TW202138828A - Socket for inspection of semiconductor devices - Google Patents

Socket for inspection of semiconductor devices Download PDF

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Publication number
TW202138828A
TW202138828A TW110125105A TW110125105A TW202138828A TW 202138828 A TW202138828 A TW 202138828A TW 110125105 A TW110125105 A TW 110125105A TW 110125105 A TW110125105 A TW 110125105A TW 202138828 A TW202138828 A TW 202138828A
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Taiwan
Prior art keywords
contact pin
socket
base
semiconductor package
contact
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TW110125105A
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Chinese (zh)
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TWI766753B (en
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朴官基
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南韓商亞洲山一電機股份有限公司
日商山一電機股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889Interfaces, e.g. between probe and tester
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The present invention relates to a socket for testing semiconductor devices, the socket comprising: a base disposed below the socket; a contact pin which is disposed on the base and is shifted in the longitudinal direction so as to contact a semiconductor package located there above; a positioning base, located above the socket, for controlling the position of the contact pin; a guide for housing the semiconductor package above the positioning base; a cover which is located above the socket and which can move up and down; and a latch assembly connected to the cover which pivotally moves up and down therein, wherein the positioning base moves the contact pin in the transverse direction such that the upper portion of the contact pin can move to a desired position.

Description

半導體裝置檢查用插座Socket for semiconductor device inspection

本發明是有關半導體裝置檢查用插座裝置(以下簡稱‘插座’),特別是有關在bow-shape形狀的LGA(Land Grid Array)插座及BGA(Ball Grid Array)插座中不使用隔板(separator),藉由具體實現將接觸銷直接插入至插座基座的方式,比使用隔板的以往的插座製作方式更在插座製作費用中帶來劃時代的降低效果,不使用隔板的既存的插座製作方式可適用於更窄的窄間距,藉此可將能適用減少插座製作費用的間距範圍全部適用於窄間距及寬間距之半導體裝置檢查用插座。The present invention relates to a socket device for semiconductor device inspection (hereinafter referred to as a "socket"), and particularly relates to a bow-shape LGA (Land Grid Array) socket and BGA (Ball Grid Array) socket without using a separator , By specifically realizing the method of directly inserting the contact pin into the socket base, it brings an epoch-making effect in reducing the production cost of the socket than the conventional socket manufacturing method that uses a partition plate, and the existing socket manufacturing method that does not use a partition plate It can be applied to a narrower and narrower pitch, so that the range of pitches that can be applied to reduce the cost of socket production can be applied to both narrow and wide pitch semiconductor device inspection sockets.

