第二電壓感測裝置 12: The second voltage sensing device

13:橫樑 13: beam

2:玻璃基板 2: Glass substrate

21:閘極線/第二金屬導線 21: Gate wire / second metal wire

22:數據線/第一金屬導線 22: data line/first metal wire

23:外部電源 23: External power supply

Claims (10)

一種使用一具有一第一與一第二電壓感測裝置之檢測設備以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括： A method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires using a detection device having a first and a second voltage sensing device includes: 自各該第二金屬導線的一端供應一第一電壓，且使各該第二金屬導線的另一端接地； Supply a first voltage from one end of each of the second metal wires, and ground the other end of each of the second metal wires; 使該第一與該第二電壓感測裝置彼此實質平行地沿垂直於該複數個第一金屬導線的一方向移動；以及 Moving the first and second voltage sensing devices substantially parallel to each other in a direction perpendicular to the plurality of first metal wires; and 當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號間的一第一兩電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第一金屬導線的至少其中之一與該複數個第二金屬導線間具有至少一短路。 When the difference between a first voltage signal and a second voltage signal sensed by the first and second voltage sensing devices is not zero, it is determined that they are located in the first voltage signal. And there is at least one short circuit between at least one of two adjacent first metal wires under the second voltage sensing device and the plurality of second metal wires. 如申請專利範圍第1項所述之方法，其中該檢測設備更包括一可移動之橫樑，其中該第一與該第二電壓感測裝置設置於該橫樑上，藉由該橫樑之移動以檢測該玻璃基板，該第一電壓感測裝置與該第二電壓感測裝置實質平行於各該第一金屬導線，以偵測各該第一金屬導線是否因該至少一短路而產生一電流並因而使該第一或該第二電壓感測裝置分別感測到該第一電壓訊號或該第二電壓訊號。 According to the method described in claim 1, wherein the detection device further includes a movable beam, wherein the first and the second voltage sensing devices are arranged on the beam, and the movement of the beam is used to detect The glass substrate, the first voltage sensing device, and the second voltage sensing device are substantially parallel to each of the first metal wires to detect whether each of the first metal wires generates a current due to the at least one short circuit and thus The first or the second voltage sensing device respectively senses the first voltage signal or the second voltage signal. 如申請專利範圍第2項所述之方法，其中當該第一兩電壓訊號之差不為零時，則該兩相鄰第一金屬導線的至少其 中之一與該複數個第二金屬導線的至少其中之一間具有該至少一短路，且當該第一及該第二電壓感測裝置所分別感測到的該第一電壓訊號與該第二電壓訊號間的該第一兩電壓訊號之差不為零時，更包括下列步驟： For the method described in item 2 of the scope of patent application, when the difference between the first two voltage signals is not zero, at least one of the two adjacent first metal wires There is the at least one short circuit between one of the second metal wires and at least one of the plurality of second metal wires, and when the first voltage signal and the first voltage signal sensed by the first and the second voltage sensing device and the second voltage sensing device are respectively sensed When the difference between the first two voltage signals between the two voltage signals is not zero, the following steps are further included: 自各該第一金屬導線的一端供應一第二電壓，且使各該第一金屬導線的另一端接地； Supplying a second voltage from one end of each of the first metal wires, and grounding the other end of each of the first metal wires; 使該第一與該第二電壓感測裝置彼此實質平行地沿垂直於該複數個第二金屬導線的一方向移動；以及 Moving the first and second voltage sensing devices substantially parallel to each other in a direction perpendicular to the plurality of second metal wires; and 當該第一及該第二電壓感測裝置所分別感測到的一第三電壓訊號與一第四電壓訊號間之一第二兩電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第二金屬導線的至少其中之一具有該至少一短路。 When the difference between a third voltage signal and a fourth voltage signal sensed by the first and second voltage sensing devices is not zero, it is determined that they are located in the first voltage signal. And at least one of two adjacent second metal wires under the second voltage sensing device has the at least one short circuit. 如申請專利範圍第3項所述之方法，其中該第一與該第二電壓感測裝置設置於該玻璃基板上方，且該第一與該第二電壓感測裝置與該玻璃基板間具有一間距，當該第一與該第二電壓感測裝置分別位於一第N+1個與一第N個第一金屬導線上方，且該第一兩電壓訊號之差等於該第N+1個第一金屬導線的該第一電壓訊號的值減去該第N個第一金屬導線的該第二電壓訊號的值，且為一正值，而當該第一與該第二電壓感測裝置分別移動至一第N+2個與該第N+1個第一金屬導線上方，且該第一兩電壓訊號之差 等於該第N+2個第一金屬導線的該第一電壓訊號的值減去該第N+1個第一金屬導線的該第二電壓訊號的值，且為一負值，其中N為一正整數時，則判斷該第N+1個第一金屬導線具有該至少一短路。 