TW202133306A - Peeling apparatus which can prevent a wafer from cracking and no glue will remain on the wafer - Google Patents

Abstract

The object of the present invention is to peel a protective member from a wafer without breaking the wafer or generating residual glue and without wasting time while peeling the protective member from the wafer. A peeling apparatus for peeling a protective member, which protects a side surface of the plate-shaped workpiece, from that side surface, and includes: a peeling means for holding an outer periphery of a protective member, wherein the protective member covers a side surface of the plate-shaped workpiece held by the holding surface of the holding means, peels the protective member from the outer periphery of the plate-shaped workpiece toward the center, and then peels from the center to the outer periphery on the opposite side of the outer periphery. The peeling means includes: a holding part that holds the outer periphery of the protective member; a moving means that moves the holding part from the outer periphery of the holding surface through the center and moves away from the center in a straight line; and a tensile load measuring part that measures the tensile load applied to the protective member between the holding part and the holding surface.

Description

Peeling device

The present invention relates to a peeling device for peeling a protective member from a plate-shaped workpiece.

The adhesive film mounting machine can paste a dicing film on the wafer on one side and the ring frame on the other side of the wafer with the protective film attached to it, so that the ring frame can support the wafer through the dicing film. In addition, after the dicing film is attached, the protective film attached to the wafer is peeled off (for example, refer to Patent Document 1). [Literature Technical Literature] [Patent Literature]

[Patent Document 1] JP 2015-167205 A

[The problem to be solved by the invention] When peeling off the protective adhesive film, for example, the peeling adhesive film is stuck to the outer peripheral part of the protective adhesive film, and the peeling adhesive film is held and stretched in a direction away from the wafer, thereby peeling off the protective adhesive film. However, if the speed of stretching the protective film when peeling off the protective film is fast, there is a problem that the protective film may remain on one side of the wafer or damage the wafer. On the contrary, if the speed of stretching the protective film is slow, there is a problem that time is wasted and work efficiency is reduced.

In addition, the adhesive force of the protective adhesive film varies depending on the types of components formed on one side of the wafer to which the protective adhesive film has been attached. That is, even the same protective film, there are cases where the components formed on the wafer are strongly adhered or slightly adhered. It is necessary to change the tensile force (stretching speed) during peeling according to the difference in adhesion. .

Furthermore, because the pulling force varies according to the small peeling area of the circular protective film at the beginning of peeling and the large peeling area when the protective film has been peeled to near the center of the wafer, the force on the wafer is also different. It depends on where the protective film is peeled off. However, in the past, the peeling speed of each wafer was gradually increased and the peeling experiment was repeated, and the predetermined peeling speed was determined and the peeling was performed gradually at the peeling speed, or a safe speed with a margin that would never damage the wafer was set The peeling is carried out gradually, so time is wasted.

Therefore, the object of the present invention is to provide a peeling device, which prevents the wafer from cracking or glue residue on the wafer when the protective member is peeled from the wafer, and the protection can be protected without wasting time. The component is peeled from the wafer.

[Technical means to solve the problem] According to the present invention, there is provided a peeling device that peels a protective member that protects one side of a plate-shaped workpiece from the one side surface, and is provided with a holding means that holds the other side of the plate-shaped workpiece by the holding surface Side surface; and peeling means, which grip the outer peripheral portion of the protective member, the protective member covering the surface of the side of the plate-shaped workpiece held on the holding surface, the protective member from the outer periphery of the plate-shaped workpiece Peel off toward the center, and then peel off from the center to the outer periphery on the opposite side of the outer periphery, and the peeling means includes: a grip portion that grips the outer peripheral portion of the protection member; and a moving means that makes the grip portion and the outer periphery of the The holding means relatively moves in a direction parallel to the holding surface, and moves the holding portion from the outer periphery of the holding surface to the center, so that the holding portion that has passed the center of the holding surface moves away from the center in a straight line And a tensile load measuring part, which measures the tensile load applied to the protective member between the holding part and the holding surface, and the peeling device is measured by the tensile load The tensile load applied to the protective member is measured partially, thereby optimizing the peeling operation of the peeling means.

Preferably, the tensile load measuring part is formed by a piezoelectric element arranged on a supporting part supporting the holding means.

Preferably, the tensile load measuring part is formed by a piezoelectric element arranged on a holding part supporting part supporting the holding part.

Preferably, the protective member is a protective adhesive film, the plate-shaped workpiece has a cut-out portion on the outer peripheral portion, and the holding means includes a partially peeled portion, and the partially peeled portion will be located in the cut portion and not adhered to the plate The protective adhesive film of the shaped workpiece is pushed up, so that the protective adhesive film near the cut portion is peeled off from the plate-shaped workpiece, and the holding portion holds the outer periphery of the protective adhesive film peeled off by the partial peeling portion part.

Preferably, the protective member is a protective adhesive film, and the outer peripheral portion of the protective adhesive film is further provided with a peeling adhesive film sticking means for sticking a peeling adhesive film, and the gripping portion holds the peeling adhesive film that has been attached to the protective adhesive film. Instead of holding the outer peripheral part of the protective adhesive film, the tensile load measuring part measures the tensile load applied to the peeling adhesive film. The protective film between them becomes one.

Preferably, the protection member has a protrusion slightly protruding from the outer periphery of the plate-shaped workpiece, and the gripping part grips the protrusion.

[Efficacy of invention] According to the present invention, the tensile load applied to the protective member is measured by the tensile load measuring part, whereby the peeling operation of the peeling means can be optimized. In other words, it becomes possible to prevent the wafer from cracking or causing adhesive residue on the wafer, and to peel the protective member from the wafer at an optimal peeling speed without wasting time.

If the tensile load measuring part is formed of a piezoelectric element arranged on the supporting part of the supporting and holding means, it becomes possible to accurately measure the tensile load applied to the protective member.

If the tensile load measuring part is formed of a piezoelectric element arranged on the holding part supporting part supporting the holding part, it becomes possible to accurately measure the tensile load applied to the protective member.

The protective member is a protective adhesive film. The plate-shaped workpiece is provided with a notch on the outer periphery, and the holding means is provided with a partial peeling portion that pushes the protective adhesive film located in the notched portion that is not adhered to the plate-shaped workpiece to make the cut portion The protective adhesive film in the vicinity is peeled off from the plate-shaped workpiece, whereby the gripping part can easily hold the outer peripheral part of the protective adhesive film peeled off by the partial peeling part.

The protective member is a protective film, and the outer peripheral part of the protective film is equipped with a peeling film sticking means for sticking a peeling film, whereby the gripping part holds the peeling film pasted to the protective film instead of holding the protective film Instead of measuring the tensile load applied to the protective film, the tensile load measuring part measures the tensile load applied to the peeling film, and the peeling film is between the grip and the holding surface The protective adhesive film is integrated, thereby making it possible to optimize the peeling operation of the peeling means.

The protection member has a protrusion slightly protruding from the outer circumference of the plate-shaped workpiece, whereby the gripping part becomes able to easily grip the protrusion of the outer circumference of the protection member.

(First embodiment of peeling device) The peeling device 1 of the first embodiment shown in FIG. 1 is an example of a peeling device that peels off the protective adhesive film 81. The protective adhesive film 81 is adhered to a plate-shaped workpiece 80 using a strip-shaped peeling adhesive film 83. In FIG. 1 The upper surface, which is the protection member of the one side surface 800, the peeling device 1 at least has: a holding means 30 which holds the other side surface 801 of the plate-shaped workpiece 80 by the holding surface 302; and a peeling means 4 which holds Holding the outer peripheral portion of the protective adhesive film 81, the protective adhesive film 81 covers the surface 800 of one side of the plate-shaped workpiece 80 held on the holding surface 302, and peels the protective adhesive film 81 from the outer circumference of the plate-shaped workpiece 80 toward the center, and then from Peel off from the center to the outer periphery on the opposite side of the outer periphery.

The plate-shaped workpiece 80 shown in FIG. 1 is, for example, a semiconductor wafer with silicon as a base material and a circular shape. Components 805 such as ICs are formed in each area divided into a grid. In this embodiment, the protective member pasted so as to cover the entire surface 800 of one side of the plate-shaped workpiece 80 is, for example, a protective adhesive film having a substrate layer and an adhesive layer (adhesive layer) on the substrate layer. 81. The substrate layer is made of a resin with a certain degree of flexibility (for example, polyolefin resin, etc.). In addition, the plate-shaped workpiece 80 may be composed of gallium arsenide, sapphire, ceramic, resin, gallium nitride, silicon carbide, etc., in addition to silicon, and the protective member is not limited to the protective film 81.

For example, the plate-shaped workpiece 80 has a cutting glue film 82 having a diameter larger than that of the plate-shaped workpiece 80 pasted on the opposite surface of the surface 800 on one side, that is, the surface 801 (the lower surface in FIG. 1) on the other side. Then, the outer periphery of the glue layer of the cut glue film 82 is also adhered to the ring frame 84, whereby the plate-shaped workpiece 80 is supported on the ring frame 84 through the cut glue film 82, and can be carried out by the ring frame 84 deal with.

The peeling device 1 has a rectangular parallelepiped base 10 extending in the X-axis direction, and a table moving means 13 for reciprocating the holding means 30 in the X-axis direction is arranged on the base 10. The table moving means 13 includes: a ball screw 130 which is arranged on the base 10; a motor 132 which is connected to one end of the ball screw 130; a pair of guide rails 131 which extend parallel to the ball screw 130; and a movable member 133, It can move in the X-axis direction. A holding means 30 is arranged on the upper surface of the movable member 133 through the support portion 31. The lower surface of the movable member 133 is in sliding contact with the pair of guide rails 131, and a nut (not shown) arranged on the lower surface of the movable member 133 is screwed with the ball screw 130. The ball screw 130 is driven by the motor 132 to rotate, whereby the holding means 30 and the movable member 133 move in the X-axis direction along the guide rail 131.