一般,半導體裝置是電子電路會被高密度集成於電路基板上而被製作者,在半導體裝置被製造後組裝成製品前,經過檢查半導體封裝是否正確動作的檢查過程。 如此的檢查作業是將半導體封裝投入至檢查用插座裝置來實施,在插座裝置是設有與半導體封裝接觸的多數的觸點,具備半導體封裝端子及接觸銷的觸點接觸而形成通電,利用檢查裝置來檢查半導體封裝。 被使用於檢查的插座的任務是構成半導體封裝的外部端子與系統間的電性連結通路,為了一次檢查複數的半導體封裝,而在主基板將一定間隔、一定數量配列安裝成矩陣狀,予以投入檢查系統來選別半導體封裝的不良與否之裝置。 一旦按下檢查用插座的蓋,則鎖扣(latch)會被開放,此時半導體封裝會被垂直地投入至插座內部,之後一邊蓋會上昇,一邊鎖扣會按壓半導體封裝上面部,而使封裝球與接觸器間的接觸荷重產生,使電性連結來進行檢查。 半導體封裝的按壓源是藉由蓋彈簧的彈性力來產生,為了上述封裝球與接觸器間的接觸及接收所伴隨的電氣訊號的導線任務,經由接觸銷來成立。 半導體封裝的發電過程上,以往是間距為1.0mm、0.8mm等間距寬的封裝(寬間距)形成主流,但現在因為半導體封裝的小型化薄膜化被加速化,半導體封裝的間距也比上述以往的間距更窄,為微細化(窄間距)的狀態,當間距為一定尺寸以上時(接觸銷的折彎狀態比間距更寬時),在將接觸銷插入至插座基座時,會與相鄰的接觸銷干擾或發生衝突,因此帶來不良或發生不能自動化插入的狀態的問題。 因而,在一定尺寸(例如0.8mm)以下的間距是無法利用自動化裝置,所以也有一邊甘受若干或某程度的衝突,一邊以手來將一個一個接觸銷插入至插座基座的情況。 又,以往寬間距或窄間距除了藉由自動或人手的插入來對插座基座直接插入接觸銷的情況以外,在使用隔板的情況時,是採用首先將接觸銷插入至隔板後,將被插入的複數的隔板安裝於插座的基座而組裝的方式。 圖14~圖16是在伴隨以往技術的基座(17)中插入接觸銷(11)的方法,如在圖14的A及B所示般,在基座(17)中直接插入的方式時,在接觸銷(11)插入時與鄰接銷的衝突及干擾量大,帶來接觸銷(11)的變形時,在間距大的情況(寬間距)是可自動化或手插,但在間距比接觸銷彈簧(12)的間隙距離更小的情況(窄間距)是自動化或直接插入的方式會發生問題。 亦即,以往的方式之中,為了解決在圖14的A所示的窄間距的衝突的問題點,當間距窄時,在基座孔中直接插入接觸銷(11)的方式是不可能,因此作為對於此的對策,使用在圖15所示的隔板(15)的方式會被使用。 又,如圖14的B所示般,即使在以往中,在接觸銷(11)的插入時,若間距為不受與接觸銷(11)的干擾影響,或干擾為些微的程度的寬間距,則在基座孔中插入接觸銷(11)不會有大的問題。但,隨著半導體封裝的發展,且依使用者的需要,慢慢地間距會被窄間距化,用以對應於窄間距的各式各樣的以往的方式成立。 此情況,如圖15及圖16所示般,在隔板(15)中插入接觸銷(11)後,將被插入接觸銷(11)的複數片的隔板(15)層疊而組裝於基座(17)的方式會被使用,現在也在窄間距是以此方式製作插座。 雖可以如此的方式來對應於窄間距,但藉由半導體封裝(50)的球矩陣來進入一個插座的隔板數會多數地增加,作業工程也隨之一起增加,成為隨製造費用上昇之原價上昇的要因,不過是變成顧客的負擔之構造。 亦即,以往在窄間距使用隔板(15)的方式時,在一個的檢查插座需要數十片的隔板(15),因此有無法對應於對製造原價敏感的半導體製造社的插座單價降低的要求之極限點,且在插座製造公司間的價格競爭力的面也成為大的負擔之實情。 基於如此的理由,在半導體裝置檢查用插座製作中藉由減少適用零件數來降低製造單價而用以確保競爭力的努力為切實的狀況。 並且,現在半導體封裝的種類為移動裝置等的微細窄間距製品群,如此的製品群的需要是持續性地增加的狀態,作為活用以往的隔板的插座製造方式是無法對應於對零件價格的降低之要求,在如此的插座基座中直接插入接觸銷的以往的製造方式是對於微細窄間距的對應本身有不可能的問題點。Generally, semiconductor devices are manufactured by high-density integration of electronic circuits on a circuit board. After the semiconductor device is manufactured, the semiconductor package undergoes an inspection process to check whether the semiconductor package operates correctly before being assembled into a product. Such inspection work is carried out by putting the semiconductor package into the inspection socket device. The socket device is provided with a large number of contacts that contact the semiconductor package, and the contacts of the semiconductor package terminals and contact pins are in contact with each other to form electrical current. Device to inspect semiconductor packages. The task of the socket used for inspection is to form an electrical connection path between the external terminals of the semiconductor package and the system. In order to inspect multiple semiconductor packages at a time, a certain interval and a certain number of arrays are mounted in a matrix on the main substrate and put into use. Check the system to identify the defective device of the semiconductor package. Once the cover of the inspection socket is pressed, the latch will be opened. At this time, the semiconductor package will be vertically inserted into the socket. Then, while the cover will rise, the latch will press the upper surface of the semiconductor package to make The contact load between the package ball and the contactor is generated, and the electrical connection is performed for inspection. The pressing source of the semiconductor package is generated by the elastic force of the cover spring, and the wire task for the contact between the package ball and the contactor and the reception of the accompanying electrical signal is established by the contact pin. In the power generation process of semiconductor packages, packages with equal pitches of 1.0mm and 0.8mm (wide pitch) have been the mainstream in the past. However, due to the acceleration of the miniaturization and thinning of semiconductor packages, the pitch of semiconductor packages is also higher than the previous ones. When the pitch is more than a certain size (the bending state of the contact pin is wider than the pitch), when the contact pin is inserted into the socket base, it will be Neighboring contact pins interfere or conflict, which causes problems such as defects or a state that cannot be automatically inserted. Therefore, an automated device cannot be used for a pitch of a certain size (for example, 0.8 mm) or less. Therefore, there are cases where one by one contact pins are inserted into the socket base by hand while accepting some or a certain degree of conflict. In addition, in the past, wide or narrow pitches were used to directly insert contact pins into the socket base by automatic or manual insertion. In the case of spacers, the contact pins were first inserted into the spacer and then A method in which the inserted spacers are mounted on the base of the socket and assembled. Figures 14 to 16 are methods of inserting the contact pin (11) into the base (17) of the prior art, as shown in A and B of Figure 14, when it is directly inserted into the base (17) , When the contact pin (11) is inserted, the amount of conflict and interference with the adjacent pin is large, and the deformation of the contact pin (11) is caused. In the case of large spacing (wide spacing), it can be automated or manually inserted, but in the spacing ratio When the gap distance of the contact pin spring (12) is smaller (narrow pitch), the automatic or direct insertion method may cause problems. That is, in the conventional method, in order to solve the problem of the conflict of the narrow pitch shown in A of FIG. 14, when the pitch is narrow, it is impossible to directly insert the contact pin (11) into the base hole. Therefore, as a countermeasure against this, the method of using the spacer (15) shown in FIG. 15 will be used. Also, as shown in B of Fig. 14, even in the past, when the contact pin (11) is inserted, if the pitch is not affected by interference with the contact pin (11), or the interference is a slightly wide pitch , There will be no major problem in inserting the contact pin (11) into the base hole. However, with the development of semiconductor packaging, and according to the needs of users, the pitch will gradually be narrowed, and various conventional methods corresponding to the narrow pitch are established. In this case, as shown in Figures 15 and 16, after inserting the contact pin (11) in the partition (15), the partitions (15) inserted into the contact pins (11) are stacked and assembled on the base The socket (17) method will be used, and now the socket is made in this way with a narrow pitch. Although it is possible to correspond to the narrow pitch in this way, the number of spacers that enter a socket through the ball matrix of the semiconductor package (50) will mostly increase, and the work process will also increase, becoming the original price as the manufacturing cost rises. The main reason for the rise is nothing but a structure that becomes a burden on customers. That is, in the conventional method of using spacers (15) in a narrow pitch, tens of spacers (15) are required for one inspection socket, so it cannot correspond to the reduction in unit price of sockets of semiconductor manufacturing companies that are sensitive to manufacturing costs. The limit point of the requirements of the socket manufacturer, and the price competitiveness of socket manufacturing companies has also become a big burden. For this reason, in the manufacture of sockets for semiconductor device inspection, efforts to ensure competitiveness by reducing the number of applicable parts and reducing the manufacturing unit price are a real situation. In addition, the current type of semiconductor package is a group of fine and narrow pitch products such as mobile devices. The demand for such a group of products is continuously increasing. As a socket manufacturing method that utilizes conventional spacers, it cannot correspond to the price of parts. To reduce the requirements, the conventional manufacturing method of directly inserting contact pins into such a socket base has a problem that it is impossible to respond to fine and narrow pitches.