The method according to item 3 of the scope of patent application, wherein the first and second voltage sensing devices are disposed above the glass substrate, and there is a gap between the first and second voltage sensing devices and the glass substrate. When the first and second voltage sensing devices are respectively located above an N+1th and an Nth first metal wire, and the difference between the first two voltage signals is equal to the N+1th The value of the first voltage signal of a metal wire minus the value of the second voltage signal of the Nth first metal wire is a positive value, and when the first and second voltage sensing devices are respectively Move to above an N+2th and N+1th first metal wire, and the difference between the first two voltage signals It is equal to the value of the first voltage signal of the N+2th first metal wire minus the value of the second voltage signal of the N+1th first metal wire, and is a negative value, where N is one When it is a positive integer, it is determined that the (N+1)th first metal wire has the at least one short circuit. 如申請專利範圍第4項所述之方法，其中當該第一與該第二電壓感測裝置分別位於一第M個與一第M+1個第二金屬導線上方，且該第二兩電壓訊號之差等於該第M+1個第二金屬導線的該第四電壓訊號的值減去該第M個第二金屬導線的該第三電壓訊號的值，且為一正值，而當該第一與該第二電壓感測裝置分別移動至該第M+1個與一第M+2個第二金屬導線上方，且該第二兩電壓訊號之差等於該第M+2個第二金屬導線的該第四電壓訊號的值減去該第M+1個第二金屬導線的該第三電壓訊號的值，且為一負值，其中M為一正整數時，則判斷該第M+1個第二金屬導線具有該至少一短路，而該第一與該第二電壓是由一外部電源所提供，其中各該第一金屬導線與各該第二金屬導線分別是一數據線和一閘極線，或是一數據線和一共源極線，或是一共源極線和一閘極線。 The method described in item 4 of the scope of patent application, wherein when the first and the second voltage sensing devices are respectively located above an M-th and an M+1-th second metal wire, and the second two voltages The signal difference is equal to the value of the fourth voltage signal of the M+1 second metal wire minus the value of the third voltage signal of the M second metal wire, and is a positive value, and when the The first and the second voltage sensing devices are moved above the M+1th and M+2th second metal wires respectively, and the difference between the second two voltage signals is equal to the M+2th second metal wire The value of the fourth voltage signal of the metal wire is subtracted from the value of the third voltage signal of the M+1 second metal wire, and is a negative value. When M is a positive integer, the M-th is determined +1 second metal wire has the at least one short circuit, and the first and the second voltage are provided by an external power source, wherein each of the first metal wire and each of the second metal wires is a data line and A gate line is either a data line and a common source line, or a common source line and a gate line. 一種使用一具有一第一與一第二電壓感測裝置之檢測設備以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括： A method for detecting a glass substrate with a plurality of first metal wires and a plurality of second metal wires using a detection device having a first and a second voltage sensing device includes: 自各該第一金屬導線的一端供應一第一電壓，且使各 該第一金屬導線的另一端接地； A first voltage is supplied from one end of each of the first metal wires, and each The other end of the first metal wire is grounded; 使該第一與該第二電壓感測裝置彼此實質平行地沿垂直於該複數個第二金屬導線的一方向移動；以及 Moving the first and second voltage sensing devices substantially parallel to each other in a direction perpendicular to the plurality of second metal wires; and 當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號間一第一兩電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線間具有至少一短路。 When the difference between a first voltage signal and a second voltage signal sensed by the first and second voltage sensing devices is not zero, it is determined to be located in the first and second voltage signals, respectively There is at least one short circuit between at least one of two adjacent second metal wires under the second voltage sensing device and the plurality of first metal wires. 