The table moving means 13 is a part of the peeling means 4 and functions as a moving means. The holding part 41 and the holding means 30 are relatively moved in the X-axis direction parallel to the holding surface 302, and the holding part 41 is moved from The outer periphery of the holding surface 302 goes to the center, and the grip 41 that has passed through the center of the holding surface 302 is moved in a straight line away from the center.

In the present embodiment, the holding means 30 is a holding table, and includes: an adsorption part 300 which is made of a porous member or the like and adsorbs a plate-shaped workpiece 80; and a frame body 301 which supports the adsorption part 300. The suction part 300 communicates with a suction source not shown in the figure, such as a vacuum generator, and transfers the suction force generated by the suction source to the exposed surface of the suction part 300, that is, the flat holding surface 302, whereby the holding means 30 can The plate-shaped workpiece 80 is sucked and held on the holding surface 302.

For example, the periphery of the holding means 30 is surrounded by the frame fixing means 32 for fixing the ring frame 84. The frame fixing means 32, which has a ring-shaped outer shape in a plan view and mounts the ring frame 84, has a structure that sucks and fixes the ring frame 84 by the attractive force generated by a suction source (not shown), and is uniformly grounded. The piston mechanism 33 arranged in the circumferential direction can be moved up and down in the Z-axis direction (vertical direction). In addition, instead of the frame fixing means 32, a plurality of mechanical clamps for opening and closing the clamps with springs or the like may be arranged around the holding means 30.

For example, the peeling means 4 is provided with a tensile load measuring part 35 formed of a piezoelectric element arranged on the supporting part 31 of the supporting and holding means 30, and is applied as a measurement shown in FIG. 1 to be described later between the holding part 41 and The tensile load measuring part of the tensile load of the protective film 81 between the holding surfaces 302. Hereinafter, the tensile load measurement unit 35 is referred to as the table side tensile load measurement unit 35.

In the present embodiment, the supporting portion 31 of the supporting and holding means 30 has, for example, a cylindrical shape, and the table-side tensile load measuring portion 35 is arranged at the connection portion between the supporting portion 31 and the movable member 133 of the table moving means 13. That is, the tensile load measuring part 35 on the table side is arranged in the form of being sandwiched between the supporting part 31 and the movable member 133 from the vertical direction (Z-axis direction), and supporting the holder mounted on the supporting part 31 Means the weight of 30. Then, in the present embodiment, two table-side tensile load measuring parts 35 are arranged below the holding means 30 so as to face each other in the X-axis direction. That is, the table-side tensile load measurement unit 35 is composed of a first table-side tensile load measurement unit 351 and a second table-side tensile load measurement unit 352.

The first table side tensile load measuring part 351 (the second table side tensile load measuring part 352) is also a piezoelectric element, such as barium titanate (BaTiO ₃ ), lead zirconate titanate (PZT), niobium Lithium oxide (LiNbO ₃ ) or lithium tantalate (LiTaO ₃ ) and other materials are formed into a plate or column shape, and the load can be converted into a voltage signal, and output to the control means 19 of the entire device that controls the stripping device 1 .

Above the moving path of the holding means 30, a peeling means 4 for peeling off the protective film 81 of the plate-shaped workpiece 80 held by the holding means 30 is arranged. The peeling means 4 includes, for example, a film cutting means 40, which Cut the peeling film 83 to a predetermined length; peeling film supply means 42, which pulls the peeling film 83 from the film roll 831 that has wound the peeling film 83 into a roll, and supplies it to the board that has been pasted The protective film 81 on the side 800 of the workpiece 80; the peeling film sticking means 44, which sticks the peeling film 83 to the outer peripheral part of the protective film 81; the grip 41, the grip of which has been stuck on the protection The peeling adhesive film 83 of the adhesive film 81; and the X-axis direction moving means 46 for moving the peeling adhesive film sticking means 44 and the holding portion 41 in the X-axis direction.

The X-axis direction moving means 46 functions as a moving means, moving the holding portion 41 and the holding means 30 relatively in the X-axis direction parallel to the holding surface 302, and moving the holding portion 41 from the outer periphery of the holding surface 302 to the center , And then move the grip 41 that has passed through the center of the holding surface 302 in a straight line away from the center. Specifically, the X-axis direction moving means 46 includes: a ball screw 460 having an axis in the X-axis direction; a pair of guide rails 461 arranged in parallel with the ball screw 460; and a motor 462 connected to the ball screw 460 And make the ball screw 460 rotate; and the movable plate 463, the nut inside it is screwed with the ball screw 460, and the side is in sliding contact with the guide rail 461, if the motor 462 rotates the ball screw 460, it will be accompanied by this, the movable plate 463 It is guided by the guide rail 461 to move back and forth in the X-axis direction, and the peeling adhesive film sticking means 44 and the grip 41 attached to the movable plate 463 also move back and forth in the X-axis direction.

The peeling film supply means 42 includes: a roll 420 equipped with a film roll 831; a pair of guide rollers 421 that guide the peeling film 83 pulled out from the film roll 831 downward; and a pair of sending out The roller 422 is arranged on the lower side of the pair of guide rollers 421. A control mechanism not shown in the figure applies reverse tension to the roll 420 and adjusts the tension so that the peeling film 83 pulled out from the film roll 831 does not slack. The pair of guide rollers 421 clamp the peeling film 83 while rewinding to apply tension and guide it toward the pair of delivery rollers 422. The pair of delivery rollers 422 can feed the peeling film 83 toward the grip 41.

The peeling adhesive film 83 is, for example, a heat-sealing film with a two-layer structure formed by an adhesive layer and a substrate, and the adhesive layer is adhered to the outer peripheral portion of the protective adhesive film 81 by heating. The material of the base material is made of resin such as polyethylene terephthalate, for example. The adhesive layer is composed of, for example, a thermosetting resin such as epoxy resin. The adhesive force of the peeling adhesive film 83 to the protective adhesive film 81 is set to be stronger than the adhesive force of the protective adhesive film 81 to the plate-shaped workpiece 80. The peeling adhesive film 83 is wound with the adhesive layer located inside (the lower surface side in the stretched state) to become the adhesive film roll 831. In addition, the peeling adhesive film 83 is not limited to a heat-sealing film.

On the support stand 480 fixed to the side surface of the movable plate 463 of the X-axis direction moving means 46 shown in FIG. 1, a grip support 48 is installed. Furthermore, the grip support 48 constitutes a grip One of the parts 41 can move up and down with respect to the gripping claw 412.

The pair of gripping claws 412 includes, for example, a fixed claw 4121 that is substantially L-shaped in a side view, and a movable claw 4122 that is arranged opposite to the fixed claw 4121 in the Z-axis direction and can approach or leave the fixed claw 4121. In the holding portion 41, by bringing the movable claw 4122 close to the fixed claw 4121, one end of the peeling adhesive film 83 can be held therebetween. Then, one pair of the gripping claws 412 of the held peeling adhesive film 83 can be positioned on the protective adhesive film 81 of the plate-shaped workpiece 80 held by the holding means 30 by the holding portion support portion 48 to a height suitable for the adhesive film. Location. On the other hand, by separating the movable claw 4122 from the fixed claw 4121, the gripping state of one end of the peeling film 83 in the grip 41 can be released.

The peeling adhesive film sticking means 44 shown in FIG. 1 is arranged between the pair of delivery rollers 422 and the grip 41. The peeling adhesive film sticking means 44 includes a support stand 440 fixed to the side of the movable plate 463 of the X-axis direction moving means 46, and a crimping plate lifting mechanism 441, which is formed by an air cylinder or the like, and is supported by the support stand 440 And the crimping plate 442, which can be moved up and down by the crimping plate lifting mechanism 441.

A heater (not shown) that generates heat by flowing current is installed on the crimping plate 442, and the crimping plate 442 is lowered by the crimping plate lifting mechanism 441 to crimp and bond the peeling adhesive film 83 to the protective glue. In the case of the outer peripheral portion of the film 81, a heater (not shown) heats the pressure-bonding plate 442, thereby allowing the peeling adhesive film 83 to be partially thermally welded to the protective adhesive film 81. Thereby, the peeling adhesive film 83 can be adhered to the protective adhesive film 81 well.

The adhesive film cutting means 40 is arranged between the pair of delivery rollers 422 and the peeling adhesive film sticking means 44, for example. The adhesive film cutting means 40 includes a mounting table 400 having a mounting surface 404 on the adhesive layer side (lower side) of the peeling adhesive film 83, and a width direction of the peeling adhesive film 83 (in the horizontal plane and X The Y-axis direction perpendicular to the axial direction) the groove 405 that crosses the placing surface 404; the cutter 401, which travels in the groove 405 along the extending direction of the groove 405; the cutter moving means 402, which passes through The cutter lifting means 403 supports the cutter 401 and moves the cutter 401 in the extending direction of the groove 405 (Y-axis direction) ball screw mechanism; and the cutter lifting means 403, which is formed by an air cylinder or the like, And the cutter 401 is raised and lowered in the Z-axis direction with respect to the mounting surface 404.

For example, the peeling means 4 is provided with a tensile load measuring portion 47 formed of a piezoelectric element arranged on the holding portion support portion 48 supporting the holding portion 41, and is applied as a measurement between the holding portion 41 and the holding portion. The tensile load measuring part of the tensile load of the protective film 81 between the surfaces 302. Hereinafter, the tensile load measuring part 47 is referred to as the grip-side tensile load measuring part 47. Then, the grip-side tensile load measuring unit 47 includes, for example, a vertical load measuring piezoelectric element 471 and a horizontal load measuring piezoelectric element 472. In addition, the peeling device 1 only needs to include at least one of the table side tensile load measuring section 35 or the grip section side tensile load measuring section 47 as a tensile load measuring section.