[技術的課題] 本發明的目的是為了解決上述般的問題點,而提供一種具備即使是微細窄間距也不使用以往般的隔板,可直接將接觸銷插入至插座基座而安裝的插座,藉此可形成更低的製造原價而帶來微細窄間距的檢查用插座的生產性提升及原價節減的效果之半導體封裝的檢查用插座裝置。 [技術性的解決方法] 本發明是為了達成上述目的,而在半導體裝置檢查用插座中,具備: 基座,其係位於上述插座的下方; 接觸銷,其係被安裝於上述基座的內側所設的基座孔,在縱方向變位,接觸於位於上方的半導體封裝;及 位置台,其係位於上述插座的上方,限制上述接觸銷的上部的位置, 上述位置台係使上述接觸銷移動於橫方向,可將接觸銷上部移動至作為目的的位置。 又,上述構成中,位置台使上述接觸銷上部移動後,上述接觸銷上部的位置係位於上述接觸銷的下部位置的一直線(C)上或接近。 又,上述構成中, 上述接觸銷係具有可在縱方向變位的1個以上被彎曲的接觸銷彈簧, 上述位置台移動上述接觸銷上部之前的接觸銷彈簧形狀,為在將上述接觸銷安裝插入至上述基座孔的過程,無與鄰接接觸銷的干擾,或不妨礙安裝的程度, 上述位置台使上述接觸銷上部移動後,上述接觸銷彈簧形狀,為形成在所欲將上述接觸銷安裝至上述基座孔的過程,發生鄰接接觸銷彼此間干擾而對組裝造成妨礙的形狀。 又,上述構成中,在上述接觸銷的下部側具有可由上方來按壓的按壓部。 又,上述構成中,在上述位置台的上方具備收納上述半導體封裝的半導體封裝搭載部, 上述半導體封裝從上方被按壓時,上述半導體封裝搭載部係與半導體封裝一起下降,上述半導體封裝係一邊被引導至上述半導體封裝搭載部,一邊接觸於上述位置台的上面而可使半導體封裝與半導體封裝搭載部的下降停止於作為目的之位置。 又,上述構成中,上述半導體封裝下降而上述半導體封裝與上述接觸銷的上部接觸時,接觸銷係藉由荷重(stroke)來從上述位置台的一方傾斜至另一方,並且,上述接觸結束後被復原至最初位置,藉此在位置台是幾乎無垂直荷重,因此摩擦力也消失,接觸銷的推斥力會被完整地被傳達至封裝球。 又,上述構成中,具備:移動至以位置台作為目的的位置時,在最終目的位置固定上述位置台的鉤,接觸銷係被配置成為配合上述半導體封裝的電極配列。 又,本發明是在半導體裝置檢查用插座中,具備: 基座,其係位於上述插座的下方; 接觸銷,其係被安裝於上述基座的內側所設的基座孔,在縱方向變位,接觸於位於上方的半導體封裝;及 位置台,其係位於上述插座的上方,限制上述接觸銷的上部的位置, 具備: 半導體封裝搭載部,其係於上述位置台的上方收納上述半導體封裝; 蓋,其係位於上述插座的上方,可移動於上下;及 鎖扣組件,其係被連結至上述蓋,上述蓋係上下移動而旋轉, 上述位置台係具備使上述接觸銷移動於橫方向可將接觸銷上部移動至作為目的的位置之構成。 [發明的效果] 本發明是藉由使接觸銷直接插入至插座基座,與使用隔板的以往的插座製造方式對比,具有製造單價降低的效果。並且,在不使用隔板的其他的以往的方式中,窄間距的情況,在接觸銷的組裝時發生鄰接銷間的干擾而帶來接觸銷的變形,因此僅間距寬廣的情況可適用,但本發明的情況,即使是窄間距也可藉由在插座基座中直接插入接觸銷,原價節減的同時可構成自動化,對於生產量的提升形成大的效果。 特別是本發明在窄間距也可藉由自動化來插入接觸銷,因此與將接觸銷直接手插於插座基座的方式或使用隔板的工程作比較時,藉由生產性提升且省略隔板,可達成隨插座製造單價的降低之價格競爭力面更優的效果。[Technical issues] The purpose of the present invention is to solve the above-mentioned problems, and to provide a socket that can be installed by directly inserting contact pins into the socket base without using conventional spacers even for fine and narrow pitches, thereby forming The lower manufacturing cost brings the productivity improvement of fine and narrow pitch inspection sockets and the effect of reducing the original price of the semiconductor package inspection socket device. [Technical solution] In order to achieve the above-mentioned object, the present invention includes a socket for semiconductor device inspection: The base, which is located below the socket; A contact pin, which is installed in a base hole provided on the inner side of the base, is displaced in the longitudinal direction, and contacts the semiconductor package located above; and The position table, which is located above the socket, restricts the position of the upper part of the contact pin, The position table system moves the contact pin in the horizontal direction, and can move the upper part of the contact pin to a target position. In the above configuration, after the position table moves the upper part of the contact pin, the position of the upper part of the contact pin is located on or close to the line (C) of the lower position of the contact pin. Also, in the above structure, The contact pin system has one or more bent contact pin springs that can be displaced in the longitudinal direction, and The shape of the contact pin spring before the position table moves the upper part of the contact pin is such that the contact pin is installed and inserted into the base hole without interference with the adjacent contact pin, or does not interfere with the installation, After the position table moves the upper part of the contact pin, the spring shape of the contact pin is formed into a shape that interferes with the adjacent contact pins during the process of installing the contact pin to the base hole and hinders assembly. In addition, in the above configuration, a pressing portion that can be pressed from above is provided on the lower side of the contact pin. In addition, in the above configuration, a semiconductor package mounting portion for accommodating the semiconductor package is provided above the position stage, and When the semiconductor package is pressed from above, the semiconductor package mounting portion is lowered together with the semiconductor package, and the semiconductor package is guided to the semiconductor package mounting portion while contacting the upper surface of the position stage to enable the semiconductor package and the semiconductor The lowering of the package mounting part stops at the target position. In the above configuration, when the semiconductor package is lowered and the semiconductor package is in contact with the upper part of the contact pin, the contact pin is tilted from one side of the position stage to the other by a load (stroke), and after the contact is completed After being restored to the original position, there is almost no vertical load on the position table, so the friction force is also eliminated, and the repulsive force of the contact pin is completely transmitted to the package ball. In addition, the above configuration includes a hook for fixing the position table at the final target position when the position table is moved to the target position, and the contact pin system is arranged to match the electrode arrangement of the semiconductor package. In addition, the present invention is a socket for semiconductor device inspection, which includes: The base, which is located below the socket; A contact pin, which is installed in a base hole provided on the inner side of the base, is displaced in the longitudinal direction, and contacts the semiconductor package located above; and The position table, which is located above the socket, restricts the position of the upper part of the contact pin, have: A semiconductor package mounting portion, which accommodates the semiconductor package above the position table; The cover is located above the socket and can be moved up and down; and The lock assembly is connected to the cover, and the cover is moved up and down to rotate, The position table is provided with a configuration in which the upper part of the contact pin can be moved to a target position by moving the contact pin in a horizontal direction. [Effects of the invention] In the present invention, by directly inserting the contact pin into the socket base, compared with the conventional socket manufacturing method using a partition, it has the effect of reducing the manufacturing unit cost. In addition, in other conventional methods that do not use spacers, in the case of a narrow pitch, interference between adjacent pins occurs during the assembly of the contact pins to cause deformation of the contact pins, so it is applicable only when the pitch is wide, but In the case of the present invention, even with a narrow pitch, the contact pins can be directly inserted into the socket base, and the original price can be reduced while being automated, which has a great effect on the increase in production. In particular, the present invention can also insert the contact pins by automation even in narrow pitches. Therefore, when compared with the method of directly inserting the contact pins into the socket base by hand or the process of using partitions, the productivity is improved and the partitions are omitted. , It can achieve the effect of better price competitiveness with the decrease of the socket manufacturing unit price.