如申請專利範圍第6項所述之方法，其中當該第一兩電壓訊號之差不為零時，則該兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線的至少其中之一間具有該至少一短路，且當該第一及該第二電壓感測裝置所分別感測到的該第一電壓訊號與該第二電壓訊號間的該第一兩電壓訊號之差不為零時，更包括下列步驟： For example, the method described in item 6 of the scope of patent application, wherein when the difference between the first and the second voltage signals is not zero, at least one of the two adjacent second metal wires and the plurality of first metal wires At least one of them has the at least one short circuit, and when the first voltage signal and the second voltage signal sensed by the first and the second voltage sensing device are respectively the first two voltage signals When the difference is not zero, the following steps are included: 自各該第二金屬導線的一端供應一第二電壓，且使各該第二金屬導線的另一端接地； Supplying a second voltage from one end of each second metal wire, and grounding the other end of each second metal wire; 使該第一與該第二電壓感測裝置彼此實質平行地沿垂直於該複數個第一金屬導線的一方向移動；以及 Moving the first and second voltage sensing devices substantially parallel to each other in a direction perpendicular to the plurality of first metal wires; and 當該第一及該第二電壓感測裝置所分別感測到的一第三電壓訊號與一第四電壓訊號間之一第二兩電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第一金屬導線的至少其中之一具有該至少 一短路，其中各該第一金屬導線與各該第二金屬導線分別是一數據線和一閘極線，或是一數據線和一共源極線，或是一共源極線和一閘極線。 When the difference between a third voltage signal and a fourth voltage signal sensed by the first and second voltage sensing devices is not zero, it is determined that they are located in the first voltage signal. And at least one of the two adjacent first metal wires under the second voltage sensing device has the at least A short circuit, in which each of the first metal wires and each of the second metal wires is a data line and a gate line, or a data line and a common source line, or a common source line and a gate line . 一種使用一第一與一第二電壓感測裝置以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括： A method of using a first and a second voltage sensing device to detect a glass substrate with a plurality of first metal wires and a plurality of second metal wires includes: 自各該第二金屬導線或各該第一金屬導線的一端供應一第一電壓； Supplying a first voltage from each of the second metal wires or one end of each of the first metal wires; 使該第一與該第二電壓感測裝置相平行，且沿垂直於未供電的該複數個第一金屬導線或未供電的該複數個第二金屬導線的一方向移動；以及 Making the first and second voltage sensing devices parallel and moving in a direction perpendicular to the unpowered first metal wires or the unpowered second metal wires; and 當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第一金屬導線或兩相鄰第二金屬導線的至少其中之一和與該兩相鄰第一金屬導線或該兩相鄰第二金屬導線相交的該複數個第二金屬導線至少其中之一或該複數個第一金屬導線至少其中之一之間具有至少一短路。 When the difference between a first voltage signal and a second voltage signal sensed by the first and the second voltage sensing device is not zero, it is determined that the first and the second voltage sensing device are located respectively At least one of the lower two adjacent first metal wires or the two adjacent second metal wires and the plurality of second metal wires intersecting the two adjacent first metal wires or the two adjacent second metal wires There is at least one short circuit between at least one of them or at least one of the plurality of first metal wires. 如申請專利範圍第8項所述之方法，更包括提供一檢測設備，其中該檢測設備包括該第一及該第二電壓感測裝置與一可移動之橫樑，該第一及該第二電壓感測裝置設置於該橫樑上，且藉由該橫樑之移動以檢測該玻璃基板，其中 各該第一金屬導線與各該第二金屬導線分別是一數據線和一閘極線，或是一數據線和一共源極線，或是一共源極線和一閘極線。 For example, the method described in item 8 of the scope of patent application further includes providing a detection device, wherein the detection device includes the first and the second voltage sensing device and a movable beam, the first and the second voltage The sensing device is arranged on the beam, and the glass substrate is detected by the movement of the beam, wherein Each of the first metal wires and each of the second metal wires is a data line and a gate line, or a data line and a common source line, or a common source line and a gate line. 一種使用一第一與一第二電壓感測裝置以檢測一具有複數個第一金屬導線與複數個第二金屬導線之玻璃基板的方法，包括： A method of using a first and a second voltage sensing device to detect a glass substrate with a plurality of first metal wires and a plurality of second metal wires includes: 自各該第一金屬導線的一端供應一第一電壓； Supplying a first voltage from one end of each of the first metal wires; 使該第一與該第二電壓感測裝置相平行且沿垂直於該複數個第二金屬導線的一方向移動；以及 Moving the first and second voltage sensing devices in parallel and in a direction perpendicular to the plurality of second metal wires; and 當該第一及該第二電壓感測裝置所分別感測到的一第一電壓訊號與一第二電壓訊號之差不為零時，判斷分別位於該第一及該第二電壓感測裝置下方的兩相鄰第二金屬導線的至少其中之一與該複數個第一金屬導線間具有至少一短路。 When the difference between a first voltage signal and a second voltage signal sensed by the first and the second voltage sensing device is not zero, it is determined that the first and the second voltage sensing device are located respectively There is at least one short circuit between at least one of the two adjacent second metal wires and the plurality of first metal wires.
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