The grip support portion 48 is, for example, an electric cylinder that can move the piston rod 483 up and down in the Z-axis direction from the cylinder tube 484. Then, for example, the vertical load measuring piezoelectric element 471 has a cylindrical outer shape, and is integrally arranged on the piston rod 483 so that the two rod bodies are connected up and down to form a single piston rod 483.

The horizontal load measuring piezoelectric element 472 is formed in, for example, a flat plate shape, and is sandwiched by the front end of the piston rod 483 and the fixing claw 4121 from both sides in the X-axis direction, and is arranged on the front end of the piston rod 483 and Fix the connection part of the claw 4121. In addition, the vertical load measuring piezoelectric element 471 and the horizontal load measuring piezoelectric element 472 are made of the same material as the table-side tensile load measuring part 35 described earlier.

For example, at a position below the moving path of the grip 41, a recovery box 17 for dropping the protective film 81 peeled off by the peeling means 4 and recovering it is arranged.

The peeling device 1 is provided with, for example, a control means 19 of the various components of the control device. The control means 19 is composed of a storage medium such as a CPU and a memory that perform arithmetic processing in accordance with a control program, and passes through a wired or wireless communication path not shown in the figure. , Are electrically connected to the table moving means 13, the X-axis direction moving means 46, and the holding part support part 48 such as an electric cylinder that moves the holding part 41 up and down, and the table moving means 13 performed by the control means 19 Under the control of, the movement speed of the holding means 30 in the X-axis direction that has sucked and held the plate-shaped workpiece 80 is controlled, and the positioning control of the grip 41 and the like are performed. In addition, under the control of the X-axis direction moving means 46 and the grip support portion 48 performed by the control means 19, the control of the movement speed of the grip 41, the control of the positioning, etc. are performed. The grip 41 The peeling adhesive film 83 of the protective adhesive film 81 adhered to the plate-shaped workpiece 80 is held. In addition, for example, the control of the X-axis direction moving means 46 by the control means 19 is performed by controlling the number of rotations of the motor 462. In addition, the control means 19 can receive information about the tensile load measured by each load measurement unit from the table-side tensile load measuring unit 35 and the grip-side tensile load measuring unit 47.

For example, in the case where the motor 132 of the table moving means 13 is a servo motor, the rotary encoder of the servo motor is connected to the control means 19 that also has the function of a servo amplifier, and the operation signal is supplied to the control means 19 from the output interface of the control means 19 After the servo motor, the rotation number of the servo motor is output to the input interface of the control means 19 as an encoder signal. Then, the control means 19 receiving the encoder signal uses the rotation angle of the motor 132 as a reference to successively identify the movement amount of the holding means 30, thereby successively identifying the position of the holding means 30 in the X-axis direction.

Next, the case where the protective adhesive film 81 is peeled from the plate-shaped workpiece 80 using the peeling device 1 shown in FIG. 1 will be described. First, the plate-shaped workpiece 80 integrated with the ring frame 84 is placed on the holding surface 302 of the holding means 30 with the protective adhesive film 81 facing upward, and the ring frame 84 is placed on the holding means. Frame fixing means 32 on the outer peripheral side of 30. Next, a suction source not shown in the figure operates to suck and hold the plate-shaped workpiece 80 by the holding surface 302, and at the same time, the ring frame 84 is sucked and fixed by the frame fixing means 32. Then, the ring frame 84 is lowered to a position lower than the holding surface 302, for example.

With the pair of guide rollers 421 shown in FIG. 1, the peeling adhesive film 83 is sent out from the adhesive film roller 831 toward the grip 41. Place the adhesive layer side (inside) of the peeling film 83 on the mounting surface 404 of the mounting table 400 of the film cutting means 40, and then position one end of the peeling film 83 on the fixing claw 4121 of the holding portion 41 After the upper surface of the film, the movable claw 4122 approaches the fixed claw 4121, and the holding portion 41 holds one end of the peeling film 83. Next, by the X-axis direction moving means 46, the holding portion 41 moves in the −X direction, and the held peeling film 83 is stretched in the same direction. At this stage, the crimping plate 442 of the peeling adhesive film sticking means 44 and the cutter 401 of the adhesive film cutting means 40 are in a standby state on the upper side of the peeling adhesive film 83.

For example, the holding means 30 moves in the +X direction, and the outer peripheral part of the protective adhesive film 81 is positioned directly below the peeling adhesive film attaching means 44. Next, the crimping plate 442 heated by a heater (not shown) provided inside will be lowered, and the release adhesive film 83 is crimped from above to the outer peripheral portion of the protective adhesive film 81 with the lower end of the crimping plate 442, and The adhesive layer of the peeling adhesive film 83 and the protective adhesive film 81 are thermally welded.

In this state, the cutter 401 is positioned at one end of the groove 405 of the mounting table 400 exposed from the side of one side of the peeling adhesive film 83. Furthermore, by the cutter lifting means 403, the cutter 401 descends until the lowermost end of the cutter 401 reaches the groove 405. Further, the cutter 401 travels in the -Y direction along the extending direction of the groove 405, and the peeling adhesive film 83 is cut by the cutter 401. After the cutter 401 cuts the peeling adhesive film 83, the cutter 401 and the crimping plate 442 rise in the +Z direction and withdraw from the peeling adhesive film 83.

(Embodiment A in which the protective adhesive film 81 is peeled off in the peeling device 1) The following case will be described: in the peeling of the protective adhesive film 81, the holding means 30 is moved in the X-axis direction, and the holding portion 41 is positioned at a predetermined distance from the holding surface 302 of the holding means 30, and then it is horizontal. move. The grip 41 holding the peeling adhesive film 83 moves in the +Z direction, and a part of the protective adhesive film 81 is peeled from the one side surface 800 of the plate-shaped workpiece 80. Next, the grip 41 is moved in the −X direction by the X-axis direction moving means 46. Furthermore, the holding means 30 is moved in the +X direction by the table moving means 13, so that the grip 41 is relatively moved in the diameter direction from the outer periphery of the plate-shaped workpiece 80 toward the center, and the protective film 81 is gradually moved from the plate The shaped workpiece 80 is peeled off. In addition, a rotating drum (not shown) may be arranged above the moving path of the holding means 30, so that the protective film 81 abuts against the rotating drum and gradually peels off, thereby preventing possible occurrence of peeling off the protective film 81 The protective film 81 is broken.

In addition, for example, it is sufficient to move the grip 41 relatively from the outer periphery of the plate-shaped workpiece 80 toward the center in the diametrical direction and peel off the protective adhesive film 81 from the plate-shaped workpiece 80. Therefore, for example, the holding means 30 may not be moved. Moving in the +X direction, only the grip 41 moves in the -X direction, thereby peeling off the protective adhesive film 81.

In this embodiment, in peeling the protective adhesive film 81 from the plate-shaped workpiece 80, the gripping part side tensile load measuring section 47 shown in FIG. 2 can accurately measure the tensile load applied to the peeling adhesive film 83 The peeling adhesive film 83 is integrated with the protective adhesive film 81 between the holding portion 41 and the holding surface 302.

For example, the tensile load measurement performed by the grip side tensile load measuring unit 47 is performed by the vertical load measuring piezoelectric element 471 and the horizontal load measuring piezoelectric element 472. In addition, in FIG. 2, the configurations of the peeling means 4 and the holding means 30 are partially simplified and shown. In FIG. 2, the arrow F1 facing diagonally upward indicates the tensile load F1 applied to the peeling adhesive film 83, which protects between the holding portion 41 and the holding surface 302 of the holding means 30 The glue film 81 is integrated. Moreover, the tensile load F1 is a tensile load F1 obtained by combining the X-axis direction tensile load Fx1 with the direction shown in FIG. 2 as the −X direction and the Z-axis direction tensile load Fz1 with the direction of the +Z direction. Then, the following formula 1 is established by the Pythagoras theorem. (Tensile load Fx1 in the X-axis direction) ² + (Tensile load Fz1 in the Z-axis direction) ² = (Tensile load F1) ² ････ (Equation 1)

Here, the piezoelectric element 472 is measured by the horizontal load, and the X-axis tensile load Fx1 is measured every predetermined time interval. That is, the horizontal load measuring piezoelectric element 472 is slightly deformed by the X-axis direction tensile load Fx1, and the horizontal load measuring piezoelectric element 472 generates a potential difference corresponding to the load. The potential difference is generated by the horizontal load measuring piezoelectric element 472, and the load detection signal is sent from the horizontal load measuring piezoelectric element 472 to the control means 19 shown in FIG. 1 during each measurement. In addition, the piezoelectric element 471 is measured by the vertical load measurement, the Z-axis tensile load Fz1 is measured every predetermined time interval, and the load detection signal is sent to the control means 19 at each measurement.

The control means 19 performs a calculation process of substituting the actual measurement value for the X-axis direction tensile load Fx1 and the actual measurement value for the Z-axis direction tensile load Fz1 into Equation 1, and measures the tensile load F1 every predetermined time interval. Then, the control means 19 uses the tensile load F1 measured at every predetermined time interval as information for optimizing the peeling operation of the protective film 81 by the peeling means 4. That is, by the value of the tensile load F1 measured at every predetermined time interval, for example, by the control means 19, the grip 41 performed by the X-axis direction moving means 46 is moved in the -X direction Optimized movement speed. The result is a state where the tensile load F1 when the gripping portion 41 peels off the peeling film 83 integrated with the protective film 81 will be fed back so that the plate-like workpiece 80 will not be broken or on the plate. The optimal tensile load such as residual glue does not occur on the shaped workpiece 80. In addition, the peeling speed performed by the holding portion 41 is not too slow, and the protective film 81 is gradually peeled from the plate-shaped workpiece 80 without wasting time.