參照以下的圖面來詳細說明用以實施發明的具體的內容。 本發明是可加諸多樣的變更,可具有複數的實施例時,所欲將特定實施例等顯示於圖面來對詳細的說明進行詳細地說明。但,此非所欲對於特定本發明的實施形態限定者,必須理解成包含本發明的思想及技術範圍所含的全部的變更、均等物乃至代替物。 [實施例] 以下,參考本案發明的圖1~圖13來說明本案發明的實施例。 圖1是本發明的半導體裝置檢查用插座的立體圖,顯示一般性的半導體裝置檢查用插座(10),具備: 基座(20),其係位於插座(10)的下段部,具有形成四角形狀的4個的支撐腳,夾著桿的下段部被固定的軸;及 蓋(30),其係位於上述基座(20)的上方,藉由4個的蓋彈簧來彈性按壓, 在上述蓋(30)的內部是具備:分別以軸來固定於上述基座(20)及上述蓋(30)而旋轉的鎖扣組件(latch assembly)(40),及被投入半導體封裝(50)的半導體封裝搭載部(60)。一旦按下上述蓋(30),則一邊蓋彈簧會被按下,一邊上述蓋(30)會降至下方,一旦接觸於上述基座(20),則鎖扣組件(40)會開啟。在如此鎖扣組件(40)開啟的狀態下,將半導體封裝(50)垂直落下(投入)至半導體封裝搭載部(60),一旦放置上述蓋(30),則鎖扣組件(40)會按壓半導體封裝(50)而位於半導體封裝(50)的下面的球(55)與上述插座(10)的接觸銷上部(72;參照圖13)會接觸而電性連接後進行各種檢查。 設有如上述般接觸銷上部(72)接觸於封裝下部的檢查用墊的球(55)時,在上述位置台(80)的上方收納上述半導體封裝(50)的半導體封裝搭載部(60),上述半導體封裝(50)在上方被按壓時,上述半導體封裝搭載部會與半導體封裝(50)一起下降,上述半導體封裝(50)是設置停止位置面,該停止位置面是一邊被引導至上述半導體封裝搭載部,一邊在位置台(80;參照圖13)上面接觸於接觸銷上部(72)而使半導體封裝與半導體封裝搭載部的下降停止於一定的(目的)位置。 上述停止位置面是意指半導體封裝搭載部(60)與半導體封裝(50)一起下降時,半導體封裝搭載部的下面的封裝球(55)與位置台上面亦即接觸銷上部(72)抵接後停止的面,如此的構成是可按照從半導體封裝搭載部的移動開始到停止的上下距離,統一控制接觸銷(70)與封裝球(55)接觸後發生變形的接觸銷(70)的變形量,為了維持最適於接觸銷與封裝球(55)之間的接觸荷重的狀態而設置停止位置面。 藉此,藉由接觸銷(70)接受最適的荷重,防止接觸銷(70)的變形,且當位於半導體封裝下面的封裝球(55)與上述接觸銷上部(72)接觸時,可維持最好的接觸關係,且藉由以接觸銷的變形量能夠形成一定的方式接受目的之荷重,可維持具有均衡的按壓,藉此,可取得檢查用插座的最適的接觸,可防止接觸銷(70)的損傷等的變形。 藉此,使上述半導體封裝搭載部的下降停止於所望之處。 並且,在此若先說明圖13,則如上述圖1所示般,半導體封裝(50)會下降而位於上述半導體封裝(50)下部的半導體封裝球(55)與接觸銷上部(72)接觸時,位於位置台(80)的右側的接觸銷(70)會藉由荷重(stroke)來傾斜至左側,在上述位置台(80)是幾乎無垂直荷重,因此摩擦力也消失,接觸銷(70)的推斥力會被完整地傳達至封裝球(55),並且,被構成為在上述接觸結束後被復原至原來的位置之右側。 同時,上述接觸銷(70)如上述般至可進行檢查用的運動(傾斜後被復原)的位置為止拉或推上述位置台(80)而使位置台移動。 在本實施例是舉使接觸銷(70)的最初的原來位置位於右側的例子,但亦可為相反的位於左側來接觸時在右側,接觸結束而封裝球(55)從接觸銷上部(72)離脱時,被復原至原來位置之左側的構成。 並且,萬一如上述般在目的之荷重以下或以上的狀態下,下降未被停止時,亦有顯現接觸不良或接觸銷的變形量不一定的情形,因此亦有對插座的品質造成影響或影響到接觸銷的耐久力的情形。 而且,上述停止位置面的構成,蓋彈力的情況,因為製作批量及彈力本身發生某程度的偏差,在接觸銷接觸於封裝球的接觸荷重也發生偏差,所以若以蓋彈力(鎖扣的上方按壓力)>每1個銷力×適用銷數來表示,藉由將上方按壓力設定成比按壓封裝的按壓力更大,形成可經常停止於同位置的構造,則接觸銷的變形量會經常形成一定,因此銷力也經常形成一定,插座性能具效果。 圖2是安裝有用以和半導體封裝(50)的接觸的圖3所示的接觸銷(70)之基座(20)的立體圖,在位於基座(20)的一側下部的基座孔(22)組裝有接觸銷(70)者,在被一定矩陣形態羅列於基座(20)內部的多數的基座孔(22)中如圖3所示般安裝接觸銷(70)。 亦即,如圖3所示般,在被設於基座(20)的內側的基座孔中依序插入接觸銷(70)而安裝,此時接觸銷(70)的插入順序是接觸銷(70)的插入時接觸銷(70)的接觸彈簧(71)不會引起與接觸銷上部(72)干擾,當干擾發生時,在有不影響組裝程度的微量的鄰接接觸銷(70)間的干擾的狀態下,依序被插入至基座(20)而安裝,或複數同時被安裝。上述接觸銷(70)被安裝於基座孔(22),亦有藉由自動插入或手動插入來進行安裝。 又,本發明的接觸銷(70)的上部的接觸銷上部(72)是比接觸銷下部(73)的一直線(垂直線)更設於外側(在相鄰的接觸銷(70)方向),且接觸銷上部是傾斜。上述傾斜是以接觸銷下部(73)的一直線(C)為基準,在約0.1度~45度的範圍內傾斜,可依將接觸銷(70)安裝於基座孔時的狀況等情況,在45度以上90度以下的範圍內調節傾斜。 或,除了上述接觸銷上部(72)設於比接觸銷下部(73)的一直線(C)更外側的構成以外,亦可為接觸銷上部(72)不傾斜的構成,與接觸銷下部(73)的一直線不一致,但形成與分離一定距離的外側的一直線互相平行的垂直狀態的構成。 並且,上述接觸銷(70)的接觸彈簧(71)是具有1個以上的彎曲部,在本實施例是具備3個或4個的彎曲部。 圖4是表示在本案發明所使用的複數的形態的接觸銷(70)的剖面圖,可形成上述圖面以外的複數的彎曲形狀或形態,彎曲部亦可為3個以下或5個以上。並且,在上述接觸銷是在接觸銷下部(73)側,亦即在上述下部的上側設置按壓部(74)。上述按壓部(74)是在基座孔(22)安裝上述接觸銷(70)時,進行用以使從上方等按壓上述按壓部(74)而接觸銷(70)的變形不會發生的任務。 圖5及圖6是表示分別顯示如圖3接觸銷(70)被安裝於位在基座(20)的內側下部的基座孔(22)之複數的接觸銷(70)的狀態者,在上述圖5及圖6,接觸銷(70)的排列不同是依照檢查用半導體封裝而多種多樣地被適用,在本實施例是以圖6的排列狀態為例進行說明。 圖7是如在上述圖6般,複數的接觸銷(70)在內部配置空間而被排列安裝成正方形狀的狀態,為將上述接觸銷上部(72)貫通被設於位置台(80)的多數的孔(以下稱為位置台孔(82))來安裝位置台(80)而覆蓋的狀態,本案的接觸銷上部(72)是如在圖3所示般以接觸銷下部的一直線(C)為基準看時,顯示傾斜於一方的狀態,在覆蓋上述位置台孔(82)的狀態也水平看具備多數的位置台孔(82)的位置台(80)時,被露出於位置台孔(82)上的接觸銷上部(72)不是與沿著位置台(80)的水平的線垂直,形成若干傾斜的狀態的構成。 上述接觸銷上部(72)不垂直立起,若干傾斜,是為了在窄間距狀態下順暢地插入至被設在基座(20)的內側下部的基座孔(22),且接觸銷上部(72)的一直線被設在比接觸銷下部(73)的一直線更外側,是為了在基座孔(22)安裝時避免像以往的情況那樣相鄰的接觸銷彼此間的衝突或干擾的構成。 因此,為了使上述傾斜的接觸銷上部(72)與半導體封裝(50)的下部接觸部接觸,而必須垂直地筆直立起,因此需要使圖8所示的位置台(80)在橫方向,亦即在圖面推至左側方向而傾斜的接觸銷上部(72)位於垂直位置。此時,傾斜的接觸銷上部(72)會位於垂直位置,且上述一直線是如圖10所示般在接觸銷上,下部(72,73)是位於一直線(C)上或離一直線上近。 亦即,為了使上述位置台(80)移動而拉或推,藉此一邊被插入至位置台(80)所設的位置台孔(82)的接觸銷上部(72)會藉由接觸彈簧(71)的彈性力來正確垂直地位置,一邊接觸銷上、下部(72,73)會在垂直的狀態下位於一直線上,此時,接觸銷(70)的位置是如圖13所示般抵接於位置台(80)的一方面而位置。 並且,上述接觸銷(70)是被插入至基座時無與鄰接接觸銷的干擾,可無妨礙安裝的程度構成接觸銷上部(72)及接觸彈簧(71)的形狀。 按下上述位置台(80)而接觸銷上部(72)垂直地筆直立起,同時圖9所示的位置台鉤(81)與被設於基座(20)的基座鉤(21)會被結合而固定性地被締結(參照圖11),藉此接觸銷上部(72)是被垂直地固定,對於接觸銷(70)的推斥力也可抵抗而維持固定。 上述位置台(80)使接觸銷上部(72)移動後,上述接觸彈簧(71)的形狀是由在所欲將接觸銷(70)安裝於基座孔(22)的過程發生鄰接接觸銷(70)彼此間干擾而妨礙組裝的形狀所成。 圖9是用以表示位置台鉤(81)未與基座鉤(21)締結的狀態的圖面,如在上述圖7、圖8可知般,顯示被插入至位置台(80)的位置台孔(82)而固定的接觸銷上部(72)傾斜的狀態,且顯示在圖9的左側是位置台鉤(80)與基座鉤(21)未被締結的狀態。 在上述狀態中,若藉由作業者或圖示省略的驅動裝置來使位置台(80)移動至圖面的左側,則如圖10、圖11般在接觸銷上部(72)形成垂直的狀態下,位置台鉤(81)與基座鉤(21)會被締結。 又,圖12是表示使上述圖10及圖11的位置台橫移而位置台鉤(81)與基座鉤(21)會被結合的狀態的立體圖,位於上述半導體封裝的下面的封裝球(55)如以圖13的構成說明般接觸於上述圖12的接觸銷上部(72)而可檢查半導體封裝。 亦即,本案發明是藉由在上述圖1~圖13所示般的構成,不使用以往在窄間距所被使用的隔板(15),即使為窄間距,也可將接觸銷(70)自動安裝於基座(20)的基座孔(22),其次,覆蓋位置台(80),藉由被設在位置台(80)及基座的各自的鉤(81,21)來固定而締結,藉此使傾斜的接觸銷上部(72)垂直正確地位置,而可提供一種在本案作為目的之半導體裝置檢查用插座。 經由上述那樣的一連串的過程,就插座製造公司的立場而言,相較於既存的插座製造方法,可將劃時代的費用減少效果達到極限。 費用減少的效果是依半導體封裝球矩陣而異,但一般在窄間距被多數設用隔板,因此只要隔板不被使用,便可減少其數量的零件價格,所以可謂越是在窄間距,其期待效果越大。 在以上說明的實施例為其一例,只要是在本發明所屬的技術領域具有通常的知識者,便可在不脫離本發明的本質的特性的範圍實施各種的修正及變形。 因此,在本發明所揭示的實施例是為了說明不是用以限定本發明的技術事實者,本發明的技術思想的範圍不是藉由如此的實施例來限定。 本發明的保護範圍並非是必須藉由下記的申請專利範圍來解釋,在與同樣的範圍內的所有技術思想應解釋成被本發明的權利範圍所包含。The specific content for implementing the invention will be described in detail with reference to the following drawings. The present invention can be modified in many ways, and when there may be a plurality of embodiments, it is desired to display specific embodiments and the like on the drawing to explain the detailed description in detail. However, this is not intended to limit the specific embodiment of the present invention, and it must be understood to include all changes, equivalents, and substitutes included in the idea and technical scope of the present invention. [Example] Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 13 of the present invention. Fig. 1 is a perspective view of a semiconductor device inspection socket of the present invention, showing a general semiconductor device inspection socket (10), including: A base (20), which is located at the lower section of the socket (10), has four supporting legs forming a quadrangular shape, and clamps the shaft to which the lower section of the rod is fixed; and The cover (30), which is located above the base (20), is elastically pressed by 4 cover springs, The inside of the cover (30) is provided with: a latch assembly (40) that is fixed to the base (20) and the cover (30) by a shaft and rotates, and is put into a semiconductor package (50). ) The semiconductor package mounting part (60). Once the cover (30) is pressed down, one cover spring will be pressed down, and the cover (30) will be lowered on the other side. Once it contacts the base (20), the lock assembly (40) will be opened. With the lock assembly (40) opened in this way, the semiconductor package (50) is vertically dropped (inserted) onto the semiconductor package mounting portion (60). Once the cover (30) is placed, the lock assembly (40) will be pressed In the semiconductor package (50), the ball (55) located under the semiconductor package (50) is in contact with the upper part (72; refer to FIG. 13) of the contact pin of the socket (10) to be electrically connected, and various inspections are performed. When the ball (55) with the upper part (72) of the contact pin contacting the inspection pad at the lower part of the package as described above is provided, the semiconductor package mounting portion (60) of the semiconductor package (50) is housed above the position table (80), When the semiconductor package (50) is pressed upward, the semiconductor package mounting portion will drop together with the semiconductor package (50). The semiconductor package (50) is provided with a stop position surface, and the stop position surface is guided to the semiconductor The package mounting part is in contact with the upper part of the contact pin (72) on the position table (80; see FIG. 13) to stop the lowering of the semiconductor package and the semiconductor package mounting part at a certain (target) position. The above-mentioned stop position surface means that when the semiconductor package mounting portion (60) and the semiconductor package (50) are lowered together, the package ball (55) under the semiconductor package mounting portion is in contact with the upper surface of the position table, that is, the upper part of the contact pin (72) The rear stop surface is configured to control the deformation of the contact pin (70) that deforms after the contact pin (70) contacts the package ball (55) according to the vertical distance from the start of the movement of the semiconductor package mounting portion to the stop. In order to maintain a state most suitable for the contact load between the contact pin and the package ball (55), a stop position surface is provided. Thereby, the contact pin (70) receives the most suitable load, prevents the deformation of the contact pin (70), and when the package ball (55) located under the semiconductor package is in contact with the upper part of the contact pin (72), it can maintain the most Good contact relationship, and by using the deformation of the contact pin to form a certain way to accept the load of the purpose, it can maintain a balanced pressing, so that the most suitable contact of the inspection socket can be obtained, and the contact pin (70 ) Deformation such as damage. Thereby, the lowering of the semiconductor package mounting portion is stopped at a desired point. Also, if FIG. 13 is described first, as shown in FIG. 1 above, the semiconductor package (50) will be lowered and the semiconductor package ball (55) located at the bottom of the semiconductor package (50) will be in contact with the upper part of the contact pin (72) When the contact pin (70) on the right side of the position table (80) tilts to the left by the load (stroke), there is almost no vertical load at the position table (80), so the friction force disappears, and the contact pin (70) The repulsive force of) is completely transmitted to the package ball (55), and is configured to be restored to the right side of the original position after the above-mentioned contact is completed. At the same time, the contact pin (70) pulls or pushes the position table (80) to move the position table (80) to a position where the movement for inspection (returned after tilting) can be performed as described above. In this embodiment, the initial original position of the contact pin (70) is on the right side, but it can also be located on the left side to make contact on the right side. The contact ends and the package ball (55) moves from the upper part of the contact pin (72). ) When detached, it is restored to the left side of the original position. In addition, if the drop does not stop when the load is below or above the intended load as described above, poor contact may appear or the amount of deformation of the contact pin may not be constant. Therefore, it may also affect the quality of the socket or A situation that affects the durability of the contact pin. Furthermore, in the case of the above-mentioned stop position surface structure, in the case of the cap elasticity, the production batch and the elastic force itself vary to a certain extent, and the contact load of the contact pin on the package ball also varies. Therefore, if the cap elastic force (above the buckle) Pressing force)> force per pin × number of applicable pins. By setting the upper pressing force to be greater than the pressing force of pressing the package, a structure that can always stop at the same position will result in the deformation of the contact pin. It is often formed to be constant, so the pin force is often formed to be constant, and the socket performance has an effect. Fig. 2 is a perspective view of the base (20) mounted with the contact pin (70) shown in Fig. 3 for contact with the semiconductor package (50). The base hole (20) is located on the lower side of the base (20) 22) When the contact pins (70) are assembled, the contact pins (70) are installed in a large number of base holes (22) arranged in a certain matrix form inside the base (20) as shown in FIG. 3. That is, as shown in FIG. 3, the contact pins (70) are sequentially inserted into the base holes provided on the inner side of the base (20) for installation. At this time, the contact pins (70) are inserted in the order of contact pins. When (70) is inserted, the contact spring (71) of the contact pin (70) will not cause interference with the upper part of the contact pin (72). When the interference occurs, there is a small amount of adjacent contact pins (70) that does not affect the degree of assembly. In the state of interference, they are sequentially inserted into the base (20) and installed, or a plurality of them are installed at the same time. The contact pin (70) is installed in the base hole (22), and it is also installed by automatic insertion or manual insertion. Furthermore, the upper contact pin upper part (72) of the upper part of the contact pin (70) of the present invention is arranged outside (in the direction of the adjacent contact pin (70)) than the straight line (vertical line) of the contact pin lower part (73), And the upper part of the contact pin is inclined. The above-mentioned inclination is based on the straight line (C) of the lower part of the contact pin (73), and the inclination is in the range of about 0.1°~45°. Depending on the situation when the contact pin (70) is installed in the base hole, etc., The tilt can be adjusted within the range of 45 degrees or more and 90 degrees or less. Or, in addition to the above-mentioned configuration in which the upper part of the contact pin (72) is provided outside the straight line (C) of the lower part (73) of the contact pin, the upper part (72) of the contact pin may not be inclined, and the lower part of the contact pin (73) The straight lines of) do not match, but form a vertical configuration in which the straight lines on the outside separated by a certain distance are parallel to each other. In addition, the contact spring (71) of the contact pin (70) has one or more bending portions, and in this embodiment, it has three or four bending portions. Fig. 4 is a cross-sectional view showing a plurality of contact pins (70) used in the present invention. A plurality of curved shapes or forms other than the above-mentioned figure can be formed, and the number of curved portions may be 3 or less or 5 or more. In addition, the contact pin is provided on the lower part (73) side of the contact pin, that is, on the