If the protective adhesive film 81 is completely peeled off from the side surface 800 of the plate-shaped workpiece 80, the grip 41 holding the peeling adhesive film 83 adhered to the protective adhesive film 81 will move to the recovery box 17. Then, the gripping portion 41 releases the grip of the peeling adhesive film 83 and drops the protective adhesive film 81 and the peeling adhesive film 83 into the recovery box 17.

As in the present embodiment, the protective member for protecting the plate-shaped workpiece 80 is the protective adhesive film 81, and the peeling adhesive film sticking means 44 for sticking the peeling adhesive film 83 is provided on the outer periphery of the protective adhesive film 81, whereby the gripping portion 41 holds The peeling adhesive film 83 that has been adhered to the protective adhesive film 81 replaces the outer peripheral portion of the holding protective adhesive film 81, and the grip side tensile load measuring section 47 measures the tensile load applied to the peeling adhesive film 83. The peeling adhesive The film 83 is integrated with the protective adhesive film 81 between the grip 41 and the holding surface 302, instead of measuring the tensile load applied to the protective adhesive film 81, thereby making it possible to maximize the peeling operation of the peeling means 4 Jiahua.

(Embodiment B in which the protective adhesive film 81 is peeled off in the peeling device 1) Explain the following situation: the grip 41 holding the peeling adhesive film 83 moves in the +Z direction, and after peeling a part of the protective adhesive film 81 from the surface 800 of one side of the plate-shaped workpiece 80, the protective adhesive film 81 is just gradually removed. At the time of peeling, as shown in FIG. 3, the holding means 30 is moved in the X-axis direction, and the grip 41 is not moved by the X-axis direction moving means 46. In this case, the grip 41 stops at a predetermined height position and a predetermined position P2 in the X-axis direction, and the control means 19 recognizes the height position where the grip 41 is located and a position P2 in the X-axis direction.

The holding means 30 is moved in the +X direction by the table moving means 13, so that the holding portion 41 that stops moving relatively moves in the diameter direction from the outer periphery of the plate-shaped workpiece 80 toward the center, and the protective film 81 is gradually moved from The plate-shaped workpiece 80 peels off. In addition, a rotating drum (not shown) may be arranged above the moving path of the holding means 30, so that the protective film 81 abuts against the rotating drum and gradually peels off, thereby preventing possible occurrence of peeling off the protective film 81 The protective film 81 is broken.

In the present embodiment, in peeling the protective adhesive film 81 from the plate-shaped workpiece 80, the table side tensile load measuring section 35 measures the tensile load applied to the peeling adhesive film 83, which is connected to The protective adhesive film 81 interposed between the holding portion 41 and the holding surface 302 is integrated. In FIG. 3, the arrow F2 represents the tensile load F2 applied to the peeling adhesive film 83. The peeling adhesive film 83 and the protective adhesive film 81 between the holding portion 41 and the holding surface 302 of the holding means 30 become One. Moreover, the tensile load F2 is a tensile load F2 obtained by combining a tensile load Fx2 in the X-axis direction shown in FIG. 3 in the −X direction and a tensile load Fz2 in the Z-axis direction in the +Z direction.

The arrow R1 shown in FIG. 3 is the first measurement load R1 that can be measured at every predetermined time interval in the Z-axis direction by the tensile load measuring part 351 on the first table side. The first measurement load R1 has, for example, a direction of the -Z direction. Information about the value of the first measurement load R1 is sent to the control means 19 at predetermined time intervals. The arrow R2 indicates the second measurement load R2 that can be measured by the second table-side tensile load measurement unit 352 at predetermined time intervals in the Z-axis direction. The second measurement load R2 has a direction of the +Z direction, for example. Information about the value of the second measurement load R2 is sent to the control means 19 at predetermined time intervals. The distance L2 in the X-axis direction between the first table side tensile load measuring part 351 and the second table side tensile load measuring part 352 shown in FIG. 3 is a device design value previously recognized by the control means 19 and becomes a constant. The change distance M in the X-axis direction from the tensile load measuring portion 351 on the first table side to the grip portion 41 at the position P2 when the movement in the X-axis direction is stopped is determined by the holding means 30 in the X-axis direction Variables that move and change. In addition, by feeding back from the rotary encoder of the motor 132 (servo motor 132) of the table moving means 13 to the encoder signal of the control means 19, the control means 19 can grasp the side pull of the first table moving together with the movable member 133 The position of the tensile load measuring part 351, therefore, the control means 19 may also sequentially recognize the value of the change distance M at every predetermined time interval. The distance N in the Z-axis direction between the first table side tensile load measuring part 351 at the height position of the control means 19 and the grip part 41 stopped at the position P2 becomes a constant recognized by the control means 19 in advance.

According to Pythagorean theorem, the following formula 2 is established. (X-axis direction tensile load Fx2) ² + (Z-axis direction tensile load Fz2) ² = (Tensile load F2) ² ････(Equation 2) In addition, due to the balance of forces in the Z-axis direction, The following formula 3 is established. (Z-axis tensile load Fz2) = (first measurement load R1) + (second measurement load R2) ････ (Equation 3)

Furthermore, in the case where the first table-side tensile load measuring part 351 is assumed to be the origin, the balance of the moment around the first table-side tensile load measuring part 351, the following equation 4 is established. (X-axis direction tensile load Fx2) × (constant distance N) = (second measurement load R2) × (distance L2) + (Z-axis direction tensile load Fz2) × (change distance M)････ (Equation 4)

According to Equation 3, the control means 19 can measure the tensile load Fz2 in the Z-axis direction every predetermined time interval. In addition, the following formula 5 is obtained by deforming the formula 4, and the control means 19 can measure the tensile load Fx2 in the X-axis direction at predetermined time intervals. (X-axis direction tensile load Fx2)={(second measurement load R2)×(distance L2)+(Z-axis direction tensile load Fz2)×(change distance M)}/(distance N which is constant)･･ ･･ (Equation 5)

The control means 19 performs a calculation process of substituting the value of the tensile load Fx2 in the X-axis direction and the value of the tensile load Fz2 in the Z-axis direction into Equation 2, and measures the tensile load F2 at predetermined time intervals. Then, the control means 19 uses the tensile load F2 measured at every predetermined time interval as information for optimizing the peeling operation of the protective film 81 by the peeling means 4. That is, based on the value of the tensile load F2 measured at every predetermined time interval, for example, the moving speed of the holding means 30 by the table moving means 13 is optimized by the control means 19. The result is a state in which the tensile load F2 at the time when the gripping portion 41 peels off the peeling film 83 integrated with the protective film 81 is feedback controlled so that the plate-shaped workpiece 80 will not be broken or on the plate. The optimal tensile load such as residual glue does not occur on the shaped workpiece 80. In addition, the peeling speed performed by the grip 41 relatively moving in the X-axis direction with respect to the moving holding means 30 is not too slow, and the protective film 81 is gradually peeled off the plate-shaped workpiece 80 without wasting time. .

As in this embodiment, the table-side tensile load measuring section 35, that is, the first table-side tensile load measuring section 351 and the second table-side tensile load measuring section 352 are provided in the support and holding means 30. The supporting part 31 of the piezoelectric element is formed, and it becomes possible to accurately measure the tensile load applied to the protective member, that is, the protective film 81.

If the protective adhesive film 81 is completely peeled off from the surface 800 of one side of the plate-shaped workpiece 80, the grip 41 holding the peeling adhesive film 83 pasted to the protective adhesive film 81 moves to the recovery box 17. Then, the gripping portion 41 releases the grip of the peeling adhesive film 83 and drops the protective adhesive film 81 and the peeling adhesive film 83 into the recovery box 17.

The peeling device 1 of the first embodiment of the present invention is not limited to the above-mentioned embodiment, and of course it can be implemented in various different ways within the scope of its technical idea. In addition, the shapes and the like of the respective components of the peeling device 1 illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within the range in which the effects of the present invention can be exhibited.

For example, as shown in FIG. 4, the plate-shaped workpiece|work 80 may be equipped with the notch part 806 in the outer peripheral part. The notch 806 is, for example, a notch that is a mark indicating the crystal direction, and is formed on the outer periphery of the plate-shaped workpiece 80 in a state of being recessed toward the center of the plate-shaped workpiece 80 toward the inner side in the diameter direction. Alternatively, the cutout portion 806 may also be an orientation plane. In this case, a part of the outer periphery of the plate-shaped workpiece 80 is cut flat, thereby forming the cutout portion 806.

As shown in FIG. 4, the holding means 30 shown in FIG. 1 may be provided, for example, with: a partial peeling portion 34 that pushes the protective adhesive film 81 that is located in the cutout portion 806 of the plate-shaped workpiece 80 that is not adhered to the plate-shaped workpiece 80 , The protective adhesive film 81 near the cut portion 806 is peeled off from the plate-shaped workpiece 80. Then, for example, the holding portion 41 shown in FIG. 1 may also hold the outer peripheral portion of the protective adhesive film 81 peeled off by the partial peeling portion 34 and peel the protective adhesive film 81 from the plate-shaped workpiece 80.

A circular through hole 341 is formed on the outer periphery of the holding surface 302 to correspond to the cutout portion 806 of the plate-shaped workpiece 80 placed on the holding surface 302. The through hole 341 constitutes a partial peeling portion 34 and makes The holding surface 302 penetrates the lower surface of the holding means 30 (the lower surface of the housing 301). Specifically, the through hole 341 is arranged on the holding surface 302 so that the distance from the center of the plate-shaped workpiece 80 to the cutout portion 806 and the distance from the center of the holding surface 302 to the through hole 341 coincide.