upper side of the lower part, a pressing portion (74) is provided. The pressing portion (74) is used to perform a task to prevent the deformation of the contact pin (70) by pressing the pressing portion (74) from above or the like when the contact pin (70) is installed in the base hole (22) . Figures 5 and 6 respectively show the state where the contact pin (70) of Figure 3 is installed in the base hole (22) located at the inner lower part of the base (20), respectively. In the above-mentioned FIGS. 5 and 6, the arrangement of the contact pins (70) is different according to the semiconductor package for inspection, and various applications are applied. In this embodiment, the arrangement state of FIG. 6 is taken as an example for description. Fig. 7 is a state in which a plurality of contact pins (70) are arranged in a square shape with a space arranged inside as in Fig. 6, and the upper part (72) of the contact pin is penetrated and installed on the position table (80). A large number of holes (hereinafter referred to as the position table hole (82)) to install the position table (80) and cover the state, the upper part of the contact pin (72) in this case is as shown in Figure 3 with a straight line (C) below the contact pin When viewed as a reference, the display is tilted to one side. When the position table (80) with many position table holes (82) is viewed horizontally while covering the position table hole (82), it is exposed in the position table hole The upper part (72) of the contact pin on the (82) is not perpendicular to the horizontal line along the position table (80), and has a slightly inclined structure. The above-mentioned upper part of the contact pin (72) does not stand upright, but is slightly inclined in order to smoothly insert into the base hole (22) provided in the lower inner part of the base (20) in a narrow pitch state, and the upper part of the contact pin ( The straight line of 72) is arranged outside the straight line of the lower part (73) of the contact pin to avoid collision or interference between adjacent contact pins when installing the base hole (22). Therefore, in order to make the inclined upper part (72) of the contact pin contact the lower contact part of the semiconductor package (50), it must stand upright vertically. Therefore, the position table (80) shown in FIG. 8 needs to be in the horizontal direction. That is, the upper part (72) of the contact pin, which is inclined to the left side in the drawing, is located in the vertical position. At this time, the inclined upper part (72) of the contact pin will be in a vertical position, and the above-mentioned straight line is on the contact pin as shown in FIG. That is, in order to move the position table (80), the upper part (72) of the contact pin inserted into the position table hole (82) provided by the position table (80) is pulled or pushed by the contact spring ( The elastic force of 71) is used to correctly position vertically. The upper and lower parts (72, 73) of the contact pin will be in a straight line in a vertical state. At this time, the position of the contact pin (70) is as shown in Figure 13. Connected to one side of the position table (80) and position. In addition, the contact pin (70) does not interfere with the adjacent contact pin when inserted into the base, and can form the shape of the contact pin upper portion (72) and the contact spring (71) to the extent that it does not hinder installation. Press the position table (80) and the upper part of the contact pin (72) stands upright, and the position table hook (81) shown in Figure 9 and the base hook (21) set on the base (20) meet The upper part (72) of the contact pin is vertically fixed by being joined and fixedly established (refer to FIG. 11), and the repulsive force of the contact pin (70) can be resisted and the fixation is maintained. After the position table (80) moves the upper part (72) of the contact pin, the shape of the contact spring (71) is determined by the contact pin (70) being attached to the base hole (22) when the contact pin (70) is installed in the base hole (22). 70) Shapes that interfere with each other and hinder assembly. Fig. 9 is a diagram showing a state where the position table hook (81) is not connected with the base hook (21). As can be seen in Figs. 7 and 8 above, it shows the position table inserted into the position table (80) The upper part (72) of the contact pin fixed by the hole (82) is inclined, and shown on the left side of FIG. 9 is a state where the position table hook (80) and the base hook (21) are not connected. In the above state, if the position table (80) is moved to the left side of the figure by the operator or the driving device omitted from the figure, the upper part of the contact pin (72) will be in a vertical state as shown in Fig. 10 and Fig. 11 Next, the position table hook (81) and the base hook (21) will be concluded. 12 is a perspective view showing a state in which the position table shown in FIGS. 10 and 11 is moved horizontally and the position table hook (81) and the base hook (21) will be combined. The package ball ( 55) The semiconductor package can be inspected by contacting the upper part (72) of the contact pin of FIG. 12 as described in the configuration of FIG. 13. In other words, the invention of the present application is based on the above-mentioned structure shown in Figs. It is automatically installed in the base hole (22) of the base (20), and secondly, it covers the position table (80), and is fixed by the hooks (81, 21) provided on the position table (80) and the base. By this, the inclined upper part (72) of the contact pin can be positioned vertically and correctly, and a socket for semiconductor device inspection can be provided for the purpose of this case. Through the above-mentioned series of processes, from the standpoint of the socket manufacturing company, compared with the existing socket manufacturing method, the epoch-making cost reduction effect can reach the limit. The cost reduction effect differs depending on the semiconductor package ball matrix. Generally, spacers are often used in narrow pitches. Therefore, as long as the spacers are not used, the cost of the number of parts can be reduced. Therefore, the narrower the pitch, The greater the expected effect. The embodiment described above is an example, and as long as a person has a general knowledge in the technical field to which the present invention belongs, various corrections and modifications can be implemented without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate technical facts that are not used to limit the present invention, and the scope of the technical idea of the present invention is not limited by such embodiments. The scope of protection of the present invention is not necessarily explained by the scope of patent application described below, and all technical ideas within the same scope should be interpreted as being included in the scope of rights of the present invention.

10:插座 15:隔板 16:隔板縫隙 17,20:基座 21:基座鉤 22:基座孔 30:蓋 40:鎖扣組件 50:半導體封裝 55:半導體封裝球 60:半導體封裝搭載部 11,70:接觸銷 12,71:接觸銷彈簧 13,72:接觸銷上部 14,73:接觸銷下部 74:按壓部 80:位置台 81:位置台鉤 82:位置台孔 C:接觸下部的一直線(中心線)10: Socket 15: partition 16: partition gap 17,20: Pedestal 21: Base hook 22: Base hole 30: cover 40: lock assembly 50: Semiconductor packaging 55: Semiconductor package ball 60: Semiconductor package mounting part 11, 70: contact pin 12, 71: Contact pin spring 13,72: The upper part of the contact pin 14,73: The lower part of the contact pin 74: Pressing part 80: position table 81: position table hook 82: position table hole C: The straight line touching the bottom (center line)

[圖1]是本發明的半導體裝置檢查用插座的立體圖。 [圖2]是安裝有用以和半導體封裝接觸的接觸銷之基座的立體圖。 [圖3]是表示本案發明的接觸銷被安裝於基座的剖面的剖面圖。 [圖4]是表示在本案發明所使用的複數的形態的接觸銷的剖面圖。 [圖5]是表示本案發明的接觸銷被安裝於基座的狀態的立體圖。 [圖6]是表示本案發明的接觸銷被安裝於基座的其他的狀態的立體圖。 [圖7]是表示在上述圖6的狀態下,位置台被覆蓋於上的狀態的立體圖。 [圖8]是表示在上述圖7的接觸銷的剖面的剖面圖。 [圖9]是表示位置台鉤與基座鉤未被締結的狀態的剖面圖。 [圖10]是表示上述圖9的位置台被橫移的狀態的接觸銷的剖面的剖面圖。 [圖11]是表示在圖9的位置台鉤與基座鉤被締結的狀態的剖面圖。 [圖12]是表示上述圖10及圖11的狀態的立體圖。 [圖13]是階段性地表示半導體封裝球與接觸銷的接觸及分離狀態的剖面圖。 [圖14]是以往的窄間距及寬間距的情況,表示接觸銷彼此間的衝突可否的圖。 [圖15]的A是表示以往使用的隔板的圖,B是表示接觸銷被安裝於以往使用的隔板的狀態的圖。 [圖16]是表示在以往多數的隔板安裝接觸銷而層疊的狀態的圖。Fig. 1 is a perspective view of a socket for semiconductor device inspection according to the present invention. [Figure 2] is a perspective view of a base mounted with contact pins for contact with a semiconductor package. Fig. 3 is a cross-sectional view showing a cross section where the contact pin of the present invention is attached to the base. Fig. 4 is a cross-sectional view showing a plurality of contact pins used in the present invention. Fig. 5 is a perspective view showing a state in which the contact pin of the present invention is attached to the base. Fig. 6 is a perspective view showing another state in which the contact pin of the present invention is attached to the base. [Fig. 7] is a perspective view showing a state in which the position table is covered in the state shown in Fig. 6 described above. [Fig. 8] is a cross-sectional view showing the cross section of the contact pin in Fig. 7 described above. Fig. 9 is a cross-sectional view showing a state where the position table hook and the base hook are not connected. Fig. 10 is a cross-sectional view showing a cross section of the contact pin in a state where the position table of Fig. 9 described above is moved laterally. Fig. 11 is a cross-sectional view showing a state where the table hook and the base hook are joined at the position of Fig. 9. [Fig. 12] is a perspective view showing the state of Fig. 10 and Fig. 11 described above. [FIG. 13] is a cross-sectional view showing the contact and separation state of the semiconductor package ball and the contact pin in stages. [Fig. 14] is a view showing whether the contact pins collide with each other in the case of a conventional narrow pitch and a wide pitch. [FIG. 15] A is a diagram showing a conventionally used partition, and B is a diagram showing a state where the contact pin is attached to the conventionally used partition. [Fig. 16] is a diagram showing a state where contact pins are attached to many conventional separators and stacked.