In addition, the diameter of the through hole 341 is set to be slightly smaller than the width of the notch 806, for example. A part of the protective adhesive film 81 adhered to the side surface 800 of the plate-shaped workpiece 80 is pushed up by the upper push pin 342, which is provided in the through hole 341 of the partially peeled part 34 by the up and down driving part 345 so as to move up and down. Directly below. The upper push pin 342 is formed in a rod shape extending in the vertical direction, and the outer diameter of the upper push pin 342 is slightly smaller than the through hole 341. For example, the front end (upper end) of the upper push pin 342 has a pointed shape, and it becomes possible to puncture the dicing film 82 adhered to the surface 801 of the other side of the plate-shaped workpiece 80.

In addition, for example, the upper push pin 342 is formed with an ejection hole (not shown) for ejecting fluid from the tip along the extending direction. At the lower end of the ejection hole, a fluid supply source 347 is connected to the transmission valve 346, and the fluid is supplied from the fluid supply source 347 to the upper push pin 342 by opening the valve 346. In addition, the fluid supplied from the fluid supply source 347 is not particularly limited, and compressed air is used as the fluid in this embodiment.

The up-and-down driving part 345 is constituted by, for example, a guide actuator driven by air or a motor, and can move the upper push pin 342 up and down while guiding the upper push pin 342 in the up and down direction in the through hole 341 of the holding means 30.

In this way, the upper push pin 342 is configured to pierce the cutting film 82 by the up-and-down driving portion 345 while ejecting air from the outlet of the ejection hole. In addition, the push-up pin 342 becomes capable of protruding from the holding surface 302 after piercing the cut adhesive film 82 to push up the protective adhesive film 81 on the cut portion 806 of the plate-shaped workpiece 80. That is, while air is ejected from the ejection hole of the upper push pin 342 to float the protective film 81, the upper push pin 342 is further raised to push up the outer peripheral portion of the protective film 81, or the upper push pin 342 is raised. While pushing up the outer peripheral portion of the protective adhesive film 81, the air is blown out from the ejection hole, and the outer peripheral portion of the protective adhesive film 81 is peeled from the plate-shaped workpiece 80. Then, the holding portion 41 shown in FIG. 4 can hold the outer peripheral portion of the protective adhesive film 81 peeled by the partial peeling portion 34 and peel the protective adhesive film 81 from the plate-shaped workpiece 80.

(Second embodiment of peeling device) The peeling device 2 of the present invention shown in FIG. 5 (hereinafter referred to as the peeling device 2 of the second embodiment) is a protective member 85 that adheres to the lower surface of the plate-shaped workpiece 80 in FIG. 5, that is, the side surface 800 An example of a peeling device that performs peeling, and at least includes: a holding means 50 that holds the other side surface 801 of the plate-shaped workpiece 80 by the holding surface 502; and a peeling means 6 that holds the protective member 85 and the protective member 85 Covering the one side surface 800 of the plate-shaped workpiece 80 held by the holding surface 502, the protective member 85 is peeled from the outer periphery of the plate-shaped workpiece 80 toward the center, and then from the center to the outer periphery on the opposite side of the outer periphery.

The protective member 85 pasted so as to cover the entire surface 800 of the side of the plate-shaped workpiece 80 facing downward is, for example, a protective member composed of a resin film 87 (refer to FIG. 6) and a circular sheet 86. The resin The film 87 is formed in a protective member forming device not shown. The surface 800 of one side of the plate-shaped workpiece 80 is crimped to the liquid resin supplied to the circular sheet 86 having a larger diameter than the plate-shaped workpiece 80, and the liquid resin After spreading from the center of the plate-shaped workpiece 80 toward the outer peripheral side, and spreading the liquid resin on the entire surface of the one side surface 800, the liquid resin is irradiated with ultraviolet rays, for example, to harden the liquid resin. Then, in this embodiment, the protective member 85 is made up of a circular sheet 86 and a resin film 87, and is provided with: a protrusion 850 shown in FIG. .

A column 21 is erected on the rear side (-X direction side) of the base 20 of the peeling device 2 shown in FIG. 60. The pad moving means 60 rotates the ball screw 600 by the motor 602, thereby causing the holding means 50 arranged on the movable plate 601 to reciprocate in the Y-axis direction. The pad moving means 60 is a part of the peeling means 6 and functions as a moving means so that the grip 61 and the holding means 50 are relatively moved in the Y-axis direction parallel to the holding surface 502, and the grip 61 From the outer periphery of the holding surface 502 to the center, the grip 61 that has passed through the center of the holding surface 502 is moved in a straight line away from the center.

The movable plate 601 is provided with a pad raising and lowering means 66 for reciprocating the holding means 50 in the Z-axis direction. The pad lifting means 66 rotates the ball screw 660 by the motor 662, thereby causing the holding means 50 arranged on the movable plate 661 to reciprocate in the Z-axis direction.

The holding means 50, which holds the surface 801 on the other side of the plate-shaped workpiece 80 by the holding surface 502, is supported by the arm 52 whose one end is fixed to the movable plate 661 and extends in the X-axis direction, and passes through the support 53 And it is attached to the lower surface side of the other end of the +X direction side of the arm part 52.

As shown in FIG. 6, in this embodiment, the holding means 50 is a suction holding pad, and includes: an adsorption part 500, which is made of a porous member and adsorbs a plate-shaped workpiece 80; and a frame body 501, which supports the adsorption part 500. The suction part 500 communicates with a suction source (not shown) through a suction tube 509 and a resin tube or a joint. Then, the suction force generated by the suction source is transferred to the holding surface 502 formed by the exposed surface of the suction part 500 and the lower surface of the frame body 501 on the same plane, whereby the holding means 50 sucks and holds the plate-shaped workpiece with the holding surface 502 80.

The support portion 53 shown in FIG. 5 has, for example, a circular plate-shaped outer shape, and its upper surface is connected to the lower surface of the arm portion 52 by a fixing bolt or the like not shown. A pad-side tensile load measuring portion 64 is installed on the lower surface of the support portion 53, and the pad-side tensile load measuring portion 64 measures the protective member 85 applied between the grip portion 61 and the holding surface 502 The tensile load measuring part of the tensile load.

The pad side tensile load measuring part 64 is formed of a piezoelectric element arranged on the supporting part 53 of the supporting and holding means 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate formed in a cylindrical or angular column shape, and is opposed in the Y-axis direction to align the support portion 53 with the holding portion 53 Two means 50 are arranged to connect and support the weight of the holding means 50 (only one is shown in FIG. 5). That is, the pad side tensile load measuring part 64 is composed of the first pad side tensile load measuring part 641 and the second pad side tensile load measuring part 642 shown in FIG. 6.

In the middle part of the front surface of the column 21 shown in FIG. 5 on the +X direction side, that is, below the movement path of the holding means 50, there are arranged in order from the +Z direction side: a rotating drum 211 having X The axis in the axial direction; the constituent elements of the peeling means 6; the mounting table 27, which mounts the protective member 85 that has been peeled from the plate-shaped workpiece 80; and the dropping means 26, which causes the peeled protective member on the mounting table 27 85 falls to the dust box (dust box) 28.

The peeling means 6 is provided with: a grip 61 that grips the outer peripheral portion of the protection member 85 (in this embodiment, a protrusion 850 that becomes the outer peripheral portion); and a moving means 63 that positions the grip 61 and the holding means 50 Move relatively in a direction parallel to the holding surface 502 (Y-axis direction), and move the grip 61 from the outer periphery of the holding surface 502 to the center, and move the grip 61 that has passed through the center of the holding surface 502 away in a straight line The direction of the center movement; and the liner side tensile load measuring part 64, which measures the tensile load applied to the tensile load of the protective member 85 between the grip 61 and the holding surface 502. In addition, the moving means 63 is referred to as a grip moving means 63 in the following description.

The grip moving means 63 is composed of the following: a ball screw 630, which has an axis in the Y-axis direction; a pair of guide rails 631, which are arranged in parallel with the ball screw 630; and a motor 632, which makes the ball screw 630 Rotation; and the movable block 633, the nut inside it is screwed with the ball screw 630, and the side part is in sliding contact with the guide rail 631. Then, when the motor 632 rotates the ball screw 630, the movable block 633 is guided by the guide rail 631 to move in the Y-axis direction. Axis direction movement.

An arm-type housing 681 is installed on the side of the movable block 633, and the arm-type housing 681 supports a main shaft 680 whose axis direction is the X-axis direction, and the main shaft 680 can rotate. Then, a connecting block 614 is attached to the connecting member 616 arranged at the front end of the +X direction side of the main shaft 680, and the connecting block 614 passes through the vertical load measuring piezoelectric element 673 of the grip side tensile load measuring section 67 Support grip 61. A clamp base 610 is installed on the connecting block 614, and the clamp base 610 supports the holding jig 612 of the holding part 61 through the horizontal load measuring piezoelectric element 674 of the holding part side tensile load measuring part 67. In addition, although not shown, the arm-type housing 681 can be raised and lowered in the Z-axis direction by a lifting means such as a ball screw mechanism not shown, and the grip 61 can also be raised and lowered in the Z-axis direction.

The holding fixture 612 can clamp the holding object between a pair of holding plates that can be close to and separated from each other, and the angle of the holding object can be changed by rotating the spindle 680.

The tensile load measuring part that measures the tensile load applied to the protective member 85 between the holding part 61 and the holding surface 502 of the holding means 50, that is, the holding part side tensile load measuring part 67, for example, is A horizontal load measuring piezoelectric element 674 such as barium titanate formed in a flat plate shape is composed of a flat vertical load measuring piezoelectric element 673 made of the same material. Then, the vertical load measuring piezoelectric element 673 is arranged in the following state: between the lower surface of the block-shaped connecting member 616 and the upper surface of the connecting block 614 mounted on the front end side of the main shaft 680, it is moved from the Z-axis direction Clamped. In addition, the horizontal load measuring piezoelectric element 674 is arranged in a state in which the connecting block 614 and the clamp base 610 of the grip 61 are clamped from both sides in the Y-axis direction.

The rotating drum 211 shown in FIG. 5, for example, has an outer shape formed in a cylindrical shape, and is rotated about the axis in the X-axis direction by a motor (not shown). By contacting the protective member 85, the rotating drum 211 performs the following function, for example, to prevent breakage of the resin film 87 shown in FIG. 6 that may occur when the protective member 85 is peeled off. In addition, the rotating drum 211 can also move in the Y-axis direction.

The mounting table 27 on which the protective member 85 peeled from the plate-shaped workpiece 80 is mounted has, for example, an outer shape of a substantially rectangular shape and a grid-shaped mounting surface. That is, the mounting table 27 has a configuration in which the longitudinal direction of the plate-shaped linear material 271 is set in the Y-axis direction, while the X-axis direction is kept at equal intervals to form gaps, and the plate-shaped linear materials 271 are arranged side by side. They are arranged, and one end on the +Y-axis direction side of each linear material 271 is connected and fixed by a rod-shaped connecting tool not shown. For example, the mounting table 27 is fixed to the side surface of the column 21 in the +X direction by connecting the linear members 271 with a rod-shaped connecting tool (not shown), and is arranged under the movement path of the grip 61 .

The dropping means 26 for dropping the protective member 85 on the mounting table 27 is composed of the following members: a ball screw 260 having an axis in the Y-axis direction; a pair of guide rails 261 arranged in parallel with the ball screw 260 Motor 262, which rotates the ball screw 260; side view of the substantially L-shaped movable member 263, its inner nut is screwed with the ball screw 260, and the side portion 2631 is in sliding contact with the guide rail 261; and the protruding pin 2634, which It is arranged on the movable member 263.

The movable member 263 includes, for example, a side portion 2631 that is screwed with the ball screw 260 and a pin seat portion 2632 that is formed to protrude from the upper end portion side surface of the side portion 2631 toward the +X direction side. Two protruding pins 2634 protruding in the +Z direction are arranged on the upper surface of the pin seat portion 2632. The protruding pins 2634 are arranged at a predetermined distance apart in the X-axis direction. When the motor 262 rotates the ball screw 260, the movable member 263 is guided by the guide rail 261 to move in the Y-axis direction to cause the The protruding pin 2634 on the movable member 263 moves in the Y-axis direction through the gap between the linear members 271 of the mounting table 27.

The base 20 is provided with a trash box 28 that contains the protective member 85 that has been peeled off. The trash box 28 is formed in a substantially rectangular parallelepiped shape, for example, and is opened below the +Y direction side end of the mounting table 27. For example, a transmissive photo sensor is arranged on the upper part of the trash bin 28, and the transmissive photo sensor includes a light-emitting part 280 (-Y direction side) and a light-receiving part 281 (+Y direction side) . The protective member 85 that is peeled from the plate-shaped workpiece 80 and placed on the mounting table 27 is dropped into the trash box 28 by the dropping means 26, and the protective member 85 is stacked in the trash box 28 to a predetermined height from the light emitting part The inspection light emitted by the 280 is shielded by the protective member 85, and the amount of light received by the light receiving portion 281 is reduced, whereby the light sensor detects the amount of the protective member 85 that should be collected in the trash bin 28.

For example, on the front surface of the column 21, a table holding table 22 is installed at a position within the movable range of the grip 61 of the peeling means 6, and a transfer table 221 is arranged on the table holding table 22. The transfer table 221 mounts the plate-shaped workpiece 80 of the peeling protection member 85. The transfer table 221 can suck and hold the plate-shaped workpiece 80 placed on its holding surface, for example, with the surface 801 on one side facing the upper side. In addition, it is also possible to have a configuration in which the transfer station 221 is not arranged on the workbench holding table 22.

On the table holding table 22, a plurality of (for example, eight) outer partial peeling means 23 are arranged at regular intervals in the circumferential direction with the transfer table 221 as the center, and the outer partial peeling means 23 grips the protrusions. The portion 850 peels the outer part of the protective member 85 from the plate-shaped workpiece 80. In addition, in FIG. 5, the structure of the outer part peeling means 23 is enlarged and shown in detail.

The outer partial peeling means 23 is provided with: a protrusion holding part 230 that holds the protrusion 850; a vertical moving part (not shown) that moves the protrusion holding part 230 in the Z-axis direction (vertical direction); and horizontal movement 234, which moves the protrusion holding portion 230 in the horizontal direction.

As shown in FIG. 5, the horizontal moving portion 234 rotates the ball screw 2341 extending in the horizontal direction by the motor 2340, thereby causing the protrusion holding portion 230 to move back and forth in the diameter direction of the transfer platform 221, and the protrusion holding The holding portion 230 is disposed on, for example, a slider 2342 formed in an L shape in a side view through a vertical moving portion not shown. The not-shown vertical moving part is constituted by, for example, a ball screw mechanism.

The protrusion grip 230 includes a substantially rectangular parallelepiped gripping base 2301, a cylinder mechanism 2303 arranged on the side of the gripping base 2301, and a gripping plate 2302 that moves up and down in the Z-axis direction by the cylinder mechanism 2303, And the holding object can be clamped between the upper surface of the holding table 2301 and the lower surface of the holding plate 2302. Each protrusion grip 230 is arranged so that the opening between the grip plate 2302 and the grip base 2301 faces the transfer stand 221 side.

The peeling device 2 includes, for example, a control means 29 for controlling each component of the device. The control means 29 is composed of a storage medium such as a CPU and a memory that perform arithmetic processing in accordance with a control program, and is connected through a wired or wireless (not shown) The communication path is electrically connected to the pad moving means 60, the pad raising and lowering means 66, the grip moving means 63, etc., and is performed under the control of the pad moving means 60 or the pad raising and lowering means 66 performed by the control means 29 Control of the moving speed of the holding means 50 in the Y-axis direction and the Z-axis direction of the holding means 50 that has sucked and held the plate-shaped workpiece 80, or the control of the alignment of the grip 61 and the like. In addition, under the control of the grip moving means 63 performed by the control means 29, the control of the moving speed of the grip 61 and the control of the alignment are performed. The grip 61 holds and protects the plate-shaped workpiece 80 The protrusion 850 of the protection member 85. In addition, the control means 19 can receive information about the tensile load measured by each load measurement unit from the pad-side tensile load measurement unit 64 and the grip-side tensile load measurement unit 67.

For example, in the case where the motor 602 of the pad moving means is a servo motor, the rotary encoder of the servo motor is connected to the control means 29 which also functions as a servo amplifier, and the operation signal is supplied to the servo from the output interface of the control means 29 After the motor, the rotation number of the servo motor is output to the input interface of the control means 29 as an encoder signal. Then, the control means 29 receiving the encoder signal uses the rotation angle of the servo motor as a reference to successively identify the movement amount of the holding means 50, thereby successively identifying the position of the holding means 50 in the Y-axis direction.

The operation of the peeling device 2 in the case where the protective member 85 is peeled from the plate-shaped workpiece 80 shown in FIG. 5 will be described below. First, for example, the plate-shaped workpiece 80 after grinding as shown in FIG. 5 is placed on the transfer table 221 so that the surface 801 on the other side of the ground surface becomes the upper side. The holding means 50 moves in the +Y direction, and is positioned above the plate-shaped workpiece 80 so that the center of the holding surface 502 and the center of the surface 801 on the other side of the plate-shaped workpiece 80 approximately coincide. Furthermore, the holding means 50 is lowered to bring the holding surface 502 into contact with the surface 801 on the other side of the plate-shaped workpiece 80. Furthermore, the attraction force generated by the attraction source not shown in the figure is transferred to the holding surface 502, whereby the holding means 50 causes the protection member 85 to face downward to attract and hold the other side surface 801 of the plate-shaped workpiece 80 .

For example, the holding means 50 that has sucked and held the plate-shaped workpiece 80 rises, and the plate-shaped workpiece 80 is separated from the transfer table 221. Then, by a vertical moving part not shown, the protrusion holding part 230 is positioned at a predetermined height position where the protrusion 850 of the protection member 85 can be held.

In addition, each horizontal moving portion 234 moves each protrusion holding portion 230 in the horizontal direction, and aligns the protrusion holding portion 230 and the protrusion 850 of the protection member 85 in the diameter direction. The holding plate 2302 is lowered by the cylinder mechanism 2303, and the protrusion holding part 230 holds the protrusion 850 of the protection member 85. In addition, holding the protrusion 850 of the protective member 85 of the plate-shaped workpiece 80 by the protrusion-holding portion 230 can also be performed in a state where the plate-shaped workpiece 80 has been held on the transfer table 221.

Next, each horizontal moving portion 234 moves each protrusion gripping portion 230 of the protrusion 850 of the protection member 85 that has gripped the plate-shaped workpiece 80 toward the outside in the diameter direction of the plate-shaped workpiece 80, whereby the protrusion 850 is moved by The protruding portion gripping portion 230 is stretched and expanded toward the outer side in the diameter direction. Then, by the above-mentioned movement of the protrusion holding portion 230, the expansion force applied to the resin film 87 (refer to FIG. 6) attached to the outer peripheral portion of the plate-shaped workpiece 80, and the circular sheet 86 and the resin film 87 The adhesive force acting therebetween can easily peel the resin film 87 attached to the outer peripheral portion of the plate-shaped workpiece 80 from the outer peripheral edge of the plate-shaped workpiece 80 toward the outer side in the diameter direction.

Next, for example, each protrusion holding portion 230 is lowered to a predetermined height position, and after the protrusion 850 of the protection member 85 is lowered to a certain extent from the plate-shaped workpiece 80 and peeled off, the protrusion holding portion 230 is released from the protection The protrusion 850 of the member 85. Thereby, for example, with the center of the plate-shaped workpiece 80 as a reference, the protrusions 850 are partially peeled off at least a total of eight locations in the outer peripheral portion of the plate-shaped workpiece 80 at an equal angle in the circumferential direction.