10:插座 10: Socket

20:基座 20: Pedestal

30:蓋 30: cover

40:鎖扣組件 40: lock assembly

50:半導體封裝 50: Semiconductor packaging

60:半導體封裝搭載部 60: Semiconductor package mounting part

Claims (1)

一種半導體裝置檢查用插座,其特徵係具備: 基座,其係位於上述插座的下方; 蓋,其係位於上述基座的上方,藉由複數的蓋彈簧來彈性按壓; 接觸銷,其係被安裝於上述基座的內側所設的基座孔,在縱方向變位,接觸於位於上方的半導體封裝;及 位置台,其係位於上述插座的上方,限制上述接觸銷的上部的位置, 具備: 在上述位置台的上方收納上述半導體封裝的半導體封裝搭載部; 位於上述插座的上方,可移動於上下的上述蓋;及 被連結至上述蓋,上述蓋係上下移動而旋轉的鎖扣組件, 上述位置台係使上述接觸銷移動於橫方向而可將接觸銷的上部移動至作為目的的位置。A socket for semiconductor device inspection, which is characterized by: The base, which is located below the socket; The cover is located above the base and is elastically pressed by a plurality of cover springs; A contact pin, which is installed in a base hole provided on the inner side of the base, is displaced in the longitudinal direction, and contacts the semiconductor package located above; and The position table, which is located above the socket, restricts the position of the upper part of the contact pin, have: Housing the semiconductor package mounting portion of the semiconductor package above the position stage; The above-mentioned cover which is located above the above-mentioned socket and can be moved up and down; and Is connected to the cover, and the cover is a lock assembly that moves up and down and rotates, The position table is capable of moving the contact pin in the horizontal direction to move the upper part of the contact pin to a target position.
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