Next, the holding means 50 that has sucked and held the plate-shaped workpiece 80 moves in the -Y direction until it is located above the rotating drum 211 and then descends so that the side surface of the rotating drum 211 abuts against the outer periphery of the lower surface of the protective member 85 on the +Y direction side Department near. As shown in FIG. 6, the holding part moving means 63 moves the holding part 61 in the −Y direction to align the holding jig 612 with the protruding part 850 of the protection member 85, and the holding jig 612 holds the protruding part 850. In the example shown in FIG. 6, the grip portion 61 grips the outer portion of the protective member 85 that does not peel off the outer portion of the protrusion 850 from the plate-shaped workpiece 80, but it may also grip the outer portion of the protective member 85 The protrusion 850 (the protrusion 850 on the -Y direction side in FIG. 6) of the outer portion from the plate-shaped workpiece 80 is peeled off.

For example, as shown in FIG. 6, after the gripping jig 612 grips the protrusion 850, the gripping jig 612 slightly moves to the +Y direction side, and the outer peripheral portion of the resin film 87 is peeled from the outer peripheral edge of the plate-shaped workpiece 80. Next, as shown in FIGS. 7 to 8, when viewed from the +X direction side, the main shaft 680 rotates 180 degrees in the clockwise direction, whereby when the rotating drum 211 supports the lower surface side of the protection member 85, the protection member 85 The resin film 87 is gently curved along the side of the rotating drum 211, and the protective member 85 is stretched toward the -Z direction by the gripping jig 612, thereby pulling a part of the protective member 85 from one side of the plate-shaped workpiece 80 Face 800 peeled off.

(Embodiment C in which the protective member 85 is peeled off in the peeling device 2) In further peeling the protective member 85, the holding means 50 is moved in the Y-axis direction. Alternatively, a case where the grip 61 is moved in the Y-axis direction with respect to the holding surface 502 of the holding means 50 will be described.

By the grip moving means 63 shown in FIG. 5, as shown in FIG. 9, the grip 61 is moved in the -Y direction. In addition, the holding means 50 may be moved in the +Y direction by the pad moving means 60 (refer to FIG. 5). The grip portion 61 is relatively moved in the diametrical direction from the outer peripheral edge of the plate-shaped workpiece 80 toward the center, and the protective member 85 is gradually peeled off from the plate-shaped workpiece 80. In addition, the rotating drum 211 rotates around the axis in the X-axis direction, and maintains the state that the resin film 87 of the protective member 85 is gently curved along the side surface of the rotating drum 211, and the protective member 85 is removed from the plate-shaped workpiece 80 The outer peripheral edge on the +Y direction side gradually peels off toward the center of the plate-shaped workpiece 80. If the resin film 87 is broken during the peeling of the protective member 85, the resin film 87 may still partially remain on the plate-shaped workpiece 80 after the peeling, or the resin film 87 may react to the plate-shaped workpiece due to the reaction force generated by the resin fracture. The side surface 800 on one side of 80 is momentarily impulsive and the side surface 800 on the side of the plate-shaped workpiece 80 is damaged. However, the side surface of the rotating drum 211 abuts against the circular sheet 86 to prevent such a problem.

In this embodiment, in peeling the protective member 85 from the plate-like workpiece 80, the grip-side tensile load measuring section 67 can accurately measure the protection applied between the grip 61 and the holding surface 502. Tensile load of member 85.

For example, the tensile load measurement performed by the grip side tensile load measuring unit 67 is performed by the vertical load measuring piezoelectric element 673 and the horizontal load measuring piezoelectric element 674. In FIG. 9, an arrow F3 indicates a tensile load F3 applied to the protective member 85 interposed between the grip 61 and the holding surface 502 of the holding means 50. Moreover, since the plate-shaped workpiece 80 and the grip 61 are separated by a predetermined distance in the Z-axis direction, the tensile load F3 is the Y-axis tensile load Fy3 and the direction shown in FIG. 9 as the -Y direction. The tensile load Fz3 in the Z-axis direction in the direction of the composite is the tensile load F3. Then, the following equation 6 is established by Pythot's theorem. (Tensile load Fy3 in the Y-axis direction) ² + (Tensile load Fz3 in the Z-axis direction) ² = (Tensile load F3) ² ････ (Equation 6)

Here, the piezoelectric element 674 is measured by the horizontal load, and the Y-axis tensile load Fy3 is accurately measured at predetermined time intervals, and the load detection signal is sent to the control means 29 for each measurement. In addition, the piezoelectric element 673 is measured by the vertical load measurement, and the Z-axis tensile load Fz3 is accurately measured at predetermined time intervals, and the load detection signal is sent to the control means 29 at each measurement.

The control means 29 performs a calculation process of substituting the actual measurement value for the Y-axis direction tensile load Fy3 and the actual measurement value for the Z-axis direction tensile load Fz3 into Equation 6, and measures the tensile load F3 at predetermined time intervals. Then, the control means 29 uses the tensile load F3 measured at every predetermined time interval as information for optimizing the peeling operation of the protective member 85 by the peeling means 6. That is, by the value of the tensile load F3 measured at every predetermined time interval, for example, the moving speed of the grip 61 by the grip moving means 63 is optimized by the control means 29 . The result is a state where the tensile load F3 when the holding part 61 peels off the protective member 85 is feedback controlled so that the plate-like workpiece 80 will not be broken or glue residue will not occur on the plate-like workpiece 80. The best tensile load. In addition, the peeling speed by the grip 61 is not too slow, and the protective member 85 is gradually peeled from the plate-shaped workpiece 80 without wasting time.

When the protective member 85 is completely peeled off from the surface 800 on one side of the plate-shaped workpiece 80, the grip 61 holding the protruding portion 850 of the protective member 85 moves to the mounting table 27 shown in FIG. 5. Then, the grip 61 releases the grip of the protrusion 850, and the protective member 85 is dropped onto the mounting table 27.

(Embodiment D in which the protective member 85 is peeled off in the peeling device 2) In the peeling protection member 85, the case where the holding means 50 is moved in the Y-axis direction and the grip 61 is not moved in the Y-axis direction as in the embodiment C will be described. In this case, for example, the rotating drum 211 moves in the same direction as the moving direction of the holding means 50. In this case, as shown in FIG. 10, the grip 61 that has been rotated 180 degrees from the state shown in FIG. 7 stops at a predetermined height position and a position P3 in the Y-axis direction, and the control means 29 shown in FIG. 5 recognizes The height position where the grip 61 is located and the position P3 in the Y-axis direction.

The holding means 50 is moved in the +Y direction by the pad moving means 60, and the holding part 61 stopped moving relatively moves in the diameter direction from the outer periphery of the plate-shaped workpiece 80 toward the center, and the protective member 85 is moved from the plate-shaped workpiece 80 gradually peeled off. In addition, the side surface of the rotating drum 211 abuts on the circular sheet 86, thereby preventing cracks and the like of the resin film 87.

In this embodiment, when the protective member 85 is peeled from the plate-shaped workpiece 80, the pad side tensile load measuring section 64 measures the tensile force applied to the protective member 85 between the grip 61 and the holding surface 502. Stretch the load. In FIG. 10, an arrow F4 represents a tensile load F4 applied to the protective member 85 interposed between the grip 61 and the holding surface 502 of the holding means 50. Furthermore, the tensile load F4 is a tensile load F4 obtained by combining a Y-axis direction tensile load Fy4 with a direction of -Y shown in FIG. 10 and a Z-axis direction tensile load Fz4 with a direction of -Z direction.

The arrow R4 shown in FIG. 10 indicates the first measurement load R4 that the first pad side tensile load measurement unit 641 can measure at predetermined time intervals in the Z-axis direction. The first measurement load R4 has a direction of the +Z direction, for example. The arrow R5 indicates the second measurement load R5 that the second pad side tensile load measurement unit 642 can measure at predetermined time intervals in the Z-axis direction. The second measurement load R5 has, for example, a direction of the -Z direction. The distance L4 between the first pad side tensile load measuring unit 641 and the second pad side tensile load measuring unit 642 in the Y-axis direction is a device design value previously recognized by the control means 29 and becomes a constant.

The change distance M1 in the Y-axis direction from the first pad side tensile load measuring portion 641 to the grip portion 61 at the position P3 when the movement in the Y-axis direction stops, is in the Y-axis direction by the holding means 50 Variables that move and change. In addition, by feeding back from the rotary encoder of the motor 602 (servo motor 602) of the pad moving means 60 shown in FIG. The position of the tensile load measuring part 641 on the side of the pad, so the control means 29 can also sequentially recognize the value of the change distance M1 at predetermined time intervals. The distance N1 in the Z-axis direction between the first pad side tensile load measuring portion 641 and the grip portion 61 stopped at the position P3 is a device design value previously recognized by the control means 29 and becomes a constant.

According to Pythagorean theorem, the following formula 7 is established. (Tensile load Fy4 in the Y-axis direction) ² + (Tensile load Fz4 in the Z-axis direction) ² = (Tensile load F4) ² ････(Equation 7) Also, due to the balance of the forces in the Z-axis direction, it holds The following formula 8. (Z-axis tensile load Fz4) = (first measurement load R4) + (second measurement load R5) ････ (Equation 8)

In addition, in the case where the first pad-side tensile load measuring part 641 is assumed to be the origin, the balance of the moment around the first pad-side tensile load measuring part 641, the following equation 9 is established. (Y-axis tensile load Fy4) × (distance N1) = (second measurement load R5) × (distance L4) + (Z-axis tensile load Fz4) × (change distance M1) ････ (Equation 9 )

According to Equation 8, the control means 29 can measure the tensile load Fz4 in the Z-axis direction every predetermined time interval. In addition, the control means 29 can measure the tensile load Fy4 in the Y-axis direction at predetermined time intervals from the following equation 10, which is obtained by deforming the equation 9. (Tensile load in the Y-axis direction Fy4)={(second measured load R5)×(distance L4)+(Tensile load in the Z-axis direction Fz4)×(change distance M1)}/(distance N1)････( Equation 10)

The control means 29 performs a calculation process of substituting the value of the tensile load Fy4 in the Y-axis direction and the value of the tensile load Fz4 in the Z-axis direction into Equation 7, and measures the tensile load F4 at predetermined time intervals. Then, the control means 29 uses the tensile load F4 measured at every predetermined time interval as information for optimizing the peeling operation of the protective member 85 by the peeling means 6. That is, with the value of the tensile load F4 measured at every predetermined time interval, for example, the moving speed of the holding means 50 by the pad moving means 60 is optimized by the control means 29. The result is a state where the tensile load F4 when the holding portion 61 peels off the peeling film 83 integrated with the protective member 85 will be fed back so that the plate-shaped workpiece 80 will not be broken or become plate-shaped. The optimal tensile load such as residual glue does not occur on the workpiece 80. In addition, the peeling speed by the holding portion 61 relatively moving in the Y-axis direction with respect to the moving holding means 50 is not too slow, and the protective member 85 is gradually peeled off the plate-shaped workpiece 80 without wasting time.

When the protective member 85 is completely peeled off from the surface 800 on one side of the plate-shaped workpiece 80, the grip 61 holding the protruding portion 850 of the protective member 85 moves to the mounting table 27 shown in FIG. 5. Then, the grip 61 releases the grip of the protrusion 850, and the protective member 85 is dropped onto the mounting table 27.

80: Plate-shaped workpiece 800: One side face 801: The other side 806: Notch 82: cutting film 84: ring frame 81: Protective film (protective member) 1: The peeling device of the first embodiment 10: Abutment 19: Control 17: Recycle bin 30: Keep the means 300: Adsorption part 302: keep face 301: Frame 31: Support 32: Frame fixing means 33: Piston mechanism 34: Partially peeled part 341: Through hole 342: Promotion 346: Valve 347: fluid supply source 345: Up and down drive 83: Peel off the film 831: Film Roller 4: Stripping method 13: Workbench moving means 130: Ball screw 132: Motor 133: movable member 35: Tensile load measuring part on the worktable side 351: Tensile load measuring part on the side of the first worktable 352: The second worktable side tensile load measuring part 40: Film cutting means 400: Mounting table 401: Cutter 402: Cutting Device Moving Means 403: Cutter lifting means 41: Grip 412: A pair of gripping claws 4121: fixed claw 4122: Movable claw 48: Grip support part 480: support table 483: Piston Rod 484: Cylinder tube 42: Stripping film supply means 420: reel 421: A pair of guide rollers 422: A pair of delivery rollers 44: Peel off the adhesive film sticking method 440: support table 441: Crimping plate lifting mechanism 442: crimping plate 46: Means of movement in the X-axis direction 460: Ball screw 462: motor 47: Tensile load measuring part on the grip part side 471: up and down load measurement piezoelectric element 472: Piezoelectric element for horizontal load measurement 85: Protective member 86: round slice 87: Resin film 850: protrusion 2: The peeling device of the second embodiment 20: Base 21: Cylinder 50: keep the means 500: Adsorption part 502: keep face 509: Suction Tube 52: Arm 53: Support 6: Stripping means 60: Pad moving means 602: Motor 600: Ball screw 601: movable plate 61: Grip 612: Holding Fixture 610: Fixture base 614: connection block 616: connection member 67: Tensile load measuring part on the grip part side 673: up and down load measurement piezoelectric element 674: Piezoelectric element for horizontal load measurement 63: Grip moving means 630: Ball screw 631: a pair of rails 632: Motor 633: movable block 680: Spindle 681: Arm shell 64: Tensile load measuring part on pad side 641: First pad side tensile load measuring part 642: Second liner side tensile load measuring part 66: Pad lifting means 660: Ball screw 662: Motor 661: movable plate 211: Rotating drum 27: Mounting table 26: Falling means 28: trash can 29: Control

FIG. 1 is a perspective view showing the peeling device of the first embodiment. Figure 2 illustrates that the holding means is moved in the X-axis direction, and the holding part is moved in the horizontal direction relative to the holding surface of the holding means while the holding part side tensile load measuring part measures the tensile load, and protects A cross-sectional view of the film peeling off the plate-shaped workpiece. Figure 3 is a cross-section illustrating the situation where the holding means is moved in the X-axis direction without moving the grip, and the tensile load is measured by the tensile load measuring part on the table side, and the protective film is peeled off from the plate-shaped workpiece picture. 4 is a cross-sectional view for explaining a holding means provided with a partial peeling portion for peeling the protective adhesive film near the cut portion of the plate-shaped workpiece from the plate-shaped workpiece. Fig. 5 is a perspective view for explaining the peeling device of the second embodiment. 6 is a cross-sectional view showing a state in which the gripping jig of the gripping portion grips the protruding portion when the peeling of the protective member is started in the peeling device of the second embodiment. 7 is a cross-sectional view illustrating a state in which the holding jig of the holding portion peels a part of the protrusion from the outer periphery of the plate-shaped workpiece when peeling of the protective member is started in the peeling device of the second embodiment. 8 illustrates that in the peeling device of the second embodiment, when peeling of the protective member is started, the holding jig of the holding portion peels off a part of the protrusion from the outer periphery of the plate-shaped workpiece, and then the protective member is rotated along Sectional view of the state of the side of the drum. Figure 9 illustrates that the holding means is moved in the Y-axis direction, and the holding part is moved obliquely downward with respect to the holding surface of the holding means while the tensile load is measured by the holding part side tensile load measuring part, and from the plate A cross-sectional view of the protective member peeled off from the shaped workpiece. 10 is a cross-sectional view illustrating a situation where the holding means is moved in the Y-axis direction without moving the grip, and the tensile load is measured by the liner side tensile load measuring part, and the protective member is peeled off from the plate-shaped workpiece .

80: Plate-shaped workpiece

800: One side face

801: The other side

804: Divide the scheduled line

805: component

82: cutting film

84: ring frame

81: Protective film (protective member)

1: The peeling device of the first embodiment

10: Abutment

19: Control

17: Recycle bin

30: Keep the means

300: Adsorption part

302: keep face

301: Frame

31: Support

32: Frame fixing means

33: Piston mechanism

83: Peel off the film

831: Film Roller

4: Stripping method

13: Workbench moving means

130: Ball screw

131: A pair of rails

132: Motor

133: movable member

35: Tensile load measuring part on the worktable side

351: Tensile load measuring part on the side of the first worktable

352: The second worktable side tensile load measuring part

40: Film cutting means

400: Mounting table

401: Cutter

402: Cutting Device Moving Means

403: Cutter lifting means

404: Mounting surface

405: Slot

41: Grip

412: A pair of gripping claws

4121: fixed claw

4122: Movable claw

48: Grip support part

480: support table

483: Piston Rod

484: Cylinder tube

42: Stripping film supply means

420: reel

421: A pair of guide rollers

422: A pair of delivery rollers

44: Peel off the adhesive film sticking method

440: support table

441: Crimping plate lifting mechanism

442: crimping plate

46: Means of movement in the X-axis direction

460: Ball screw

461: Rail

462: motor

463: movable plate

47: Tensile load measuring part on the grip part side

471: up and down load measurement piezoelectric element

472: Piezoelectric element for horizontal load measurement

Claims (6)

A peeling device, which peels a protective member that protects one side of a plate-shaped workpiece from the one side, and is provided with: Holding means, which holds the other side surface of the plate-shaped workpiece by the holding surface; and A peeling means for holding the outer peripheral portion of the protective member, the protective member covering the one surface of the plate-shaped workpiece held on the holding surface, and peeling the protective member from the outer peripheral portion of the plate-shaped workpiece toward the center, Then peel off from the center to the outer periphery on the opposite side of the outer periphery, The peeling means includes: a holding part that holds the outer peripheral portion of the protection member; a moving means that relatively moves the holding part and the holding means in a direction parallel to the holding surface, and makes the holding part From the outer periphery of the holding surface to the center, the grip part that has passed through the center of the holding surface is moved in a straight line away from the center; and a tensile load measuring part whose measurement is applied between the grip The tensile load of the protective member between the part and the holding surface, The tensile load measuring part measures the tensile load applied to the protective member, thereby optimizing the peeling operation of the peeling means. The peeling device according to claim 1, wherein the tensile load measuring part is formed by a piezoelectric element arranged on a supporting part supporting the holding means. The peeling device according to claim 1, wherein the tensile load measuring part is formed by a piezoelectric element arranged on a holding part supporting part supporting the holding part. Such as the peeling device of any one of claims 1 to 3, wherein: The protective member is a protective film, The plate-shaped workpiece has a cut-out portion in an outer peripheral portion, The holding means includes a partially peeled portion that pushes the protective adhesive film located in the cut portion that is not adhered to the plate-shaped workpiece, so that the protective adhesive film near the cut portion is removed from the plate-shaped workpiece Stripping, The holding part holds the outer peripheral part of the protective adhesive film peeled off by the partial peeling part. Such as the peeling device of any one of claims 1 to 3, wherein: The protective member is a protective film, The outer peripheral part of the protective film is further equipped with peeling film sticking means for sticking peeling film, The gripping part holds the peeling adhesive film that has been adhered to the protective adhesive film instead of holding the outer peripheral part of the protective adhesive film, and the tensile load measuring part measures the tensile load applied to the peeling adhesive film, The peeling adhesive film is integrated with the protective adhesive film between the holding portion and the holding surface. Such as the peeling device of any one of claims 1 to 3, wherein: The protection member has a protrusion slightly protruding from the outer circumference of the plate-shaped workpiece, The gripping part grips the protruding part.

Images